Abstract: The present invention particularly relates to a hand-held sanding machine with an outer housing (1), a tool shaft (2) and a brushless electric drive motor. In the present invention, the rotor of the drive motor is fastened to the tool shaft (2) of the sanding machine, and the stator (6) is positioned in the outer housing (1). The present invention also relates to a control method for an electric sanding machine.

Abstract: A portable electric grinder with an air cooling system and connected to a remote stationary voltage supply means (19, 20) via a cable (16), wherein a cooling air duct (21) is provided to connect cooling air passages (23a, b) in the grinder housing (10) to a stationary air pumping device, and the air pumping device is provided with a filter unit (24) for preventing dust and other undesirable particles from entering the air duct (21) and reaching the cooling air passages (23a, b) of the grinder housing (10).

Abstract: Disclosed is a saw blade capable of rapid cutting for various objects, such as jewelry, ferrite materials, stone, metallic materials, or ceramic tiles. The shape of the saw blade is modified such that performance and life time of the saw blade are improved. And also the manufacturing process for the saw blade is simplified, thereby reducing the manufacturing cost for the saw blade. The cutting tip is formed at upper and lower surfaces thereof with a mesh pattern, thereby enhancing the cutting performance by 30% as compared with that of a conventional cutting tip. The cutting tip represents superior cooling efficiency so that body of the saw blade is not broken during the cutting process, thereby ensuring safety of a worker and expanding the life time of the saw blade.

Abstract: A substrate holding mechanism, a substrate polishing apparatus and a substrate polishing method have functions capable of minimizing an amount of heat generated during polishing of a substrate to be polished and of effectively cooling a substrate holding part of the substrate holding mechanism, and also capable of effectively preventing a polishing solution and polishing dust from adhering to an outer peripheral portion of the substrate holding part and drying thereon. The substrate holding mechanism has a mounting flange, a support member 6 and a retainer ring. A substrate to be polished is held on a lower side of the support member surrounded by the retainer ring, and the substrate is pressed against a polishing surface of a polishing table. The mounting flange is provided with a flow passage contiguous with at least the retainer ring. A temperature-controlled gas is supplied through the flow passage to cool the mounting flange, the support member and the retainer ring.

Abstract: In a grinding disk (100) for the rotary slaving on a driven shaft of a grinding machine, in particular of a hand grinder, which has at least one supporting plate (10) with at least one cut or opening (20) through which the abrasive dust which develops by grinding can be sucked by means of at least one suction bell placed in or on the grinding machine, the cut or opening (20) is configured aerodynamically.

Abstract: The instant invention relates to power tools. More specifically, the instant invention is a portable device for shaping, contouring and polishing the edge of a workpiece consisting of a hard material. The device includes a guide-way constructed and arranged to attach directly to the upper surface of the workpiece. A carriage is slidably supported on the guide-way for movement along the length thereof. Secured to the carriage is a motor for rotation of a rotary tool. A pneumatic cylinder is provided to force the rotary tool into the workpiece with a predetermined pressure along a predetermined axis of approach. The carriage is constructed and arranged for vertical positioning and angular rotation of the rotary tool.

Abstract: The invention relates to a grinding-wheel cover (3) for grinding wheels with a support body (1) and a grinding layer (2) arranged at an edge or face for edge or face use in grinding, a grinding-wheel cover being provided for forming cavities on the grinding body, wherein the grinding-wheel cover (3) additionally being provided with partitions, recesses or cutouts (5) for increasing the pressure of the cooling and or lubricating medium.

Abstract: A manual power grinder has a housing, a motor received in the housing, a grinding disc driven by the motor and located on an underside of the motor; a drive shaft arranged so that said drive shaft and the motor are located parallel to one another and vertically to the grinding disc in said housing and are in rotational communication with one another, and a gear unit providing the rotational communication of the motor and the drive shaft and located below in the housing.

