Abstract: A system for the secure physical attachment of a second device to a first device is disclosed comprising a first and second inter-connection attachment means in physical association with each device. The second inter-connection attachment means physically mates with its corresponding first inter-connection attachment means. Additionally, means for detecting the physical mating of each of the first and second inter-connection attachment means is provided. The detecting means is preferably associated with at least one of the devices and in communication with each of it's associated device's inter-connection attachment means. Means are provided for determining that the first and second inter-connection attachment means have been securely mated and, if not, means are provided for indicating the status of the completion of the secure attachment there between.

Abstract: There is disclosed an apparatus for adjusting the origins of module heads of a surface mounting apparatus for a dual gantry, the adjusting apparatus, and method therefor.

Abstract: Systems and methods are presented for employing arrays of coupling strips to measure misalignment of layers of multilayer devices as a function of directional coupling between pairs of strips. Each array is capable of detecting misalignment only in the direction perpendicular to the axes of the coupling strips, although multiple arrays may be employed for measuring misalignment in more than one direction. Such arrays are easily manufactured onto existing multilayer devices, and may be excised from such devices after misalignment has been measured.

Abstract: The present invention relates to maskless photolithography using a patterned light generator for creating 2-D and 3-D patterns on objects using etching and deposition techniques. In an embodiment, the patterned light generator uses a micromirror array to direct pattern light on a target object. In an alternate embodiment, the patterned light generator uses a plasma display device to generate and direct patterned light onto a target object. Specifically, the invention provides a maskless photolithography system and method for photo stimulated etching of objects in a liquid solution, patterning glass, and photoselective metal deposition. For photo stimulated etching of objects in a liquid solution, the invention provides a system and method for immersing a substrate in an etchant solution, exposing the immersed substrate to patterned light, and etching the substrate according to the pattern of incident light.

Abstract: The present invention is a maskless photolithography system and method using a plasma display for creating two-dimensional and three-dimensional structures. Advantageously, the invention does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three-dimensional structure. The invention employs a plasma display having individually addressable pixels to generate and direct light onto an object that has photoreactive or photoresist compounds applied to the exposed surface. Unlike conventional plasma displays that generate visible light, the plasma display of the current invention lacks the phosphor coating conventionally used to convert ultraviolet (UV) light to visible light. Therefore, the instant plasma display generates UV light appropriate for reactive processes typically used in photolithography.

Abstract: Extremely small optical heads are being developed for use in optical storage devices. The heads typically include a light source, a lens and a photodetector array. The beam of light generated by the light source must be aligned precisely with central axis of the lens and with the photodetector array. Because the heads are so small, their components are fixed permanently together; no adjustments are possible after assembly. A system of this invention includes a rotational stage, a pair of X-translation stages, and a pair Y-translation stages. The stages are mounted in a mechanical path between first and second holding devices. One component of the head, which would typically include the light source, is held in the first holding device. Another component, which would typically include the lens, is held in the second holding device. The stages are adjusted until the light beam exits the first component on an axis that coincides with the center of rotation of the rotational stage.

Abstract: A method for calibrating a first co-ordinate frame of a robot and effector in a second frame of reference of a sensor when the sensor is substantially rigidly attached to the robot and effector, including the steps of measuring first positions of a plurality of first light sources relative to the sensor, with the first positions corresponding to a first absolute position of the robot and effector, moving the robot and effector, measuring second positions of the plurality of first light sources, which second positions correspond to the desired second absolute position of the robot and effector and the sensor, repeating the measurement of and movement from the first to second positions so as to provide at least two sets of measurements of first and second positions corresponding to at least two movements, each of which at least two movements is a known, unique transform, combining the at least two sets of measurements of first and second positions so as to calibrate the first co-ordinate frame in the second fra

Abstract: A method and system for visual servoing of a linear apparatus rotatable in a plane about a fixed point implements cross-ratios and provides alignment of the linear apparatus to the target in an image, such as a fluoroscope image in 3 iterations. The imaging device through which the scene is observed can be of any suitable type and does not need to be calibrated.

