Abstract: An adsorbent molded article comprising granular absorbant and binder having sustained adsorption over an indefinite period; an adsorbent unit employing said adsorbent molded article; and a housing employing said adsorbent molded article or adsorbent unit.

Abstract: An apparatus includes a rigid housing having a plurality of sides removably engaged with the electronic device and a plurality of passageways for effectively channeling air through first and second directions. The apparatus further includes at least one rotary fan moving in a selected radial path situated along one of the sides, a disposable electrostatic filter bifurcating the passageways wherein the contaminants are trapped and a power supply source electrically coupled to the fans.

Abstract: The invention relates to a device for filtering contaminants, such as particulates and vapor phase contaminants, from a confined environment such as electronic or optical devices susceptible to contamination (e.g. computer disk drives) by improving performance and possibly incorporating multiple filtration functions into a unitary filter. Filtration functions include a passive adsorbent assembly and can include a combination of inlet, or breather filter and adsorbent filter. Moreover, recirculation filter, diffusion tube, and outside mount functions can be added to the filter depending on desired functionality within the enclosure.

Abstract: A filter device. The filter device comprises a first shaft, a second shaft separated from the first shaft by a predetermined distance, a filter looped around the first shaft and the second shaft and moved as the first and the second shafts rotate, and a brush contacting the filter. The brush removes filtered matter from the filter screen when an electronic device (projector) is started.

Abstract: A load-lock system includes a load-lock chamber arranged between a storage port which stores a substrate and a process chamber which processes the substrate in a process space maintained at a pressure lower than that in the storage port, and a dehumidifying unit which forms a dehumidified environment in the load-lock chamber. A system preferably includes another chamber between said storage port and said load-lock chamber, wherein said dehumidifying unit dehumidifies said another chamber.

Abstract: Filters and filtering methods for placement in an electronic enclosure, such as a hard disk drive housing, are disclosed. In one embodiment the filter includes a housing having a top, a base, and at least one sidewall extending from the top to the base, the housing defining an inlet port and an outlet port through the sidewall, and a breather port in the base, the housing further defining an internal volume. Adsorbent filter media is disposed within the internal volume of the housing such that the housing defines a first path for flow of fluid through the breather port in the base to the filter media and a second path for flow of fluid through the inlet port, into contact with the filter media, and out the outlet port.

Abstract: A multiple diffusion channel filter assembly is disclosed. The filter assembly provides filtration of air entering and exiting an electronic enclosure through a breather hole. In one implementation, the filter assembly contains a housing with an adsorbent component and a first diffusion channel and a second diffusion channel. In another implementation, the filter assembly contains a first layer and a second layer which surround an adsorbent component and a first and a second diffusion channel that are in fluid communication with the interior space defined by the first and second layers. In yet another implementation, the invention, includes a filter accessory containing a diffusion channel configured to work in conjunction with a separate filter assembly thereby adding an additional diffusion channel to the existing design.

Abstract: An air cleaning apparatus includes a blowing unit and a filtering unit which are easily removed from and installed in a cabinet, allowing the air cleaning apparatus to be easily cleaned. The cabinet included in the air cleaning apparatus may be used as a table. The cabinet is provided with a top panel of a predetermined area, is opened at a bottom thereof, and is provided on at least one side wall thereof with an air outlet port. A fan casing is installed in the cabinet to be drawn out from the cabinet in a horizontal direction. A blowing fan is installed in the fan casing to move air to the air outlet port. A filter casing is installed under the fan casing to be drawn out from the cabinet in the horizontal direction, and at least one filter is installed in the filter casing.

Abstract: The invention relates to a hood (10) for a filter ventilator, which is connected to an outside wall (40) of a space to be ventilated, in particular the outside wall (40) of a control box, circuit housing, or case for various kinds of devices, and which includes an air inlet (11), an air outlet (12), a filter (20) mounted in the air outlet and a maintenance portal (13), in particular for exchanging the filter (20). In order to enable effortless and rapid exchange of the filter, the maintenance portal (13) is made such that it can be closed by at least one pivotable flap 30.