Abstract: A manual power grinder has a housing, a motor received in the housing, a grinding disk driven by the motor and located on an underside of the motor, a drive shaft arranged so that the drive shaft and the motor are located parallel to one another and vertically to the grinding disk in the housing and are in rotational communication with one another, and a gear unit providing the rotational communication of the motor and the drive shaft and located in the housing.

Abstract: It is accordingly an object of the invention to provide a technique of cooling a power tool which further improves cooling effectiveness of the power tool. According to the invention, a power tool is provided that includes a driving motor, a tool bit, a power transmitting mechanism, a tool body and a cooling fan. The power tool further includes first and second cooling air passages. The first cooling air passage is disposed within the tool body and flows cooling air into the tool body by using the cooling fan. The second cooling air passage is provided within the tool body and takes outside air into the tool body by using the flow of the cooling air through the first cooling air passage. The cooling air within the first cooling air passage can be cooled by mixing outside air taken into the tool body via the second cooling air passage and therefore, the cooling air can further effectively cool components within the power tool. As a result, cooling effectiveness of the power tool can be improved.

Abstract: A tool, particularly for milling operations, capable of being driven in rotation about its own main axis. The tool has a core provided with a plurality of abrasive elements extending from the core radially to the axis and spaced apart from each other angularly. Between at least one pair of abrasive elements adjacent to each other is provided at least one respective gap in the form of a cut extending radially in the core to a predefined distance from the axis.

Abstract: A flapped grinding disk having a disk- or plate-shaped support including an outer periphery, and a plurality of spaced-apart, discrete groups of grinding flaps forming a plurality of apertures, wherein the flaps overlap each other on the support in the manner of shingles, are secured in an adhesive bed, and define an outer circumference, wherein the radial dimension of the aperture from the outer periphery of the support to the outer circumference is substantially commensurate with the radial dimension of the groups of grinding flaps from the outer periphery of the support to the outer circumference.

Abstract: A metal machining apparatus for removal of metal from a workpiece, that employs a laser-targeted coolant nozzle to apply coolant fluid to a machining tool, such as a grinding wheel, to remove metal from a workpiece. The laser-targeted coolant nozzle has a coolant nozzle body having a flow passage for the coolant fluid, and a laser bore through which a visible laser can be inserted. The visible laser cooperates with a positioning feature on the nozzle body for visually positioning the coolant nozzle relative to the grinding wheel. When the laser is removed and replaced with a seal plug, the stream of cooling fluid passing through the flow passage can be directed accurately at the grinding wheel for improved workpiece grinding.

Abstract: Double-sided polishing machine with an upper and a lower working disc, each comprising a polishing disc and a carrier disc. The working disc are co-axially arranged and rotatable relative to each other, a polishing gap being formed between the polishing discs. Said workpieces are machined in the polishing gap. A temperature control device being at least provided for the upper working disc by which a temperature control fluid can be conveyed through passages in the upper working disc. A spacing measuring device being associated with the working discs which measure the spacing in the polishing gap (gap width ?) at two radial spaced points of the polishing gap.

Abstract: A nozzle assembly and method is configured to apply coherent jets of coolant in a tangential direction to the grinding wheel in a grinding process, at a desired temperature, pressure and flowrate, to minimize thermal damage in the part being ground. Embodiments of the present invention may be useful when grinding thermally sensitive materials such as gas turbine creep resistant alloys and hardened steels. Flowrate and pressure guidelines are provided to facilitate optimization of the embodiments.

Abstract: It is one object of a grinding machine and a grinding fluid supply-nozzle therefor according to the present invention to supply grinding fluid to a moving grinding point reliably, even if the surfaces of a grinding wheel is abraded up. A wheel head 5 advances/retracts to a workpiece. A grinding wheel G is carried rotatably by the wheel head 5 and grinds an eccentric portion W of the workpiece. A grinding fluid supply-nozzle 50 supplies grinding fluid to a moving grinding point K where the grinding wheel G contacts the eccentric portion W of the workpiece. The grinding fluid supply-nozzle 50 is made from a curve portion 53, an opening 51 and a straight portion 52 between the curve portion 53 and the opening 51. The grinding fluid supply-nozzle 50 spouts the grinding fluid to a grinding fluid supply point Pc upstream the grinding points K and Ks, even in the case that the grinding wheel G has been abraded up.

