Abstract: A heat engine includes a first rotatable pulley and a second rotatable pulley spaced from the first rotatable pulley. A shape memory alloy (SMA) element is disposed about respective portions of the pulleys at an SMA pulley ratio. The SMA element includes a first wire, a second wire, and a matrix joining the first wire and the second wire. The first wire and the second wire are in contact with the pulleys, but the matrix is not in contact with the pulleys. A timing cable is disposed about respective portions of the pulleys at a timing pulley ratio, which is different than the SMA pulley ratio. The SMA element converts a thermal energy gradient between the hot region and the cold region into mechanical energy.

Abstract: An energy harvesting system in thermal communication with a hot region and a cold region includes a hot end heat engine in thermal communication with the hot region, a cold end heat engine in thermal communication with the cold region, and an intermediate heat engine disposed between the hot end heat engine and the cold end heat engine. The hot end heat engine includes a hot end shape memory alloy (SMA) element, the cold end heat engine includes a cold end SMA element disposed, and the intermediate heat engine includes an intermediate SMA element. A hot side of the intermediate SMA element is in thermal communication with a cold side of the hot end SMA element. A cold side of the intermediate SMA element is in thermal communication with a hot side of the cold end SMA element.

Abstract: An electro-thermal actuator device includes a case defining a cavity in which are housed a thermal actuator, an electrical heater and, at least partially, an actuating shaft. The device comprises a multipolar connector for the rapid, secure and reliable coupling to a respective source of electrical power supply for the heater. The connector can be configured as an adapter unit distinct from the case, suitable to transform a traditional electro-thermal actuator device into the actuator device described above.

Abstract: A thermally activated initiator assembly uses a first bar that experiences a change in length as a function of temperature. The first bar is coupled to a first support. A second support is pivotally coupled to the first support and to the first bar so that the second support may move relative to the first support when the first bar experiences the change in length. An initiator is coupled to the second support adjacent to the high side of a ramp on the second support. A second bar is rigidly coupled to the first support. The second bar rests on the low side of the ramp prior to the first bar experiencing the change in length. When the first bar experiences the change in length, the second support moves relative to the first support causing the second bar to slide along the ramp until it falls off the ramp's high side to strike the initiator.

Abstract: An actuator includes a shape memory element formed from a shape memory alloy. The shape memory element is configured such that the actuator is actuated by a change in shape of the shape memory element. The shape memory element may be maintained in a pre-actuated state that is advanced from its rest state, but which is not at its actuated state.

Abstract: SM-based actuators (110) and release mechanisms (100) therefrom and systems (500) including one or more release mechanisms (100). The actuators (110) comprise a SM member (118) and a deformable member (140) mechanically coupled to the SM member (118) which deforms upon a shape change of the SM member triggered by a phase transition of the SM member. A retaining element (160) is mechanically coupled to the deformable member (140), wherein the retaining element (160) moves upon the shape change. Release mechanism (100) include an actuator, a rotatable mechanism (120) including at least one restraining feature (178) for restraining rotational movement of the retaining element (160) before the shape change, and at least one spring (315) that provides at least one locked spring-loaded position when the retaining element is in the restraining feature and at least one released position that is reached when the retaining element is in a position beyond the restraining feature (178).

Abstract: A representative embodiment of the invention provides a thermal actuator for a MEMS-based relay switch. The thermal actuator has an “active” arm that is movably mounted on a substrate. The “active” arm has (i) a thermal expansion layer and (ii) a resistive heater that is electrically isolated from the thermal expansion layer. The thermal expansion layer is adapted to expand in response to a temperature change induced by a control current flowing through the resistive heater, thereby bending the “active” arm and moving that arm with respect to the substrate. Due to the fact that mechanical and electrical characteristics of the “active” arm are primarily controlled by the thermal expansion layer and the resistive heater, respectively, those characteristics can be optimized independently to obtain better operating characteristics for MEMS-based relay switches of the invention compared to those attained in the prior art.

