Including Apparatus Heat-up, Cool-down Or Protection Patents (Class 432/4)
  • Patent number: 10604705
    Abstract: A material heating device comprises a rotary kiln, a plurality of heat exchange tubes, a hot air hood, a high-temperature gas input mechanism, an exhaust-gas collecting chamber, and an exhaust-gas output pipeline. The rotary kiln is provided with a material feed end and a material discharge end. The heat exchange tubes are in the rotary kiln. The hot air hood is outside the rotary kiln. The air inlet ends of the heat exchange tubes communicate with the hot air hood, and the air outlet ends of the heat exchange tubes communicate with the exhaust-gas collecting chamber. The exhaust-gas collecting chamber communicates with the exhaust-gas output pipeline. The hot air hood communicates with the high-temperature gas input mechanism, and the cavity between the heat exchange tubes and the heat insulation layer of the rotary kiln is a material channel. The heat exchange tubes are directly in contact with the material.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: March 31, 2020
    Inventor: Shuhong Zhu
  • Patent number: 10020207
    Abstract: An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: July 10, 2018
    Assignee: TEL FSI, INC.
    Inventors: Mark Goluch, David C. Zimmerman, Robert E. Larson, Edward Deneen Hanzlik, Gregory Paul Thomes, Christina Ann Rathman
  • Patent number: 9429364
    Abstract: A channel inductor of a channel induction furnace is disclosed. The channel inductor comprises a channel liner that defines a channel for a molten metal to flow through the channel inductor. The channel liner comprises an inlet and an outlet for the molten metal and a flange for mounting the channel liner to a refractory material lining of a pot of the channel inductor furnace. The channel liner being formed from a ceramic material that is resistant to chemical attack by the molten metal in the channel, whereby in use of the channel induction furnace direct contact between the molten metal and the channel inductor is limited to contact with the channel liner (including the flange) only and molten metal does not contact other parts of the channel inductor.
    Type: Grant
    Filed: March 29, 2011
    Date of Patent: August 30, 2016
    Assignee: Bluescope Steel Limited
    Inventors: Darren Kenneth Thompson, Nega Setargew, William Joseph Gleeson, Gerry Cardozo, John Anthony Spink, Craig Roulston
  • Patent number: 9033703
    Abstract: The invention relates to a dental furnace wherein a firing chamber is heated up in a first heating-up period at a first heating-up rate of more than 50° K/min, in particular more than 100° K/min, which heats the furnace to at least 1000° C., in particular to 1100-1250° C. The first heating-up period is followed by an intermediate heating period, which is at least five minutes long, in particular at least ten minutes long, the gradient or heating-up rate of which is adapted to the material to be sintered in the dental furnace (10), and wherein this is followed by an end heating-up period (44) during which heating up is effected at a heating-up rate of more than 30° K/min, in particular approximately 50° K/min, and wherein during this the furnace temperature is held for at least five minutes, in particular for at least 25 minutes, above the temperature toward the end of the first heating-up period, and wherein forced cooling of the furnace (10) is performed after this.
    Type: Grant
    Filed: March 5, 2009
    Date of Patent: May 19, 2015
    Assignee: Ivoclar Vivadent AG
    Inventors: Gottfried Rohner, Walter Pokorny, Robert Grünenfelder, Frank Rothbrust
  • Patent number: 8950470
    Abstract: Preferably, obtaining internal and external thermal measurement values of a sealed process chamber allows a control system to generate a control signal based on a comparison of the internal and external thermal measurement values to the predetermined value. The control signal is provided to a fluid handling system, wherein the fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber. The control signal is further provided to a closed loop heat exchange system, wherein the closed loop heat exchange system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal. The control signal is still further provided to an open loop heat exchange system, wherein the open loop heat exchange system modulates flow of a third fluid within the interior of cavity of the sealed process chamber.
    Type: Grant
    Filed: December 30, 2010
    Date of Patent: February 10, 2015
    Assignee: Poole Ventura, Inc.