Abstract: A rotary cutting saw including: (a) a base disk which has a plurality of apertures formed therethrough and opening in axially opposite end surfaces thereof; (b) a plurality of abrasive segments which are fixed to an outer circumferential surface of the base disk; and (c) a plurality of axial-runout restraining members which are received in the apertures. Each of the axial-runout restraining members has a size which is smaller than a size of each of the apertures, such that a clearance is defined between the periphery of each of the apertures and a corresponding one of the axial-runout restraining members which is received in the each of the apertures. A ratio of a size of the clearance to the size of each of the axial-runout restraining members is 5–150%.

Abstract: The flapped grinding disk comprises a disk- or plate-shaped support and grinding flaps which overlap each other on the support in the manner of shingles and which are secured in an adhesive bed. Apertures are cut away on the periphery of the flapped grinding disk, the apertures have approximately the form of a part of an annulus with a front edge and an edge at the rear in the direction of rotation of the grinding disk and at least the edge of the apertures that is at the rear in the direction of rotation of the grinding disk runs approximately radially. The grinding flap adjoining the rear edge of the aperture can form a ramp. The front edge of the apertures can also run approximately radially. The radial depth of the apertures can be equal to the radial extent of the grinding flaps, so that no remnants of grinding flaps remain at the inner edge of the apertures.

Abstract: A coolant nozzle is used on a machine tool having a rotating bit of convoluted longitudinal profile for cutting a number of slots in a disk. The nozzle includes at least one coolant inlet and at least one coolant outlet. The coolant outlet has a convoluted section and is positioned to direct a coolant stream tangentially at the bit in a direction of rotation of the bit. Internal surface portions of the nozzle define one or more passageways between the inlet and the outlet(s).

Abstract: A method and apparatus for diamond wire cutting of metal structures, such as nuclear reactor vessels, is provided. A diamond wire saw having a plurality of diamond beads with beveled or chamfered edges is provided for sawing into the walls of the metal structure. The diamond wire is guided by a plurality of support structures allowing for a multitude of different cuts. The diamond wire is cleaned and cooled by CO2 during the cutting process to prevent breakage of the wire and provide efficient cutting. Concrete can be provided within the metal structure to enhance cutting efficiency and reduce airborne contaminants. The invention can be remotely controlled to reduce exposure of workers to radioactivity and other hazards.

Abstract: A grinding wheel has a flat, circular carrier surface (1) on which a plurality of elongated grinding members (2) are arranged running least partially radially. A discharge opening (3) is disposed ahead of each of the grinding members (2) in the circumferential direction (U). Furthermore, the carrier surface (1) has a basically truncated conical central depression (4) facing away from the grinding members (2). The discharge openings (3) abut the L-shaped grinding members (2) in a direction of rotation (D) and extend approximately over the entire length of the grinding members (2).

Abstract: The present invention relates to a ported grinding wheel for use on a grinding machine. The grinding wheel comprises at least one fluid inlet port located on a first surface of the grinding wheel, a plurality of fluid outlet ports on a working surface of the grinding wheel for delivering the fluid to the working surface, and an internal annular channel connecting the inlet port(s) to the plurality of outlet ports.

Abstract: The invention provides a method and an apparatus that prevent the accumulation of copper ions during CMP of copper lines by performing the CMP process at low temperatures and by maintaining this low temperature during the CMP process by adding a slurry that functions as a corrosion inhibitor.

Abstract: The present invention relates to a ported grinding wheel for use on a grinding machine. The grinding wheel comprises at least one fluid inlet port located on a first surface of the grinding wheel, a plurality of fluid outlet ports on a working surface of the grinding wheel for delivering the fluid to the working surface, and an internal annular channel connecting the inlet port(s) to the plurality of outlet ports.

