Abstract: A device for heating a substrate according to a predetermined temperature profile for crystallizing a material on the substrate includes: a housing, at least a process chamber situated inside the housing and provided with a first and second opening for passing through a substrate, an inlet for introducing a process gas which includes the material in vapour phase into the chamber, at least two transport rollers attached to the housing for transporting the substrate into the chamber. The device further includes passage spaces for preventing the escape of process gas from the chamber to a space between the chamber and housing, which are situated near respective ends of the transport rollers in the chamber, the respective passage spaces having a first passage opening on an inner wall of the chamber, a second passage opening on an outer wall of the chamber and a first flange fixed around the transport roller.

Abstract: A heat treatment furnace, also referred to as a multi-chamber furnace, that includes a plurality of treatment chambers, each having heating and cooling dampers and being controllable to adjust a flow rate into the treatment chamber, the dampers of each treatment chamber being selectively and independently adjustable with respect to one another so as to allow simultaneous heat processing of a plurality of products in different treatment chambers at different respective heat treatment states depending on the amount of heating and cooling flow rates allowed to enter in each treatment chamber via the dampers.

Abstract: The present invention relates to an opening and closing device of an autoclave and the autoclave, wherein: supplying and discharging of a product to a chamber having a sealed structure can be performed automatically, and the occurrence of accidents caused by back pressure is structurally prevented; and a product bonded by pre-load is heated and transferred whereby energy loss is minimized and the product is cooled off uniformly, thereby improving the quality of the product.

Abstract: The invention provides a convection type brazing apparatus for metal workpieces such as aluminum, copper, iron and so forth that enables uniform heating of the metal workpieces to prevent deformation of the workpieces and can shorten a heating time to achieve a higher operation efficiency. A heating medium gas heated by a tube heater 36 in a thermal medium gas heating chamber 45 is forwarded by a fan 37 to manifolds 41A and 41B located on both left and right sides, to be blown through a multitude of nozzles 43 toward workpieces W to which a brazing material and flux have been applied in advance. Once the workpieces temperature has reached a predetermined temperature for brazing, a switching valve located in an upper duct 48 is activated so that the heating medium gas is intermittently blown to the workpieces. As a result, a temperature slope of the workpieces is minimized and uniform brazing can be performed.

Abstract: A method of uniformly or substantially uniformly heating at least one surface of a substrate, comprises the steps of supporting a substrate, generating a heated air flow, directing the heated air flow to heat a strip of a first surface of the substrate, and moving the flow path of the heated air in a direction transverse to the direction in which the heated air flow impinges on the substrate until the temperature of the whole or substantially the whole first surface of the substrate has been uniformly or substantially uniformly raised. Apparatus for performing this method is also disclosed.

Abstract: An assay system for detecting the binding of a mobile reactant to an immobilized reactant on an assay plate. The assay plate includes a substrate having an assay spot deposited thereon. The assay spot includes the immobilized reactant. In the present invention, a carrier dye is included in the assay spot, the amount of the carrier dye indicating the amount of the immobilized reactant that is present in the assay spot. In the preferred embodiment of the present invention, the assay spot is generated by depositing liquid on the assay plate at a location corresponding to the assay spot. The carrier dye is dissolved in the liquid and remains after the liquid evaporates. The amount of carrier dye in each spot may be measured spectroscopically and provides a means for identifying defective assay plates.

Abstract: Mixing of spent reactant gases with ambient air inside a semiconductor wafer fabrication facility is avoided and consequently corrosion of a scavenger box in a wafer fabrication facility is avoided. Repeatability of reaction gas results on wafers in a process tube is improved by maintaining precisely constant pressure in the wafer processing tube, which is operated close to ambient atmospheric pressure. This is accomplished by positioning an exhaust tube downstream from the wafers in the processing tube at a location that results in a uniform, repeatable reaction gas flow pattern between the wafers. Pressures at or near that point are measured by a differential manometer referenced to ambient atmospheric pressure to produce a pressure-indicating signal. The pressure indicating signal is electronically compared with a preset constant signal representative of the desired constant pressure at the pressure measurement point to produce an error signal.

