Abstract: An air purifier (100) includes a detection unit (130) and a control unit (110). The detection unit (130) periodically detects environment information. The environment information indicates information relating to an environment around the air purifier (100). The control unit (110) determines whether or not the environment information satisfies a specific condition a plurality of times during the specific time period (Ts) corresponding to an event within a prescribed period (Ta). In a case where the control unit (110) determines that the environment information satisfies the specific condition a plurality of times, the control unit switches a mode from a learning mode to an implementation mode. In the implementation mode, in a case where the environment information meets a trigger during the specific time period, the control unit (110) performs event operational control.

Abstract: The suction ashtray device is portable and is preferably battery powered with an electric motor. The suction ashtray device can include a rechargeable battery that can be charged using a power cable such as a Universal Serial Bus cable. A pipe bowl can be placed on or above an inverted cone-shaped top. When the suction ashtray is powered on, ash and any other particles are vacuumed through the top into a catch compartment. Some embodiments can include an ashtray attachment. The ashtray attachment connects to the cyclone top. The ashtray attachment includes a plurality of grooves able to hold a cigarette or similarly sized smoking apparatus. A user can place a cigarette in a groove so that the ash can fall into the cyclone top.

Abstract: The suction ashtray device is portable and is preferably battery powered with an electric motor. The suction ashtray device can include a rechargeable battery that can be charged using a power cable such as a Universal Serial Bus cable. A pipe bowl can be placed on or above an inverted cone-shaped top. When the suction ashtray is powered on, ash and any other particles are vacuumed through the top into a catch compartment. Some embodiments can include an ashtray attachment. The ashtray attachment connects to the cyclone top. The ashtray attachment includes a plurality of grooves able to hold a cigarette or similarly sized smoking apparatus. A user can place a cigarette in a groove so that the ash can fall into the cyclone top.

Abstract: A drying block structure is provided, including a main body and a protective layer. The main body has a honeycomb and substantially circular shape. The protective layer covers the main body and has a porous structure. The main body and the protective layer are integrally formed as one piece.

Abstract: An apparatus for safely enabling air filtering by temporarily joining a box fan to a replaceable air filter includes: (a) an air chamber frame with a rear portion that is configured to accommodate the replaceable air filter, (b) a frame stabilizing means that includes a front mounting platform which is configured to temporarily hold a box fan that is oriented to pull air through the filter, (c) a gasket that is configured to attach to the frame's front surface and minimize air flow around the gasket and into the frame, (d) a vent door located in the frame and configured to open to allow air to enter the frame's interior region when the filter is clogged, (e) an alarm mechanism attached to the vent door and configured to provide a signal when the door is been opened, and (f) an alarm device configured to receive the alarm mechanism's signal and provide an alarm that the air filter needs replacement.

Abstract: Embodiments disclosed herein provide an apparatus to enable smooth and safe assembly of functional modules to computer chassis. The apparatus includes a chassis and a pair of racks mounted to the chassis. Each rack has a plurality of gear teeth formed thereon. A module having a housing is slidably coupled to the chassis and disposed between the pair of racks. A pair of gear pinions are rotatably mounted to the housing and meshed to the gear teeth of one of the racks. A damping member is coupled between each gear pinion and the housing. A sliding movement of the housing relative to the chassis rotates the pair of gear pinions to roll over along the gear teeth. During the sliding movement of the housing, the damping member exerts a resistance force against the housing, to reduce the movement speed of the housing.

Abstract: One aspect of the technology relates to a recirculation filter. The recirculation filter has a first outer layer defining at least a portion of a first flow face of the recirculation filter, where the first flow face is configured to be positioned adjacent to a sensitive component in an electronics enclosure. A second outer layer defines at least a portion of a second flow face of the recirculation filter. A filter material layer is disposed between the first outer layer and the second outer layer. The filter material layer has a central region, wherein a substantial portion of the central region is offset from the first flow face of the recirculation filter. Other aspects are also described.

Abstract: Avionic LRUs having increased temperature tolerances and other desirable properties are provided, as are aircraft systems containing such high temperature avionic LRUs. In one embodiment, the avionic LRU includes at least one microelectronic device and an LRU housing, which contains an enclosed cavity in which the microelectronic device is located. The LRU housing further includes an electrically-routed housing wall having an inner principal surface or frontside, which partially bounds the enclosed cavity and to which the microelectronic device is bonded or attached. The avionic LRU further includes a first LRU connector interface having a first LRU terminal array. The first LRU terminal array projects from the LRU housing and is electrically coupled to the microelectronic device through the electrically-routed housing wall. The LRU connector interface is configured to matingly engage the receptacle connector interface to support LRU operation when the LRU is removably mounted to the avionic LRU receptacle.