Abstract: A gas recycling system which has a carbon dioxide collecting device for collecting gas containing carbon dioxide from a carbon dioxide source. In the system, at least part of the gas containing sulfur hexafluoride used as an electric insulation medium in a gas-insulated electric device is replaced with the carbon dioxide obtained by the carbon dioxide collecting device.

Abstract: An example airborne conductive contaminant handling system is described. The airborne conductive contaminant handling system may include a handling circuit that is configured to selectively pass an electric current through a conductive contaminant. The airborne conductive contaminant handling system may also include an attracting circuit that is configured to attract an airborne conductive contaminant towards the handling circuit, where it can be subjected to the electric current.

Abstract: There is disclosed an apparatus and method for protecting electronic devices against excessive heat build-up and particulate infiltration while implementing EMC shielding.

Abstract: A multilayer filter assembly for use inside an electronic enclosure, such as a hard disk drive enclosure containing a rotating disk, is disclosed. The filter assembly provides filtration of air entering the enclosure, as well as air circulating within the enclosure. The filter assembly is generally a single-piece unit that can be formed without a rigid frame, thus allowing the filter assembly to be produced at a reduced cost. In one implementation of the invention, the multilayer filter assembly contains at least two particulate removal layers covering, enclosing, and dividing at least two adsorbent regions. One of the adsorbent regions is configured to be placed flush against an interior wall of the electronic enclosure to allow air to flow in and out of the enclosure, while the other adsorbent region is configured to be placed in an upright position in the enclosure with exposed surfaces that allow airflow through this portion of the filter assembly.

Abstract: A breather bag filter assembly for use with an electronic enclosure, such as a hard disk drive enclosure containing a rotating disk, is disclosed. The filter assembly provides filtration of air entering and exiting an electronic enclosure through a breather hole. The filter assembly is a deformable sealed cavity that exchanges air with the drive enclosure as the air pressure inside the drive enclosure fluctuates. In one implementation of the invention the filter assembly contains three layers of material. Two layers of material form the exterior of the filter assembly surrounding a third layer that is composed of an adsorbent material.

Abstract: An adsorbent includes core particles containing an adsorbing material; a porous coating layer including a polymer material that coats the core particles; and an underlying layer containing a metal compound and disposed between the core particles and the porous coating layer. The porous coating layer is formed by spraying and applying a suspension or a solution containing the polymer material over the adsorbing material, or by immersing the adsorbing material into the suspension or the solution.

Abstract: A particle filter for microelectromechanical systems is provided that includes a particle trap formed on a substrate material. The particle trap includes an array of multidimensional geometric structures in an adjacent relationship. The geometric structures further define a plurality of multidimensional voids therebetween for trapping particles therein. The individual multidimensional geometric structures are formed by a plurality of vertically interconnected geometric shapes to define different configurations of voids between the adjacent geometric structures. In one embodiment of the filter system, an electrical bias is applied to the array of multidimensional geometric structures to facilitate attracting and trapping of particles in the filter.

Abstract: A self-cleaning filter and cooling system are disclosed for filtering ambient air used to cool the interior of an equipment enclosure. The system includes an enclosure for housing predetermined equipment to be cooled, the enclosure including an air intake port and an exhaust port. The system includes a blower for causing ambient air to be inducted into the enclosure through the air intake port and expelled from the exhaust port. The system also includes a filter that includes a predetermined filter media that covers the air intake port and the exhaust port. The filter moves relative to the air intake port and the exhaust port. The enclosure and blower are configured so as to create a single air flow path for equipment cooling and for discharging exhaust through the filter media to dislodge any particulate matter entrapped in the filter media.

Abstract: An ink tank is formed having a generally rectangular parallelepiped shape, and air/fluid separating members having air pores are provided around at least the corner portions of the generally rectangular parallelepiped. The inner faces of wall members forming the outer faces of the generally rectangular parallelepiped are formed with an inclination of a predetermined angle as to the outer face of the wall member which it faces.

