Alignment Or Registration Patents (Class 700/57)
  • Publication number: 20090192633
    Abstract: Systems and apparatus are provided for locating the center of a substrate. The invention includes a frame, mounted between a slit valve assembly and a transfer chamber wall in substrate processing equipment; at least one emitter, housed in the frame, and adapted to emit a signal; at least one sensor, housed in the frame, and adapted to receive the emitted signal; and a controller adapted to determine a center of a substrate based on the signal received by the sensor. Numerous other aspects are provided.
    Type: Application
    Filed: January 24, 2009
    Publication date: July 30, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventor: Ronald V. Schauer
  • Patent number: 7512457
    Abstract: In-process non-contact measurement systems and methods for automated lapping systems are disclosed. In an embodiment, a moveable frame can be controllably positioned proximate to a lapped work product. A control component can provide first control signals to control a movement of the moveable frame relative to the lapped work product. A non-contact measuring device can be coupled to the moveable frame measures a surface of the lapped work product and can transmit measurement data of the surface of the lapped work product to the control component. The control component can further provide second control signals to control a movement of the non-contact measuring device relative to the moveable frame.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: March 31, 2009
    Assignee: The Boeing Company
    Inventors: Jeffrey H Wood, Thomas R Berkel, Robert E Bender
  • Patent number: 7507296
    Abstract: In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The position of the brush relative to the wafer may be adjusted based on the monitored torque to regulate the pressure applied to the wafer by the brush. Open loop positioning or closed loop control may be employed.
    Type: Grant
    Filed: June 1, 2007
    Date of Patent: March 24, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Michael N. Sugarman, Vladimir Galburt
  • Patent number: 7460977
    Abstract: Methods and apparatus are described for aligning components. Misalignment is calculated based on sensed values with a controller illustrating a process for data acquisition with graphical icons and indicia that include and/or are based on sensed data. The alignment process also includes graphical icons showing the process for alignment and the direction and amount of correction needed to achieve adequate alignment.
    Type: Grant
    Filed: February 19, 2007
    Date of Patent: December 2, 2008
    Assignee: Fixturlaser AB
    Inventors: Peter Stromberg, Reine Nilsson, Roberth Asplund, Bo Baversjo, Peter Sandstrom
  • Publication number: 20080243272
    Abstract: A position apparatus capable of positioning a moving member even in the situation with a large initial misalignment. This positioning apparatus includes a moving member driven by a drive 4; a position detector for outputting a maximum detection output when the moving member is at a predetermined position; and a controller 10. The controller 10 controls the drive device 4 based on the output of the second amplifier 23, whose amplification factor is greater than that of the first amplifier 22, when the output of the second amplifier 23 is equal to or less than a predetermined switching threshold, and otherwise the controller controls the drive device 4 based on the output of the first amplifier.
    Type: Application
    Filed: March 24, 2008
    Publication date: October 2, 2008
    Inventor: Kazuhiro Shibatani
  • Patent number: 7406360
    Abstract: A dummy substrate (17) differs from a substrate to be processed in having a first guide (G1) for assisting centering, however, it can be handled as a substitute of the substrate to be processed. In a process chamber (2), a second guide (G2) is arranged to assist the dummy substrate (17) to center. To detect a transfer shift of a transfer mechanism (TRM), at first, the dummy substrate (17) is centered to a placing table (14) on the placing table (14) or at an upper position thereof by engagement of the first and the second guides (G1, G2). The dummy substrate (17) centered in such a manner is received by the transfer mechanism (TRM) and transferred to a detector (11). Then, a detection value of a decentering quantity and that in a decentering direction of the dummy substrate (17) are obtained by the detector (11), and a transfer shift of the transfer mechanism (TRM) is obtained based on the detection values.
    Type: Grant
    Filed: February 22, 2005
    Date of Patent: July 29, 2008
    Assignee: Tokyo Elctron Limited
    Inventor: Wataru Machiyama
  • Patent number: 7353145
    Abstract: A computer implemented method for correcting a mask pattern, includes: preparing a designed mask pattern; obtaining a rough corrected mask pattern from the designed mask pattern by applying a rough correction; and obtaining a precision corrected mask pattern from the rough corrected mask pattern by applying a precision correction using a model based correction method with a precision model that simulates a transferred image of an exposure apparatus.