Abstract: A method for controlling a polishing characteristic of a polishing pad used in planarization of a substrate. The method preferably includes controlling the temperature of a planarizing surface of the polishing pad so that waste matter accumulations on the planarizing surface soften and/or become more soluble, and/or material comprising the planarizing surface attains approximately its glass transition temperature. The waste matter accumulations and/or a portion of the planarizing surface are in this way softened and more easily removed. The planarizing surface is either heated directly by directing a flow of heated planarizing liquid or heated air to the planarizing surface or indirectly by heating a support surface beneath the polishing pad or by heating the air proximate to the polishing pad.

Abstract: A universal abrasive article adapted to mount on a mounting surface of a sanding machine having a plurality of dust extraction holes that define an open area. The abrasive article includes a plurality of discrete apertures that are sized and positioned so as to expose a majority of the open area of the dust extraction holes independent of the angular orientation of the abrasive article when the abrasive article is in registration with the mounting surface. The discrete apertures may include elongated, arcuate slots that may be symmetrically positioned about a center point of the abrasive article. In one embodiment, the discrete apertures may include seven arcuate slots. These embodiments also include sufficient abrasive material to provide adequate sanding cut rate and structural integrity during use and removal.

Abstract: In a method and an apparatus for supplying coolant in a grinding machine while the grinding machine grinds, a cooling nozzle and a cleaning nozzle are mounted on a moving member, and the moving member is moved in a direction identical with a first normal line, relative to the grinding wheel, at a first predetermined angle away from a reference straight line perpendicular to an axis of a main spindle. The reference straight line passes through a grinding point. Accordingly, the cooling nozzle injects the coolant with an injecting outlet port directed in a direction of a tangential line, of the grinding wheel, passing through the grinding point. The cleaning nozzle injects the coolant with an injecting outlet port directed in a direction of a normal line relative to the grinding wheel.

Abstract: A finishing orbital sander (1) includes a main body (2) and a base (12) provided below the main body. Provided between the main body and the base are a plurality of foot assemblies (22). Each assembly in turn includes a cylindrical or columnar foot (23) made of aluminum and a pair of rubber O-rings (25) at both ends of the cylindrical foot. Each foot additionally includes reduced diameter sections (24) at both ends, where the O-rings are disposed. The reduced diameter sections (24) are fitted in the O-rings and placed in recessed seats (26) provided in opposing surfaces of the main body (2) and the base (12), thus elastically supporting the aluminum feet (23) in the axial direction thereof. The axial dimension of each reduced diameter section (24) is made no longer than the thickness (i.e., the axial dimension) of the O-ring (25), so that the tip end of the reduced diameter section does not exceed or project from the axial outermost end of the O-ring.

Abstract: An improved method of finishing a silicon part utilizes a rotatable grinding wheel having diamond particles and a bonding agent, and a plurality of grit materials. The grinding wheel is dressed to form a wheel with a grinding surface having a plurality of diamond particles, and thereafter a bonding agent is removed from the grinding wheel surface without significant removal of the plurality of diamond particles. An enhanced lubricity material may be applied to the grinding wheel, and the surface of the silicon part then ground, preferably while cooling the silicon part. The surface of the silicon part may then be finished with a plurality of grit materials. A single digit RMS surface finish on a silicon part may be obtained.

Abstract: A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen that are coupled to a vacuum source. When a vacuum is drawn through the apertures in the platen, the polishing pad is drawn tightly against the platen and may therefore be less likely to wrinkle when a semiconductor substrate is engaged with the polishing pad during planarization. When the vacuum is released, the polishing pad can be easily separated from the platen. The apparatus can further include a liquid trap to separate liquid from the fluid drawn by the vacuum source through the apertures, and can also include a releasable stop to prevent the polishing pad from separating from the platen should the vacuum source be deactivated while the platen is in motion.

