Abstract: Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 ?in.

Abstract: Actuators (artificial muscles) comprising twisted polymer fibers generate tensile actuation when powered thermally. In some embodiments, the thermally-powered polymer fiber tensile actuator can be incorporated into an article, such as a textile or garment.

Abstract: A method for producing a machining segment for a machining tool, where the machining segment is connectable to a basic body of the machining tool by an underside of the machining segment, includes producing a green body by placing first hard material particles in a first matrix material in a defined particle pattern. The green body is compacted by pressure between a first press punch, which forms the underside, and a second press punch, which forms an upper side of the machining segment, to form a compact body. The compact body is processed by temperature or by infiltration to produce the machining segment. The second press punch has depressions in a pressing surface where an arrangement of the depressions corresponds to the defined particle pattern of the first hard material particles.

Abstract: A method for producing a machining segment for a machining tool, where the machining segment is connectable to a basic body of the machining tool by an underside of the machining segment, includes producing a green body by placing first hard material particles in a first matrix material in a defined particle pattern and processing the green body by hot pressing under temperature and pressure between a first press punch, which forms the underside, and a second press punch, which forms an upper side of the machining segment, to form the machining segment, where the upper side is opposite from the underside. The second press punch has depressions in a pressing surface and an arrangement of the depressions corresponds to the defined particle pattern of the first hard material particles.

Abstract: A rotary electronic component capable of reducing an abrasion and a metal fatigue of a slider and extending a rotation life time compared to the conventional technology. A rotary electronic component is provided with a buffer member between a sliding portion of a slider and a rotor. Thus, the sliding portion is energized toward the annular electrode with a proper elastic force and the sliding portion is held. Because of this, vibration of the sliding portion is suppressed and metal fatigue of the slider can be reduced. Furthermore, since the lubricant is impregnated into the buffer member and a part of the buffer member is in contact with the annular electrode, the lubricant can be applied on the annular electrode. Consequently, the sliding portion slides smoothly and the abrasion of the contact portion can be further reduced. In addition, since the buffer member functions to wipe the surface of the annular electrode, foreign substances such as dust on the annular electrode are collected.

Abstract: Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 ?in.

Abstract: A composition that can be used for abrasive processing is disclosed. The composition includes an organic bond material, an abrasive material dispersed in the organic bond material, and a plurality of microfibers uniformly dispersed in the organic bond material. The microfibers are individual filaments having an average length of less than about 1000 ?m. Abrasive articles made with the composition exhibit improved strength and impact resistance relative to non-reinforced abrasive tools, and improved wheel wear rate and G-ratio relative to conventional reinforced tools. Active fillers that interact with microfibers may be used to further abrasive process benefits.

Abstract: A method of manufacturing polishing layers for use in chemical mechanical polishing pads is provided, wherein a plurality of polishing layers are derived from a cake, wherein the formation of density defects in the cake and the surface roughness of the polishing layers formed are minimized.

Abstract: A bonded abrasive tool includes a bonded abrasive body having a bond matrix material including an organic bond material, abrasive grains contained within the bond matrix material, and chopped fiber bundles within the bond matrix material. The tool further has a porosity within the bonded abrasive body, wherein a majority of the porosity includes pores surrounding the chopped fiber bundles.

Abstract: Abrasive articles including a body having a first abrasive layer, a second abrasive layer and one or more reinforcing layers for use with cordless tools have a reduced thickness with respect to conventional counterparts. Techniques for producing and using such abrasive articles are described. In one embodiment, the first abrasive layer and the second abrasive layer comprise abrasive particles in a bond material. In an embodiment, a reinforcing layer is disposed between the first abrasive layer and the second abrasive layer. In a particular embodiment, the body comprises an average thickness of not greater than about 5 mm. In another particular embodiment, the abrasive particles can comprise silicon carbide.

Abstract: A bonded abrasive tool includes a bonded abrasive body having a bond matrix material comprising an organic bond material, abrasive grains contained within the bond matrix material, and not greater than about 5 vol % chopped fiber bundles within the bond matrix material. The tool further has a porosity within the bonded abrasive body, wherein a majority of the porosity comprises pores surrounding the chopped fiber bundles.

Abstract: An abrasive article comprising an abrasive particle including a core comprising a compressible material, an intermediate layer comprising a binder material overlying an exterior surface of the core, and an outer layer comprising abrasive grains overlying the intermediate layer.

Abstract: An abrasive article includes an abrasive layer having an array of protrusions. The abrasive layer has a thickness not greater than about 500 mils. The abrasive article is free of a backing layer.