Abstract: To prevent evaporated flux from being attached to rotation axes of motors which rotate fans positioned in a preheating zone, a main heating zone and a cooling zone and being solidified, the evaporated flux is efficiently and surely collected with the flux liquefying before the flux is solidified and having fluidity. A drain portion 20 constituting a flux collection apparatus 10A is formed at a side of a motor base 16 opposed to the fan and at a circumferential portion of the rotation axis 14. A surface of the drain portion 20 opposed to the fan is formed as an inclined surface 20A which is inclined from a level position of the motor base 16 to a discharge port 46 provided at a back side of the motor base 16.

Abstract: Solar cell modules for converting solar energy into electrical energy, such as used in a concentrating photovoltaic system. The modules have a first ventilating opening in the module housing; and a ventilating subassembly mounted on the module housing and disposed over the ventilating opening in the module housing. The ventilating subassembly has a housing having a first chamber adjacent to and in communication with the first ventilating opening in the module housing; a second chamber adjacent to the first chamber, the second chamber having a second ventilating opening to the external environment; and a filter membrane separating the first chamber from the second chamber to allow air to flow between the first chamber and the second chamber through the filter membrane.

Abstract: Air filter and cable management assemblies for network communication systems are disclosed. The assemblies include filters that cover one or more communication line cards and their associated connection panels. The assemblies also include cable support structures with cable support brackets that support connected cables while restricting airflow so that airflow is forced through the filter towards the connection panels. This airflow can then pass into housings for the line cards and other circuitry, such as fabric cards, to provide desired cooling. Fan subsystems can also be provided to facilitate airflow. Advantageously, the disclosed air filter and cable management assemblies allow for filtered cooling of stacked network communication systems while greatly simplifying the complexity of the filter and cable installation and maintenance.

Abstract: A filter fan of a switch cupboard or of an electrical and/or electronic device placed in a casing with a blast producing an air flow and with a filter element (3) which is placed in the air flow and separates a clean side, on which the blast is placed, from an unclean side, wherein the filter element is held in a frame which can be fixed on the casing by covering the air passage opening penetrating through the casing wall and wherein a protective grid (4) is placed between the filter element (3) and the blast, the invention proposes that a bridging-free distance is provided between the filter surface of the filter element (3) and the protective grid (4), wherein this distance is dimensioned so as to make possible the discharge of water drops on the clean side surface of the filter element and to avoid a contact of the water drops with the protective grid.

Abstract: A disk drive includes a disk drive enclosure and a disk rotatably mounted to and within the disk drive enclosure. A desiccant canister is in fluid communication with the disk drive enclosure. The desiccant canister includes a canister housing and a desiccant material within the canister housing. The desiccant canister includes a water absorption restriction that limits a steady-state hourly water absorption rate of the desiccant to not exceed 2% of the desiccant's total capacity for water absorption.

Abstract: Filters, methods, and an apparatus for filling housings and both encapsulated porous and non-porous spaces with contaminant control media for placement in electronic enclosures, such as disk drive enclosures, are disclosed. In one embodiment, a filter assembly includes a housing comprising an internal cavity configured to receive contaminant control media, a fill port in communication with the internal cavity, and an opening in communication with the internal cavity, and filter media at least partially covering the opening; and contaminant control media occupying the internal cavity. Contaminant control media is deposited within the internal cavity via the fill port by means of creating a negative pressure within the internal cavity. The application of a partial vacuum facilitates movement of the contaminant control media into the internal cavity and minimizes the contamination of the filter, housing, and work space common to other loose fill filling methods.

Abstract: A housing includes a wall having an aperture and a vented panel, the vented panel including a first wall having a first side and a second side and an opening, a second wall having a first side, a second side facing the first wall first side and an opening, and a panel interior, the housing further including an air filter having an inner side and an outer side relative to the interior mounted against the second wall first side over the second wall opening with the filter inner side facing the housing interior, a water dam mounted along the filter bottom portion at the filter inner side, the water dam being higher than any water barrier mounted along the filter bottom portion outer side, whereby, any water reaching the filter bottom is substantially prevented from draining into the housing interior. Also an air filter usable in the housing.

