Abstract: Systems of process control integration are provided. An embodiment of a system of process control integration comprises multiple process control systems (PCSs) and a supervisor controller. Each PCS calculates at least one process parameter based on at least one process model, a process target and an acceptable range. The supervisor controller couples to and coordinates the PCSs. A semiconductor fabrication operation is performed on a wafer based on the process parameter.

Abstract: User interface for reporting event-based production information in product manufacturing. Some of the disclosed embodiments include a system, method, computer-readable medium, and display device for processing data stored in a database. The data includes automatically collected event-based production information records in a manufacturing system wherein each record represents an event and includes a timestamp, an event code, and a measure of cost or production loss associated with the event.

Abstract: A method of controlling a semiconductor device manufacturing process for a product which is newly applied and a control system for the same process are provided. According to an embodiment on the control method, a sample process time for a product applied to the semiconductor device manufacturing process for the first time is calculated. The semiconductor device manufacturing process is performed based on the calculated sample process time. Then, a main process time is calculated by applying the stored sample process time to a main process time equation. The semiconductor device manufacturing process can be controlled on the basis of the main process time. The sample process time may be stored in an information storage table.

Abstract: An information delivery system and its method and a program of the system, in which plural robots are used and users can obtain information effectively via the plural robots from the wider range than the range where only one robot moves, are provided. Each of the plural robots provides an information delivering means to users and an information exchanging means with an information server. The plural robots and the information server connect to a network. The robot obtains information to be delivered to an identified person from the information storing in the information server. And the robot delivers the obtained information to the identified person.

Abstract: The invention provides a system for virtually designing a medical device conformed for use with a specific patient. Using the system, a three-dimensional geometric model of a patient-specific body cavity or lumen is reconstructed from scanned volume images such as obtained x-rays, magnetic resonance imaging (MRI), computer tomography (CT), ultrasound (US), angiography or other imaging modalities. Knowledge of the physical properties of the cavity/lumen is obtained by determining the relationship between image density and the stiffness or elasticity of tissues in the body cavity or lumen and is used to model interactions between a simulated device and a simulated body cavity or lumen.

Abstract: A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of manufacturing facilities and coupled with the centralized CIM system; and a centralized basic record module, coupled and coordinated with the centralized CIM system, and designed for defining a unified process flow associated to a mobile object.

Abstract: The invention relates to a manufacturing execution system comprising: a manufacturing execution plan being indicative of a set of manufacturing steps to be executed for manufacturing a product, a planning component for determining a context-specific data collection plan of data to be collected during execution of one of the manufacturing steps, a service interface for providing the data collection plan in response to a service request, a database for storing data that has been collected in accordance with a context-specific data collection plan

Abstract: A system, method, and storage medium for determining packaging design for one or more containers are provided. The method includes selecting at least one 3-D CAD model of a manufactured part. The method further includes selecting a first 3-D CAD model of a first container defining a first receiving region. The method further includes automatically generating a first plurality of 3-D part packaging designs for the first receiving region wherein each 3-D part packaging design comprises a distinct orientation or positioning of at least the 3-D CAD model of the manufactured part and a second 3-D CAD model and selecting a first 3-D part packaging design from the first plurality of 3-D part packaging designs. The method further includes generating a first dunnage design based on the first 3-D part packaging design and the first receiving region, wherein a first volume defined by the first 3-D part packaging design and the first dunnage design can be held within the first receiving region.

Abstract: An estimation system for estimating an injection-molding related cost comprises an input unit, storage, a data processing unit, and an output unit. The storage stores a mold estimation function for each of cost items of a mold used to produce a molded product, and a mold estimation reference value table for recording mold estimation reference values in association with prescribed conditions. The data processing unit acquires a fabrication condition of the molded product through the input unit, reads the mold estimation function and one of the mold estimation reference values from the storage corresponding to the fabrication condition, and estimates a cost of the mold based on the mold estimation function and the selected mold estimation reference value. The output unit outputs a mold cost estimation result made by the data processing unit.