Abstract: A filter assembly for use in a disk drive assembly is disclosed. The filter assembly is configured to remove contaminants within the drive assembly and to prevent entry of contaminants into the drive assembly. In one implementation the filter assembly includes a housing configured for placement in a disk drive assembly containing a rotating disk, the housing comprising an air scoop having an entrance configured for placement beneath the rotating disk in the drive assembly; and a major surface comprising a wall and an opening in the wall, the opening configured for receiving a filter material and being in fluid communication with the entrance to the air scoop. A filter element is positioned within the housing and configured so that a first portion of the element filters air directed from the air scoop, while a second portion of the element filters air from the exterior of the drive assembly, the first and second portions sealed by a common filter material placed over the opening in the major surface.

Abstract: A method and device for gradually equalizing air or gas pressures between substrate processing chambers prior to transfer of a substrate between the chambers. The device comprises a gas flow restrictor provided in the chamber wall that separates the chambers. A door typically reversibly seals the gas flow restrictor. During substrate processing in one of the chambers, the gas flow restrictor is sealed to maintain a partial vacuum pressure in the chamber. Prior to opening the wafer transfer gate between the chambers, the gas flow restrictor door is opened to facilitate the gradual flow of air or gas from the higher-pressure chamber, through the gas flow restrictor to the lower-pressure chamber and substantially equalize the pressures in the respective chambers.

Abstract: To provide a mounting structure for a gas adsorption filter and a housing equipped with the gas adsorption filter that make it possible to overcome the contradiction between achieving a further reduction in the size of airtight containers such as casings for magnetic storage disk devices, and ensuring improved control over moisture, noxious gases, and other types of contaminants in the airtight containers.

Abstract: A breather bag filter assembly for use with an electronic enclosure, such as a hard disk drive enclosure containing a rotating disk, is disclosed. The filter assembly provides filtration of air entering and exiting an electronic enclosure through a breather hole. The filter assembly is a deformable sealed cavity that exchanges air with the drive enclosure as the air pressure inside the drive enclosure fluctuates. In one implementation of the invention the filter assembly contains three layers of material. Two layers of material form the exterior of the filter assembly surrounding a third layer that is composed of an adsorbent material.

Abstract: A filter apparatus includes a filter panel having inner and outer surfaces and a configuration for completely covering a computer housing ventilation opening. The filter apparatus includes an adhesive layer permanently adhered to the inner surface of the filter panel. A thermochromic region is positioned on the outer surface of the filter panel which changes color as temperature increases. The thermochromic region includes an ink layer and a wax layer positioned atop the ink layer. The wax layer includes a thermochromic dye having a color different from the color of the ink layer. The color of the thermochromic dye blocks the color of the ink layer at an ambient temperature and is transparent to allow the ink layer color to be seen at an activation temperature. Therefore, the filter apparatus provides an indication when the filter is full and heat is building within the housing as a result.

Abstract: A method of using a substrate transport pod is suitable for manufacturing semiconductor devices with copper wiring and low dielectric insulating film having dielectric constants of less than 3. The method is based on loading the substrates into a pod from an atmosphere of a first process, and circulating a gaseous atmosphere through interior of the pod in such a way to selectively remove at least one contaminant including moisture, particulate substances or chemical substances, and to expose the substrates to a controlled atmosphere intermittently or continually while the substrates are held in the pod before they are unloaded from the pod and introduced into a second process. For a pod that is used to house the substrates for the purpose of retaining or transporting, the pod has a pod main body and a door that provides a hermetic seal, the pod is made primarily of a materiel that has moisture absorption factor of less than 0.

Abstract: An air filter device is installed on an exhaust device. The air filter device includes a filter net and one or more ultraviolet light-emitting diodes (UV LEDs). The filter net is disposed at an air passageway of the exhaust device. The UV LED is disposed on the exhaust device and located at one side of the filter net to irradiate UV light toward the filter net, hence accomplishing filtering and sterilizing effects to the air passing through the exhaust device and thus improving the quality of indoor air.

Abstract: The present invention includes a filtered mask enclosure having an exterior portion and interior regions within the exterior portion such that the interior regions have a filtering region and a purging region connected to the filtering region. The present invention further includes a method of removing a first contaminant in a gas phase, a second contaminant in a solid phase, and a third contaminant having an electrical charge from a purge gas and flowing the purge gas through a vicinity of a mask while exposing a wafer with light through the mask.