Abstract: An avionic bay with a device for filtering cooling air for aircraft electrical equipment. The device includes at least two filtration grilles provided with apertures and which are disposed successively one behind the other in order to filter the air drawn from a cooling air vein before distributing it to an aircraft electrical equipment item. The apertures of the second grille are offset transversely in relation to the apertures of the first grille.

Abstract: Embodiments provide methods, apparatuses, and articles of manufacture for filtering particulates from an airflow directed at a heat exchanger. A blade may gather the filtered particulates. The gathered particulates may then be exhausted.

Abstract: A filter for an electronics cooling unit of a telecommunications base station, the electronics cooling unit adapted to receive fresh air into a housing of the cooling unit through an opening communicating with the external environment. The filter includes a structural support configured to be mounted to said housing, a gasket sealingly engaging the structural support and adapted to engage the housing; and a filter media supported by the structural support, the filter media being free of a membrane type layer and including a fiber entanglement selected to prevent ingress of water sufficient to pass a salt fog test consistent with GR-487-CORE and in accordance with ASTM B 117.

Abstract: A particle-capturing device configured to remove particles from a plurality of air-streams flowing within a disk enclosure of a HDD. The particle-capturing device includes a particle-capturing filter, and a filter holder. The filter has a front side and a back side. The filter holder holds the filter. The filter holder has a first opening configured to allow a first in-bound air-stream to flow in-bound through a first portion of the filter, which is disposed in the first opening, from the front side out through the back side of the filter, and a second opening configured to allow an out-bound air-stream to flow out-bound through a second portion of the filter, which is disposed in the second opening, from the back side out through the front side of the filter. A HDD and a particle-capturing system that include the particle-capturing device are also provided.

Abstract: The present invention relates to an air cleaner for the removal of pollutants from an air flow by a filter module, the filter module of which includes at least one permeable filter layer for the accumulation of pollutants on the filter layer. A bypass channel will be provided and established such that part of the unfiltered air flow may bypass any filter layer. Such a bypass channel does not compromise the cleaning effect of the filter module, at least as long as the filter layer has not yet been clogged with pollutants since in this case the biggest part of the air flow will take the major path through the filter layer due to lack of resistance. Only if the filter layer is clogged and if resistance for the air flow increases, air will obviously flow through the mentioned bypass channel.

Abstract: An apparatus, system, and method for preventing server contamination. The system includes a server rack and a contamination filter secured to the server rack. The contamination filter may be configured to filter particulate substances and/or chemical substances from air. The system may include a reaction coupon configured to indicate the presence of particulate substances and/or chemical substances in the air.

Abstract: The invention relates to a filter system for cleaning the air of an enclosure to be ventilated, especially for fiber-optic equipment. The enclosure includes a ventilation opening and is associated with an insertion shaft located proximate to the ventilation opening. The filter system includes an insertion part including a filter housing for accommodating at least one filter element and further including a handle for inserting the insertion part into the insertion shaft. The filter housing is configured so as to cover the ventilation opening when the filter housing is in a working position within the insertion shaft. The filter system includes an insertion arrangement provided at a first end portion of the insertion shaft for inserting the insertion part into the insertion shaft.

Abstract: It is an object to provide a vent filer that can reduce contaminants diffusing through the vent filter into the inside of a housing, and has high diffusion efficiency and low pressure loss. The vent filter has an adhesive layer 1 having a through-hole 1a at least in one area; a flow path member 2 provided with a flow path 2a in communication with the through-hole 1a; and an air-permeable membrane 3 covering the flow path member 2 and part of the adhesive layer 1, wherein the peripheral portion 3a of the air-permeable membrane 3 is fixed to the adhesive layer 1 and the flow path member 2 is held within a hollow portion formed between the adhesive layer 1 and the air-permeable membrane 3.

Abstract: A filter for an electronics cooling unit of a telecommunications base station, the electronics cooling unit adapted to receive fresh air into a housing of the cooling unit through an opening communicating with the external environment. The filter includes a structural support configured to be mounted to said housing, a gasket sealingly engaging the structural support and adapted to engage the housing; and a filter media supported by the structural support, the filter media being free of a membrane type layer and including a fiber entanglement selected to prevent ingress of water sufficient to pass a salt fog test consistent with GR-487-CORE and in accordance with ASTM B 117.