Abstract: A global predictive monitoring system for a manufacturing facility. The system may be employed in an integrated circuit (IC) device fabrication facility to monitor processing of semiconductor wafers. The system may include deployment of a swarm of individually separate agents running in computers in the facility. Each agent may comprise a genetic algorithm and use several neural networks for computation. Each agent may be configured to receive a limited set of inputs, such as defectivity data and WIP information, and calculate a risk from the inputs. A risk may be a value indicative of a production yield. Each agent may also generate a quality value indicative of a reliability of the risk value. New agents may be generated from the initial population of agents. Outputs from the agents may be collected and used to calculate projections indicative of a trend of the production yield.

Abstract: An engineering analysis system may provide an engineering analysis framework that operates both with an engineering analysis application and the databases that include the data to be analyzed. The framework includes a plurality of components which may be used in different combinations in different situations.

Abstract: The invention relates to a method for the automatic retrieval of engineering data from installations. The engineering and runtime objects are described by a uniform object model. This allows the correspondence between engineering objects and runtime objects to be determined at object level and no information is lost as a result of the mapping. In addition, a direct communication between engineering and runtime objects can take place, which can be utilized when the method is carried out.

Abstract: A manufacturing system, located at a manufacturing system site, includes a discharger for discharging a liquid material having fluidity onto a substrate, communication means for transmitting and receiving data through a communication line, and monitoring means for monitoring the state of the discharger and for outputting data obtained by the monitoring through the communication means. The communication means provides communication between the monitoring means at the manufacturing system site and a server located outside of the manufacturing system site. The monitoring means receives a control command from the server through the communication means.

Abstract: A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating at least one system-wide configuration file and at least one component-level configuration file using the key file. The method additionally includes generating run-time executable objects from a database of option definition files, the at least one system-wide configuration file and the at least one component-level configuration file. Furthermore, the method includes employing the run-time executable objects to configure the plasma cluster tool.

Abstract: A part cost estimation system including a processing cost information storage device; a shape designating device configured to designate the shape of the part; a processing designating device configured to designate contents of processing to be performed on a material to form the part having the designated shape; a processing facility designating device configured to designate a processing facility; a processing time calculating device configured to calculate a processing time; a processing cost calculating device configured to calculate a processing cost spent on manufacturing the part based on a unit machining cost and the processing cost calculated by the processing time calculating device; and an adding device configured to add the processing cost to determine a cost of the part.

Abstract: A substrate processing system comprises a substrate processing apparatus and a support computer, which are connected to a network respectively. Updated countermeasure information is accumulated in the support computer by a system administrator. When the substrate processing apparatus causes a failure, content of the failure is displayed on a display part while an alarm processing part controls process according to an alarm definition file. Further, a countermeasure information acquisition part requires updated countermeasure information against the failure from the support computer. In response to this, countermeasure information distribution part of the support computer transmits updated countermeasure information. Thus, updated countermeasure information can be read instantly when a failure occurs.

Abstract: A computer implemented management domain for controlling the production of low volume advanced technology articles of manufacture is provided. The management domain includes an information library, an integrated manufacturing intelligence, and an interrogation network which includes a plurality of analyzers. The information library includes a plurality of databases, each of which include objects of an object schema. Objects of the object schema of any one database are linked or linkable to dependent objects of objects of an object schema of another of the databases. The integrated manufacturing intelligence includes a plurality of processors for processing data of the databases. Each analyzer of the plurality of analyzers executable with regard to an advanced technology article of manufacture and/or any object of the objects of said object schema of the databases.

Abstract: A data set (D) is provided for machine control of a grinding machine to determine time-efficient, collision-free travel paths. The data set has a collision parameter of “0” or “1” in each separate coordination point (X, Y, Z, A) as well as for each combination of the separated tool types (WZI) and workpiece types (WSJ). The collision parameter indicates if the constellation assigned to the corresponding coordination point (X, Y, Z, A), which means the relative position of workpiece (11) and tool (3), does or does not result in a collision or spatial overlapping of the tool and the workpiece. The data base (D) forms a lookup table that can be used to check given paths or expansions or the step-by-step layout of paths. The computation of time-efficient paths can be performed within a few seconds, even at limited computing capacities.