    Type: Grant
    Filed: December 3, 2002
    Date of Patent: April 1, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Tanaka, Soichi Inoue
  • Patent number: 7353135
    Abstract: The invention is an apparatus and process for obtaining values for one or more alignment quantities using one or more transportable devices. The process consists of establishing and maintaining a transportable device in a reference position and a reference orientation, then establishing and maintaining the transportable device in a fixed position and orientation with respect to a target object, then determining the transportable object's position and orientation with respect to the target object from measurements of acceleration and angular velocity of the transportable device as it moves from the reference position and orientation to the fixed position and orientation with respect to the target object, determining the position and orientation of the target object from the position and orientation of the transportable device, repeating the preceding steps as required to obtain position and orientation data for other target objects, and finally determining the values of the alignment quantities.
    Type: Grant
    Filed: March 7, 2006
    Date of Patent: April 1, 2008
    Inventor: Robert Malm
  • Publication number: 20080058966
    Abstract: Methods and systems for controlling an HVAC actuator using a single output control signal are disclosed. In one illustrative embodiment, the single output control signal may be a digital signal that serially encodes desired position data (either an absolute position or a relative position) for the HVAC actuator. In some cases, the single output control signal is provided by a controller remote from the HVAC actuator, and is received by the HVAC actuator. The HVAC actuator may include a controller for decoding the serially encoded data contained in the single output control signal, and for controlling the HVAC actuator accordingly.
    Type: Application
    Filed: September 5, 2006
    Publication date: March 6, 2008
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventor: Paul C. Wacker
  • Patent number: 7305277
    Abstract: Methods and systems for position sensing are disclosed. In one embodiment, a method includes measuring at least three discrete point positions associated with a first component by using at least one transmitter having a known position and orientation and in a line of sight with the three discrete point positions, the three discrete point positions having known distances relative to one another. The method computes a current position and orientation of the first component using data provided by the at least one transmitter and the three discrete point positions, along with position and orientation data from a last known location of the first component assuming that no sudden position changes since the first component has moved from the last known location. The first and second components may be a workpiece and a tool that performs a manufacturing operation on the workpiece.
    Type: Grant
    Filed: March 31, 2005
    Date of Patent: December 4, 2007
    Assignee: The Boeing Company
    Inventors: Philip L. Freeman, John R. Dworschak, Joseph C. Marsh
  • Patent number: 7289868
    Abstract: A method comprising adjusting a first relative position between a substrate and a fabrication unit by a first shift value, forming a first pattern relative to a first pattern instance on the substrate subsequent to adjusting the first relative position by the first shift value, and calculating a second shift value using a first displacement between the first pattern and the first pattern instance and a second displacement between a second relative position of the first pattern instance with respect to a second pattern instance is provided.
    Type: Grant
    Filed: August 22, 2005
    Date of Patent: October 30, 2007
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Carl E. Picciotto, Jun Gao, Ronald A. Hellekson, Judson M. Leiser
  • Patent number: 7248931
    Abstract: A method and apparatus is provided for determining substrate drift from its nominal or intended position. The apparatus includes at least two fixed reference points. The reference points can be fixed with respect to the processing tool, or with respect to the end effector. As a robotic arm moves the end effector and substrate along a path, a camera captures images of the edge of the substrate and the reference points. Two or more cameras can also be provided. A computer can then calculate positional drift of the substrate, relative to its expected or centered position on the end effector, based upon these readings, and this drift can be corrected in subsequent robotic arm movement.
    Type: Grant
    Filed: July 15, 2004
    Date of Patent: July 24, 2007
    Assignee: ASM America, Inc.
    Inventor: Ivo Raaijmakers
  • Patent number: 7221985
    Abstract: An on-screen calibration system for disc drives and the operating method thereof. The calibration system includes an autocollimator detecting the inclined angle of the stage of a disc drive. A control module is connected to the on-screen display module and a bar code scanner to receive the bar code of the pick-up module and compute a predetermined position data. A monitor displays a moving point according to the inclined angle and a target point according to the predetermined position data through an on-screen display module. The tilt-adjusting mechanism supporting the pick-up module is adjusted to shift the moving point overlapping the target point.
    Type: Grant
    Filed: September 4, 2003
    Date of Patent: May 22, 2007
    Assignee: Lite-On IT Corporation
    Inventors: Rei-Chang Chang, San-Chi Chien, Lih-Hwa Kuo, Sung-San Chang
  • Patent number: 7200910
    Abstract: A method of making a gas treatment device, the method includes projecting a laser line onto a side of substrate from a laser line generator angled away from a viewing source; projecting a laser dot onto the substrate from a laser dot generator located above the viewing source; verifying an alignment of the substrate with at least one of: another substrate and a housing by comparing the laser line projection on the substrate to the laser dot projection on the substrate, wherein the alignment is verified when the laser line projection and the laser dot projection are co-linear; and stuffing the substrate into the housing.