Abstract: In order to provide a machining apparatus which can save fluids such as water, compressed air and clean air, it comprises at least a spindle unit including a rotary spindle having a machining element attached thereto for effecting a required machining work on a workpiece and a spindle housing rotatably bearing the rotary spindle, and means for supplying the spindle unit with fluid for use in machining the workpiece. The means for supplying the spindle unit with fluid has a flow control provided in the fluid flowing passage for controlling the flow rate of the fluid in response to the rotating and stopping of the rotary spindle, thereby saving such fluid. Also, a controlled small quantity of such fluid is allowed to flow in the spindle housing after the machining is stopped, thereby retaining the thermal condition without being changed until the machining is resumed. Thus, no thermal calibration is required when the machining apparatus resumes work.

Abstract: The invention provides a method and an apparatus that prevent the accumulation of copper ions during CMP of copper lines by performing the CMP process at low temperatures and by maintaining this low temperature during the CMP process by adding a slurry that functions as a corrosion inhibitor.

Abstract: A countersink bit for glass has a shaft extending along and rotatable about an axis, a head fixed to the shaft and having a frustoconical surface centered on the axis, a layer of grinding material on the surface, and an axially relatively incompressible plastic body capable of transmitting torque between the surface and the shaft. The plastic body has good damping capabilities so that any tendency of the head to vibrate or chatter is largely eliminated.

Abstract: An apparatus and method for re-surfacing compact discs. The method is a two-step method in which the disc to be re-surfaced is first placed on a shaft. A resilient pad supports an abrasive medium and is positioned so the abrasive medium overlaps only the protective layer of the CD. The disc and abrasive material are rotated in opposite directions at about the same speed to remove deeper blemishes in a wet operation. Subsequent polishing is accomplished in a similar manner using a polishing compound instead of an abrasive. The re-surfacing and polishing apparatus each have motor driven shafts which are parallel and spaced apart and support the CD and pad in a cabinet. A transparent cover extends across the top of the cabinet.

Abstract: Apparatus and methods for substantial planarization of solder bumps. In one embodiment, an apparatus includes a planarization member engageable with at least some of the plurality of outer surfaces to apply a planarization action on one or more of the outer surfaces to substantially planarize the plurality of outer surfaces, and a securing element to securely position the bumped device during engagement with the planarization member. Through application of “additive” and/or “subtractive” processes, the solder balls are substantially planarized.

Abstract: Accessories for an angle grinder include a disposable rotary sanding disk having quite large shaped ventilating/viewing apertures, for use with a resilient backing plate also having shaped ventilating apertures. The apertures of one or both parts are shaped so that snagging of the apertures on projections from the work surface is minimized and to facilitate air flow across the work surface during use. This air flow helps in cooling the work and ejecting detritus, so minimising clogging effects. The ventilating apertures also facilitate viewing the work to be sanded through the spinning disk during the abrasion process, so that operator feedback is immediate. The holes also give the sanding disk more resilience so that a greater area comes in contact with the work and the disk wears more evenly over its abrasive surface.

Abstract: A grinding wheel having dust discharge-impelling blades which are able to impel to discharge the dust produced during the grinding operation to a dust collection machine to decrease dispersing dust in the air, and increase the cooling efficiency of the grinding wheel to enhance the grinding ability and the life of the grinding wheel. The grinding wheel of the present invention comprises a shank for connecting with a shaft of electric motor, having a plurality of dust discharging holes disposed at given intervals in the shank and a plurality of dust discharge-impelling blades disposed between the dust discharging holes for impelling to discharge dust produced during the grinding operation through and in cooperation with dust discharging holes, and a plurality of grinding tips disposed fixedly at predetermined intervals on the lower surface of the circumferential portion of the shank by means of welding or joining.

Abstract: A method of cutting metal materials and non-metal materials in a non-combustible gas atmosphere, the method including forming a non-combustible gas atmosphere, providing the non-combustible gas atmosphere to at least one of a cutting part of a machine tool and an area adjacent to the cutting part, and machining the metal materials and the non-metal materials using the cutting part, and where the non-combustible gas includes one of nitrogen gas and carbon dioxide gas, and where the non-combustible gas occupies a proportion of at least 90% of the non-combustible gas atmosphere.