Abstract: The invention relates to a system and a method for modelling and executing business processes in MES systems (manufacturing execution systems) or manufacturing control systems by means of a plurality of independently operating processes which are modelled by automatic state or execution machines and interconnected asynchronous connections. Said processes can be independently distributed to a plurality of computers (deployment) and communicate with each other in an asynchronous manner. The modelling of said automatic execution machines is carried out by means of activity and data flow diagrams according to UML representation. An advantage of the inventive system or method is that said processes can be immediately executed and tested. External software systems can be integrated by means of wrappers or adapters.

Abstract: This invention overcomes the disadvantages of the prior art by providing a human/machine interface (HMI) for use with machine vision systems (MVSs) that provides the machine vision system processing functionality at the sensor end of the system, and uses a communication interface to exchange control, image and analysis information with a standardized, preferably portable device that can be removed from the MVS during runtime. In an illustrative embodiment, this portable device can be a web-browser equipped computer (handheld, laptop or fixed PC) or a Personal Digital Assistant (PDA). The communication interface on the sensor-end of the system is adapted to communicate over a cable or wireless communication link (for example infrared (IR) or radio frequency (RF)), with a corresponding communication interface in the portable device.

Abstract: Methods and apparatus for generating mosaics from a given image. The method and apparatus comprise scanning the image into a computerized form, optionally marking guidelines on the image, and generating a mosaic description from the image. The mosaic description comprises tiles placed along the guidelines in directions tangent to the guidelines. A user can edit and make changes to the mosaic description. The mosaic description is optionally split to sheets, and transferred to a placing machine, preferably pick and place machine such as an SMT machine for generating a mosaic from the mosaic description.

Abstract: Automated comparison of tool recipes is described. A target recipe is digitally translated from a tool language to a standard language format to produce a translated recipe. The translated recipe is digitally compared to a source recipe that is also in the standard language format.

Abstract: A method and apparatus for managing recipes in a semiconductor manufacturing process. Recipes and associated process contexts in a manufacturing execution system and corresponding recipes and associated contexts in a recipe management system are audited to identify discrepancies. The discrepancies are reconciled to ensure that compatible recipes and process contexts are maintained in the manufacturing execution system and the recipe management system. The audit and reconciliation process can be initiated automatically at predetermined time intervals or can be initiated interactively by a user of the manufacturing system.

Abstract: A substrate processing apparatus and an information storage server are connected with each other through a network. A storage part of the substrate processing apparatus stores set information and a control program, for controlling operation of the substrate processing apparatus according to the set information and the control program. The substrate processing apparatus is provided with a schedule function, for transmitting a backup instructional command according to the schedule. In response to this instructional command, the substrate processing apparatus generates a duplicate of specified information stored in the aforementioned storage part and transfers the duplicate information to the information storage server through the network. The information storage server stores the received duplicate information in a hard disk as backup data. The information storage server can also store only differential data of the duplicate information.

Abstract: A system and method of integrating geometric models, comprising identifying a product to design or manufacture, generating a product template, initiating the generation of at least one geometry, associating knowledge with the geometry, performing operations on the geometry, comparing results of the operations to rules, modifying the geometry and the knowledge, propagating the modifications to at least one second geometry, and updating the template.

Abstract: A system and method that prioritizes product lots for fabrication and dispatching to manufacturing equipment establishes priorities for dispatching product lots based on a criticality factor and establishes a priority for dispatching product lots to manufacturing equipment based on processing capability and the efficiency of manufacturing equipment. A computer integrated manufacturing system executes a program process that functions as a lot dispatcher and a priority factor calculator. The lot dispatcher is in communication with an order entry system to receive requests for fabrication and with a process information system to receive procedures defining which manufacturing equipment is required. A manufacturing information system provides the lot dispatcher with a criticality factor and a queue level for each piece of manufacturing equipment. Then the current group of pieces of manufacturing equipment is followed with a balanced loading.

Abstract: By analyzing process messages exchanged between one or more process tools and a remote host system, the status of the communication may be efficiently monitored. The analysis of the respective process messages may allow interpretation of process messages so as to have increased intelligibility, wherein additionally the process messages may be classified in accordance with one or more predefined criteria. Thus, the detection of even subtle communication inefficiencies may be significantly enhanced.