    Type: Grant
    Filed: October 28, 2003
    Date of Patent: April 10, 2007
    Assignee: Delphi Technologies, Inc.
    Inventors: Alan E. Kasten, Bruce E. Mattrisch, Jeff S. Johnson
  • Patent number: 7200260
    Abstract: A workpiece W serving as an object for detection is fixed in place. A camera 20 is mounted to the end of a robot RB. The camera is turned about an axis, which passes through the center position of the workpiece W and is perpendicular to the optical axis of the camera, to take an image of the workpiece W at a plurality of positions in different directions. A teaching model is generated on the basis of each produced image data. The relative position and posture of the workpiece to the camera 20 is also stored in association with the teaching model. Thus, it is possible to easily generate the teaching model of the workpiece regardless of three-dimensional variations in posture.
    Type: Grant
    Filed: April 10, 2000
    Date of Patent: April 3, 2007
    Assignee: Fanuc Ltd
    Inventors: Atsushi Watanabe, Taro Arimatsu
  • Patent number: 7130710
    Abstract: Systems and methods for identifying, tracking and exploiting per station information from a multiple repeat manufacturing device used in connection with a web converting manufacturing process such as that used for manufacturing disposable absorbent garments. Some of the disclosed embodiments include relating inspection data, such as product (or process) attribute data, to data from other manufacturing-related systems. Also disclosed are systems and methods for linking product (or process) attribute data obtained during the manufacturing process with one or more data sources including raw material data, process setting data, product quality data, and/or productivity data. Also disclosed are systems and methods for identifying manufacturing set point changes and automatically implementing such changes and automated web steering changes based on data from one or more inspection systems.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: October 31, 2006
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventors: Robert L. Popp, Kyle S. Allen, Henry L. Carbone, II, Scott G. Chapple, Clinton David Clark, Tim G. Dollevoet, John G. Hein, Erica C. Tremble
  • Patent number: 7117047
    Abstract: A method and a system that enable the inspection of large envelopes and complex surfaces. This is accomplished by generating a rotation and translation transform which enables the process monitoring system to define the location of the product placed in a field of view of the process monitoring system, applying the transform to three dimensional CAD data defining the process being performed with respect to the product to provide transformed CAD data representative of three dimensional information in a two dimensional pattern of the process with respect to the process monitoring system, providing placement guidance signals at predetermined locations in relation to a region of the three dimensional product, and providing an inspection data gathering device having a handheld component and providing the predetermined locations.
    Type: Grant
    Filed: December 4, 2002
    Date of Patent: October 3, 2006
    Assignee: Assembly Guidance Systems, Inc.
    Inventors: Scott Blake, Buddy Ehrlich, Eric Eisack, Robert Luoma
  • Patent number: 7117068
    Abstract: In one aspect and one example, a method for calibrating robotic picker mechanisms in automated storage library systems includes detecting a calibration mark with at least one sensor from a first position and a second position, where the first position and the second position are separated by an offset distance. Further, the method includes determining a shift in the calibration mark between the first position and the second position, and determining a distance between a reference position and the calibration mark based on the shift in the calibration mark, the offset distance, and the focal length of the sensor.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: October 3, 2006
    Assignee: Quantum Corporation
    Inventor: Michael E. Critchlow
  • Patent number: 7105841
    Abstract: The present subject matter allows non-orthogonal lines to be formed at the same thickness as the orthogonal lines so as to promote compact designs, to be formed with even line edges, and to be formed efficiently. One aspect of the present subject matter relates to a method for forming non-orthogonal images in a raster-based photolithographic system. According to various embodiments of the method, a first image corresponding to a first data set is formed on a reticle when the reticle is at a first rotational position ?1. The reticle is adjusted to a second rotational position ?2. A second image corresponding to a second data set is formed on the reticle when the reticle is at the second rotational position ?2. The second image is non-orthogonal with respect to the first image. Other aspects are provided herein.