Abstract: A method of cooling a first region that is above the transition temperature of a phase change material having a cold phase and a warm phase and that is proximal to a second region into which heat may be exhausted. The method utilizes an article of the phase change material, and starting in the cold phase, places the article into thermal contact with the first region, thereby causing the phase change material to undergo a phase transition, changing size. When the phase transition is substantially complete, the article is taken out of thermal contact with the first region and is placed into thermal contact with the second region. At this point, force is applied to the article, causing it to transition to the cold phase, thereby exhausting heat into the second region. The process is begun again, by placing the article, once again, into thermal contact with the first region.

Abstract: An overheating protection system adapted for use with a shape memory alloy actuator element, includes at least one switching shape memory alloy element presenting a slower activation period than that of the actuator element, and configured to selectively prevent activation of the actuator element, when the actuator element is actually or predicted to be experiencing overheating; and a circuit comprising the system, wherein the switching element and/or a circuit implement functions to modify activation of the actuator element.

Abstract: A system, in certain embodiments, includes an accumulator having a first plate with a first plurality of holes and a second plate with a second plurality of holes. The second plate is positioned at an offset from the first plate, and the second plate is moveable relative to the first plate to adjust a fluid pressure. The accumulator also includes a plurality of shape memory alloy wires extending between the first and second plates, wherein the plurality of shape memory alloy wires extend through the first and second plurality of holes.

Abstract: A movable mechanism having: a fixed body (1); a movable body (4); and a driving member (2), one end of which is attached to the fixed body and the other end of which is attached to the movable body, for changing the position of the movable body, wherein the driving member (2) is composed of a shape restorable material, and the movable body (4) is moved by shape restorability of the driving member (2) that has been released movable body (4) from being fixed.

Abstract: Fuel-powered actuators are described wherein actuation is a consequence of electrochemical processes, chemical processes, or combinations thereof. These fuel-powered actuators include artificial muscles and actuators in which actuation is non-mechanical. The actuators range from large actuators to microscopic and nanoscale devices.

Abstract: A temperature responsive control system, the system including a first seal, a second seal abutting the first seal, and a thermally reactive element in contact with the first seal and/or the second seal wherein the thermally reactive element constricts to displace at least one of said first and second seals, for reducing a degree of contact pressure between the first and second seals from a first, higher level of contact pressure to a second, lower level of contact pressure, when a temperature of the first seal and/or the second seal increases to a level to activate the thermally reactive element to constrict. A water pump seal pressure system with abutting seals and a method for managing the contact between abutting seals in a system are also disclosed.

Abstract: A shape memory alloy actuated device is provided for engaging a movable object. The device may include a first movable component, a shape memory alloy for moving the first component from a first position to a second position, a biasing element configured to expand the shape memory alloy object and apply a continual tensile force to the shape memory alloy object. The device may be configured to allow the first component move between the first position and the second position other than by transferring force to the shape memory alloy object. The device may also be configured to allow the shape memory alloy object to expand and contract when the first component is retained in the first position.

Abstract: A shape memory element (a structure formed from a shape memory alloy) includes an electrically conductive ferromagnetic material. The ferromagnetic material may be magnetostrictive. In some embodiments, the shape memory element is formed from a shape memory alloy core and has a cladding over the core that includes the ferromagnetic material. In other embodiments, the shape memory alloy may be selected to be ferromagnetic.

Abstract: A method of string an SMA, method of manufacturing the SMA actuator, SMA actuator and apparatus for manufacturing the SMA actuator, wherein a drive member made up of an SMA is extended between a moving member and wire supporting member via a drive member supporting member, and current is applied to the unnecessary portion of the drive member located between the wire supporting member and drive member supporting member, whereby the unnecessary portion of the drive member is cut off by melting, with the result that the size of the protrusion left behind after cutting of the SMA is reduced, and there is no need of giving consideration to the durability of a cutter otherwise used for cutting purposes.

