Abstract: A polishing machine for polishing a flat workpiece such as a semiconductor wafer has a rotatable reference table supporting an abrasive cloth disposed on a surface thereof, and a rotatable workpiece holder for holding a flat workpiece against the abrasive cloth. While the flat workpiece is being polished by the abrasive cloth, an abrasive compound is supplied between the abrasive cloth and the flat workpiece. The reference table has grooves defined therein for dissipating heat from the reference table and the abrasive cloth while the flat workpiece is being polished by the abrasive cloth. The grooves may be supplied with either the abrasive compound or a coolant.

Abstract: A polishing apparatus includes a light weight and easily interchangeable cloth cartridge of high deformation resistance. The cloth cartridge is made by bonding a polishing cloth to a cartridge base member which includes a honeycomb structure member which can be sandwiched between top and bottom aluminum thin plates. Honeycomb structure member of various cell sizes and materials available in the marketplace can be used for this purpose quite effectively. The honeycomb structure members made of an aluminum material provides a stiff and thermally resistant cartridge base member. Cell spaces in the honeycomb structure member can be cooled or heated, depending on a nature of the polishing slurry used, by passing an appropriate fluid through the base member. This is made possible by providing flow holes in the cell walls separating the honeycomb cells. This approach is effective in producing optimum polishing performance by the cloth cartridge.

Abstract: A turn broaching machine for broaching a workpiece comprises a hollow arbor having a plurality of axially spaced apart, circumferentially extending cutting segments projecting radially outwardly from the side wall thereof. The cutting segments each have a radially outer peripheral edge provided with broaching elements. A closed loop system circulates a heated fluid through the arbor. The fluid is heated to an elevated temperature of about 100 F.-150 F. to maintain the arbor in a similarly heated condition during broaching. Maintaining the arbor at a relatively constant, elevated temperature during broaching stabilizes the broach by eliminating axial thermal expansion.

Abstract: A machine for simultaneously milling and grinding a workpiece comprises milling and grinding wheels rotatable about respective first and second parallel axes, the second axis being offset radially with respect to the first axis. A single motor drives the milling and grinding wheels at different relative speeds. The grinding wheel is mounted to a hub which includes an axially flexible portion to enable the grinding surface to be axially adjusted. The milling wheel includes an array of milling cutters with a large gap formed between leading and trailing ones of the milling cutters to accommodate the offset grinding wheel. The radial spacing of the milling cutters from the axis of rotation of the milling wheel progressively increases from the leading milling cutter to the trailing milling cutter.

Abstract: A machine tool comprises at least one revolvable spindle having an end for supporting a work piece, a first processing tool disposed opposite to the end of the spindle for processing the work piece, a second processing tool disposed parallel to the first processing tool, and a revolving unit for revolving the spindle about a central revolving axis to place the end of the spindle opposite to the second processing tool for processing the work piece. A chamber is disposed on the outer peripheral surface of the work spindle. A pair of inlet and outlet connections are revolved integrally with the work spindle and are arranged on opposite sides of the central revolving axis. Connecting pipes connect the inlet and outlet connection on one side of the central revolving axis to the inlet and outlet connection at the opposite side of the central revolving axis through the chamber. A coolant supply pipe is provided for supplying a coolant to the chamber through the inlet and outlet connections and the connecting pipes.

Abstract: A ventilating device in a power driven tool has a fan driven by a motor for cooling the motor and has an air flow channel for the air to flow to the outside after passing around the motor. The ventilating device includes an air passage member disposed in the air flow channel on the downstream side of the fan to form a part of the air flow channel. The air passage member includes a plurality of blow windows and a plurality of partition walls for separating the blow windows from each other. The blow windows are positioned in series in the rotational direction of the fan. The partition walls have different heights relative to and in the direction toward the fan such that the heights increase in the rotational direction of the fan.

Abstract: A grinding wheel is provided having a wheel body and an abrasive surface layer having a plurality of dead end grooves extending rearwardly from the side of the circumference of the wheel to effectively gather and then trap coolant therein during grinding. The dead end grooves are preferably arranged in alternating right and left hand sections extending respectively from the right and left hand sides of the wheel. The dead end grooves effectively feed and trap coolant therein during cutting. The grinding wheel and related grinding method effectively reduce workpiece burning during creep feed grinding large surface areas and deep cuts, with a water base coolant.

