Belt Tracking Patents (Class 451/297)
  • Patent number: 9511468
    Abstract: Provided is a belt-type grinding tool allowing an endless grinding belt replacement operation to be performed without requiring a large force. A belt-type grinding tool has an endless grinding belt wound around a drive pulley provided in a tool body and an idler pulley rotatably supported by a pulley support bar. The grinding tool has a spring urging the pulley support bar forward relative to the tool body, thereby causing the idler pulley to press the endless grinding belt forward to apply a tension to the endless grinding belt, and a spring support member movably attached to the tool body to support and compress the spring, the spring support member being movable between a first position where the idler pulley applies a tension to the endless grinding belt and a second position where the spring support member is displaced from the first position to reduce the amount of compression of the spring to reduce the tension.
    Type: Grant
    Filed: August 25, 2015
    Date of Patent: December 6, 2016
    Assignee: Nitto Kohki Co., Ltd.
    Inventor: Yasumasa Suzuki
  • Patent number: 9097624
    Abstract: An external filter assembly adapted for modifying a suction cleaning device to sample relatively small particles from various surfaces and/or the ambient air, includes a housing having a first open end, a second open end and a throughbore between the first and second open ends, a filter adapted for capturing particles with particle sizes greater than 0.1 micrometer, the filter being mounted on and enclosing the first open end, and means for securely retaining the second open end of the housing on an exhaust port of the suction cleaning device in communication with the housing throughbore.
    Type: Grant
    Filed: March 1, 2013
    Date of Patent: August 4, 2015
    Assignee: The United States of America as Represented by the Secretary of the Army
    Inventors: Jerold R. Bottiger, Jana S. Kesavan
  • Patent number: 8382556
    Abstract: The portable belt grinder 201 comprises; a main body 202 with an electric motor 203 built therein; a drive pulley disposed in the lower portion of the main body 202 and rotationally drivable by the electric motor 203; an idle pulley disposed as the companion to the drive pulley; and, an endless abrasive belt 215 wound between the two pulleys. In the portable belt grinder 201, in the portion of the main body 202 that exists in the vicinity of the abrasive belt 215, there is formed a hole portion 202f which is used to visually confirm the side end edge of the abrasive belt 215 from above. Also, on the upper surface of the main body 202, there is mounted a transparent cover 222 which is used to cover the hole portion 202f.
    Type: Grant
    Filed: October 12, 2007
    Date of Patent: February 26, 2013
    Assignee: Hitachi Koki Co., Ltd.
    Inventors: Naoto Yamashiro, Akira Onose, Shinichi Sakuma
  • Patent number: 8251777
    Abstract: The invention is directed to a method of polishing a surface of an object that includes aluminum. The method includes the step of contacting the surface of the object with a soft polishing pad and a polishing composition. The polishing composition includes abrasive particles, an agent that oxidizes aluminum, and a liquid carrier to polish the surface of the object. The polishing composition includes the abrasive particles suspended in the liquid carrier, and is applied at a pH above about 7.
    Type: Grant
    Filed: February 11, 2008
    Date of Patent: August 28, 2012
    Assignee: Cabot Microelectronics Corporation
    Inventors: Kevin Moeggenborg, John Clark, Jeffrey Gilliland, Stanley Lesiak, Susan Wilson, Vlasta Brusic
  • Patent number: 8075374
    Abstract: A belt sander is disclosed that may include a sanding assembly having a first roller and a second roller, the sanding assembly being configured to receive a sanding belt around the first roller and the second roller to define a sanding surface therebetween. The belt sander may include a motor operationally coupled to the sanding assembly and opposite the sanding surface, the motor being configured to rotate at least the first roller and thereby rotate the sanding belt around the first roller and the second roller, as well as a handgrip formed around at least a portion of the motor and substantially encasing the motor.
    Type: Grant
    Filed: February 1, 2007
    Date of Patent: December 13, 2011
    Assignee: Black & Decker Inc.
    Inventors: Daniel P. Wall, Jeremy D. Leasure, Craig A. Carroll, Julie L. Jones, Jeffrey D. Weston, Thomas A. Mooty, James P. Nichols, Jr., John W. Schnell
  • Patent number: 8062096
    Abstract: The invention is directed to a method of polishing a surface of a substrate comprising aluminum, comprising contacting a surface of the substrate with a polishing pad and a polishing composition comprising an abrasive, an agent that oxidizes aluminum, and a liquid carrier, and abrading at least a portion of the surface to remove at least some aluminum from the substrate and to polish the surface of the substrate, wherein the abrasive is in particulate form and is suspended in the liquid carrier.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: November 22, 2011
    Assignee: Cabot Microelectronics Corporation
    Inventors: Vlasta Brusic, Richard Jon Jenkins, Christopher C. Thompson
  • Patent number: 8007345
    Abstract: A portable belt sander having a drive pulley capable of being produced at a limited period. The sander includes a main body accommodating therein a motor, a drive shaft rotationally driven by the motor, a drive pulley coupled to the drive shaft, a driven shaft, and an endless polishing belt mounted between the drive pulley and the driven pulley. The drive pulley includes a base section coupling the drive shaft and made from a rigid material, and an outer low hardness section made from an elastomer material and disposed over an outer peripheral surface of the base section and integrally therewith by injection molding. Mating surfaces between the base section and the outer section are irregularly formed.