    Inventors: Mark R. Erickson, Aaron L. Dingus, Arthur W. Custer, III, Henry J. Poole, Nader Jamshidi
  • Patent number: 8834155
    Abstract: A water transfer apparatus and a wafer transfer method are provided. The wafer transfer apparatus is provided with a heating component and a cooling component, the heating component heats the wafer carrying component to a temperature the same as the wafer when it is just unloaded from the rapid thermal anneal tool, and the cooling component cools the wafer carrying component along with the wafer to room temperature, thereby avoiding the large temperature difference between the wafer and the wafer transfer apparatus, preventing the high thermal stress induced inside the wafer during wafer transfer, avoiding wafer breakage, and ensuring the completeness of the wafer.
    Type: Grant
    Filed: April 11, 2011
    Date of Patent: September 16, 2014
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Chunlong Li, Junfeng Li
  • Publication number: 20140227651
    Abstract: The invention relates to a roller hearth furnace for heating workpieces, comprising at least one furnace chamber for receiving the workpieces, the chamber having at least two lateral furnace walls. At least one transport roller for transporting the workpieces through the furnace chamber is arranged inside the furnace chamber, and each of the furnace walls has at least one opening through which the transport roller can be guided. At least one rolling bearing unit is arranged on each of the outer sides of the furnace walls, said rolling bearing unit being designed to accommodate and support the transport roller outside the furnace chamber.
    Type: Application
    Filed: March 23, 2012
    Publication date: August 14, 2014
    Inventor: Rolf-Josef Schwartz
  • Publication number: 20140186785
    Abstract: An active cooling system for a furnace that establishes steep temperature gradients, reduces temperature variations and performs rapid cooling, improving mechanical and electrical properties of heat-treated materials, increases overall throughput and promotes low compositional variation in the growth of crystals.
    Type: Application
    Filed: December 28, 2012
    Publication date: July 3, 2014
    Applicant: The Mellen Company Inc.
    Inventor: Jonathan Y. MELLEN
  • Publication number: 20140127634
    Abstract: A modular heating system and method is presented that automatically shuts down the chemical reaction within a heater if the heat generated by the reaction is excessive. Heaters are designed to generate sufficient heat to warm food or drink in an adjacent container. If the container is empty, or if the heater is dislodged from the container, the heat generated by the heater will become dangerously high. When excessive heat is generated by the reaction in the heater, systems and methods of the present invention respond by terminating the reaction before all of the reaction mixture has reacted.
    Type: Application
    Filed: November 6, 2013
    Publication date: May 8, 2014
    Applicant: HeatGenie, Inc.
    Inventors: Brendan Coffey, Krzysztof Kwiatkowski, Travis Bookout
  • Patent number: 8678815
    Abstract: In a method of heating a structure, an interior space of a furnace is heated to an interior temperature which is greater than a desired temperature to which a structure is intended to be heated. The structure is then placed into the furnace while the interior space is at least at the interior temperature at all times. When the structure has been heated to the desired temperature, it can be removed from the furnace at the desired temperature which is lower than the interior furnace temperature.
    Type: Grant
    Filed: October 26, 2010
    Date of Patent: March 25, 2014
    Assignee: Benteler Automobiltechnik GmbH
    Inventor: Georg Frost
  • Publication number: 20140079626
    Abstract: A method for controlling a fuel reformer, capable of generating hydrogen by reforming fuel, comprises: heating a catalyst of the fuel reformer by operating an electric heater formed to enclose the catalyst; supplying fuel and air to the catalyst under a condition of complete combustion; flame-combusting the fuel by igniting an ignition plug installed near a rear end of the catalyst; and shifting the position of the flame combustion to inside of the catalyst, by reducing a supply amount of the fuel and the air, such that temperature of the catalyst is drastically increased.
    Type: Application
    Filed: June 24, 2013
    Publication date: March 20, 2014
    Inventors: Hyun Jin JI, Sang Hyeon HA, Sung Baek CHO
  • Patent number: 8641841
    Abstract: A continuous heat treatment furnace is provided in which an atmosphere-control gas is introduced to a heating chamber having a heating zone, metal tubes are continuously charged along an axial direction from a furnace entrance, and the metal tube subjected to a heat treatment is taken out from a furnace. The continuous heat treatment furnace includes a front chamber which has a preheating zone on an entrance side of the heating chamber and seal curtains which are located on an entrance side and an exit side of the front chamber.