Abstract: A flexible sanding composite in accordance with the principles of the invention includes about 10% to about 70% by weight liquid component, such as polybutene and/or oleic acid; about 30% to about 80% by weight abrasive material including calcium carbonate and aluminum oxide; and about 0% to about 5% by weight synthetic rubber. The invention also includes a method of removing dirt or contamination from a surface, or flattening surface irregularities, which includes rubbing the flexible sanding composite against the surface repeatedly until the dirt or contamination is diminished.

Abstract: Lofty open nonwoven abrasive articles, unitized abrasive wheels, and convolute abrasive wheels include a dipodal aminosilane. Methods of making the abrasive articles are also included.

Abstract: A polishing cloth used in the chemical mechanical polishing treatment comprises a molded body of (meth)acrylic copolymer having an acid value of 10 to 100 mg KOH/g and a hydroxyl group value of 50 to 150 mg KOH/g.

Abstract: The present invention provides a polishing pad. The polishing pad comprises a transparent part and a high molecular weight layer. The transparent part has an uneven side surface and the profile of the uneven side surface is selected from a group consisting of a serrated shape, a wavy shape and a toothed shape. The high molecular weight layer encircles the transparent part.

Abstract: A polyurethane adhesive composition, formed by combining a non-blocked urethane prepolymer and a polymeric polyol, is used for preparing a coated abrasive tool. The polyurethane adhesive composition is applied over a substrate to thereby form a polyurethane-adhesive-composition-coated substrate. Curing the polyurethane-adhesive-composition-coated substrate forms a polyurethane-adhesive-coated substrate. An abrasive material is applied over the substrate at a time selected from the group consisting of prior to, after, and simultaneously with, the application of the polyurethane adhesive composition to the substrate, to thereby form the coated abrasive tool. The coated abrasive tool preferably includes a polyurethane adhesive resin coating over the substrate, the resin coating being formed from a polymerization reaction of a non-blocked urethane prepolymer and a phenoxy resin.

Abstract: A bonded abrasive tool includes a bonded abrasive body having a bond matrix material comprising an organic bond material, abrasive grains contained within the bond matrix material, and chopped fiber bundles within the bond matrix material. The tool further has a porosity within the bonded abrasive body, wherein a majority of the porosity comprises pores surrounding the chopped fiber bundles.

Abstract: A method and apparatus for planarizing a substrate are provided. A substrate carrier head with an improved cover for holding the substrate securely is provided. The cover may have a bead that is larger than the recess into which it fits, such that the compression forms a conformal seal inside the recess. The bead may also be left uncoated to enhance adhesion of the bead to the surface of the groove. The surface of the cover may be roughened to reduce adhesion of the substrate to the cover without using a non-stick coating.

Abstract: A ceramic sprayed member comprises a substrate and a ceramic sprayed coating thereon. Splats have been removed from the surface of the sprayed coating, typically by blasting. The ceramic sprayed member with improved plasma resistance mitigates particle contamination of wafers and enables stable manufacture when used in a halogen plasma process for semiconductor fabrication or the like.

Abstract: The disclosure is directed to an abrasive article. The abrasive article includes a backing having a major surface and a make layer. The make layer is disposed over the major surface of the backing. The make layer includes abrasive grains and a photoinitiator that increases the depth of ultraviolet cure of the make layer by at least about 50% compared to bis(2,4,6-trimethyl benzoyl) phenyl phosphine oxide. The disclosure is also directed to a method for forming the abrasive article.

Abstract: In one embodiment is provided a method of making an abrasive backing having a smooth surface comprising the steps of providing a paper having a first paper surface and a second paper surface; applying a first synthetic polymeric layer comprising a first synthetic polymeric composition to the first paper surface; and applying a second synthetic polymeric layer comprising a second synthetic polymeric composition to the first synthetic polymeric layer. The method is used to prepare fine abrasive backings having a smooth exterior surface for preparation of fine abrasive papers.

Abstract: There is provided a chemical mechanical polishing pad which has a circular polishing surface and a non-polishing surface that is the back side of the polishing surface and incorporates an information recording medium that is readable or readable/writable by an electromagnetic wave in a noncontact manner and in which the position of the center of gravity of the information recording medium in the radial direction of the polishing surface is preferably within a range of 0 to 10% or 80 to 100% of the radius of the polishing surface in the direction from the center on the radius of the polishing surface toward the periphery of the polishing surface.