    Type: Grant
    Filed: December 19, 2007
    Date of Patent: August 30, 2011
    Assignee: Hitachi Koki Co., Ltd.
    Inventors: Akira Onose, Toshiaki Takagi
  • Patent number: 7997962
    Abstract: A belt sander is disclosed that may include a sanding assembly having a first roller and a second roller, the sanding assembly being configured to receive a sanding belt around the first roller and the second roller to define a sanding surface therebetweeen. The belt sander may include a motor operationally coupled to the sanding assembly and opposite the sanding surface, the motor being configured to rotate at least the first roller and thereby rotate the sanding belt around the first roller and the second roller, as well as a handgrip formed around at least a portion of the motor and substantially encasing the motor.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: August 16, 2011
    Assignee: Black & Decker Inc.
    Inventors: Daniel P. Wall, Craig A. Carroll
  • Patent number: 7899651
    Abstract: In a method for estimating an entrance angle of a V-ribbed belt from a flat pulley to a V-ribbed pulley, the entrance angle is estimated easily at a stage of pulley layout design. The V-ribbed belt 10 forms a track which enters at an entrance angle of approximately zero degree (substantially perpendicular to a plane that includes an axis 3a of rotation) into the flat pulley 3, is wound along the outer peripheral face of the flat pulley 3 without deviating in the axial direction thereof, and extends substantially linearly from a winding end point c at the flat pulley 3 to a winding start point d at a drive pulley 1. The entrance angle ? of the V-ribbed belt 10 from the flat pulley 3 to the drive pulley 1 is obtained on the basis of the track of the V-ribbed belt by, for example, a three-dimensional CAD or the like.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: March 1, 2011
    Assignee: Bando Chemical Industries, Ltd.
    Inventors: Hiroyoshi Takahashi, Eijiro Nakashima, Hideaki Kawahara
  • Publication number: 20100081006
    Abstract: A faux stainless steel sheet material of ferrous carbon sheet steel core is polished in a polishing apparatus comprising a series of commercially available polishing heads each of which utilizes a polishing belt of a predetermined grit mesh and size, belt speed, belt oscillations transverse to the sheet steel conveyed direction, at predetermined conveyance rate of the sheet steel and pressure. The polishing heads scratch the material surface wherein the scratches mimic a stainless steel finish such as #4 stainless steel finish (80 mesh). An example and sample are described in one embodiment of the invention.
    Type: Application
    Filed: April 3, 2009
    Publication date: April 1, 2010
    Applicant: MAIN STEEL POLISHING COMPANY, INC.
    Inventors: Richard M. Leidolf, Jr., Daniel C. Leas, Joseph D. Corona
  • Publication number: 20100016169
    Abstract: An oxide superconductor member is composed of a tape-shaped substrate, an intermediate layer formed on this substrate and an oxide superconductor thin film layer formed on this intermediate layer. A surface of the tape-shaped substrate is polished by continuously running the tape-shaped substrate. The polishing step includes initial polishing process and finishing process which are carried out such that the average surface roughness Ra of the substrate becomes 2 nanometers or less and the in-plane directionality of the intermediate layer becomes 5° or less after the polishing step.
    Type: Application
    Filed: August 1, 2007
    Publication date: January 21, 2010
    Applicant: NIHON MICRO COATING CO., LTD.
    Inventors: Sanaki Horimoto, Takuya Nagamine, Takehiro Watanabe, Fumi Murokawa, Yuji Horie, Noriyuki Kumasaka, Masahiro Hosoi
  • Patent number: 7621800
    Abstract: A belt grinding machine with a belt adjusting device utilizes a screw to radially push an inclined surface of a push rod to make the push rod move axially to push rollers of the belt grinding machine, and thus the belt winding around the rollers can be adjusted. In an outer cover of the belt grinding machine is defined a penetrating hole for allowing a screw to extend out therethrough, so as to improve the safety and convenience of operation and adjustment. Moreover, the belt grinding machine is provided with an emergency switch located correspondingly to the outer cover, when the outer cover is open, it will press the emergency switch of the housing and consequently cut off the power supply, so as to further improve the safety of the belt grinding machine.
    Type: Grant
    Filed: September 13, 2008
    Date of Patent: November 24, 2009
    Assignee: J & T Machinery Co., Ltd.