Abstract: A high-bandwidth MEMS actuation system includes actuator pairs coupled in parallel to a stage, each actuator energizable in a drive direction against a bias to an energized position, and movable upon deenergization, to the rest position to define an actuation cycle. The actuators are asymmetric, with an energization frequency greater than a bias frequency, and are opposably coupled to one another. A pulse generator alternately transmits pulses to the actuators, at an alternation frequency greater than the bias frequency. The pulse generator transmits the energization pulses to each of the actuator pairs sequentially at a sequence frequency greater than the cycle frequency. The actuators are each movable from energized to rest positions faster than the bias frequency, and the actuator pairs are sequentially energizable faster than the cycle frequency, wherein the stage is movable in one degree of freedom at a bandwidth of at least four times the cycle frequency.

Abstract: An actuator driving device includes: an actuator made of a shape metal alloy having a property that a predetermined shape is memorized in advance, and that the predetermined memorized shape is recovered when the actuator is heated to a predetermined temperature; an applier for applying, to the actuator, a pulse current or a pulse voltage at least having a predetermined current value or a predetermined voltage, and a predetermined duty ratio to heat the actuator; and a determiner for determining the current value or the voltage value, and the duty ratio of the pulse current or the pulse voltage to be applied to the actuator by the applier, wherein the determiner is operative to determine the pulse current or the pulse voltage having: the current value larger than a current value of a constant current required for displacing the actuator by a predetermined targeted displacement amount, or the voltage value corresponding thereto; and the duty ratio of making an applied current amount smaller than an applied curr

Abstract: Multiple embodiments of ferromagnetic shape memory alloy (FSMA) based torque actuators are described. These torque actuators include a magnetic trigger and an FSMA member, which when actuated by the magnetic trigger, produces a torque for rotating a member. Examples of magnetic triggers include hybrid magnetic triggers having at least one electromagnet and at least one permanent magnet. The FSMA member can be configured as a coil (or plate) spring and can be fabricated of a true FSMA alloy (i.e., an alloy that exhibits both ferromagnetic and shape memory properties) or of an FSMA composite that includes a ferromagnetic portion and an SMA portion. Several embodiments include a central orifice in which the FSMA member and an axial rod configured to rotate when actuated are disposed; the magnetic trigger system is disposed about the periphery of the orifice.

Abstract: An actuator comprises an elongated shape-memory element wound around a first element and having one first end connected to the first element and one second end connected to a second element. Heating means are provided for heating the shape-memory element in order to obtain a displacement of one of the ends thereof. The elongated shape-memory element is guided so that it can slide within a closed channel made of a material having a low coefficient of friction, for example defined by a sheath.

Abstract: A microswitch comprises a deformable membrane including two substantially parallel flexure arms, attached to a substrate via at least one end thereof and comprising thermal actuating means. An elongated contact arm, substantially parallel with the flexure arms, is arranged therebetween and attached thereto at the high deformation areas thereof. The contact arm moves in a direction substantially parallel to the substrate upon actuation of the microswitch, and comprises electrostatic holding electrodes and a conducting pad.

Abstract: An electro-thermal actuator device comprises a case defining a cavity in which are housed a thermal actuator, an electrical heater and, at least partially, an actuating shaft. The device comprises a multipolar connector for the rapid, secure and reliable coupling to a respective source of electrical power supply for the heater. The connector can be configured as an adapter unit distinct from the case, suitable to transform a traditional electro-thermal actuator device into a device according to the invention.

Abstract: A method of generating motion from a cool region that is proximal to a warm region, the cool region and the warm region defining a temperature range. The method uses an article of phase change material having a warm-to-cold phase transition and a cold-to-warm phase transition, both within the temperature range. This article is exposed to the cool region, thereby causing the phase change material to change size. When the warm-to-cold phase transition is substantially complete, this is detected. In response to this detection the article is exposed to the warm region, thereby causing the phase change material to change size. When this transition is substantially complete, the cycle is restarted with exposure to the cool region.