    Type: Grant
    Filed: December 31, 2009
    Date of Patent: February 4, 2014
    Assignee: Nippon Steel & Sumitomo Metal Corporation
    Inventors: Mikio Tatsuoka, Akhiro Sakamoto
  • Publication number: 20130137054
    Abstract: Composite hydrogels and methods for making and using the composite hydrogels are provided. The composite hydrogels comprise graphene oxide flakes distributed in, and covalently bonded to, a thermo-responsive hydrogel polymer.
    Type: Application
    Filed: November 30, 2011
    Publication date: May 30, 2013
    Inventors: Hongrui Jiang, Chi-Wei Lo, Difeng Zhu
  • Publication number: 20120270165
    Abstract: The present invention discloses a heating method for maintaining a stable thermal budget. By following the primary procedure with a virtual procedure in such a manner that the total duration of the whole heating process remains constant, it is beneficial to maintain a stable thermal budget and further to maintain a stable device performance.
    Type: Application
    Filed: August 9, 2011
    Publication date: October 25, 2012
    Inventor: Chunlong Li
  • Publication number: 20120270166
    Abstract: A method and apparatus for thermally processing a substrate is provided. In one embodiment, a method for thermally treating a substrate is provided. The method includes transferring a substrate at a first temperature to a substrate support in a chamber, the chamber having a heating source and a cooling source disposed in opposing portions of the chamber, heating the substrate to a second temperature during a first time period while the substrate is disposed on the substrate support, heating the substrate to a third temperature during a second time period while the substrate is disposed on the substrate support, and cooling the substrate in the chamber to a fourth temperature that is substantially equal to the second temperature during the second time period.
    Type: Application
    Filed: June 29, 2012
    Publication date: October 25, 2012
    Applicant: Applied Materials, Inc.
    Inventors: KHURSHED SORABJI, Alexander N. Lerner
  • Publication number: 20120045728
    Abstract: Described is an apparatus (5) as well as a method for cooling kiln exhaust gases in a kiln bypass (7), which apparatus comprises a mixing chamber (9) for extracting and cooling a portion of the kiln exhaust gases from a kiln system (1, 3), said mixing chamber (9) comprising a tubular housing being provided at one end with an exhaust gas inlet (11) for kiln exhaust gases and provided at its other end with an outlet (13) for cooled exhaust gases, said mixing chamber (9) further comprising a tangential inlet (15) for cooling gases, where the apparatus also comprises a first fan (17) for supplying cooling gases to the mixing chamber (9) and a second fan (19) for drawing the kiln exhaust gases through the kiln bypass (7).
    Type: Application
    Filed: November 18, 2008
    Publication date: February 23, 2012
    Applicant: FLSMIDTH A/S
    Inventor: Søren Hundebøl
  • Publication number: 20110294082
    Abstract: The invention and its group of variants consists of metal heat treating methods, a method for the combustion of liquid or gaseous fuel and hot air in a directly or indirectly fired furnace, and a heating device and regeneration nozzles for the carrying out of said method. The invention, and its variants, relate to the field of metallurgy and mechanical engineering, and can be used for metal heat processing (e.g., melting, heating for deformation, heat treatment) and for the sintering, drying (and other types of heat treatment) of non-metallic products such as ceramics. The essence of the invention are the novel technical features that make it possible to attain, while implementing the invention, the air excess factor (?) values in fuel and hot air mixture that are greater than 2.0 and mainly set within a range equal or less than 6.0.
    Type: Application
    Filed: August 25, 2008
    Publication date: December 1, 2011
    Inventors: Igor Mikhaylovich Distergeft, IIIe Igoravich Distergeft
  • Publication number: 20110275024
    Abstract: The present invention relates to a heat treatment apparatus and a heat treatment method that control temperature distribution during cooling. There is provided a cooling step in which a heated treatment object is cooled using a cooling liquid in mist form, and heat treatment is performed by alternatingly repeating a first step (K1) in which the treatment object is cooled at a first mist density, and a second step (K2) in which the treatment object is cooled at a second mist density that is less dense than the first mist density.