Abstract: In a method for compensating static positioning errors, in particular position and orientation errors, in guiding a movement of a movable machine element of an industrial processing machine, positioning errors are initially measured at startup of the machine and stored in a compensation table in a numerical controller (CNC). These values are used to generate reference values for compensating the errors. Deviations between the measured points in the table are interpolated. The actual position is measured during machining by using an additional measurement system and compared with the nominal position. Typically, the points of the measurement are different from the points in the compensation table. The compensation values can be improved continuously in two ways: on one hand, by extending the compensation table by adding the measured points and, on the other hand, by adapting the points of the compensation table adjacent to the corresponding measurement point.

Abstract: A computerized system and method for recreating illumination conditions in a slave bonder, prepared to attach connecting bonds onto bond pads of a slave integrated circuit. First, images of illuminated alignment references of a master circuit on a master bonder are defined; these data are analyzed to construct relationships between reference images and bond locations; data and relationships are stored in a master file. Secondly, on a slave bonder, the master reference image data are regenerated so that the illumination conditions of the slave bonder, as based on images, are recreated. Thirdly, images of the slave circuit references are produced under the newly created illumination conditions, and the alignment references are compensated. Finally, the bonding locations of the slave circuit and the bonding program of the slave bonder are corrected so that connecting bonds can be attached onto the recomputed correct bond locations.

Abstract: A method and apparatus for positioning a workpiece in a desired position on a gauge fixture. The apparatus includes a gauge fixture, a positioner assembly, a pusher assembly and a controller. The fixture has a first side and a second side, the first side being opposite the second side. The positioner assembly is mounted on the first side of the gauge fixture, and includes a stop member, a crank and a positioner sensor. The pusher assembly is mounted on the second side of the gauge fixture, and includes a pusher member and a pusher sensor. The controller is connected to the pusher assembly and the positioner assembly.

Abstract: A robot device that either translationally or rotationally aligns an object with a slot. For translational alignment, the robot device comprises a position sensor positioned in close proximity to the slot. The translational position sensor determines the position of the object by moving the object parallel to the slot until it actuates the position sensor. For rotational alignment, two position sensors are provided that determine the relative angle between the object and a portion of the robot device and the object.

Abstract: A discrete Kalman filter 12 and a disturbance estimating unit 13 are added to a feedback loop for feeding back a detected value of position from a position detector 6. The Kalman filter estimates position and velocity of an object to be controlled, thereafter outputting an estimated value of position and an estimated value of velocity. The disturbance estimating unit estimates from a command value of current and the estimated value of velocity the disturbance that is added to a load 5. The estimated value of position is fed back to a position controller 1, and the estimated value of velocity is fed back to a velocity controller 2. Further, a difference between a target value of current outputted from the velocity controller and the estimated value of disturbance is output as the command value of current.

Abstract: The invention relates to an apparatus for picking and placing small objects. It is equipped with a tool holder that can be positioned in an X-, Y- and Z-direction. A pickup tool is mounted to the tool holder and can be rotated about a vertical axis. A microscopic and a macroscopic camera with non-parallel axes are arranged on the tool holder for viewing the objects from above, and a lookup camera is provided to view the objects from below. The housing of the apparatus as well as a first movable frame are formed by perpendicular walls, which are light but provide stability for placing the tools accurately. An object dispenser is located below a transfer opening of a working platform of the apparatus for quick access to new objects. A control unit provides a graphical user interface for controlling the operation of the apparatus.

Abstract: An apparatus and method for controlling a mechanism for positioning video cameras for use in measuring vehicle wheel alignment includes optical targets for mounting to the wheels of a vehicle, at least one video camera for viewing said optical targets and producing at least one image thereof, a computer system for measuring said at least one image and for using said measurements to compute vehicle wheel alignment information, a positioning system for positioning said at least one video camera such that said optical targets are visible to said at least one video camera and such that said at least one video camera can produce said at least one image of said targets, and a controller for controlling said positioning system such that a user of said apparatus can cause said at least one video camera to be positioned in at least one desired position and such that said user can further cause said controller to remember said at least one desired position so that any user can, at a later time, cause said controller to

Abstract: A method for aligning a plurality of thin film transistor tiles for constructing a flat panel display. A coverplate is arranged on a coverplate support. A first layer of a bonding material is applied to at least one of a first side of each of the tiles and a surface of the coverplate on which the tiles are to be secured. The tiles are arranged on the coverplate, such that the first layer of bonding material is arranged between the tiles and the coverplate. The tiles are connected to an alignment apparatus. The tiles are aligned relative to each other and the coverplate. The tiles are at least partially secured to the coverplate.