Abstract: The invention relates to a device for a bi-directional displacement of a means or a connecting element, along a guide, which can be reversibly moved between at least two positions along the guide, with a means for driving that can be engaged with the means or connecting element, which is capable along the guide to displace the means or connecting element in a direction while being subjected to force and an actuator engaged with the means or connecting element, which is capable of displacing the means or connecting element in the opposite direction along the guide while being subjected to the force and wherein the actuator is actuatable by a converter material.

Abstract: An actuator (10) is described in which the functional element (11) is made of a shape memory alloy, and comprising means (14, 18) for increasing the load applied onto the functional element when the external temperature increases, thus causing a consequent variation of the transition temperatures characterizing the hysteresis cycle of said functional element.

Abstract: An arrangement of the invention includes a base block 16, a cylindrical cam 14, as a rotary member, which is rotatably supported on the base block 16, and includes a contact portion on an outer periphery thereof for outputting a rotating force, a drive gear 21, as an oscillatory ring, which includes a contact portion on an inner periphery thereof, and is oscillated on a plane perpendicular to a rotation axis of the cylindrical cam 14 in contact with the contact portion of the cylindrical cam 14, parallel springs 23 through 26, as a position retainer, for retaining the position of the drive gear 21, and three or more shape metal alloy actuators (SMA) wires 35 through 38, as expandable and contractible actuators, with both ends of the each SMA wire being fixed to the base block 16 for contact with the drive gear 21.

Abstract: A temperature activated actuator installed on a tubular to actuate an adjacent device may include one or more shape-memory alloy elements. The elements may be coupled between a first portion and a second portion of a device, or the elements may be coupled between the tubular and a portion of the device. The elements are activated by raising the temperature to a transition temperature to cause metallurgical phase transformation, causing the elements to shrink and displace at least a portion of the device. The actuator may be used, for example, to actuate a centralizer from a run-in mode to a deployed mode or, alternately, to actuate a packing member from a run-in mode to an isolating mode. A nickel-titanium alloy, for example, may be used as the shape-memory alloy material from which the shape-memory element is made.

Abstract: An actuator includes a bistable mechanism having a tension beam and a compression beam defined by a relief slit in a flexible substrate; and a first shape memory element that upon heating actuates the actuator from a first position to a second position. A heat source can be thermally coupled to actuate the first shape memory element, or the first shape memory element can be heated by passing current through the element. The actuators can be formed in an array. Such arrays can be useful for tactile displays, massagers, and the like. Also included are methods of operation and manufacturing.

Abstract: An actuator has two shape memory alloys (SMAs) connected in a push-pull arrangement to a movable part. By passing current to each of the SMAs from a drive circuit part, the movable part can be driven. When a target position signal of the movable part is input to the drive circuit part, a current is passed to an SMA of the contraction side on the basis of a drive waveform obtained by adding a voltage according to the target position signal to a bias voltage, and a current is passed to the SMA on the expansion side on the basis of a signal waveform obtained by subtracting the voltage according to the target position signal from the bias voltage. Consequently, the SMA of the expansion side maintains a pre-heat state and is not cooled excessively, so that response delay at the time of the next heating can be prevented. As a result, the response of the actuator can be increased.

Abstract: An apparatus used in the medical industry, in order to increase transpulmonary pressure and respiratory volumes, to improve inspiratory muscle performance and re-establish the normal pulmonary hyperinflation, through the employment of electronic technology, providing audible, simulated, verbal, human sounding words, that assist, guide and prompt, increasing patient usage. In the past, lack of usage of this simple plastic, antiquated, disposable unit, by the patient, has contributed to severe problems, such as pneumonia. Without prompting, the patient finds it hard to inhale into a tube repetitively, to improve their lungs. Previous applications of prior equipment has been poor, thus adding intelligence in the form of electronic technology, which prompts without assistance, is a tremendous advantage in helping not only the sighted, but also the blind as well, since normally only written information accompanies the incentive spirometer, thus, changing the use of this medical device as we know it today.