Abstract: A ball grinding machine for grinding ceramic bearing balls and the method thereto employing a non-rotating upper circular plate and a rotating lower circular plate to perform precision grinding of ceramic balls. The grinding mechanism according to the present invention comprises two or more separate concentric fixed rings, adjacent annular recesses into the lower surface of the upper circular plate, and corresponding two or more concentric hydraulic pressure rings inserted into said recesses, each with a slanted bottom surface towards the adjacent fixed ring for supplying pressure to the ceramic bearing balls on top of the lower circular plate at a sloped angle. The inner surface of the fixed ring, the slanted bottom surface of the pressure ring, and the grinding surface of a diamond grinding wheel installed on top of the rotating lower circular plate together form a grinding track.

Abstract: An improved exhaust line of a chemical-mechanical polisher will improve polishing performance. A chemical-mechanical polisher is in a polishing chamber, wherein the chemical-mechanical polisher contains a polishing table, a plurality of polishing pads on the polishing table, and a plurality of outlets on the polishing table. A plurality of exhaust lines is connected with the plurality of the outlets, wherein the exhaust lines are used to drive out exhaust gas and sewage generated in the polishing chamber. At least a gas-liquid separating device is connected with the plurality of the exhaust lines, wherein the gas-liquid separating device is used for separation of the exhaust and the sewage. The gas-liquid separating device comprises a sewage collector, a filter, a pump, and a sewage-collecting device. The sewage collector is connected with the plurality of the outlets, wherein the sewage collector is used for collecting the exhaust gas and the sewage driven out through the plurality of outlets.

Abstract: A universal grinding machine, particularly for the grinding of tools, having a tool magazine in which a plurality of grinding tools, together with coolant supply devices which are matched thereto, are disposed in holders and can be supplied according to choice to the grinding spindle, where the grinding tool and its coolant supply device are introduced into their receivers; simultaneously by an axial movement of the grinding spindle and of the grinding spindle slide and are withdrawn by a movement of the grinding spindle and of its grinding spindle slide perpendicular to the grinding spindle axis so that the grinding tool and the coolant supply device are always in a position in relation to each other which is correct for machining.

Abstract: The material removal rate of a creep-feed grinding operation may be increased significantly by use of a type of porous grinding wheel in combination with jet of coolant liquid at high pressure directed at the periphery of the wheel in advance of the cutting point. The apparatus for performing the method may comprise a multi-axis machining centre adapted to enable the coolant nozzle(s) to be retracted to provide working clearance for automatic tool changer operation and to re-position the aiming point of the nozzle(s) over an angular range relative to a cutting point.

Abstract: Machining apparatus for machining a workpiece with a machining tool, including a work holder for holding the workpiece, and a cold gas stream supply device including a cooling gas nozzle through which a cold gas stream is supplied to a machining point, and wherein the cooling gas nozzle is provided on the work holder, and the cold gas stream has a temperature lower than an ambient temperature of the apparatus. The apparatus may be a centerless grinding apparatus including a regulating wheel for rotating the workpiece, and a work rest blade cooperating with the regulating wheel to rotatably support the workpiece so that the workpiece is ground by a grinding wheel while the workpiece is held by the work holder between the regulating and grinding wheels. The cooling gas nozzle is desirably positioned such that a distance between the exit end of the cooling gas nozzle and the grinding point is not larger than a diameter of the workpiece.

Abstract: A rotatable platen has a polishing pad adhered to the top surface thereof. A carrier for holding a substrate and a slurry supply pipe for supplying an abrasive slurry onto the near-center region of the polishing pad are provided above the polishing pad. Two lamps for partially irradiating the surface of the polishing pad with visible light or infrared light are provided at respective locations above the polishing pad and upstream of the carrier in the direction of rotation of the platen. Of the area of the polishing pad in contact with the substrate, a region closer to the center of rotation of the polishing pad and a region farther away therefrom are heated by the two lamps.

