Abstract: A low K dielectric composite layer is formed of a low k barrier layer and a low K dielectric layer on the barrier layer. The barrier layer, which is deposited with the result of having a hydrophobic top surface, is treated with an oxygen plasma to convert the surface from hydrophobic to hydrophilic. A subsequent water-based clean is very effective in removing yield-reducing defects on the barrier layer due to the conversion of the surface of the barrier layer. After the water-based clean, the low K dielectric layer is formed on the surface of the barrier layer to achieve the composite layer that has a low K.

Abstract: The lamp has a lamp cap (10) with a metal shell (20), in which an insulator body (30) with a circumferential outer surface (31) between a first and a second end face (32, 33) is locked. Recesses (34) occur at the outer surface (31) at a cross-section (II--II). Between these recesses (34) the outer surface (31) has flattened portions (35), which enable the metal shell (20) to be deformed when the insulator body (30) and the shell (20) are assembled together, and to widen temporarily near the recesses (34). As a result projections (23) in the metal shell (20) can be depressed more deeply than in the case of an outer surface (31) without flattened portions (35). Consequently, the projections (23) press clampingly in the recesses (34) of the outer surface (31), when the metal shell (20) is released, thereby tightly securing the insulator body (30) in the metal shell (20 ).