    Inventor: Hsiu-Ching Liao
  • Patent number: 7614935
    Abstract: An apparatus for machining a strip- or plate-shaped metallic workpiece is proposed, in particular for the deburring of cut edges and/or for the grinding of surfaces of the workpiece, having at least one machining unit which has a revolving drive device which directs a machining element at least approximately linearly past the region of the workpiece to be machined obliquely or transversely to the feed direction of the workpiece. According to the invention, the machining element is designed as a grinding belt, the grinding belt, in the region of the workpiece to be machined, being in operative connection with the drive device in such a way that the drive device drives the grinding belt, and the grinding belt and the drive device are separate from one another at least in a region remote from the workpiece.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: November 10, 2009
    Assignee: Lissmac Maschinebau und Diamantwerkzeuge GmbH
    Inventor: Josef Weiland
  • Patent number: 7503838
    Abstract: A belt sander is disclosed that may include a sanding assembly having a first roller and a second roller, the sanding assembly being configured to receive a sanding belt around the first roller and the second roller to define a sanding surface therebetween. The belt sander may include a motor operationally coupled to the sanding assembly and opposite the sanding surface, the motor being configured to rotate at least the first roller and thereby rotate the sanding belt around the first roller and the second roller, as well as a handgrip formed around at least a portion of the motor and substantially encasing the motor.
    Type: Grant
    Filed: April 12, 2007
    Date of Patent: March 17, 2009
    Assignee: Black & Decker Inc.
    Inventors: Daniel P. Wall, Craig A. Carroll
  • Publication number: 20090017730
    Abstract: A polishing apparatus has a polishing tape (21), a supply reel (22) for supplying the polishing tape (21) to a contact portion (30) at which the polishing tape (21) is brought into contact with a notch portion (11) of a substrate (10), and a take-up reel (23) for winding up the polishing tape (21) from the contact portion (30). The polishing apparatus also has a first guide portion (24) having as guide surface (241) for supplying the polishing tape (21) directly to the contact portion (30), and a second guide portion (25) having a guide surface for supplying the polishing tape (21) tot the take-up reel (23). The guide surface (241) of the first guide portion (24) and/or the guide surface of the second guide portion (25) has a shape corresponding to a shape of the notch portion (11) of the substrate (10).
    Type: Application
    Filed: October 12, 2005
    Publication date: January 15, 2009
    Inventors: Takeo Kubota, Atsushi Shigeta, Gen Toyota, Tamami Takahashi, Daisaku Fukuoka, Kenya Ito
  • Patent number: 7422515
    Abstract: A wide belt sander has a base, a driving axle, a driving device, a driven axle bracket, a driven axle, a belt and an automatic adjustment device. The driving axle is rotatably mounted on the base and has a central axis. The driving device is mounted on the base and is connected to the driving axle. The driven axle bracket is rotatably mounted on the base along a longitudinal axis perpendicular to the central axis of the driving axle. The driven axle is rotatably mounted on the driven axle bracket along a rotating axis parallel with the central axis of the driving axle. The belt is endlessly mounted around the driving and driven axles. The automatic adjustment device is mounted between the base and the driven axle bracket to drive the driven axle bracket to swing relative to the base in a simple harmonic motion.
    Type: Grant
    Filed: February 23, 2007
    Date of Patent: September 9, 2008
    Inventor: Wen-Chi Chang
  • Publication number: 20080207096
    Abstract: A wide belt sander has a base, a driving axle, a driving device, a driven axle bracket, a driven axle, a belt and an automatic adjustment device. The driving axle is rotatably mounted on the base and has a central axis. The driving device is mounted on the base and is connected to the driving axle. The driven axle bracket is rotatably mounted on the base along a longitudinal axis perpendicular to the central axis of the driving axle. The driven axle is rotatably mounted on the driven axle bracket along a rotating axis parallel with the central axis of the driving axle. The belt is endlessly mounted around the driving and driven axles. The automatic adjustment device is mounted between the base and the driven axle bracket to drive the driven axle bracket to swing relative to the base in a simple harmonic motion.
    Type: Application
    Filed: February 23, 2007
    Publication date: August 28, 2008
    Inventor: Wen-Chi Chang
  • Publication number: 20080171497
    Abstract: A portable belt sander having a drive pulley capable of being produced at a limited period. The sander includes a main body accommodating therein a motor, a drive shaft rotationally driven by the motor, a drive pulley coupled to the drive shaft, a driven shaft, and an endless polishing belt mounted between the drive pulley and the driven pulley. The drive pulley includes a base section coupling the drive shaft and made from a rigid material, and an outer low hardness section made from an elastomer material and disposed over an outer peripheral surface of the base section and integrally therewith by injection molding. Mating surfaces between the base section and the outer section are irregularly formed.