Abstract: Accessories for an angle grinder include a disposable rotary sanding disk having quite large shaped ventilating/viewing apertures, for use with a resilient backing plate also having shaped ventilating apertures. The apertures of one or both parts are shaped so that snagging of the apertures on projections from the work surface is minimized and to facilitate air flow across the work surface during use. This air flow helps in cooling the work and ejecting detritus, so minimizing clogging effects. The ventilating apertures also facilitate viewing the work to be sanded through the spinning disk during the abrasion process, so that operator feedback is immediate. The holes also give the sanding disk more resilience so that a greater area comes in contact with the work and the disk wears more evenly over its abrasive surface.

Abstract: Apparatus is provided for reducing the temperature of a plunge grinding drum to minimize the effects of thermal expansion on the accuracy of the grinding process. The grinding drum has air passages through the interior of the grinding drum. A radiator cylinder is pressed into the inside of the drum. The radiator cylinder has an outside diameter sized so that it can be press fit into the drum. The radiator cylinder has a plurality of radial fins projecting inward. Air is conducted through the grinding drum and picks up heat from the radiator fins. The air then carries the heat out of the grinding drum. The grinding drum has a shaft with a hollow central region for receiving air. The grinding drum has flanges on each end which have openings to allow the air to flow into and out of the grinding drum. At the air inlet, the opening in the flange is preferably at the flange's center. At the air outlet, the openings in the flange are preferably adjacent the radiator fins.

Abstract: A method of cleaning a solid surface which is particularly effective for a surface having a complicated structure including slots and holes comprises immersing the solid surface in a cleaning slurry comprising a cleaning liquid and abrasive particles which are soluble in the cleaning liquid, the cleaning liquid comprising a saturated solution so as to greatly reduce the dissolution of the abrasive particles in the cleaning liquid.

Abstract: The prior art discloses machines which, for cooling the surface to be machined, have a gas supply line which opens into a gas outlet which is in the direct vicinity of the polishing disk. When CO.sub.2 is used as cooling gas, stoppages, which can be traced back to snow formation of the CO.sub.2, may occur in the line and in the gas outlet. In order to avoid blockages, the machine is assigned means for the supply of the liquid or supercritical CO.sub.2 which comprise a valve for regulating the throughflow quantity of the CO.sub.2 with an expansion nozzle, the valve being arranged inside the machine.

Abstract: In accordance with the present invention, there is provided a machine for performing abrading operations. The preferred machine includes an upper lap plate and lower lap plate mounted for rotation about its own vertical axis. A carriage means supports the upper lap plate, and a frame means supports the carriage means at spaced locations in a manner permitting the carriage means to reciprocate vertically within the frame means relative to the lower lap plate for performing abrading operations and to provide access for loading and unloading the workpieces. The upper lap plate also may reciprocate vertically and independently of and relative to the carriage means for performing abrading operations and to provide access for loading and unloading the workpieces. Additionally, the abrading machine may be provided with a temperature control device having at least one tube disposed adjacent the lower lap plate for coolant fluid flow.

Abstract: This invention provides a polishing method including the steps of forming a film to be polished on a substrate having a recessed portion in its surface so as to fill at least the recessed portion, and selectively leaving the film to be polished behind in the recessed portion by polishing the film by using a polishing agent containing polishing particles and a solvent, and having a pH of 7.5 or more. The invention also provides a polishing apparatus including a polishing agent storage vessel for storing a polishing agent, a turntable for polishing an object to be polished, a polishing agent supply pipe for supplying the polishing agent from the polishing agent storage vessel onto the turntable, a polishing object holding jig for holding the object to be polished such that the surface to be polished of the object opposes the turntable, and a polishing agent supply pipe temperature adjusting unit, connected to the polishing agent supply pipe, for adjusting the temperature of the polishing agent.