    Type: Application
    Filed: December 25, 2009
    Publication date: November 10, 2011
    Inventor: Kazuhiko Katsumata
  • Publication number: 20110269085
    Abstract: An oven with a sensor positioned to detect an event that will cause a decrease in the internal temperature of a tunnel. The oven includes a controller configured to increase the thermal output of a heating element in anticipation of the upcoming decrease in the internal temperature. In some embodiments, the oven is a conveyor over and the sensor is positioned to detect a food item approach the tunnel on a conveyor. In some embodiments, the amount of current provided to an electric heating element is increased by increasing the target temperature. In some embodiments, the amount of current provided to the electric heating element is increased by a predetermined offset.
    Type: Application
    Filed: July 8, 2011
    Publication date: November 3, 2011
    Inventors: John H. Wiker, Mohan K. Panicker, Richard H. Van Camp, Theodore James Chmiola
  • Patent number: 8021520
    Abstract: The invention relates to a device and method for preparing liquid from solid materials such as medicinal materials. It includes liquid and materials for preparing the liquid at the beginning and the end of the process. The device uses a steam generator, an intermediate switch valve and a material chamber, which are connected sequentially with pipes, and further includes an outlet pipe, which is at the bottom of the material chamber. The method involves the steps of: distillation and absorption; immersion; and repetition. The device and method for preparing liquid alternates the distillation and immersion steps, which reduces harmful substance in the prepared liquid that would otherwise occur by conventional methods. The method not only extracts soluble effective matter, but also reduces loss of volatile effective matter. Ultimately, the method makes the steps for preparing liquid simple and clear, and it can prepare liquid quantitatively, effectively and without pasty and shrinkable characteristics.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: September 20, 2011
    Assignee: Shenzhen Zofu Technology Co., Ltd
    Inventor: Linlin Yao
  • Publication number: 20110223552
    Abstract: A vertical heat treatment apparatus including a furnace body having a heating section in the inner circumferential surface; a treatment container for housing a plurality of objects W to be treated. An air supply line is connected to the furnace body, and an air exhaust line is connected to the furnace body. An air supply blower and an air supply line valve mechanism, and an air exhaust blower and an air exhaust line valve mechanism are provided in the air supply line and the air exhaust line, respectively. A pressure detection system is provided for detecting the pressure in the space. A control section controls, based on a detection signal from the pressure detection system the blowers, the air supply line valve mechanism and the air exhaust line valve mechanism to keep the space at a slightly negative pressure.
    Type: Application
    Filed: March 4, 2011
    Publication date: September 15, 2011
    Applicant: Tokyo Electron Limited
    Inventor: Makoto KOBAYASHI
  • Publication number: 20110207067
    Abstract: A heat-generating mixture includes 40 to 55 wt % of metal silicide, 40 to 60 wt. % of iron (III) oxide, and 0 to 10 wt. % of silicon. On burning, the heat-generating mixture forms a non-melting, porous slag. In a method of heat generation, to generate heat, an igniter capable of being actuated mechanically or electrically, ignites a booster charge, which in turn ignites the heat-generating mixture. A device for heat generation incudes an igniter capable of being actuated mechanically or electrically, a booster charge and the heat-generating mixture fixed and/or contained in and/or on a casing.
    Type: Application
    Filed: May 4, 2011
    Publication date: August 25, 2011
    Inventors: Peter Simon Lechner, Ulrich Bley, Rainer Hagel, Aleksei Hoschenko
  • Publication number: 20110195369
    Abstract: The invention relates to a shaft furnace (10) and a method for heat treating carbonaceous molded parts, particularly anodes (17), having an arrangement of the molded parts in at least one molded part column (11 to 15) disposed between tempering shaft devices (19, 20, 21) comprising a plurality of molded part rows (16) disposed above each other in a conveyor shaft, the rows being moved past temperature fields of the tempering shaft devices (19, 20, 22) and passing through a heating zone (25), a firing zone (27) having a burner device (28), and a cooling zone (26), wherein thermally insulating intermediate layers are disposed both between the temperature fields of the tempering shaft devices (19, 20, 22) and between the molded part rows of the molded part columns.