    Type: Application
    Filed: December 19, 2007
    Publication date: July 17, 2008
    Inventors: Akira Onose, Toshiaki Takagi
  • Patent number: 7374470
    Abstract: A sharpening apparatus having at least one guide slot, a drive pulley drivingly coupled to a frame and at least one idler pulley rotatably coupled to a support member. The support member is pivotably coupled to the frame. The apparatus includes an endless abrading belt rotatable in a path over the drive pulley and the at least one idler pulley and a biasing member coupled to the frame for biasing the support member toward an engaged position. Pivotal movement of the support member adjusts tension in the belt. A tool is traversed into the guide slot for sharpening a cutting edge thereof. The belt and support member respond to application and release of a force applied to the belt by the cutting edge to decrease and increase, respectively, belt speed to preclude overheating of the cutting edge and damage to the belt and cutting edge.
    Type: Grant
    Filed: April 13, 2007
    Date of Patent: May 20, 2008
    Inventor: Richard W. Fuchs
  • Publication number: 20080090492
    Abstract: An adjustment device for adjusting a level difference between rollers of a roller belt sander includes a base, an eccentric shaft and a restricting knob. The base is fixed on an interior wall edge of a main body corresponding to two ends of a roller. The eccentric shaft inserted pivotally in a penetrating opening of the base has a rear end portion, and a front-end engaging portion formed eccentrically to engage with the roller pivotally. The restricting knob is engaged in a threaded hole of the base to fix the eccentric shaft. Therefore, the adjustment device can be turned to enable the roller positioned at a level for preferable grinding.
    Type: Application
    Filed: October 13, 2006
    Publication date: April 17, 2008
    Inventor: Po Chang Chuang
  • Patent number: 7273410
    Abstract: A guiding and pressing device for a belt sander includes two triangular guiding blocks or sheet-like inclined guiding blocks, which are disposed at suitable positions on a front side frame of the sander and near to a circulating path of a sand belt. The two guiding blocks have opposite inclined surfaces near an edge of the sand belt to restrict the circulating path of the sand belt without damaging the edge of the sand belt. In addition, an elastic pressing or push rod is disposed inside the sand belt and on a backside of the frame in order to frequently push the sand belt outwards and thus to keep the sand belt in a tightened state when the belt sander is sanding.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: September 25, 2007
    Inventor: Tian-Wang Wang
  • Patent number: 7097547
    Abstract: The invention provides for a powered hand held apparatus for sharpening ice skate blades having an elongated frame with a drive pulley located at one and, and a driven pulley located at the other end. An abrasive grinding belt loops over the pulleys and passes over a convex grinding surface aligned with the pulleys. The pulleys, frame, drive belt, grinding belt and electric motor are contained in a housing having a skate guidance slot such that when a skate is inserted into the slot, the bottom edge of the skate is directed to the abrasive belt at the convex grinding surface.
    Type: Grant
    Filed: May 23, 2003
    Date of Patent: August 29, 2006
    Inventor: Robert McCroary
  • Patent number: 7090560
    Abstract: Systems and methods control abrading operations of an abrading machine by sensing characteristics of an abrading article installed on the abrading machine. When a problem is discovered by sensing the article, appropriate actions may be taken. As one example, the abrading article may be sensed to determine whether the abrading article has been installed with an abrasive side facing the wrong direction. An alert allows an operator to reinstall the article. As another example, the abrading article may be sensed to determine whether splicing tape is present to hold two pieces of abrading tape together. The article may be advanced until the splicing tape is beyond an abrading zone. As another example, the abrading article may be sensed to determine whether the abrading article has stopped moving while the article drive is advancing because the article has broken. An alert allows an operator to repair the break.
    Type: Grant
    Filed: July 28, 2004
    Date of Patent: August 15, 2006
    Assignee: 3M Innovative Properties Company
    Inventor: Daniel A. Billig
  • Patent number: 7090571
    Abstract: A belt sander includes a base, a sanding device, a worktable, a tipping drive device, and a swinging device. The swinging device includes a cylindrical roller, a central shaft, a toothed ring, a drive gear, a cam, and a fixing rod. The swinging device drives the sanding device to produce a slightly reciprocally swinging action during operation of the sanding device. Thus, the grinding path and area of the sand belt are increased largely by the reciprocally and successively swinging action of the swinging device and the sanding device, so that the sand belt can be used to grind the wooden material exactly and efficiently, thereby greatly enhancing the grinding and finishing effect of the belt sander.