Abstract: In a bonding method and apparatus, a position-detecting camera is moved to a point above reference marks, and the positional relationship between the reference marks and the optical axis of the position-detecting camera is measured by the position-detecting camera, a bonding tool is moved to a point above the reference marks in accordance with an amount of offset stored in memory beforehand, the positional relationships between the reference marks and the tool are measured by an offset-correcting camera, and an accurate amount of offset is determined by correcting the mount of offset stored in memory beforehand based upon such a measurement result.

Abstract: A multiplexed analog control system for an micro electromechanical systems (MEMS) array of electrostatic actuators, such as tiltable mirrors in an optical switch. Each actuator includes a variable gap capacitor formed as part of the movable mechanical element. A hold capacitor is connected to each actuator capacitor, and a selectable high-voltage inverter connects them to provide a bipolar drive signal of 50% duty cycle. A single power digital controlled current source is connected to all the drive circuits to provide a high-power correction signal. Address decoders enable a selected one of the drive circuits to add or subtract the correction from the hold capacitor.

Abstract: The present invention preferably employs non-contact, small-displacement, capacitive sensors to determine Abbe errors due to the pitch, yaw, or roll of a near linear mechanical stage that are not indicated by an on-axis position indicator, such as a linear scale encoder or laser interferometer. The system is calibrated against a precise reference standard so the corrections depend only on sensing small changes in the sensor readings and not on absolute accuracy of the sensor readings. Although the present invention is preferred for use in split-axis positioning systems with inertially separated stages, the invention can be employed in typical split-axis or stacked stage systems to reduce their manufacturing costs.

Abstract: A method for determining a minimal set of adjustments for the blades of a rotor supported by a supporting structure for reducing rotation-induced vibration in the supporting structure at at least one harmonic rotation order and/or for reducing track deviation while maintaining structure vibration over at least one harmonic order within an acceptable limit. In one embodiment, a relationship is established by which vibration of the supporting structure may be calculated at harmonic orders of rotor rotation from Fourier coefficients of adjustment, Fourier coefficients of unit vibration influence and Fourier coefficients of vibration measurements. Thereafter, a value is determined for each selected Fourier coefficient of adjustment that provides a desired virtual reduction of vibration of the supporting structure at the harmonic order of the selected Fourier coefficient of adjustment using the vibration relationship.

Abstract: A method for predicting an amount of distortion experienced by turbine components due to the replacement of an upper turbine portion, such as an upper casing, is disclosed. In an exemplary embodiment, a horizontal plane is defined by reference to support points for the turbine casing or shell. From this plane, the relative elevations of support points for a component being aligned is measured, as are elevations along the turbine lower casing at the same axial location as the component. From these relative elevations, vertical and/or transverse offset values are calculated using a predictive algorithm. These offset values may then be used to adjust the aligned component to compensate for the predicted amount of vertical and/or transverse displacement that occurs when the upper casing(s) is/are replaced.

Abstract: A method for calibrating a non-contact range sensor comprises the steps of employing the range sensor to obtain a range image of an object to be inspected. The range image is registered with a reference image of the object thereby providing registered data. The reference image may be derived through computer assisted drawing (CAD) data. Normal deviations between the registered data and the reference image are computed. Noise is filtered from the normal deviations. A plurality of bias vectors and a covariance matrix are estimated based on the normal deviations, stored in memory as a lookup table comprising geometric correction factors for the sensor. Images of the object subsequently obtained by the sensor are compensated in accordance with the lookup table.

Abstract: The present invention provides for a method and apparatus for correction of overlay control errors. Semiconductor devices are processed based upon control input parameters. The processed semiconductor devices are examined in a review station. The control input parameters are modified in response to the examination of the processed semiconductor devices. New control input parameters are implemented for a subsequent run of the semiconductor device processing step based upon the modification of the control input parameters.