Abstract: A method and apparatus for physically processing a workpiece by contact of a working tool with the workpiece, wherein a mass of bubbles of a working liquid is applied to an area of contact between said working tool and said workpiece. The apparatus includes a foaming device for foaming the working liquid to produce the mass of bubbles, a conduit for delivering the mass of bubbles from the foaming device, and a nozzle disposed at one end of the conduit remote from the foaming device, for applying the mass of bubbles to at least one of the tool and workpiece. The nozzle may incorporates a foaming device.

Abstract: A conversion grinding wheel frame for an abrasive-belt to secure thereto for replacing a conventional stone grinding wheel used on a cylindrical roll grinding machine. The abrasive-belt conversion wheel is secured to a spindle of the grinding machine by a wheel clamping assembly. The abrasive-belt conversion wheel frame having an engagement working surface and a mounting surface with both surfaces having apertures therethrough traversing from a chamber within the abrasive-belt conversion grinding wheel frame. Fluid under pressure in the chamber escapes through the apertures to the working surface and mounting surface. The pressure of the gas expands the abrasive-belt while being mounted onto the abrasive-belt conversion grinding wheel frame. The mounting surface is diametrically tapered in relation to the working surface to afford initial engagement of the abrasive-belt which further assists mounting the abrasive-belt onto the working surface.

Abstract: A spherical member polishing apparatus has a fixed disk which is disposed in opposition to a rotating disk with a predetermined clearance. The rotating disk is rotated, and spherical members are clamped and pressurized between the rotating disk and the fixed disk for roll-polishing the spherical members. A plurality of grooves are formed along a circumferential direction of the fixed disk, and a plurality of working-fluid supply ports are randomly formed along the circumferential direction between the grooves, between the groove and an outer peripheral portion of the fixed disk, and between the groove and an inner peripheral portion of the fixed disk. The working fluid is supplied through the working-fluid supply ports to the fixed disk. A large number of spherical members are polished at a high precision, while a variation in polishing precision and the like are avoided as much as possible.

Abstract: For the machining of ceramic materials, there are employed halogenated hydrocarbon compositions, e.g., CCl.sub.4, CCl.sub.3 CF.sub.3, CHCl.sub.2 CHCl.sub.2, and CCl.sub.2 .dbd.CClCCl.dbd.CCl.sub.2, to increase the removal rate of the ceramic material. The halogenated hydrocarbon composition is applied to the contact surface of the machine tool, e.g., a diamond-surfaced grinding wheel, and the ceramic and acts as a chemical assistant in machining the ceramic.

Abstract: A method and apparatus for physically processing a workpiece by contact of a working tool with the workpiece, wherein a mass of bubbles of a working liquid is applied to an area of contact between said working tool and said workpiece. The apparatus includes a foaming device for foaming the working liquid to produce the mass of bubbles, a conduit for delivering the mass of bubbles from the foaming device, and a nozzle disposed at one end of the conduit remote from the foaming device, for applying the mass of bubbles to at least one of the tool and workpiece. The nozzle may incorporates a foaming device.

Abstract: A polishing machine for polishing a flat workpiece such as a semiconductor wafer has a rotatable reference table supporting an abrasive cloth disposed on a surface thereof, and a rotatable workpiece holder for holding a flat workpiece against the abrasive cloth. While the flat workpiece is being polished by the abrasive cloth, an abrasive compound is supplied between the abrasive cloth and the flat workpiece. The reference table has grooves defined therein for dissipating heat from the reference table and the abrasive cloth while the flat workpiece is being polished by the abrasive cloth. The grooves may be supplied with either the abrasive compound or a coolant.

Abstract: A guide plate for guiding a power hand tool along a guide rail placed on a workpiece, has a guide channel formed to embrace the guide rail and provided with guide surfaces for sliding along lateral surfaces of the guide rail. The guide channel is formed by at least two elongated bridge-type beads arranged at a distance from one another and by recesses located in a plane and aligned with the beads so as to extend on both sides of the beads following immediately from the beads. The guide channel has a greater clearance dimension in relation to a width of the guide rail. The guide surfaces are formed in pairs on two necks which are provided in the guide channel at a separation from each other with a clearance width which is slightly greater than the width of the guide rail.