    Type: Grant
    Filed: April 4, 2005
    Date of Patent: August 15, 2006
    Inventor: Tian-Wang Wang
  • Patent number: 7066787
    Abstract: A substrate processing apparatus is used for removing surface irregularities occurring on a peripheral portion (a bevel portion, an edge portion, and a notch) of a substrate, such as a semiconductor wafer, and films deposited as a contaminant on the peripheral portion of such a substrate. The substrate processing apparatus includes an edge-portion polisher for pressing a polishing tape against an edge portion of a substrate and causing relative movement between the polishing tape and the substrate to polish the edge portion of the substrate, and a bevel-portion polisher for pressing a polishing tape against a bevel portion of the substrate and causing relative movement between this polishing tape and the substrate to polish the bevel portion of the substrate.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: June 27, 2006
    Assignees: Ebara Corporation, Kabushiki Kaisha Toshiba
    Inventors: Masayuki Nakanishi, You Ishii, Kenro Nakamura
  • Patent number: 7063605
    Abstract: A long-lasting retaining ring for wafer carriers used in chemical mechanical planarization. A groove is disposed around the retaining ring, with the groove opening facing the mounting plate. A ridge is disposed in the groove. A bladder is disposed in the groove and is pressed between the ridge and the mounting plate. Pressure in the bladder can be maintained or adjusted to deform the bladder and thereby force the retaining ring onto the polishing pad as the retaining ring is worn. Prior to adding pressure to the bladder, the ridge forces the bladder to very closely conform to the dimensions of the groove. Thus, during use, bladder deformation is not wasted on conforming the bladder to the groove shape, but instead can be used to force the retaining ring further in the direction of the pad. The ridge thereby increases the distance the retaining ring can move towards the pad.
    Type: Grant
    Filed: March 18, 2005
    Date of Patent: June 20, 2006
    Assignee: Strasbaugh
    Inventor: Larry A. Spiegel
  • Patent number: 7044844
    Abstract: A shaping pulley assembly (6) for a belt notching machine, including on a frame (1) a pair of driving and shaping pulleys (3, 4) for a grinding belt (5), includes a shaping pulley holder element (9) like a fork supported by the frame (1), having a C-shaped body with end brackets (90, 91), a stationary center and a removable counter-center, both being live centers which are housed in respective housings of the end brackets (90, 91), a shaping pulley (4) in the form of a cylindrical roller provided with center holes (42, 43) opposite to each other for fixed centre and removable counter-center, respectively on the bases (40, 41) of the shaping pulley.
    Type: Grant
    Filed: October 21, 2004
    Date of Patent: May 16, 2006
    Assignee: CML International S.p.A.
    Inventor: Alessandro Caporusso
  • Patent number: 7008303
    Abstract: Generally, a method and system for lifting a web of polishing material is provided. In one embodiment, the system includes a platen that has a first lift member disposed adjacent to a first side and a second lift member disposed adjacent to a second side. The platen is adapted to support the web of polishing media that is disposed between the first and the second lift members. A method includes supporting a web of polishing media on a platen between a first lift member and a second lift member and moving at least the first lift member or the second lift member to an extended position relative the platen that places the web in a spaced-apart relation with the platen.
    Type: Grant
    Filed: April 3, 2003
    Date of Patent: March 7, 2006
    Assignee: Applied Materials Inc.
    Inventors: John M. White, Phillip R. Sommer, Sasson Somekh
  • Patent number: 6951511
    Abstract: Generally, a method and apparatus for supporting a web of polishing material. In one embodiment, the apparatus includes a platen adapted to support the web, a frame assembly, and one or more flexures coupled between the platen and the frame assembly. The flexure allows the frame assembly to be moved in relation to the platen. When the frame assembly is in an extended position relative to the platen, the web is placed in a spaced-apart relation to the platen.
    Type: Grant
    Filed: October 17, 2002
    Date of Patent: October 4, 2005
    Assignee: Applied Materials Inc.
    Inventors: Jayakumar Gurusamy, Gee Sun Hoey, Lawrence M. Rosenberg
  • Patent number: 6939203
    Abstract: A fluid bearing polishing apparatus for carrying a polishing member for chemical mechanical polishing includes a fluid supply and a fluid dispensing structure to support the polishing member. A method of polishing a workpiece includes supporting a polishing member on a fluid bearing between a first end of the polishing member and a second end of the polishing member and moving the polishing member to polish the workpiece. The fluid bearing has a curved portion at which plane of travel of the polishing member changes from a first plane to a second plane. Advantages of the invention include smooth belt motion in all desired directions of movement.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: September 6, 2005
    Assignee: ASM Nutool, Inc.
    Inventors: Homayoun Talieh, Douglas W. Young
  • Patent number: 6929530
    Abstract: Polishing pads, planarizing machines and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies. The polishing pads, for example, can be web-format pads, and the planarizing machines can be web-format machines. In a typical application, the web-format machines have a pad advancing mechanism and stationary table with a first dimension extending along a pad travel path, a second dimension transverse to the first dimension, and an illumination site from which a laser beam can emanate from the table. The pad advancing mechanism moves the pad along the pad travel path to replace worn portions of the pad with fresh portions. In one embodiment of the invention, a web-format polishing pad includes a planarizing medium and an optical pass-through system having a plurality of view sites through which a light beam can pass through the pad.
    Type: Grant
    Filed: July 14, 2000
    Date of Patent: August 16, 2005
    Assignee: Micron Technology, Inc.