Abstract: Amplifiers (41 to 44) connected to a CNC (10) are provided individually with memories (41b to 44b) that are stored with ID data for discriminating the kinds and properties thereof and ID data as maintenance management data. Likewise, motors (41c to 44c) are provided with memories (41c to 44c) stored with ID data. The management of the amplifiers and the motors is facilitated by reading these ID data from the CNC (10) and displaying them on a display unit (20). Based on the ID data, moreover, adaptation or nonadaptation between the motors and the amplifiers is automatically determined by means of the CNC (10).

Abstract: When plural board blocks formed in one board undergo sequential part-mountings at plural mounting stages, particular recognition points and recognition points in the board blocks target of a downstream mounting stage are recognized at an upstream mounting stage. Relative positional data of each recognition point of the board block with respect to the particular recognition points are thus obtained at the upstream mounting stage. At the mounting stage on downstream side, only the particular recognition points are recognized thereby detecting a whole position of the board. Based on the whole position and the relative positional data, a positional deviation of the board block at the mounting stage can be detected, so that repeated recognition of the same recognition points is avoided thereby shortening a total time of position recognition.

Abstract: A spindle is formed with a radial flange in a vicinity of a front end thereof, a spindle feed shaft rotatably holding the spindle has a non-contact type deviation detector secured thereto in opposite to a surface of the flange in an axial direction of the spindle, the deviation detector detects a deviation of an air gap in the axial direction between therefrom to the flange surface, a correction value of an axial position of the spindle is calculated in accordance with the detected deviation of the air gap, and a command responsible for tile axial position of the spindle is corrected in accordance with the calculated correction value to compensate for an axial position of the front end of the spindle.

Abstract: Apparatus and method for determining the alignment positions and orientations of vehicle wheels includes optical targets mounted on the wheels. A pair of cameras or other image sensing devices on each side of the vehicle are used to obtain images of the various optical targets and a computer is responsive to the images of the targets to determine values of wheel alignment parameters of the vehicle. The surface on which the wheels are disposed may be an automotive lift or a stationary runway. One camera on each side is directed at the target on the corresponding front wheel and the other camera on each side is directed at the target on the corresponding rear wheel. When used with a rack, the major axis of the field of view of each camera is disposed vertically. When used with a stationary runway, the major axis of the field of view of each camera is disposed horizontally.

Abstract: A machine tool is controlled through a process incorporating the steps of (1) measuring geometric and thermal errors with accurate instruments, (2) creating a global differential wet model of machine tool position, and (3) using this model to control real time compensation of machine tool operation. A controller modifies encoder-type position feedback signals used by the machine to compensate for geometric and thermal errors in the manner dictated by the global differential wet model.

Abstract: A computer-controlled method for automatically positioning a guide for a biopsy needle for its proper insertion into the body of a patient from a selected point on a surface of the body, so as to enter in a straight line passing through a designated target region within the body, in conjunction with an imaging system utilizing radiation from first and second source positions for deriving first and second radiographic images.

Abstract: A controller for a work transfer system, capable of performing precise positioning of feed bars during sole driving of the transfer system and simplified in structure to contribute to savings in installation space and cost. The controller has a cam angle detector mounted on a cam shaft for feed cams and controls servo motors for respective lift bars according to information which is related to cam angle of the feed cams detected by the cam angle detector and looked up in a motion table set by a transfer controlling PLC serving as a motion table setting means.

Abstract: A method for detecting the leading edge of a sheet of print medium by driving a line feed motor at a predetermined speed; scanning and storing a data block of the sheet by slices; determining the leading edge of the sheet, based on the scanned and stored data; calculating sheet position according to the edge determination, and calculating a drive value of the line feed motor according to the sheet position; and second driving the line feed motor according to the calculated drive value. The data of the scanned data block is stored such that a scanning level of pixel data for a given horizontal line is regularly stored in an address memory, and the determining step searches for a boundary on which both near-absolute black and near-absolute white pixel data values are indicated in the scanning and storing step.