Abstract: A method of sequentially transitioning a thermally active shape memory device progressively translocates the thermally active shape memory device through a first controlled temperature zone and through an additional controlled temperature zone. The thermally active shape memory device is thermally transitioned and changed in geometric shape as a result of thermal communication of the shape memory device with either or both of the controlled temperature zones to produce a transitioned thermally active shape memory device. Novel devices produced according to the method are also disclosed.

Abstract: A linear actuator is provided, comprising a housing defining an interior channel, a stop extending from the housing and displaceable relative to the housing, and at least one wire formed of a shape-memory alloy, the wire being attached at a first end to the stop and at a second end to the housing. When heated to a predetermined temperature, the wire applies a pulling force to the stop to cause the stop to slide in a first direction into the housing interior channel. A spring located in the housing interior channel applies a biasing force to the stop in a second direction counter to the first direction when the wire cools, thereby returning the stop to the unactuated position. A wire heater is provided, which may be an electrical source for resistive heating of the wire. Multiple actuators of the present invention may be configured in parallel to increase the force generated by the wires.

Abstract: A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element.

Abstract: A bistable MEMS microswitch produced on a substrate and capable of electrically connecting ends of at least two conductive tracks, including a beam suspended above the surface of the substrate. The beam is embedded at its two ends and is subjected to compressive stress when it is in the non-deformed position. The beam has an electrical contact configured to produce a lateral connection with the ends of the two conductive tracks when the beam is deformed in a horizontal direction with respect to the surface of the substrate. Actuators enable the beam to be placed in a first deformed position, corresponding to a first stable state, or in a second deformed position, corresponding to a second stable state, and the electrical contact ensures connection of the ends of the two conductive tracks.

Abstract: A microelectromechanical systems (MEMS) based heat engine capable of converting thermal energy gradients into mechanical or electrical energy, as well as its fabrication process is disclosed. This heat engine design consists of a stressed oscillating beam formed from a shape memory alloy (SMA) thin film. As the temperature of the beam changes, its shape changes due to the phase transformation of the shape memory alloy, causing it to oscillate between a hot source and a cold source. Due to the hysteretic behavior of the phase transformation, the oscillating SMA cantilever beam produces a net mechanical work output that may be either converted to electrical energy or mechanically linked to other MEMS devices.

Abstract: A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element.

Abstract: A rotary SMA actuator includes an SMA assembly having a plurality of grooves formed therein to form a plurality of concentrically arranged SMA tubes. A heater element is disposed against an input end of the SMA tubes and generates heat when electrical current is applied thereto. The heat is used to heat the SMA tubes, which causes an angular deflection of each of the tubes at an output end thereof. An innermost one of the SMA tubes is used as an output member and its angular deflection is the sum of the angular deflections of all of the SMA tubes. The actuator is of a smaller size and lighter weight than electrical, mechanical, hydraulic or pneumatic actuators of comparable torque output. The actuator also provides greater deflection capability than similarly sized SMA type actuators that do not employ concentric tubes.

Abstract: The present invention employs an optimized cross-sectional shape for a ferromagnetic shape memory alloy (FSMA) composite that is used in a spring-type actuator, an improved hybrid magnetic trigger for use in FSMA based actuators, an a FSMA composite based spring type actuator, an a FSMA based spring type actuator including a stack of triggering units and FSMA springs, a FSMA composite based torque actuator. The invention also includes a model that can be employed to evaluate different materials being considered as components a FSMA for a FSMA composite used in either a FSMA based torque actuator or a FSMA spring actuator.

Abstract: A bistable structure provided by the invention is characterized as including a deflection element that has mechanically constrained end points and a compliant span between the end points that is substantially free to deflect between two stable positions when a force is applied at a point along the span. The deflection element span is provided, as-fabricated, curved in one of the two stable positions and in a mechanically unstressed condition along the length of the span. The as-fabricated curve of the deflection element span includes a curve maxima at a point along the span length that is at least about ¼ of the span length from the end points of the span. The deflection element span is constrained to substantially prohibit development of a second bending mode that is characteristic for the span as the element deflects between the two stable positions.