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: September 12, 2006
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7084413
    Abstract: The present subject matter allows non-orthogonal lines to be formed at the same thickness as the orthogonal lines so as to promote compact designs, to be formed with even line edges, and to be formed efficiently. One aspect of the present subject matter relates to a method for forming non-orthogonal images in a raster-based photolithographic system. According to various embodiments of the method, a first image corresponding to a first data set is formed on a reticle when the reticle is at a first rotational position ?1. The reticle is adjusted to a second rotational position ?2. A second image corresponding to a second data set is formed on the reticle when the reticle is at the second rotational position ?2. The second image is non-orthogonal with respect to the first image. Other aspects are provided herein.
    Type: Grant
    Filed: August 8, 2002
    Date of Patent: August 1, 2006
    Assignee: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Patent number: 7082347
    Abstract: Systems and methods for providing registration control in connection with a web converting manufacturing process such as that used for manufacturing disposable absorbent garments. Some of the disclosed embodiments include relating inspection data, such as product (or process) attribute data, to data from other manufacturing-related systems. Also disclosed are systems and methods for linking product (or process) attribute data obtained during the manufacturing process with one or more data sources including raw material data, process setting data, product quality data, and/or productivity data. Also disclosed are systems and methods for identifying manufacturing set point changes and automatically implementing such changes and automated web steering changes based on data from one or more inspection systems.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: July 25, 2006
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventors: Robert L. Popp, Kyle S. Allen, Henry L. Carbone, II, Scott G. Chapple, Tim G. Dollevoet, John G. Hein, Archie Dodds Morgan, Shawn A. Quereshi, Erica C. Tremble
  • Patent number: 7006879
    Abstract: In a separate process from a boring process, the prealignment is performed beforehand on the circuit board, employing an alignment device, to create the positional data indicating the position of boring the hole in a pattern within the circuit board. In the boring process, the circuit board is carried into the working apparatus. The panel alignment is made on the circuit board. The positional data for positioning the circuit board on a table of the working apparatus is created. The synthesis of the positional data created by the prealignment and the positional data created by the panel alignment is performed to calculate the boring position of the circuit board on the table. The hole is bored at the calculated position in the circuit board, employing a boring machine of the working apparatus. Thereafter, the circuit board is carried out from the working apparatus.
    Type: Grant
    Filed: October 23, 2001
    Date of Patent: February 28, 2006
    Assignee: Nitto Denko Corporation
    Inventor: Hitoshi Ishizaka
  • Patent number: 6988009
    Abstract: A system for registering an orthopedic implant in a computer assisted navigation system. The system includes a plurality of differently sized implants which may be the femoral component or hip stem of a prosthetic hip joint. A registration device is engageable with each of the implants in a predefined relative position. The registration device also includes at least one reference element registerable in the computer assisted navigation system. A second reference structure also having at least one reference element registerable in the computer assisted navigation system is detachably secured to the implant. The relative positions of the reference elements located on the registration device and second reference structure differs for each of the plurality of implants and thereby allows the navigation system to determine the nominal size of the implant. The relative position and orientation of the implant relative to the second structure can also be calibrated using the registration device.
    Type: Grant
    Filed: March 3, 2004
    Date of Patent: January 17, 2006
    Assignee: Zimmer Technology, Inc.
    Inventors: James Grimm, Shawn McGinley, Dale Walriven, Chetan Rangaiah
  • Patent number: 6973355
    Abstract: A positioning system including a sensor, a drive sequencer and an actuator. The sensor senses the actuator position and provides position signals to drive the sequencer which responsively computes and drives the actuator in open loop moves containing dwell intervals of position. The actuator positions a mirror or other load means to reflect an optical beam as desired. Either preprogrammed or non-repeating sequences of actuator stopping positions can be synchronized with a laser. During dwell times, mirror position accuracy better than 10 microradians is suitable for tuning CO2 pulse burst or CW lasers.
    Type: Grant
    Filed: December 31, 2003
    Date of Patent: December 6, 2005
    Inventor: J. Gilbert Tisue
  • Patent number: 6950726
    Abstract: A numerical control apparatus for controlling a machine having two moving shafts placed in parallel and separate servomotors 6 and 10 for driving one of the shafts as a master shaft and the other as a slave shaft in the same direction and performing return to origin of the above-mentioned master shaft and the slave shaft according to a dog technique. The numerical control apparatus comprises position determination module determining the positional relationship as to whether or not the master shaft is ahead of the slave shaft, and return-to-origin management module performing return to origin of the master shaft and the slave shaft with one dog based on the determined positional relationship, so that the return to origin of the master shaft and the slave shaft can be performed with one dog. Moreover, the return to origin can be performed reliably at parallel positions.