Abstract: A method for repairing a printed circuit board includes the step of generating fault data relating to the plots or layout of a printed circuit board from a circuit board testing device. The printed circuit board under test is positioned on a workstation. An image containing repair data based on the fault data is projected directly onto the printed circuit board and is overlaid in registration with the plot or layout of the printed circuit board to assist in operator repair.

Abstract: Automatic tracking lighting equipment for automatically tracking a target to be illuminated. A spotlight is supported for pivoting in horizontal and vertical directions on a ceiling surface. A horizontal drive mechanism changes the horizontal angle of the spotlight and a vertical drive mechanism changes the vertical angle of the spotlight. A CCD camera picks up the image of a target area to be illuminated. An image recognition unit processes the image from the CCD camera to recognize the target to be illuminated and to specify its coordinates. A coordinate calculation unit calculates how far to move the spotlight based on a distance of the target to be illuminated. A movable control unit converts the output of the coordinate calculation unit into drive signals for the horizontal drive mechanism and for the vertical drive mechanism and outputs drive signals to pivot the spotlight in a desired direction.

Abstract: A robot calibration system includes a calibration sensor that provides an indication of when a first reference point that remains fixed relative to a robot base is a fixed distance from a second reference point that is located on the robot arm. The robot arm is moved through a plurality of orientations and each time that the fixed distance between the two reference points is achieved, robot joint position information is determined. The preferred calibration sensor includes a string that extends between the two reference points and activates a signal generator each time that the string is taut as caused by the orientation of the robot arm. The generated signal indicates that the two reference points are separated by the fixed distance. The determined robot joint positions are then used to determine a calibration factor which varies depending on the needs of a particular situation.

Abstract: A method of correction of a mask pattern in which the mask pattern of a photomask to be used in a photolithographic step is deformed so that a transfer image near a desired design pattern is obtained, including an evaluation point arrangement step for arranging a plurality of evaluation points along an outer periphery of the desired design pattern; a simulation step for simulating the transfer image to be obtained where exposure is carried out under predetermined transfer conditions by using a photomask of a design pattern given the evaluation points; a comparison step for comparing a difference between the simulated transfer image and the design pattern for every evaluation point; and a deformation step for deforming the design pattern according to the difference compared for every evaluation point so that the difference becomes smaller and a correction apparatus for the same.

Abstract: A method of correction of a mask pattern in which the mask pattern of a photomask to be used in a photolithographic step is deformed so that a transfer image near a desired design pattern is obtained, including an evaluation point arrangement step for arranging a plurality of evaluation points along an outer periphery of the desired design pattern; a simulation step for simulating the transfer image to be obtained where exposure is carried out under predetermined transfer conditions by using a photomask of a design pattern given the evaluation points; a comparison step for comparing a difference between the simulated transfer image and the design pattern for every evaluation point; and a deformation step for deforming the design pattern according to the difference compared for every evaluation point so that the difference becomes smaller and a correction apparatus for the same.

Abstract: A method for verification of components installed on a printed circuit board includes the step of capturing an image of an entire printed circuit board and components mounted thereon using a scanning device. After it has been determined that a printed circuit board having no defects, the scanned image of the circuit board has no defects is stored in a memory. The image of the entire printed circuit board under test, and having potential defects is then captured using a scanning device. The image of the printed circuit board under test is then stored in a memory. The stored image of the printed circuit board having no defects is then overlaid in registration with the stored image of the printed circuit board with potential defects on a display in alternating sequence in order to visually provide an indication of a defective component or defective component placement on the printed circuit board under test to an operator.

Abstract: A position control system, capable of correcting the positional deviation between mechanically related control axes. The position control system comprises a structural body having a Y-shaft supported by a fixed member so that two end portions can move in a vertical direction and a main shaft provided in this shaft so that it can move in a horizontal direction, servo motors for driving the two end portions, a servo motor for driving the main shaft, and a control device for performing the servo control of the servo motors. The control device adjusts the positions of the two end portions of the Y-shaft in accordance with the position of the main shaft with respect to the Y-shaft at the position control to correct the positional deviation from the target position of the main shaft in the vertical direction.