Abstract: A self-cleaning filter and cooling system are disclosed for filtering ambient air used to cool the interior of an equipment enclosure. According to exemplary embodiments of the present invention, the system comprises an enclosure for housing predetermined equipment to be cooled, the enclosure including an air intake port and an exhaust port. The system comprises a blower for causing ambient air to be inducted into the enclosure through the air intake port and expelled from the exhaust port. The system also comprises a filter that includes a predetermined filter media that covers the air intake port and the exhaust port. The filter moves relative to the air intake port and the exhaust port. The enclosure and blower are configured so as to create a single air flow path for equipment cooling and for discharging exhaust through the filter media to dislodge any particulate matter entrapped in the filter media.

Abstract: An airflow feedback control method and apparatus for fan filter unit (FFU) is proposed, which is designed for use with a fan filter unit that is widely used in semiconductor fabrication factories for dust-clearing purpose, for controlling the fan filter unit to generate a constant amount of airflow equal to a preset desired amount. The proposed FFU airflow feedback control method and apparatus is characterized by that it utilizes bell inlet as an airflow measuring nozzle and that airflow is used as feedback parameter to control the FFU, rather than utilizing motor speed as feedback parameter by prior art. This feature allows the fan filter unit to continuously generate a fixed amount of airflow equal to the preset desired amount even if there is a pressure change at the site of installation, thus lessening the problems of insufficient air change rate and sideward-going airflows.

Abstract: A filter apparatus includes a filter panel having inner and outer surfaces and a configuration for completely covering a computer housing ventilation opening. The filter apparatus includes an adhesive layer permanently adhered to the inner surface of the filter panel. A thermochromic region is positioned on the outer surface of the filter panel which changes color as temperature increases. The thermochromic region includes an ink layer and a wax layer positioned atop the ink layer. The wax layer includes a thermochromic dye having a color different from the color of the ink layer. The color of the thermochromic dye blocks the color of the ink layer at an ambient temperature and is transparent to allow the ink layer color to be seen at an activation temperature. Therefore, the filter apparatus provides an indication when the filter is full and heat is building within the housing as a result.

Abstract: Reflow solder oven gas management system introduces an inert gas into and removes contaminated gas from a reflow oven tunnel (42) at predetermined points (6, 8) to influence the oven tunnel gas flow and to dilute and expel excess oxygen. The contaminated gas is ducted to a flux separation system (34) to be cleaned, for example remove flux vapors, and returned in part to the tunnel (42) for recirculation and with the remainder routed to end baffle boxes (54) for tunnel end pressurization and exhaust. The system has sufficient pressure to supply end baffle boxes (54) with clean gas to create a gas barrier to effectively seal off the tunnel ends from air infiltration or migration into the tunnel making the system insensitive to external pressure and/or temperature variations. The invention also includes alternative embodiments, low flow oxygen bleed valves (72) to maintain low oxygen content in the oven process tunnel.

Abstract: A filter bag of rectangular shape is fitted over the computer to be protected. It has a main opening for receiving the computer, and is longer than the computer with the open-ended position extended beyond the computer and tied to close the main opening against the passage of air therethrough. After fitting the bag over the computer, a piece of the bag is cut to form an inner flap, and this flap with an outer flap remains hingedly secured to the bag, in register with a hole in the computer. The flap is momentarily opened for providing access to the computer and closed, and when closed provides an almost perfect seal.

Abstract: A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

Abstract: A computer box filter system for a computer box including a hollow, u-shaped frame assembly that selectively attaches to a computer box. The frame assembly includes a plurality of holes formed on its inside surface which are aligned and registered with holes formed on the sides of the computer box. Disposed inside the frame assembly is replacable air filter. In one embodiment, the system includes a closeable door cover that attaches to the frame assembly and selectively closes over the entire front surface of the computer box. The frame assembly includes an extending lip which properly aligns the lower section of the frame assembly on the computer box so that the edges of the door cover may be pressed against the edges of the frame assembly during use to form a seal around the front surface.