Abstract: A method of producing abrasive tools with abrasive particles consisting of Al2O3 has the steps of producing a mixture of initial components with particles of Al(OH)3, forming blanks of an abrasive tool from the mixture of the initial components with the particles of AL(OH)3, subsequently producing the abrasive tools with the abrasive particles of Al2O3 by subjecting the blanks to a heat treatment such that the particles of Al(OH)3 are converted into the abrasive particles of Al2O3 in the tools, wherein the forming includes rolling a sheet from the mixture of the initial components with the particles of Al(OH)3 before the heat treatment and conversion of the particles of Al(OH)3 the abrasive particles of Al2O3 which particles of Al(OH)3 are softer than the abrasive particles of Al2O3 and therefore do not damage a rolling equipment, and thereafter separating the blanks of the abrasive tools from the sheet for the subjecting to the heat treatment.

Abstract: A curable emulsion comprises: an oil phase comprising blocked polyisocyanate and curative; and an aqueous phase comprising at least partially neutralized crosslinked copolymer of monomers comprising at least one free-radically polymerizable carboxylic acid and at least one of an alkyl or alkaryl (meth)acrylate. In some embodiments, the curable emulsion further comprises nonionic surfactant. Methods of making the curable emulsions and their use in the manufacture of abrasive articles are also disclosed.

Abstract: An object of the invention is to provide a polishing pad having the excellent slurry retaining properties and the large removal rate and a composition for a polishing pad which can form such the polishing pad. A composition for polishing pad of the invention is comprising a water-insoluble matrix material containing a crosslinked polymer and a water-soluble particle dispersed in the water-insoluble matrix material. The elongation remaining after breaking is 100% or less when a test piece comprising the water-insoluble matrix material is broken at 80° C. according to JIS K 6251. A polishing pad of the invention is that at least a part of the polishing pad comprises the composition for polishing pad.

Abstract: Foamed thermoplastic polymeric mechanical planarization polishing pads (“MP pads”) made with supercritical fluids are presented. A supercritical fluid foaming agent is dissolved in a thermoplastic polymer. A rapid change in the solubility and volume of the supercritical fluid foaming agent in the thermoplastic polymer results in foaming of the thermoplastic polymer. Foamed thermoplastic polymeric MP pads are advantageously both significantly and uniformly porous.

Abstract: It is an object of the invention to provide a composition for forming a polishing pad comprising substances having specific functional groups exhibiting excellent hydrophilic properties and the like, a crosslinked body for polishing pad as well as a polishing pad with excellent water resisting and durability which exhibits excellent polishing performance including a high removal rate and method for producing thereof. The composition for forming a polishing pad comprises a crosslinkable elastomer having no carboxyl, amino, hydroxyl, epoxy, sulfonic acid and phosphoric acid groups, and a water-insoluble substance having at least one functional group selected from the group consisting of carboxyl, amino, hydroxyl, epoxy, sulfonic acid and phosphoric acid groups. And a water-soluble substance such as cyclodextrin may be contained. A polishing pad can be manufactured using the composition above or the crosslinked body for polishing pad, and porous polishing pads may also be obtained.

Abstract: Surface conditioning articles comprising an organic matrix and water-based organic binders are reported. The water-based organic binders include a first binder and a second binder with abrasive particles dispersed and adhered within the second binder. The first binder comprises a mixture of a phenolic resin and a carboxylated butadiene-acrylonitrile copolymer latex, in the range of weight ratio of dry materials of said latex versus said phenolic resin of 90/10 to 60/40.

Abstract: A curl-resistant, antislip abrasive backing which includes a polymer-reinforced paper having a first surface and a second surface; a synthetic polymeric layer bonded to the first surface; and an amorphous, rubbery polymer film layer bonded to the second surface. Also provided is a curl-resistant, antislip abrasive paper which includes a polymer-reinforced paper having a first surface and a second surface; a synthetic polymeric layer bonded to the first surface; a layer of abrasive particles bonded to the synthetic polymer layer; and an amorphous, rubbery polymer film layer bonded to the second surface. By way of examples, the amorphous, rubbery polymer may be a polyester elastomer or an amorphous, rubbery polypropylene.

Abstract: A resilient abrasive article includes a resilient elongatable substrate, abrasive particles adhesively bonded to the substrate with a flexible make coat, and a hard size coat applied over the abrasive particles and flexible make coat. The size coat provides an anti-loading layer which is applied thinly enough to prevent the size coat from cracking and tearing the substrate during use.