    Type: Application
    Filed: July 31, 2008
    Publication date: August 11, 2011
    Inventor: Wolfgang Leisenberg
  • Patent number: 7993574
    Abstract: A holding furnace for holding a molten metal includes a housing having an interior chamber for holding the molten metal. An insulating board structure is placed into the chamber along at least a side portion of the housing. The insulating board structure contains heat within the housing for maintaining the metal in a molten state. A heater assembly is provided in a side of the furnace. The heater assembly is installed in the side of the furnace with a structural arrangement that protects against leakage of molten metal from the furnace interior to the furnace exterior.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: August 9, 2011
    Assignee: SPX Corporation
    Inventors: Andrew Wisdom, Robert Janney
  • Publication number: 20110143296
    Abstract: A method and apparatus are disclosed for controlling a temperature within a reactor vessel such as an autoclave operating at elevated temperature and pressure. The apparatus includes a preheating vessel for preheating a feed material such as an aqueous slurry. The preheating vessel forms part of a preheating control system which provides the primary means of temperature control within the reactor vessel, and the reactor temperature is used as the setpoint for the preheating control system. The apparatus also comprises secondary means for heating and cooling the reactor. The feed material temperature is increased or decreased by the preheating control system, based on the reactor temperature. This is sufficient to heat or cool the reactor under most process conditions. Where the preheating control system is at or near its capacity for heating or cooling, the secondary heating or cooling means is activated to bring the reactor temperature within an optimum range.
    Type: Application
    Filed: January 19, 2011
    Publication date: June 16, 2011
    Applicant: Hatch Ltd.
    Inventors: Kevin S. Fraser, Murray S. Pearson, William E. McCombe
  • Publication number: 20100285416
    Abstract: A portable catalytic heating system for off grid application, in which the heating system comprises a heating unit with a handle (4) and an, in extension hereof arranged, heating pipe (5) containing a catalytic burner (20) for catalytic combustion of gases for providing infra-red radiation, where the heating pipe (5) is produced in a material that is transparent for infra-red radiation and fluid-proof for immersion in liquids.
    Type: Application
    Filed: August 23, 2006
    Publication date: November 11, 2010
    Inventors: Frederik Gundelach Møller, Hans Jessen Møller
  • Publication number: 20100273121
    Abstract: An oven apparatus has an oven enclosure with a heating zone and has two fans that remove air from the heating zone during purging and during normal operations. One of the two fans, called the exhaust fan, is a fixed speed fan in some embodiments. The second fan is a variable speed fan in some embodiments. The oven apparatus may have a vestibule at a conveyor opening with a fan dedicated to exhausting the vestibule. The oven apparatus may have an air seal between the vestibule and a heating zone of an oven chamber.
    Type: Application
    Filed: April 27, 2009
    Publication date: October 28, 2010
    Inventors: James M. Gleason, Thomas S. Neeley, Samuel L. Woehler
  • Publication number: 20100248176
    Abstract: A method for controlling a boiler includes firing a boiler, and monitoring a temperature deviation between a boiler temperature and a heating temperature profile over time. If the temperature deviation exceeds an allowable deviation, the boiler is shut off.
    Type: Application
    Filed: March 27, 2009
    Publication date: September 30, 2010
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventors: Peter Anderson, Richard Simons, Henry Troost, Emil Costea
  • Patent number: 7642059
    Abstract: A highly specific homogeneous assay method for an immunosuppressive drug using an immunophilin in a single receptor format is provided. In the simplest format, a single receptor is utilized analogous to a competitive immunoassay whereby an immunophilin is substituted for an antibody, and a competition results between a drug conjugate and the drug analyte for a limited number of immunophilin binding sites. In a microparticle agglutination assay format, an immunophilin is either bound to a particle or in solution. In the case where an immunophilin is bound to a particle, a polyvalent conjugate of the drug analyte is present in solution.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: January 5, 2010
    Assignee: Roche Diagnostics Operations, Inc.