    Inventor: Jason B. Elledge
  • Patent number: 6855038
    Abstract: A shaping pulley assembly (6) for a belt notching machine, including on a frame (1) a pair of driving and shaping pulleys (3, 4) for a grinding belt (5), includes a shaping pulley holder element (9) like a fork supported by the frame (1), having a C-shaped body with end brackets (90, 91), a stationary center and a removable counter-center, both being live centers which are housed in respective housings of the end brackets (90, 91), a shaping pulley (4) in the form of a cylindrical roller provided with center holes (42, 43) opposite to each other for fixed center and removable counter-center, respectively on the bases (40, 41) of the shaping pulley.
    Type: Grant
    Filed: October 6, 2003
    Date of Patent: February 15, 2005
    Assignee: CML International S.p.A.
    Inventor: Alessandro Caporusso
  • Patent number: 6749492
    Abstract: A rotary sanding machine includes a driven wheel coupled to a transmission shaft which is driven by a motor so as to actuate an emery coated belt for sanding. A barrier wall is disposed to hold back dust flying during sanding action to permit the dust to fall into a dust passageway in a dust collecting member. An impeller is mounted in a blower casing, and is coupled to an impeller driving shaft which is rotated with the transmission shaft by means of an endless drive transmission member such that the dust falling in the dust passageway can be drawn into the blower casing for discharge through a discharge port.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: June 15, 2004
    Inventor: Pei-Lieh Chiang
  • Patent number: 6726545
    Abstract: A linear polishing apparatus for polishing a semiconductor substrate including a novel polishing belt arrangement with at least two polishing belts forming a continuous loop. Each belt having an outside polishing surface and an inside smooth surface. The belts are spaced alongside each other sharing a common axis at each end. The belts are looped around a pair of rollers making up a driver roller at one end and a driven roller at the other end. A platen member interposes each belt and is placed between the pairs of rollers. The platen provides a polishing plane and supporting surface for the polishing belts. The polishing plane includes a plurality of holes communicating with an elongated plenum chamber underlying the plane. The chamber supplies a compressed gas to impart an upward pressure against the polishing belts. The driver rollers are coupled to separate motors to independently drive and control at least said two of the polishing belts.
    Type: Grant
    Filed: April 26, 2002
    Date of Patent: April 27, 2004
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Subramanian Balakumar, Chen Feng, Victor Lim, Paul Proctor, Mukhopadhyay Madhusudan, Chivukula Subrahmanyam, Yelehanka Ramachandramurthy Pradeep
  • Patent number: 6726532
    Abstract: A tensioning assembly for a polishing belt on a linear chemical mechanical polishing apparatus. The tensioning assembly comprises first and second rollers which are operably engaged by respective air cylinders and exert a selected degree of downward tension on the lower run of the horizontal polishing belt. A third roller biased typically by a spring pushes upwardly on the lower run of the belt between the first and second rollers. Accordingly, the first and second rollers, in conjunction with the third roller, tension the belt on the apparatus to maintain optimum material removal rates and uniformity. The degree of tension exerted on the belt can be varied according to stretching of the belt resulting from prolonged use.
    Type: Grant
    Filed: July 24, 2002
    Date of Patent: April 27, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Hun Lin, Tien-Chen Hu, Tso-Hsu Lin, Hong-Chin Pu, Jeng-Fang Chang, Der-Yuan Hong
  • Patent number: 6663475
    Abstract: A tool support device for use in a belt grinding apparatus (1), the apparatus including, a drive motor (60), a drive shaft (61) and an abrasive belt arranged to be driven by the drive motor, (60) the tool support device (10) including a primary carriage (20) including a plurality of mounting zones (22, 23, 24) thereon, each mounting zone being adapted to receive a primary working tool assembly, (40, 41, 42), one or more of the primary tool assemblies including a secondary carriage (46) operatively mounted to the primary carriage (20) at one or respective one of the mounting zones (22, 23, 24) the primary carriage (20) being mounted for rotary movement so that it can adopt a plurality of working positions, wherein in each working position one of the primary working tools can be selectively disposed at a work station in an operative position, the secondary carriage (46) having a plurality of additional working tools thereon, the secondary carriage (46) being adapted for rotary movement relative to the primary c
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: December 16, 2003
    Inventor: John Lewis Price
  • Patent number: 6629875
    Abstract: The wafer edge processing unit may be a stand alone unit or may be incorporated in existing grinding machines. The processing unit employs a plurality of tapes which are coated with differing grades of grit to sequentially polish the edge of a rotating wafer or to remove an edge bead from a processed wafer or the other substrate. The tapes are mounted on a backing block which is rotated to move the tapes from a line contact with the top bevel of the wafer to a line contact with the bottom bevel of the wafer. Fresh surfaces of the tapes are presented to successive wafers by rotating the spools on which the tapes are mounted. The wafer may be moved in small increments along a Y-axis and/or an X-axis relative to a tape during polishing to improve the polishing operation.
    Type: Grant
    Filed: December 19, 2000
    Date of Patent: October 7, 2003
    Assignee: Accretech USA, Inc.