Abstract: A thermal management apparatus includes an electrohydrodynamic fluid accelerator in which an emitter electrode and another electrode are energizable to motivate fluid flow. One of the electrodes includes a solid solution formed of a solvent metal having a first performance characteristic and a solute material having a second performance characteristic. The first and second performance characteristics are exhibited substantially independently in the electrode as the solvent metal and solute material remain substantially pure within the solid solution. A method of making an EHD product includes providing an electrode with such a solid solution and positioning the electrode relative to another electrode to motivate fluid flow when energized.

Abstract: A filter for an electronics cooling unit of a telecommunications base station, the electronics cooling unit adapted to receive fresh air into a housing of the cooling unit through an opening communicating with the external environment. The filter includes a structural support configured to be mounted to said housing, a gasket sealingly engaging the structural support and adapted to engage the housing; and a filter media supported by the structural support, the filter media being free of a membrane type layer and including a fiber entanglement selected to prevent ingress of water sufficient to pass a salt fog test consistent with GR-487-CORE and in accordance with ASTM B 117.

Abstract: A computer system includes a computer chassis housing a processor and having a dust filter disposed in an airflow pathway through the computer chassis. A plurality of electrodes is disposed across an area of the dust filter, and a voltage source is provided having a negative terminal and a positive terminal. A controller selectively couples a first subset of electrodes to the negative terminal and selectively couples a second subset of electrodes to the positive terminal, wherein a voltage differential between the first subset of electrodes and the second subset of electrodes is sufficient to cause electrostatic movement of dust from an area of the dust filter near the first subset of electrodes to an area of the dust filter near the second subset of electrodes.

Abstract: A computer case includes a housing, a first dust screen and a second dust screen. The housing defines two openings at opposite ends of the housing. The first dust screen and the second dust screen each include a piece of nonwoven fabric and a bracket, and are respectively covered on the two openings. The nonwoven fabric is covered on the bracket. The bracket includes a rim and a plurality of reinforcement ribs connected to an inner side surface of the rim.

Abstract: This patent pertains to self-cleaning fan assemblies. One implementation includes electronic components positioned in an enclosure. This implementation also includes a fan assembly that is configured to impart rotational force on air to move the air from outside the enclosure to inside the enclosure and around the electronic components. The fan assembly is further configured to separate contaminants from the air based upon differences in density between the contaminants and the air.

Abstract: An air moving apparatus includes an axial fan and an electrostatic device. The axial fan has a rotatable shaft defining a central axis of the axial fan, a plurality of blades secured to the shaft, and an air inlet opening. The electrostatic device is disposed immediately upstream of the air inlet opening of the axial fan, and includes a collector and an emitter. In one embodiment, the electrostatic device includes a cylindrical collector coupled to ground and has a central axis aligned with the central axis of the axial fan. The electrostatic device further includes a plurality of emitter wires coupled to a terminal of a direct current source and extending lengthwise within the cylindrical collector. During operation of the axial fan, the application of an electrical potential between an emitter and a collector causes ionic air movement radially outwardly away from a central axis of the axial fan.

Abstract: An apparatus, system, and method for preventing server contamination. The system includes a server rack and a contamination filter secured to the server rack. The contamination filter may be configured to filter particulate substances and/or chemical substances from air. The system may include a reaction coupon configured to indicate the presence of particulate substances and/or chemical substances in the air.

Abstract: The present invention relates to a cooling system. More particularly, the present invention relates to a cooling system for removing dust from air being drawn for cooling heat generation components of an electronic product, for improving convenience in maintenance or repair of the electronic product.

Abstract: The PSA Filter is a non-electronic air filter utilized in the interior or exterior of any device which uses air movement as a means of ventilation or circulation including, but not limited to a computer, printer or any other type of electronic or non-electronic devices. This invention consists of a base substrate which is covered with a PSA (pressure sensitive adhesive); such that the PSA material applied to the substrate is the active filtering element, this PSA coated substrate is inserted into or on a device for the purpose of trapping dirt, dust, pollen, fibers, and any additional types of air borne contaminants, that may inadvertently enter from the outside environment through factory installed vents, or that may be created inside of the device from its normal operations, thus said contaminants become trapped onto the PSA filter surface through air-circulation.