    Inventors: Gerald Sigler, Mitali Ghoshal, Allan Dorn, Shaker Rashid
  • Publication number: 20090226855
    Abstract: The invention relates to a dental furnace wherein a firing chamber is heated up in a first heating-up period at a first heating-up rate of more than 50° K/min, in particular more than 100° K/min, which heats the furnace to at least 1000° C., in particular to 1100-1250° C. The first heating-up period is followed by an intermediate heating period, which is at least five minutes long, in particular at least ten minutes long, the gradient or heating-up rate of which is adapted to the material to be sintered in the dental furnace (10), and wherein this is followed by an end heating-up period (44) during which heating up is effected at a heating-up rate of more than 30° K/min, in particular approximately 50° K/min, and wherein during this the furnace temperature is held for at least five minutes, in particular for at least 25 minutes, above the temperature toward the end of the first heating-up period, and wherein forced cooling of the furnace (10) is performed after this.
    Type: Application
    Filed: March 5, 2009
    Publication date: September 10, 2009
    Inventors: Gottfried Rohner, Walter Pokorny, Robert Grunenfelder, Frank Rothbrust
  • Publication number: 20090212471
    Abstract: A holding furnace for holding a molten metal includes a housing having an interior chamber for holding the molten metal. An insulating board structure is placed into the chamber along at least a side portion of the housing. The insulating board structure contains heat within the housing for maintaining the metal in a molten state. A heater assembly is provided in a side of the furnace. The heater assembly is installed in the side of the furnace with a structural arrangement that protects against leakage of molten metal from the furnace interior to the furnace exterior.
    Type: Application
    Filed: February 27, 2008
    Publication date: August 27, 2009
    Inventors: Andrew Wisdom, Robert Janney
  • Publication number: 20080193890
    Abstract: An oven for bonding adhesives to the back surface of a textile article includes a housing with a transport frame for passing the textile article through a curing chamber within the housing. The oven also has an air source and a duct system that delivers an airflow into a cool zone on the opposite, pile surface side of the textile article. The airflow has a lower temperature than the elevated temperature of the curing chamber and is supplied to the cool zone in sufficient amounts such that the pressure in the cool zone exceeds the ambient pressure in the curing chamber.
    Type: Application
    Filed: February 8, 2007
    Publication date: August 14, 2008
    Inventor: James H. Rogers
  • Patent number: 7293986
    Abstract: The present invention provides a heat treating process chamber having a housing with a flow passage in communication with a vestibule assembly. The vestibule assembly includes an outer ring with a first groove and an inner ring with a second groove. The first groove is formed in an axially inwardly facing surface of the outer ring. The first groove has a portion open in a radially outer direction and an axially inner direction. The second groove opens in an axially inner direction and is formed in an axially outwardly facing surface of the inner ring. The first and second grooves form a passageway when they are in an axially superimposed relationship. The first groove forms a radially outwardly open end and the second groove forms an axially inwardly facing end of the passageway. The passageway communicates with the flow passage thereby allowing passage of a temperature adjusting medium.
    Type: Grant
    Filed: May 6, 2003
    Date of Patent: November 13, 2007
    Assignee: MRL Industries, Inc.
    Inventors: Kevin B. Peck, Mike D. Soliday, Jim Sanches
  • Patent number: 7037409
    Abstract: A method and a device for the hot-repairing of the heating flues of a coke-oven battery according to which the completed sections of a heating flue still under construction are heated by means of a heated gas. The heated gas comprises the air usually provided for combustion in the heating flues during coking operations. The air is guided through the flow paths provided for in the coke-oven battery for combustion air and waste gases as well as through the regenerator, heated as it passes through the flow paths and then guided through the heating flues to be repaired. The completed section of the heating flue is separated from the non-completed portion by an air-reversion device that also directs the heated air.
    Type: Grant
    Filed: March 8, 2000
    Date of Patent: May 2, 2006
    Assignee: Thyssen Krupp Encoke GmbH
    Inventors: Werner Hippe, Hans-Juergen Fischer
  • Patent number: 6793844
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing boric acid in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the boric acid may be supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the boric acid is in contact with the heat sensitive device, either directly or indirectly.