    Inventor: Robert E. Steere, III
  • Publication number: 20030171082
    Abstract: A tool support device for use in a belt grinding apparatus (1), the apparatus including, a drive motor (60), a drive shaft (61) and an abrasive belt arranged to be driven by the drive motor, (60) the tool support device (10) including a primary carriage (20) including a plurality of mounting zones (22, 23, 24) thereon, each mounting zone being adapted to receive a primary working tool assembly, (40, 41, 42), one or more of the primary tool assemblies including a secondary carriage (46) operatively mounted to the primary carriage (20) at one or respective one of the mounting zones (22, 23, 24) the primary carriage (20) being mounted for rotary movement so that it can adopt a plurality of working positions, wherein in each working position one of the primary working tools can be selectively disposed at a work station in an operative position, the secondary carriage (46) having a plurality of additional working tools thereon, the secondary carriage (46) being adapted for rotary movement relative to the primary c
    Type: Application
    Filed: November 25, 2002
    Publication date: September 11, 2003
    Inventor: John Lewis Price
  • Patent number: 6612901
    Abstract: Planarizing machines, planarizing pads, and methods for planarizing or endpointing mechanical and/or chemical-mechanical planarization of microelectronic substrates. One particular embodiment is a planarizing machine that controls the movement of a planarizing pad along a pad travel path to provide optical analysis of a substrate assembly during a planarizing cycle. The planarizing machine can include a table having an optical opening at an illumination site in a planarizing zone and a light source aligned with the illumination site to direct a light beam through the optical opening in the table. The planarizing machine can further include a planarizing pad and a pad advancing mechanism. The planarizing pad has a planarizing medium and at least one optically transmissive window along the pad travel path. The pad advancing mechanism has an actuator system coupled to the pad and a position monitor coupled to the actuator system.
    Type: Grant
    Filed: June 7, 2000
    Date of Patent: September 2, 2003
    Assignee: Micron Technology, Inc.
    Inventor: Vishnu K. Agarwal
  • Publication number: 20030157871
    Abstract: A grinding machine includes a work table disposed on top of a base, a housing rotatably secured to the base with a shaft and having a roller disposed on one end, a casing has one end secured to the housing and has another roller, a sander belt is engaged over the rollers. The sander belt is adjustable relative to the base and the work table when the housing is rotated and adjusted relative to the base about the shaft. A plate is secured to the base and has a curved slot, the casing has a fastener adjustably engaged in the curved slot of the plate.
    Type: Application
    Filed: February 21, 2002
    Publication date: August 21, 2003
    Inventor: Kun Yi Lin
  • Patent number: 6561884
    Abstract: Generally, a method and system for lifting a web of polishing material is provided. In one embodiment, the system includes a platen that has a first lift member disposed adjacent to a first side and a second lift member disposed adjacent to a second side. The platen is adapted to support the web of polishing media that is disposed between the first and the second lift members. A method includes supporting a web of polishing media on a platen between a first lift member and a second lift member and moving at least the first lift member or the second lift member to an extended position relative the platen that places the web in a spaced-apart relation with the platen.
    Type: Grant
    Filed: August 29, 2000
    Date of Patent: May 13, 2003
    Assignee: Applied Materials, Inc.
    Inventors: John M. White, Phillip R. Sommer, Sasson Somekh
  • Patent number: 6544112
    Abstract: A belt tracking mechanism for a belt using machine having a frame, a drive pulley, an idler pulley and a belt trained over the pulleys includes a support member for supporting the idler pulley for rotation about an axis fixed relative to the support member. A mounting stud attached to the support member parallel to the idler pulley axis and threadably engaged with an adjustment knob connects the support member to the frame, the stud being loosely received in an opening in the frame and the knob loosely engaging the frame around the opening on a side of the frame facing away from the support member. A spring biases the support member in a belt tightening direction about the axis of the mounting stud, and the forces imposed on the support member by the belt and spring and mounting stud hold a bend line of the support member, which extends transversly of the support member against the frame.
    Type: Grant
    Filed: January 17, 2002
    Date of Patent: April 8, 2003
    Inventor: Richard Fuchs
  • Patent number: 6537142
    Abstract: A belt adjusting device of the belt sander comprises a seat on which a driving roller and a driven roller are pivotally mounted. A reduction gear set is mounted on the seat and is driven by a motor. The gear set is provided with a shaft rod capable of turning in the direction perpendicular to the motor spindle and having one end which is disposed in a long slot of a swiveling member. When the shaft rod slides in the long slot, the push portion of other end of the swiveling member is caused to swivel a predetermined angle, so as to push an action rod in constant contact with the swiveling member to act. The action rod is pivoted with the driven roller. When the action rod is pushed, the free end of the driven roller is caused to engage in an up-and-down displacement perpendicular to the motor spindle. The sanding belt can be thus displaced horizontally on the two rollers to adjust automatically the contact position between the sanding belt and a workpiece.