Abstract: A method of using a substrate transport pod is provided, which is suitable for manufacturing semiconductor devices with copper wiring and low dielectric insulating film having dielectric constants of less than 3. The method is based on loading the substrates into a pod from an atmosphere of a first process, and circulating a gaseous atmosphere through interior of the pod in such a way to selectively remove at least one contaminant including moisture, particulate substances or chemical substances, and to expose the substrates to a controlled atmosphere intermittently or continually while the substrates are held in the pod before they are unloaded from the pod and introduced into a second process. For a pod that is used to house the substrates for the purpose of retaining or transporting, the pod has a pod main body and a door that provides a hermetic sealing seal, and the pod is made primarily of a materiel that has moisture absorption factor of less than 0.

Abstract: An electronics assembly includes a chassis and a panel mounted on the chassis. The panel has an air filter on a surface of the panel which is retained in position on the panel by one or more retaining elements (80), for example plastics rivets, that can be operated to allow release of the air filter from the panel. The air filter can be changed very quickly during maintenance of the assembly without the need to switch the assembly off during changing of the air filter.

Abstract: An air blower apparatus for use in an inspection apparatus includes an air blowing device for blowing air via an air filter to a recording medium and a recording apparatus. The air blowing device includes a fan unit provided above the recording medium, and a fan unit housing provided above the fan unit. The fan unit housing includes a first buffer space having an inlet port directed substantially downwardly toward the recording medium, and the first buffer space temporarily accumulates air inhaled from the inlet port. The fan unit inhales air from the inlet port that faces the first buffer space, discharges inhaled air at a substantially constant air flow rate to deliver the air via an air filter from an outlet port to the recording medium by a fan, and the discharged air is reflected on the recording medium and returns to the inlet port.

Abstract: The invention relates to a filter bag for holding filtering material located inside a gas-installed housing of the electrical installation. The filter bag is produced from a fabric that is resistant to high temperatures, which eliminates the need for holding devices protecting the filter bag from hot switching gases to be provided inside the compressed gas housing.

Abstract: An effective desiccant for use in a package which has a material including at least in part solid particles of one or more materials, at least one of such materials having an average particle size range 0.001 to 0.1 micrometers to provide a high rate of water absorption and to provide an equilibrium minimum humidity level lower than a humidity level to which a highly moisture sensitive electronic device is sensitive within a sealed enclosure.

Abstract: A disk apparatus having an open inner structure and a collector liquid, which are housed in a hermetically sealed collecting container, are heated to a certain collecting temperature by a heating mechanism so as to permit a gas to be generated from the disk apparatus and to evaporate the collector liquid. The vapor of the collector liquid brings into contact with the disk apparatus and collects the gas generated from the disk apparatus and, then, the collecting container is cooled so as to liquefy the vapor that has collected the gas generated from the disk apparatus.

Abstract: A gas adsorption filter located over a breathing hole within a semi airtight container, wherein the gas adsorption filter has an opening that is connected with and open to the breather hole and, comprises a base material for attaching the filter to the inner wall of the container and a gas adsorption body that is laminated and fixed to the gas flow path surface of the base material, and on the gas contact surface on the side where the gas adsorption body is in contact with the gas flow path surface of the base material, there is at least one gas inflow orifice that is connected to the opening of the base material, and at least one gas discharge orifice that is connected to the outside of the gas adsorption body, and a groove section is formed that is connected to the gas inflow orifice and the gas discharge orifice.

Abstract: The filter construction includes a first portion that removes or reduces contaminants entering a disk drive enclosure from the external atmosphere and a second portion that removes or reduces contaminants present within the disk drive enclosure. Air exits the first portion in an area of the disk drive enclosure having a low air pressure. The second portion has an adsorbent filter, such as a recirculation filter, which allows air or gas to flow therethrough with little resistance. The filter construction has an exit positioned approximately parallel to the periphery of a disk in the disk drive enclosure, so that air exiting the filter construction is generally perpendicular to the air currents produced by the spinning disk.