    Type: Grant
    Filed: February 20, 2001
    Date of Patent: September 21, 2004
    Inventor: Claude Q. C. Hayes
  • Patent number: 6780345
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as lithium bicarbonate, sodium bicarbonate, potassium bicarbonate, magnesium bicarbonate, calcium bicarbonate, beryllium bicarbonate, aluminum bicarbonate, ammonium bicarbonate and mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the bicarbonate salt may be supported in a position between the heat sensitive device and the heat generator.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: August 24, 2004
    Inventor: Claude Q. C. Hayes
  • Patent number: 6773623
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Aldehyde in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Aldehyde is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Aldehyde is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: August 10, 2004
    Inventor: Claude Q. C. Hayes
  • Patent number: 6769908
    Abstract: A wafer heat-treatment system for processing a wafer by a high-temperature heat-treatment process and cooling the heat-treated wafer, comprises walls surrounding a closed space placing the wafer and having a hollow sealing a gas therein, and a pressure-regulating unit connecting to the hollow for regulating pressure in the hollow. Hence, the wafer heat-treatment system reduces power consumption by heating lamps by carrying out an evacuating process before the high-temperature heat-treatment process, and shortens the time necessary for the cool down process by a pressurizing process that is carried out after the completion of the high-temperature heat-treatment process.
    Type: Grant
    Filed: February 6, 2002
    Date of Patent: August 3, 2004
    Assignee: Semiconductor Leading Edge Technologies, Inc.
    Inventor: Yoshimasa Kawase
  • Patent number: 6746238
    Abstract: The present invention relates to a cooling system of a furnace, and more particularly, to a multi-cycle cooling system, located by the furnace door. The multi-cycle cooling system comprises the first gas cooling cycle, the second gas cooling cycle, the first liquid cooling cycle, the second liquid cooling cycle, the heat sinks and the heat insulation slot. When inside the process tube proceeds the high temperature process like depositing process, the first gas cooling cycle and the second gas cooling cycle are opened and the second liquid cooling cycle is closed at the same time. The second gas cooling cycle and the second liquid cooling cycle are assembled in the first flange, which is located on the process tube and contacts with the door. The first liquid cooling cycle in the second flange, which is located on the process tube and contacts with the first range, is always opened.
    Type: Grant
    Filed: April 12, 2002
    Date of Patent: June 8, 2004
    Assignee: United Microelectronics Corp.
    Inventors: Eric Chu, Kevin Chiang, Ling-Hsin Tseng, Ken Yew
  • Publication number: 20040079917
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing boric acid in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the boric acid may be supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the boric acid is in contact with the heat sensitive device, either directly or indirectly.
    Type: Application
    Filed: February 20, 2001
    Publication date: April 29, 2004
    Inventor: Claude Q.C. Hayes
  • Publication number: 20040009448
    Abstract: A gas-cooled single-chamber type heat-treating furnace T in which cooling gas vents 9A and 9B opened and closed by doors 11A and 11B are provided on each of mutually opposed walls of an inner chamber 5 forming a processing room and cooling gas is circulated by opening the cooling gas vents 9A and 9B during gas cooling, wherein the cooling gas vents 9A and 9B of the inner chamber 5 are provided with lattice-shaped flow uniforming members 19 made of heat-resisting materials.
    Type: Application
    Filed: October 24, 2002
    Publication date: January 15, 2004
    Inventor: Kinya Kisoda
  • Patent number: 6673260
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Carbonate Salts in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Carbonate Salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Carbonate Salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 14, 2001
    Date of Patent: January 6, 2004
    Inventor: Claude Q. C. Hayes
  • Patent number: 6652770
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Organic Acids in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Organic Acid is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Organic Acid is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: November 25, 2003
    Inventor: Claude Q. C. Hayes
  • Publication number: 20030213932
    Abstract: The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as lithium bicarbonate, sodium bicarbonate, potassium bicarbonate, magnesium bicarbonate, calcium bicarbonate, beryllium bicarbonate, aluminum bicarbonate, ammonium bicarbonate and mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator separate and distinct from the heat sensitive device, the bicarbonate salt may be supported in a position between the heat sensitive device and the heat generator.