Abstract: A method and apparatus for use with a component assembly that forms part of an enterprise and at least one processor, the processor programmed to perform at least one diagnostic process on the assembly and to at least periodically perform at least one summary process on the assembly, the method for commencing the at least one summary process and comprising the steps of specifying at least one triggering relationship between at least a first enterprise user and the assembly that is to initiate the at least one summary process, determining when the at least one triggering relationship occurs and, when the at least one triggering relationship occurs, causing the processor to perform the at least one summary process.

Abstract: A method for identifying an area of a chip to be probed proceeds as follows. A callout list of failures is obtained from a tester, the list including cell name and pin for each failure. A Def file is interrogated to locate a Def entry matching the cell name, and a cell type, cell location, and cell orientation data is obtained for the cell from the Def file. A Lef file is then interrogated to locate a Lef entry matching the cell type, and the coordinates of the pin are obtaining from the Lef file. A GDS file is interrogated to locate a GDS entry matching the cell type, and the coordinates of polygons listed in the GDS entry are obtained. The coordinates of the pin are then crossed with the coordinates of the polygons to identify overlapping area. The overlapping area is defined as the location to be probed. A driving signal is applied to a stage to align a prober with the location to be probed.

Abstract: A system is provided to allow for automated planning and scheduling the work flow for reconfigurable production systems having a plurality of modules, with each module having alternative capabilities. The system includes a system controller, a planning function for planning the concurrent production of regular and diagnostic work units, and a scheduling function for scheduling the concurrent production of regular and diagnostic work units.

Abstract: A system is provided to allow automated planning and scheduling of the work flow for reconfigurable production systems having a plurality of modules, with each module having alternative capabilities. The system includes a system controller, at least one planning function, and at least one scheduling function.

Abstract: System, method and program product for tracing first, second and third processes for producing a product. First, second and third process instances for the first, second and third processes, respectively, are generated. Tracing information is stored in association with the first, second and third process instances to indicate respective execution conditions. The third process instance is executed after the second process instance, and the second process instance is executed after the first process instance. The first process instance yields a product which is subject to the second process instance, and the second process instance yields a product which is subject to the third process instance. A first pointer indicates that the second process instance follows the first process instance, and a second pointer indicates that the third process instance follows the second process instance.

Abstract: A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values stored in the semiconductor processing apparatus against verification data stored in the database. The results of the evaluation are used to determine whether a process will be performed by the semiconductor processing apparatus.

Abstract: A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

Abstract: A system for acquiring semiconductor process status information. An equipment server outputs a start command according to a HSMS protocol to a computer system server, which converts the start command from the HSMS protocol to a RS232 protocol and outputs the converted command to a protocol converter. The protocol converter converts the start command from the RS232 protocol to a RS485 protocol and outputs the converted command to an AD/DA module. The AD/DA module converts the start command from the RS485 command to an analog signal and outputs the converted command to an external sensor, which acquires semiconductor equipment status information as initiated by the start command. The acquired status information is then sent on a reverse path to the start command, undergoing successive conversion and output until reaching the equipment server.

Abstract: In a system including a plurality of diverse semiconductor manufacturing facilities, each of the facilities having a respective manufacturing process requiring semiconductor specific design information in a corresponding diverse format, a method for supplying data to each of the facilities in an appropriate format includes establishing a database for each of the plurality of facilities, the database identifying the appropriate format for each of the facilities. The method also includes receiving semiconductor specific design information and converting the design information in accordance with the appropriate format for one of selected ones of the facilities. The method further includes providing a respective tapeout to said one of the selected ones of the facilities, each tapeout comprising the design information formatted in the appropriate format for the respective facility receiving the tapeout.

Abstract: The website hosted by the server is a collection of separately recorded musical tracks with the music containing a minimum of at least one musical instrument or vocal. Users may record additional tracks of music to add to a primary track. There is one primary track and up to six accompaniment or comptracks. The server allows the client to add one or more tracks to any other tracks for a given song title within the database. Separate tracks then selected by the client and mixed in the mixer into a single sound recording which is then communicated over the server across the internet to the client so the client may hear the finished or composite mixed musical work. If the mixed or composite composition is not to the liking of the user, then different tracks may be selected or rerecorded mixed in sample again.