Abstract: A filter bag of rectangular shape is fitted over the computer to be protected. It has a main opening for receiving the computer, and is longer than the computer with the open-ended position extended beyond the computer and tied to close the main opening against the passage of air therethrough. After fitting the bag over the computer, a piece of the bag is cut to form an inner flap, and this flap with an outer flap remains hingedly secured to the bag, in register with a hole in the computer. The flap is momentarily opened for providing access to the computer and closed, and when closed provides an almost perfect seal.

Abstract: A filtering apparatus of a hard disk drive includes a filter filtering particles from air flowing inside a housing which includes a base plate and a cover plate, and two holders installed inside the housing and having support grooves supporting both end portions of the filter. The filter includes a filtering portion through which the flowing air passes and particles are filtered from the flowing air, and an insertion portion included at both end portions of the filtering portion and inserted into the support grooves forming a seal. Thus, since no gap is generated between the support groove of the holder and the insertion portion of the filter, all the air flowing toward the filter passes through the filtering portion. Also, the flow of air passing through the filtering portion is smooth, so that an efficiency of filtering tiny particles included in the air flowing in the hard disk drive is improved.

Abstract: An electronics assembly comprises:

Abstract: The invention relates to a compartment 10 having a space 32 segregated from air outside the compartment and capable of housing a product apparatus for assembly of, for example, semiconductor devices and integrated circuit packages in a “clean” environment. The compartment 10 includes panels 16 to segregate the air inside the compartment 10 from the surrounding environment. At the front of the compartment 10, there is a top access panel 12 and a bottom access panel 14 to access a production apparatus (not shown) which is houseable or storable within a space 32 for such apparatus defined within the compartment 10. Where it is desired to place a plurality of similar compartments 10 adjacent to one another to provide a production line, an opening 18 can be included in one or both of the side panels 16 for transfer of processed material, such as leadframes for assembling integrated circuit packages, from one production apparatus to another, housed in respective adjacent compartments 10.

Abstract: The present invention provides a method and apparatus for replacing a filter. The apparatus includes a receptacle adapted to receive a filter that is capable of filtering a first area. The apparatus further includes at least one supporting member to support at least a portion of the filter and at least a portion of a replacement filter, wherein both the filter and replacement filter are adapted to filter at least a portion of the first area for a selected duration.

Abstract: A system for filtering air entering the housing of a computer. A filter is placed in the path of air entering the computer housing. A timing program is installed on the computer to keep track of the total amount of time the computer has run since installation or service of the filter. After the computer has run for a predetermined amount of time, the program causes the computer to prompt the computer user to change or service the filter.

Abstract: The present invention includes a filtered mask enclosure having an exterior portion and interior regions within the exterior portion such that the interior regions have a filtering region and a purging region connected to the filtering region. The present invention further includes a method of removing a first contaminant in a gas phase, a second contaminant in a solid phase, and a third contaminant having an electrical charge from a purge gas and flowing the purge gas through a vicinity of a mask while exposing a wafer with light through the mask.

Abstract: A console for enclosing one or more component elements of a computer system is disclosed. The console includes a cabinet structure which defines an interior space configured to receive one or more component elements of the computer system. The cabinet defines an inlet port and one or more discharge ports. The inlet port is fitted with a fan on the interior surface of a sidewall forming the cabinet. Releasably mounted on the external sidewall which defines the inlet port is a filter positioned to filter air prior to its introduction into the interior space of the cabinet through the inlet port. The filter is adapted to be slidably removed from its association with the cabinet.

Abstract: A computer box filter system for a computer box including a hollow, u-shaped frame assembly that selectively attaches to a computer box. The frame assembly includes a plurality of holes formed on its inside surface which are aligned and registered with holes formed on the sides of the computer box. Disposed inside the frame assembly is replacement air filter. In one embodiment, the system includes a closeable door cover that attaches to the frame assembly and selectively closes over the entire front surface of the computer box. The frame assembly includes an extending lip which proper aligns the lower section of the frame assembly on the computer box so that the edges of the door cover may be pressed against the edges of the frame assembly during use to form a seal around the front surface.