Abstract: Gas anti-diffusion assemblies are designed to slow, but not to block, the diffusion of a gas from or to an enclosed space to or from an open space, e.g., to slow the diffusion of air into or out of the housing for a hard disk drive from or out to the exterior of the housing. The assemblies typically have a laminate structure, i.e., are constructed of individual layers adhered or otherwise joined to one another in a stacked arrangement. The assemblies typically comprise alternating layers of polymeric film and adhesive with a mesh layer sandwiched or otherwise positioned within the assembly, and optionally comprises one or both of a filter layer and an absorbent layer.

Abstract: A ventilation device uses a cross-flow fan and one or more filters, where the filter preferably has a J-shape that at least partially surrounds the rotor of the cross-flow fan. In one embodiment, the filter includes a plurality of pleats, preferably along a bottom surface of the filter. The filters preferably remove particles, undesired gases, and micro-organisms. A filtration and ventilation system with at least one first ventilation device and at least one second ventilation device larger than the first ventilation device, as well as a method of filtering contaminants out of air using a personal ventilation device, are also disclosed.

Abstract: A fluid filter for preventing the introduction of fluid contaminants into an associated device is disclosed. The filter has a housing having an inlet chamber and an outlet chamber. The inlet chamber forms an inlet port of the fluid filter and the outlet chamber forms an outlet port of the fluid filter. A number of serially connected intermediate chambers are coupled between the inlet chamber and the outlet chamber. Each of the chambers contains an absorbent material for capturing the fluid contaminants and generally preventing their introduction into the associated device.

Abstract: A control device module for a motor vehicle includes a control device that has a closed housing in which a first internal pressure prevails, and at least one connecting device for coupling a connecting element of an electrical cable. A closed space is defined in the coupled state between the connecting device and the connecting element, in which closed space a second internal pressure prevails. The control device also includes a pressure compensating device for adapting the first and second internal pressures to an external pressure that acts on the control device module from outside.

Abstract: A fan is enclosed in the enclosure of an electronic apparatus. The fan discharges air out of a ventilation opening of the fan. Heat radiating fins are located in an air passage extending from the ventilation opening. A dust catcher is removably mounted on an outside surface of the enclosure into an opening of the enclosure. The dust catcher is located in the air passage between the heat radiating fins and the ventilation opening. The dust catcher serves to catch the dust in the air passage. The dust catcher is removed from the enclosure along with the dust.

Abstract: An air cleaner for an enclosed electronic device such as an electronic slot machine, for use in areas that have a high level of air contamination from cigarette smoking such as casinos, includes an active field polarized media air cleaner or other filters for removing sub-micron particles, tars and/or volatile organic compounds (VOC's). In addition, a shared air cleaner for removing sub-micron particles, tars and/or VOCs is coupled to a plurality of enclosed electronic devices, such as a cluster of electronic slot machines.

Abstract: The present invention comprises a filter system for a computing device including a frame. In one embodiment, end members on the frame are biased toward each other so that, when the frame is mounted on a cabinet of the computing device, the opposing end members tightly fit around a portion of the cabinet, the filter fitting within the frame. In one embodiment, a majority of the filter is visible to the user, largely unobstructed by the frame. As a result, the status of the filter may be evident to the user, thereby facilitating its cleaning or replacement. In some embodiments, the user may clean the filter in place, and in some embodiments, the user may easily remove the frame with its opposing end members from the computer cabinet thereby permitting the filter to be easily cleaned or replaced.

Abstract: A housing for a centrifugal fan includes a surrounding wall extending upwardly from a periphery of a bottom wall with an air inlet, and including a surrounding wall body defining an opening, a protruding wall body extending outwardly from the surrounding wall body, corresponding to the opening, and having a dust-discharging hole, and a shielding plate disposed on the protruding wall body. The surrounding wall body and the bottom wall cooperatively define an accommodation space communicated with the air inlet, and an air outlet communicated with the accommodation space. The protruding wall body, the shielding plate, and the bottom wall cooperatively define a turbulence space communicated with the accommodation space. The shielding plate is movable between a closed position to close the dust-discharging hole, and an open position to open the dust-discharging hole so as to permit fluid communication between the turbulence space and the outside environment.