Abstract: A process for selectively forming NMOS/PMOS/CMOS integrated circuits and for selectively incorporating any or all of lightly doped drain-source (LDD) regions, sidewall gate oxide structures, and guard band regions.

Abstract: A shaft melting furnace for melting metals is proposed with an interior receiving the molten bath, a charging shaft for supplying the melting stock and a burner supplying heat to the latter. The charging shaft is funnel-shaped and passes into a melting zone of constant cross-section leading to a melting bridge.

Abstract: A preheating mechanism for preheating a source metal for melt includes a combination of independent combustion and preheating devices. The mechanism also includes a high-temperature gas conduit for connecting the combustion device and the preheating device, a low-temperature gas conduit for connecting the preheating device and an exhaust gas chimney, a branch pipe branched from the low-temperature gas conduit and connected to the high-temperature gas conduit, and a short-cut gas conduit for connecting a conduit portion at a combustion device side from a coupling portion between the high-temperature gas conduit and the branch pipe to a conduit portion at an exhaust gas chimney side from a branch portion between the low-temperature gas conduit and the branch pipe. A diluting mechanism is arranged in the short-cut gas conduit. A valve with a variable motor is arranged in the branch pipe.

Abstract: A method and a device for scrap preheating by means of hot steel furnace exhaust gases. A scrap bucket permits passage of gaseous medium therethrough and is closed by a cover with an exterior waterseal by providing an intermediate annular space having a controlled inlet for a purging medium which is connected to a pressure sensing means in the intermediate space. Purging medium is supplied to the intermediate space at a pressure not substantially less than the pressure in the inlet space in the bucket, so that all leakage is primarily the purging medium which flows outwardly to an outlet space. In a preferred embodiment the purging medium is recycled from the outlet space.

Abstract: An apparatus for positioning a thermogravimetric furnace includes a furnace mounting bracket which is rotatable about and linearly translatable along a single axis. In addition, simultaneous rotational and linearly movement of the furnace is excluded.

Abstract: An improved industrial multistage recirculating-fluidized-bed reactor for producing chlorine and iron oxide having an initial "dense" zone and a downstream "dilute" zone. In the dense zone, a fuel is burned, reactants and recirculated iron oxide particles are heated, ferric chloride is vaporized and at least 50% of the ferric chloride is converted to chlorine and iron oxide. In the downstream dilute zone, a solids fraction from 0.005-0.05 is maintained, along with a superficial gas velocity from 1.5-6 meters/second which is from 5-25 times the superficial gas velocity in the dense zone, and the conversion of ferric chloride is continued to greater than 95% completion.

Abstract: The environment of the invention comprises work degreasing apparatus wherein a tank contains liquid solvent to be vaporized by a heater for degreasing contact with work introduced into the tank, the vapor being subject to condensation, there also being a tank cover having open and closed positions. The inventive improvement comprises means responsive to closing of the cover to control the heater to reduce heat transfer to the liquid solvent, and also responsive to opening of the cover to control the heater to increase heat transfer to the liquid solvent.

Abstract: A furnace for preparing test specimens, such as specimens of ceramic materials, is provided, such furnace including a furnace chamber having a heating zone; heating means for heating the heating zone; first specimen support means disposed in the heating zone supporting at least two test specimens to be subjected to heat treatment; heat sensing means disposed in the heating zone for sensing the degree of heat treatment of at least one of said test specimens; specimen outlet conveyor means for removing from the heating zone at least one test specimen subjected to a predetermined heat treatment; and specimen inlet conveyor means for feeding control or blank specimens into the heating zone to maintain constant the total number (total mass) of specimens subjected to heat treatment in the heating zone.