Abstract: Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch having a movable microcomponent is provided and includes a substrate having a stationary contact. The switch can also include a structural layer having a movable contact positioned for contacting the stationary contact when the structural layer moves toward the substrate. An electrothermal latch attached to the structural layer and having electrical communication with the movable contact to provide current flow between the electrothermal latch and the stationary contact when the movable contact contacts the stationary contact for maintaining the movable contact in contact with the stationary contact.

Abstract: A micro electromechanical differential actuator is comprised of a suspension arm structure and/or a bridge structure to make a two-degree-of-freedom and bi-directional motion. The actuator support base can make out-of-plane or in-plane vertical and horizontal motions. The invention is applicable in optical micro electromechanical devices such as optical switches, variable optical attenuators, optical tunable filters, modulators, tunable VCSEL's, grating modulators, micro displays, and RF switches.

Abstract: A device is described for latching an actuator to a substrate where the substrate includes a thermally activated material located on the substrate and a heater capable of heating the thermally activated material until it softens. The actuator includes a contact area that is spaced above the thermally activated material in a non-contact position. The actuator is movable from the non-contact position to a contact position where the contact area contacts the thermally activated material of the substrate. A method of latching actuator is also provided including heating the thermally activated material until it softens and moving an actuator into the contact position.

Abstract: A continuous rotary actuator using a shape memory alloy has a simple structure, is small and light-weight, and has a high torque, which can lock the actuator against rotation during periods when the actuator is not energized. The continuous rotary actuator includes an inner drum rotating around an axis constituted by a rotating shaft. The inner drum is provided in an outer cylinder, wherein first and second shape memory alloy torsion springs, which are wound in opposite directions and which are unwound to recoil when electrically heated, are fixed between the outer cylinder and the inner drum, and wherein switching means for alternately switching the electrical heating according to the rotation angle of the inner drum are connected to the first and second shape memory alloy torsion springs.

Abstract: A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: An actuator device has electrical components, which are subjected to electric voltage, located inside a housing near movable mechanical elements. Insulation of the electrical components from the environment is achieved by introducing into the housing an expanding material, specifically a silicone elastomer of a type suitable to reticulate for forming a protective foam.

Abstract: A shape memory alloy hinge assembly for deploying at least a first object in a controllable, substantially shockless manner is disclosed. Generally, the hinge assembly includes at least a first flexure member capable of moving from a first, folded configuration to a second, straightened configuration, and a controller for controlling the movement of at least the first flexure member as the first flexure member moves or reconfigures from the folded configuration to the straightened configuration.

Abstract: A constant force actuator transforms applied heat to an applied force on an output device. Strips of shape memory alloy are coiled into spirals and trained to have this configuration as a static state. The shape memory alloy springs are attached to the output device to apply a directional force. When one of the springs is heated, the modulus of elasticity within the spring material changes. This change in modulus increases the force which the spring exerts in returning to its static state, which in turn increases the force applied to the output device, upsetting the balance of forces and resulting in a rotation.

Abstract: A thermally buckling linear micro structure, in which by isolating technology a thermal oxidization isolation layer are generated on the two ends of a micro structure, or a material with larger thermal inflation coefficient is deposited, or the area of thermal conduction is reduced so that the two ends of a micro structure has a larger thermal stress and the membrane structure may be heated uniformly so to cause a thermally buckling deformation, therefore, the deformation of the membrane type micro structure is amplified linearly with the input power. This micro structure is formed as a membrane type by a membrane manufacturing technology.

Abstract: An improved form of thermal actuator suitable for use in a MEMS device. The actuator includes a first material such as polytetrafluoroethylene having a high coefficient of thermal expansion and a serpentine heater material having a lower coefficient of thermal expansion in thermal contact with the first material and heating the first material on demand. The serpentine heater material is elongated upon heating so as to accommodate the expansion of the first material.