    Type: Application
    Filed: April 6, 2001
    Publication date: November 20, 2003
    Inventor: Claude Q.C. Hayes
  • Patent number: 6638444
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Hydrated Salt in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the Hydrated Salt is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the Hydrated Salt is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: October 28, 2003
    Inventor: Claude Q. C. Hayes
  • Patent number: 6572368
    Abstract: A method and apparatus for accelerated cooling of a furnace such as a furnace containing a susceptor. Cooling gases are split whereby a first percentage are provided to cool the furnace while a second percentage are provided to assist in cooling the heated cooling gases after cooling the furnace, whereby the percentages are changed throughout the process. The system further provides for unique cooling flow arrangement in the furnace which promotes maximum heat transfer through swirling.
    Type: Grant
    Filed: August 20, 2002
    Date of Patent: June 3, 2003
    Assignee: Lectrotherm, Inc.
    Inventors: Anthony M. Tenzek, Jeffrey P. Deeter, David A. Lazor
  • Patent number: 6558568
    Abstract: The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a hydroxide such as Lithium Hydroxide, Sodium Hydroxide, Potassium Hydroxide, Magnesium Hydroxide, Calcium Hydroxide, Beryllium Hydroxide, Aluminum Hydroxide, Ammonium Hydroxide and the mixtures thereof, in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are generated by a heat generator, separate and distinct from the heat sensitive device, the hydroxide is supported in a position between the heat sensitive device and the heat generator. Where the heat sensitive device is itself the heat generator, the hydroxide is contacted to the heat sensitive device either directly or indirectly.
    Type: Grant
    Filed: April 26, 2000
    Date of Patent: May 6, 2003
    Inventor: Claude Q. C. Hayes
  • Publication number: 20020177094
    Abstract: A heating apparatus comprises a central hot plate for heating the center portion of a substrate, a plurality of segment hot plates for heating the peripheral portion of the substrate, a hot plate support member supporting the central hot plate and the segment hot plates, support pins for supporting the substrate so as to face the central hot plate and the segment hot plates in a close proximity without being in contact with the central hot plate and the segment hot plates, and a power supply for supplying electricity to the central hot plate and the segment hot plates.
    Type: Application
    Filed: May 22, 2002
    Publication date: November 28, 2002
    Inventor: Eiichi Shirakawa
  • Patent number: 6435868
    Abstract: A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition between two different pressures, a heating configuration for heating the substrate and providing a transition between two different pressures, and a cooling configuration for cooling the substrate and providing a transition between two different pressures. Various features of the chamber configurations help increase the throughput of the system by enabling rapid heating and cooling of substrates and simultaneous evacuation and venting of the chamber, and help compensate for thermal losses near the substrate edges, thereby providing a more uniform temperature across the substrate.
    Type: Grant
    Filed: December 7, 2000
    Date of Patent: August 20, 2002
    Assignee: Applied Komatsu Technology, Inc.
    Inventors: John M. White, Wendell T. Blonigan, Michael W. Richter
  • Patent number: 6367288
    Abstract: In furnaces for producing high purity fused silica glass boules, glass particles have a tendency to build-up adjacent the burner hole rim. It was discovered that unburned furnace gases containing silica particles where re-circulated in the furnace close to the burner hole rim and reacted with the oxygen of infiltrated air adjacent the burner hole, and thus deposited such particles in the form of a glassy build-up about the rim of the burner hole. In order to eliminate the source of oxygen adjacent the burner hole rim, a curtain of an inert gas is caused to flow through the burner hole between the sidewalls of the burner hole and the flame of the burner. Accordingly, the curtain of inert gas inhibits the combustion of the unburned hydrogen and carbon monoxide furnace gases adjacent the exit rim of the burner hole and thereby minimizes glass build-up about the burner hole rim.
    Type: Grant
    Filed: December 29, 1999
    Date of Patent: April 9, 2002
    Assignee: Corning Incorporated
    Inventors: Raymond E. Lindner, Robert E. McLay, Mahendra K. Misra, Michael H. Wasilewski