Abstract: A polymeric foam finishing pad is made by attaching an array of foam fingers to a suitable support substrate. The foam fingers are attached to the substrate in a continuous strip of interconnected fingers or may be individually inserted into a support substrate and attached to the substrate by an adhesive layer. Each of the foam members is preferably formed in and cut from an advancing foam strip and folded and inserted into a preformed opening contained in the support substrate, such that each foam member forms a pair of fingers that extend from the front face of the support substrate. The outer tip of each foam finger may include a pair of slits extending into the foam member from the outer tip to divide each outer tip into a plurality of contact tips, thereby increasing the amount of surface contact between the finishing pad and the surface being finished. The tips of the fingers may also be provided with abrasive particles to provide a more aggressive pad finishing surface.

Abstract: In the method for the manufacture of dental tools for the treatment of surfaces, a rubber core serving as a carrier layer is first applied by injection molding onto the spindle of the tool, and the abrasive layer comprising the abrasive grains is subsequently applied to the carrier layer. In another method for the manufacture of dental tools for different treatments of surfaces, more particularly for coarse grinding, finishing, and polishing, rubber-elastic masses of different degrees of hardness are used for the abrasive parts of the tools according to the intended treatment, and abrasive grains of the same size are embedded in the rubber-elastic mass of these parts.

Abstract: A method for production of stone pattern processing mills including the steps of application of compression to resin, cellulose, and milling material in a mold module. The resin and milling material are combined to form milling granules to be bound to the cellulose substances so as to form a milling grain cellulose layer. The backside of the milling grain cellulose layer is covered with suitable flexible substances to form a hollow-set machine/grind cushion meant for coupling with a mill chassis for use. Alternatively, the backside of the machine/grind cushion may be filled with flexible or hard material so as to form a one-piece mill.

Abstract: A resilient abrasive article includes a resilient elongatable substrate, abrasive particles adhesively bonded to the substrate with a flexible make coat, and a hard size coat applied over the abrasive particles and flexible make coat. The size coat provides an anti-loading layer which is applied thinly enough to prevent the size coat from cracking and tearing the substrate during use.

Abstract: A polishing tool for polishing optical and technical glass, semiconductors, ceramics and other materials has a high concentration of cerium dioxide or aluminum oxide particles in the quantity of 85-96% by weight, and a high molecular binder based on synthetic rubber and including a combination of high-molecular components and other components for vulcanization, plasticization and stabilization.

Abstract: A method for manufacturing a foraminous abrasive article whereby abrasive particles are concentrated in an external surface region of a foraminous substrate. The method includes the steps of: providing a foamable, hardenable, liquid resin composition and a foraminous substrate having an external surface; foaming the resin composition effective to disperse a plurality of gas bubbles throughout the resin composition; applying the foamed resin composition to the external surface of the substrate to form a foam coating layer having an upper surface; applying a plurality of abrasive particles to the upper surface of the foam coating layer; heating the foamed coating layer effective to eliminate the gas bubbles from the foamed coating layer; and hardening the resin composition to attach the abrasive particles to the substrate. The invention also concerns the foraminous abrasive article products of this method.

Abstract: An abrasive sheet has an abrasive particle layer formed on a surface of a thin flexible resin film. The abrasive sheet is produced by the steps of preparing a releasable film, forming a thin flexible resin film layer on a release agent applied surface of the releasable film and forming an abrasive particle layer on an upper surface of the resin film layer. Thereafter, the resin film having the abrasive particle layer formed thereon is removed from the releasable film, and the resin film having the abrasive particle layer formed thereon is cut into any suitable size. The abrasive sheet can provide higher polishing power during the polishing operation, but it polishes a surface while tracing or following any orange peel on the surface. Therefore, the abrasive sheet is effective for use as the polishing tool that can replace the fine compound buffing process currently utilized in the automobile repairing industry.

Abstract: In a method for removing metal from the surface of a workpiece by continuously rubbing the surface with a tool in a friction-inducing manner and in the presence of a friction-enhancing agent (an anti-lubricant) and in which a thin layer of the friction-enhancer must be available at the tool surface, there is provided a tool which carries the friction-enhancing agent in the form of a composition of an abrasive and a rubbery solid siloxane reaction product admixed with a liquid, mobile, anti-lubricant siloxane stably dispersed therewithin, and the use of the tool to excoriate and condition the surface by removing therefrom the oxide film thereon and leaving its place a siloxane film, and a conditioned metal surface having siloxane molecules each individually bonded directly to the metal over a relatively large area of the surface to provide a relatively uniform siloxane layer.