    Type: Grant
    Filed: January 17, 2002
    Date of Patent: September 27, 2005
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Yuuji Mizukami
  • Patent number: 6925347
    Abstract: A method and apparatus is provided for a process control based on an estimated process result. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and estimating at least one process result of the workpiece based on at least a portion of the received trace data. The method further comprises adjusting processing of a next workpiece based on the estimated at least one process result.
    Type: Grant
    Filed: August 19, 2002
    Date of Patent: August 2, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Michael L. Miller, Thomas J. Sonderman, Alexander J. Pasadyn, Richard J. Markle, Brian K. Cusson, Patrick M. Cowan, Timothy L. Jackson, Naomi M. Jenkins
  • Patent number: 6925339
    Abstract: A system for registering an orthopedic implant in a computer assisted navigation system. The system includes a plurality of differently sized implants which may be the femoral component or hip stem of a prosthetic hip joint. A registration device is engageable with each of the implants in a predefined relative position. The registration device also includes at least one reference element registerable in the computer assisted navigation system. A second reference structure also having at least one reference element registerable in the computer assisted navigation system is detachably secured to the implant. The relative positions of the reference elements located on the registration device and second reference structure differs for each of the plurality of implants and thereby allows the navigation system to determine the nominal size of the implant. The relative position and orientation of the implant relative to the second structure can also be calibrated using the registration device.
    Type: Grant
    Filed: February 4, 2003
    Date of Patent: August 2, 2005
    Assignee: Zimmer Technology, Inc.
    Inventors: James E. Grimm, Shawn E. McGinley
  • Patent number: 6920368
    Abstract: The present invention relates to a method for determining the precompensated pattern of exposure doses of an electron beam required per pattern position to obtain a desired pattern in a coating on a substrate, comprising the steps of: determining a smearing function of the electron beam; determining a precompensated pattern with the smearing function and the desired pattern, wherein the determination is performed such that exposure doses contain almost exclusively positive values and the exposure doses are smooth relative to each other.
    Type: Grant
    Filed: June 14, 1999
    Date of Patent: July 19, 2005
    Inventors: Dirk Ernst Maria Van Dyck, Piotr Tomasz Jedrasik
  • Patent number: 6914402
    Abstract: In a method for operating machines (138) with a plurality of shafts (102, 110, 111), in which the shafts (102, 110, 111) are each driven, synchronized with one another, by individual drive mechanisms (103) belonging to them, in accordance with an electronic, chronological guide shaft function, which corresponds to an instantaneous position of a guide shaft L, and the motions of a plurality of derived shafts (102, 110, 111) are derived from the guide shaft L in accordance with conversion functions that correspond to respective predetermined mechanical conversions (106, 107, 108, 109) with respect to the guide shaft L, it is proposed, in order to improve the method in such a way that—particularly when there is a large number of shafts to be regulated—simple startup at comparatively little expense for equipment is permitted, that all the shafts (102) of at least one group (117) of shafts, which correspond to one another in terms of the conversion (106, 107, 108, 109), obey an electronic, chronological following
    Type: Grant
    Filed: April 8, 2002
    Date of Patent: July 5, 2005
    Assignee: Rexroth Indramat GmbH
    Inventors: Thomas Gabler, Karin Steudel, Dieter Staub
  • Patent number: 6909938
    Abstract: A method of and apparatus for synchronous control of a leading element and a follower element in which synchronism is started smoothly and a mechanical shock at the start of synchronism is reduced. When the follower element is started to move to be synchronized with the leading element, motion of the follower element is started before the follower element reaches a start position of the synchronism, and brought into synchronism with the leading element at the start position of synchronism. A positional relationship between the leading element and the follower element in synchronism, and a start position for starting the synchronism of the follower element and the leading element is set. An acceleration control of the follower element is performed between a motion start position preceding the start position of the synchronism and the start position of the synchronism.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: June 21, 2005
    Assignee: Fanuc Ltd.