Abstract: A reflow apparatus for solder joining electronic components to a substrate includes a reflow chamber, a conveyor to convey a substrate within the chamber, at least one heating element to provide heat to reflow solder on the substrate, and at least one system to remove contaminants generated from the reflow solder. The system is coupled with the chamber for passage of a vapor stream from the chamber through the system. The system comprises a contaminant collection unit in fluid communication with the vapor stream. The contaminant collection unit includes a coil and a collection container. The coil is configured to receive cooled gas therein. The arrangement is such that when introducing cooled gas in the coil, contaminants in the vapor stream condense on the coil, and when ceasing the introduction of cooled gas in the coil, contaminants in the vapor stream are released from the coil and collected in the collection container. Other embodiments and methods for removing contaminants are further disclosed.

Abstract: A filter element includes a flow-through element and a floor element that abut one another to form a crevice along a crevice length between the flow-through element and the floor element. The crevice traps a portion of particles that become dislodged from the flow-through element.

Abstract: A multifunction air purifying device which has functions for eradicating house dust mites, collecting dust and producing warm, cleaning air comprises of a main body (1) incorporates a printed circuit board (PCB) (5), an aspiring module (2) provided within said body, connected electrically to the PCB (5), multiple buttons disposed on a surface of the body (1) connect electrically to the PCB (5) and a handle (4) attached to the body (1). Said body (1) consists of a substrate (11), a cover (12) with a suction hole (121), and a base (13) with an exhaust hole (131). Said aspiring module (2) is composed of a housing (21) having an air intake (211) and an air outtake (212), a centrifugal fan (22), a motor (23), and a heating means (24).

Abstract: Filters, methods, and an apparatus for filling housings and both encapsulated porous and non-porous spaces with contaminant control media for placement in electronic enclosures, such as disk drive enclosures, are disclosed. In one embodiment, a filter assembly includes a housing comprising an internal cavity configured to receive contaminant control media, a fill port in communication with the internal cavity, and an opening in communication with the internal cavity, and filter media at least partially covering the opening; and contaminant control media occupying the internal cavity. Contaminant control media is deposited within the internal cavity via the fill port by means of creating a negative pressure within the internal cavity. The application of a partial vacuum facilitates movement of the contaminant control media into the internal cavity and minimizes the contamination of the filter, housing, and work space common to other loose fill filling methods. Other aspects and embodiments are provided herein.

Abstract: A cyclone includes a cylindrical housing and has an inner diameter D. An inlet is near a first end of the housing. A deflection member can be positioned within the first end or the second end of the housing, depending on whether the cyclone is uniflow or reverse flow. An outlet tube is positioned within and extends from a second end or the first end of the housing (depending on whether uniflow or reverse flow). A bunker is formed between the outlet tube and an inner wall of the housing in a uniflow design and between the deflection member and the housing in a reverse flow design, and collects particles separated from an inlet gas stream. A gap between the deflection member and the outlet tube has a length in the range of approximately 0.4*D to 0.8*D. The length of the bunker is approximately greater than or equal to 1.5*D.

Abstract: A computing device having a cooling fan, a heat exchanger, and a filter disposed between the heat exchanger and the cooling fan.

Abstract: A dust collector is provided in the main body of a POS terminal so that the dust in the main body can be caught into the dust collector.

Abstract: A filter assembly for removing unwanted contaminants and other impurities from a filtrant stream entering the intake region of an underlying device. The filter assembly comprises a filter media appropriate for segregating and separating the impurities and contaminants from the filtrant stream, and a surrounding collar for providing structural support to the filter media that simultaneously provides a self-adhesive material. Such collar is formed from a self-adhesive material, and a binding solution like printers ink, which interact in conjunction with the portion of such filter media not constituting the filtering region, so that the resulting support collar is integrally connected to the filter media, and is non-tacky on its top surface. At the same time, the adhesive retains its adhesive properties on the bottom surface of the collar.

Abstract: In an apparatus for transferring a substrate, a partition wall is disposed in a vertical direction in a housing to divide an interior space of the housing into a first space and a second space. A pressure generating member divides the first space into an upper space and a lower space and moves in a vertical direction in the first space such that a positive pressure and a negative pressure are alternately generated in the upper space and the lower space. A substrate supporting member is movably disposed in the second space to support and to transfer the substrate. A plurality of gates is disposed on a side wall of the housing and the partition wall, and is opened and closed by the positive pressure and the negative pressure such that the particles are eliminated from the second space to an exterior space via the first space.