Abstract: A method of making abrasive articles which includes the steps of sandwiching and adhering abrasive particles between two sheets of fiber where the particles have a major cross-section dimension greater than the thickness of the sheets into resultant second sheets. The resultant second sheets are then adhered together by lamination under pressure so that the abrasive particles of a second sheet enter the interstices between the abrasive particles of adjacent other second sheets to form an interlocking bond and increase the tensile strength. The sheets are preferably cut from a processed strip prior to lamination. Prior to lamination the second sheets may be coated with one or both of a liquid rubber and a thermosetting resin. If resin is used the stack is heated as it is pressure laminated. The application of rubber and resin may be in the alternative. The application of rubber imparts flexibility while the resin upon curing imparts hardness.

Abstract: Abrasive articles and methods for their manufacture are described. The articles are screen abrasive articles including a durable backing member having a patterned array of portions thereon arranged around a plurality of openings extending through the backing with the openings comprising between about 20% and about 80% of the total area of the backing. A coating of abrasive material is adhesively affixed to the array of portions on the backing, forming abrasive surfaces arranged around the openings to cooperatively function as a single abrasive surface while the openings allow debris to pass through the article during abrasive applications. In at least one aspect of the invention, the portions of the backing include a plurality of first surface portions and a plurality of second surface portions having surface areas greater than the surface areas of the first portions.

Abstract: A composition comprising an inorganic filler and binder component containing a glassy polymer and a rubbery polymer is provided. The glassy polymer contacts and encapsulates the filler. The compositions are especially useful in the fabrication of flexible magnetic recording media and abrasive articles.

Abstract: A method for making abrasive articles uses a soft, easily deformable and flexible preform having a high binder content. The binder gives the preform its integrity, and is present in greater quantity than the retaining powder. The preform can have superabrasive particles mixed therein, or added later. The preform allows even distribution of a small quantity of retaining powder for thin superabrasive articles. A porous layer may be added to the assembly for making an abrasive article, the porous layer absorbing the liquid binder, supporting the retaining powder and superabrasive particles to prevent lateral movement, and perhaps giving strength to the preform. The final assembly to be heated or sintered (preferably under pressure) for making the abrasive article, which may include any number of layers of superabrasive particles, porous layers and preforms.

Abstract: An open low-density abrasive article comprising in combination:(a) a lofty, open, nonwoven three-dimensional fibrous web formed of a plurality of interentangled randomly-extending polyamide staple fibers including points of intersection and contact between the fibers, the points of intersection and contact between the fibers being bonded together to form a three-dimensionally integrated structure throughout the web, wherein the fibers comprise surfaces and a fiber tenacity of less than 5 g/denier; (b) abrasive particles dispersed throughout the web and securely adhered to the surfaces of the fibers; and (c) resinous material dispersed throughout the web comprising (i) a hard phenolic resin formed as a cured product of a phenolic resin precursor distributed throughout the web and in contact with the fibers, and (ii) a modifier component of the type and in an amount effective to substantially prevent chemical degradation of the fibers while in contact with the phenolic resin precursor.

Abstract: An abrasive cleaning ball (1) is made of a mass of sponge rubber filled with abrasive grains (2) intimately mixed within the mass. The grains are constituted by short lengths of a wire made of an abrasive material that is polygonal in section, preferably square in section, and coated on its side surfaces with dried adhesive.

Abstract: A composite abrasive filament, including at least one preformed core at least partially coated with a hardened, abrasive-filled thermoplastic elastomer, exhibits increased abrading life over previously known abrasive filaments. Also disclosed are methods of making such filaments and using such filaments in article form to abrade a variety of workpieces.

Abstract: An abrasive filament, including a thermoplastic elastomer having abrasive particles dispersed and adhered therein, exhibits improved life over previously known abrasive-filled polymeric filaments. Methods of making abrasive filaments of the invention, articles including the abrasive filaments, and methods of abrading surfaces using the abrasive articles of the invention are also described.

Abstract: An improved polishing pad is provided comprising a solid uniform polymer sheet having no intrinsic ability to absorb or transport slurry particles having during use a surface texture or pattern which has both large and small flow channels present simultaneously which permit the transport of slurry across the surface of the polishing pad, where said channels are not part of the material structure but are mechanically produced upon the pad surface. In a preferred version of the invention, the pad texture consists of a macrotexture produced prior to use and a microtexture which is produced by abrasion by a multiplicity of small abrasive points at a regular selected interval during the use of the pad.

Abstract: A composite abrasive filament, including at least one preformed core at least partially coated with a hardened, abrasive-filled thermoplastic elastomer, exhibits increased abrading life over previously known abrasive filaments. Also disclosed are methods of making such filaments and using such filaments in article form to abrade a variety of workpieces.