    Type: Grant
    Filed: April 26, 2001
    Date of Patent: March 25, 2003
    Inventor: John Liou
  • Patent number: 6503128
    Abstract: A grinding attachment for use in conjunction with hand-held grinding or drilling power tools such as are commonly found around the house, and method for using this attachment. The purpose of the invention is to allow the homeowner and the like to have greater facility in performing surface sanding, grinding, or finish work on pieces of wood and the like. In particular, the goal is to provide proficiency in working with surfaces that are not planar or otherwise simple. By providing an appropriate compound support against which an abrasive belt or the like is to run as it works the surface, it is possible to have a variety of backing shapes ranging from a strictly planar backing to one that allows the abrasive material to take the shape of whatever piece is being pressed against it. The invention derives its motive power from a coupling to a power tool, typically by the insertion of a drive axle of the attachment into the chuck of a hand drill.
    Type: Grant
    Filed: June 7, 2000
    Date of Patent: January 7, 2003
    Inventors: William R. Deware, William L. Andrews
  • Patent number: 6428394
    Abstract: A method and apparatus are disclosed for chemically-mechanically polishing and planarizing semiconductors. An apparatus includes first and second rollers connected by a tension belt. A polishing member is releasably attached to the first and second rollers. A method includes clamping a first portion of a continuous strip of polishing member to a first roller, clamping a second portion of the continuous strip to a second roller, applying a tension to the continuous strip and rotationally reciprocating the rollers while pressing a semiconductor wafer against the continuous strip.
    Type: Grant
    Filed: March 31, 2000
    Date of Patent: August 6, 2002
    Assignee: Lam Research Corporation
    Inventors: Ben Mooring, Wilbur Krusell, Glenn Travis, Erik Engdahl
  • Patent number: 6416385
    Abstract: A system and method for planarizing a plurality of semiconductor wafers is provided. The method includes the steps of processing each wafer along the same process path using at least two polishing stations to each partially planarize the wafers. The system includes an improved process path exchanging a detachable wafer carrying head with spindles at each processing point and conveying the detached wafer carrying heads in a rotary index table between processing points. The system also provides for improved polishing accuracy using linear polishers having pneumatically adjustable belt tensioning and aligning capabilities.
    Type: Grant
    Filed: June 22, 2001
    Date of Patent: July 9, 2002
    Assignee: Lam Research Corporation
    Inventors: Edward T. Ferri, Jr., Randall L. Green, Anil K. Pant
  • Publication number: 20020052171
    Abstract: A chemical mechanical polishing apparatus has a rotatable platen, a generally linear polishing sheet having an exposed portion extending over a top surface of the platen for polishing the substrate, and a drive mechanism to incrementally advance the polishing sheet in a linear direction across a top surface of the platen by a fixed distance each time the polishing sheet is incremented. The polishing sheet is releasably secured to the platen to rotate with the platen, and it has a width greater than a diameter of the substrate.
    Type: Application
    Filed: July 6, 2001
    Publication date: May 2, 2002
    Inventors: Manoocher Birang, Martin Scales, Karl M. Robinson
  • Patent number: 6312315
    Abstract: An abrasive article including (i) a first backing, (ii) a plurality of protrusions attached to the first surface of the first backing and including a grinding aid, wherein the first surface of the first backing is contoured by the protrusions so as to define a plurality of peaks and valleys, and (iii) a coating of abrasive particles adhered to the contoured first surface of the first backing so as to cover at least a portion of both the peaks and the valleys.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: November 6, 2001
    Assignee: 3M Innovative Properties Company
    Inventor: John J. Gagliardi
  • Publication number: 20010011003
    Abstract: A polishing head of a polishing apparatus of this invention has a structure in which an air blast port is formed in a lower surface of a carrier 20, and an upper outer peripheral portion 24 of the carrier is so formed as to protrude in a diametric direction, and is placed on a retainer ring 30 to thereby form a seal portion 25. The retainer ring clamps a peripheral edge of a rubber sheet in such a form as to cover the carrier. Consequently, an air chamber 61 is formed between the carrier lower surface and the rubber sheet, and an air pressure of this air chamber pushes a wafer W to a polishing cloth 2.
    Type: Application
    Filed: January 26, 2001
    Publication date: August 2, 2001
    Inventor: Minoru Numoto
  • Patent number: 6186866
    Abstract: An abrasive article including (i) a first backing, (ii) a plurality of protrusions attached to the first surface of the first backing and including a grinding aid, wherein the first surface of the first backing is contoured by the protrusions so as to define a plurality of peaks and valleys, and (iii) a coating of abrasive particles adhered to the contoured first surface of the first backing so as to cover at least a portion of both the peaks and the valleys.
    Type: Grant
    Filed: August 5, 1998
    Date of Patent: February 13, 2001
    Assignee: 3M Innovative Properties Company
    Inventor: John J. Gagliardi