    Inventors: Tetsuo Hishikawa, Takashi Idei, Kentaro Fujibayashi
  • Patent number: 6892153
    Abstract: In a method for compensating static positioning errors, in particular position and orientation errors, in guiding a movement of a movable machine element of an industrial processing machine, positioning errors are initially measured at startup of the machine and stored in a compensation table in a numerical controller (CNC). These values are used to generate reference values for compensating the errors. Deviations between the measured points in the table are interpolated. The actual position is measured during machining by using an additional measurement system and compared with the nominal position. Typically, the points of the measurement are different from the points in the compensation table. The compensation values can be improved continuously in two ways: on one hand, by extending the compensation table by adding the measured points and, on the other hand, by adapting the points of the compensation table adjacent to the corresponding measurement point.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: May 10, 2005
    Assignee: Siemens Aktiengesellschaft
    Inventor: Thomas Puchtler
  • Patent number: 6871120
    Abstract: A device (22, 24) for actuating a seat element comprises an actuator (26, 28) equipped with a transducer designed to supply a crude measurement value representing the current position of the actuator. The actuator provides for calculation of a corrected value of the current position of the actuator, from each crude measurement value supplied by the transducer, and calculation of a refining correction function. The device also provides for processing the corrected value of the current position of the actuator.
    Type: Grant
    Filed: November 13, 2000
    Date of Patent: March 22, 2005
    Assignee: Labinal
    Inventor: Laurent Nivet
  • Patent number: 6809489
    Abstract: There is provided a print control unit capable of transferring and stopping an object to be controlled at a target position when unexpected load is applied to the object. A print control unit includes: a selection control part, operating at a predetermined timing, to select and set the control parameters in accordance with the target speed, to judge as to whether the object is located within a target range, based on the output of the position detecting part, if located, the selection control part selecting and operating the third control part, while if the object is not located within the target range, the selection control part selecting and operating the first or the second control part based on the physical value corresponding to the speed.
    Type: Grant
    Filed: September 19, 2000
    Date of Patent: October 26, 2004
    Assignee: Seiko Epson Corporation
    Inventors: Masanori Yoshida, Hitoshi Igarashi
  • Patent number: 6799079
    Abstract: There is provided a finite type rolling guide deviation correcting method and system capable of detecting the deviation in relative position between a rolling guide and a movable body if the deviation in relative position increases, and automatically carrying out a correcting operation for returning the deviation in relative position to a normal positional relationship. The finite type rolling guide deviation correcting method corrects a relative positional relationship between a finite type rolling guide for guiding a reciprocating motion of a movable body and the movable body.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: September 28, 2004
    Assignee: Toshiba Kikai Kabushiki Kaisha
    Inventors: Yukio Serizawa, Katsuji Gakuhari, Kazushi Kawatsu
  • Publication number: 20040167640
    Abstract: A technique is disclosed that allows alignment of substrates on a run-to-run basis by using the position data of one or more previously aligned substrates to determine a setpoint of a pre-alignment process for one or more subsequent substrates. The setpoint may also be determined on the basis of a predefined characteristic of the substrates to be aligned.
    Type: Application
    Filed: July 17, 2003
    Publication date: August 26, 2004
    Inventors: Uwe Knappe, Jan Raebiger, Uwe Schulze, Rolf Seltmann
  • Patent number: 6778866
    Abstract: A method and apparatus for teaching a person how to perform a specific body motion in a consistent manner is based on electronically measuring one or more parameters of an actual body motion, comparing the one or more measured parameters with corresponding parameters of a target body motion, and providing a sensible feedback to the user based on a degree of correspondence between the one or more measured parameters and the corresponding target parameters. In a particular embodiment, the feedback is audible. More specifically the feedback is a musical tune that has a particular characteristic (such as rhythm) that is particularly suited to a particular body motion (such as a golf swing). The feedback may be in the form of electronically causing the musical tune to go off-key in proportion to a discrepancy between the actual body motion and the target body motion.
    Type: Grant
    Filed: March 16, 2000
    Date of Patent: August 17, 2004
    Inventor: Ted S. Bettwy
  • Publication number: 20040122533
    Abstract: An on-screen calibration system for disc drives and the operating method thereof. The calibration system includes an autocollimator detecting the inclined angle of the stage of a disc drive. A control module is connected to the on-screen display module and a bar code scanner to receive the bar code of the pick-up module and compute a predetermined position data. A monitor displays a moving point according to the inclined angle and a target point according to the predetermined position data through an on-screen display module. The tilt-adjusting mechanism supporting the pick-up module is adjusted to shift the moving point overlapping the target point.
    Type: Application
    Filed: September 4, 2003
    Publication date: June 24, 2004
    Inventors: Rei-Chang Chang, San-Chi Chien, Lih-Hwa Kuo, Sung-San Chang
  • Patent number: 6748346
    Abstract: The changed state of a shape of a transformable element of each part is preregistered to a library in an assembly simulation. When two parts collide with each other, the changed state of the element is selected according to an interference condition such as a material, a direction in which force is applied, etc., and the interference between parts is verified based on the selected shape after being changed.
    Type: Grant
    Filed: December 27, 2000
    Date of Patent: June 8, 2004
    Assignee: Fujitsu Limited
    Inventor: Kazuyuki Ujiie
  • Patent number: 6748141
    Abstract: An alignment system that uses a single optical sensor to enable the end of an optical fiber to be aligned with the input of an optical waveguide of an optical device. In accordance with the present invention, it has been determined that the output of a single optical sensor can be processed and converted into digital signals, which are then further processed in accordance with an alignment algorithm to generate feedback signals that enable precise alignment to be achieved. The alignment system includes the single optical sensor, a lens and processing logic.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: June 8, 2004
    Assignee: Agilent Technologies, Inc.
    Inventors: William P Kennedy, Amanda J Price, Wallace J Lannen, John Bernard Medberry
  • Patent number: 6738679
    Abstract: A positional control system wherein the position of the controlled object connected to a drive is controlled to a variable target or desired position. A period is determined which starts with a detection of a reversal in the direction of the feed of a positional command Pr as well as the detection of a stoppage of a table 104 as a controlled object and which ends with a detection of the re-start of the movement of the table 104. During the period, a correction amount for correcting a positional deviation E is issued.
    Type: Grant
    Filed: April 30, 2001
    Date of Patent: May 18, 2004
    Assignee: Toshiba Kikai Kabushiki Kaisha
    Inventors: Jun Fujita, Minoru Hamamura
  • Patent number: 6735485
    Abstract: A method for determining an overlay registration correction for a new product lot of a microelectronic product type with respect to a specific alignment tool within a foundry facility first provides for determining: (1) a first average historic overlay registration correction for historic product lots of the new product lot type with respect to the specific alignment tool; and (2) a second average historic overlay registration correction with respect to product lots of any product type with respect to the specific alignment tool. The overlay registration correction is determined as the sum of: (1) an overlay registration correction for an immediately preceding layer within the new product lot, if present; (2) a factor derived from the first average historic overlay registration correction; and (3) a factor derived from the second average historic overlay registration correction.
    Type: Grant
    Filed: November 8, 2002
    Date of Patent: May 11, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Hung Wu, Kun-Pi Cheng
  • Publication number: 20040049303
    Abstract: A method for controlling the functioning of a tire includes the steps of determining estimations or measurements of the slip Gi and the coefficient of friction &mgr;i prevailing at such slip for at least one pair “i” of values (Gi, &mgr;i); determining the corresponding values of the slope &agr;i of the straight line passing through the origin and through each pair (Gi, &mgr;i); calculating a coefficient B by direct calculation or by a regression from a sufficient number of pairs of (&agr;i, Gi) so as to estimate the value of slope &agr;0 at the origin; and using &agr;0 in an indicator of the longitudinal stiffness of the tread pattern.
    Type: Application
    Filed: July 1, 2003
    Publication date: March 11, 2004
    Inventors: Georges Levy, Nicolas Fangeat
  • Patent number: 6701197
    Abstract: A method of recording aligned images on two sides of a printed circuit board substrate, including: recording an image of an electrical circuit pattern on a first side of a printed circuit board substrate; forming an alignment pattern on a side of the printed circuit board substrate, wherein the alignment pattern has a known spatial relationship to said image of an electrical circuit pattern; determining a location of the alignment pattern on the printed circuit board substrate; and recording an image of an electrical circuit pattern on a second side of the printed circuit board substrate in response to the determined location of the alignment pattern.
    Type: Grant
    Filed: February 23, 2001
    Date of Patent: March 2, 2004
    Assignee: Orbotech Ltd.
    Inventors: Barry Ben-Ezra, Abraham Gross, Hanan Gino, Boris Kling, Dan Alon
  • Patent number: 6701196
    Abstract: A control unit (14) makes an end effector (10) compliant with respect to an x-axis and a y-axis which are perpendicular to a z-axis parallel to a direction in which a shaft (20) is moved for insertion and makes the end effector (10) produce a pressing force acting in a direction parallel to the z-axis to press the shaft (20) against an internally toothed disk (22). The control unit (14) moves the compliance center of the shaft (20) along a predetermined groping route in a state where the pressing force acting in the direction parallel to the z-axis is produced by the end effector (10). The shaft (20) gripped by the end effector (10) repeats radially outward movement from a position near the center of the center opening (22b) of the internally toothed disk (22) in different phases in an xy plane defined by the x-axis and the y-axis to find a position where the splines (20a) of the shaft (20) are able to engage the internal teeth (22a) of the outermost internally toothed disk (22).
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: March 2, 2004
    Assignee: Kawaskai Jukogyo Kabushiki Kaisha
    Inventors: Toshiyuki Itoko, Keizo Miyahara, Hiroaki Kagaya, Jun Fujimori
  • Patent number: 6697683
    Abstract: A positioning system including a sensor, a drive sequencer and an actuator. The sensor senses the actuator position and provides position signals to drive the sequencer which responsively computes and drives the actuator in open loop moves containing dwell intervals of position. The actuator positions a mirror or other load means to reflect an optical beam as desired. Either preprogrammed or non-repeating sequences of actuator stopping positions can be synchronized with a laser. During dwell times, mirror position accuracy better than 10 microradians is suitable for tuning CO2 pulse burst or CW lasers.
    Type: Grant
    Filed: April 25, 2001
    Date of Patent: February 24, 2004
    Inventor: J. Gilbert Tisue
  • Patent number: 6694197
    Abstract: A single channel reformatter having a syringe that is movable along a z-axis by a z-positioner. A x-y positioner is capable of positioning any well of a source plate having a plurality of wells, and of positioning any well of a destination plate having a plurality of wells, beneath the syringe. Liquid from a well of the source plate is aspirated by the syringe and dispensed into one or more wells of the destination plate. Since the syringe does not move in the x-y plane, it is advantageously integrated into a wash system that cleanses it between liquid transfer operations. The drive element that actuates the syringe to aspirate and dispense during liquid transfer operations is advantageously used to drive the wash cycle. In a method according to present invention for controlling the reformatting operation, well-to-well links are specified, a preferred execution order for executing the specified links is determined, and the specified links are executed in the preferred order.
    Type: Grant
    Filed: April 24, 2000
    Date of Patent: February 17, 2004
    Assignee: Pharmacopeia Drug Discovery Inc.
    Inventors: Thomas James Hatcher, Aleksandr Grinberg
  • Patent number: 6676439
    Abstract: A system for the secure physical attachment of a second device to a first device is disclosed comprising a first and second inter-connection attachment means in physical association with each device. The second inter-connection attachment means physically mates with its corresponding first inter-connection attachment means. Additionally, means for detecting the physical mating of each of the first and second inter-connection attachment means is provided. The detecting means is preferably associated with at least one of the devices and in communication with each of it's associated device's inter-connection attachment means. Means are provided for determining that the first and second inter-connection attachment means have been securely mated and, if not, means are provided for indicating the status of the completion of the secure attachment there between.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: January 13, 2004
    Assignee: Xerox Corporation
    Inventor: Debora Margaret Hejza Litwiller
  • Patent number: 6658313
    Abstract: There is disclosed an apparatus for adjusting the origins of module heads of a surface mounting apparatus for a dual gantry, the adjusting apparatus, and method therefor.
    Type: Grant
    Filed: May 22, 2000
    Date of Patent: December 2, 2003
    Assignee: Mirae Corporation
    Inventor: Chang Hyun Lee
  • Patent number: 6647311
    Abstract: Systems and methods are presented for employing arrays of coupling strips to measure misalignment of layers of multilayer devices as a function of directional coupling between pairs of strips. Each array is capable of detecting misalignment only in the direction perpendicular to the axes of the coupling strips, although multiple arrays may be employed for measuring misalignment in more than one direction. Such arrays are easily manufactured onto existing multilayer devices, and may be excised from such devices after misalignment has been measured.
    Type: Grant
    Filed: November 18, 1999
    Date of Patent: November 11, 2003
    Assignee: Raytheon Company
    Inventor: Miles E. Goff
  • Publication number: 20030190535
    Abstract: The present invention is a maskless photolithography system and method using a plasma display for creating two-dimensional and three-dimensional structures. Advantageously, the invention does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three-dimensional structure. The invention employs a plasma display having individually addressable pixels to generate and direct light onto an object that has photoreactive or photoresist compounds applied to the exposed surface. Unlike conventional plasma displays that generate visible light, the plasma display of the current invention lacks the phosphor coating conventionally used to convert ultraviolet (UV) light to visible light. Therefore, the instant plasma display generates UV light appropriate for reactive processes typically used in photolithography.
    Type: Application
    Filed: June 25, 2002
    Publication date: October 9, 2003
    Inventor: David P. Fries