Abstract: A dynamically-reconfigurable production line includes an item-interaction unit and an item-identification unit configured to read item data from an item approaching the item-interaction unit. On the basis of the item data, a processor accesses a memory to select particular configuration data stored therein provided by the item-identification unit. The processor then causes an actuator to reconfigure the production line consistent with the particular configuration data.

Abstract: Methods and systems of controlling an enterprise and for providing a control architecture. In some embodiments, a multiple level business model is used to define business processes, and control, regulate, or synchronize those processes. Actual processes are generally executed at lower levels, while control of the processes is carried out one level higher. At an echelon two levels higher, coordination of the processes based on objectives and available shared assets is carried out. A fourth level may be used to provide planning and development, and a fifth level may be used to set the objectives of an enterprise or enterprise unit. Implementation of this model provides control and monitoring of value production, performance measurement, and timely exchange of information and instructions.

Abstract: The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle (200) having lifecycle activities for SW developing and integrating (210), installing and administrating (220), factory modeling (230), manufacturing planning (240), manufacturing controlling, monitoring and tracking (250) and analyzing of manufacturing results (260). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

Abstract: The present invention provides a process manufacturing integration system (PROMIS) comprising: a plurality of PROMIS ISAM files; a TEST database having a plurality of TEST fields for storing a plurality of status controlled DCOP definitions within an associated ISAM file; a CAUX database having a plurality of CAUX fields for storing a plurality of control chart definitions within an associated ISAM file; and an associated graphical user interface to better control each of a plurality of data collection operations (DCOP). Further provided is a method of using the PROMIS comprising the steps of: associating an equipment identification (EQP ID) with a control chart identification (CHART ID) within a chart table (Tc); associating the CHART ID with a data collection operation (DCOP) within a operation chart table (To); and creating a DCOP control methodology chart by combining the Tc with the To to associate the EQP ID with a DCOP.

Abstract: A flexible control system and method of controlling a processing operation. The control system and method may be employed to control a high speed manufacturing system for processing articles of manufacture requiring processes to be performed on the articles at a pre-selected processing rate includes a trunk for simultaneously conveying a plurality of the articles of manufacture at the pre-selected processing rate in a first mode of motion from the beginning of the manufacturing system to the end of the system. At least one branch processing station is positioned intermediate the beginning and the end of the trunk wherein the branch processing station during its operation performs at least one process on articles of manufacture conveyed on the branch processing station and where the articles are conveyed in a second mode of motion.

Abstract: A board work system operable by a plurality of operators assigned in turn to operate. The system includes (a) at least one device changeable to each one of a plurality of different modes; (b) a control device which controls the changeable device, and receives operator ID data identifying each operator, so as to recognize which one of the operators is currently assigned to operate the system; and (c) an ID-data input device operable to input the operator ID data to the control device. The control device includes: (b-1) a suitable-mode-establishing-data storing portion which stores suitable-mode-establishing data representative of one of the different modes which is to be established during operation of the system by each operator; and (b-2) a suitable-mode establishing portion which establishes one of the different modes on the basis of the suitable-mode establishing data and according to the operator ID data inputted to the control device.

Abstract: According to an embodiment of the present invention, a material processing systeme (1) including a process tool (10) and a process performance control system (100). The process performance control system (100) includes a process performance controller (55) coupled to the process tool (10), where the process performance controller (55) includes a process performance prediction model (110), a process recipe correction filter (120), a process controller (130), and process performance model correction algorithm (150). The process performance prediction model (110) is configured to receive tool data from a plurality of sensors coupled to process tool (10) and to predict process performance data. The process recipe correction filter (120) is coupled to the process performance prediction model (110) and configured to receive predicted process performance data and generate a process recipe correction for run-to-run process control.

Abstract: A method for configuring a specific plasma cluster tool having a plurality of modules. The method includes providing a set of module option definition files, the set of module option definition files containing generic configuration definitions for generic plasma cluster tools. The method further includes providing a set of tool-specific protection information, the set of tool-specific protection information including data that specifically identifies the particular plasma cluster tool for which the configuring is intended. The method further includes providing a set of tool-specific options specifications, the set of tool-specific options specifications specifying options that are specified for the specific plasma cluster tool. The method additionally includes generating a key file, the key file encapsulating configuration restrictions imposed on the specific plasma cluster tool, the key file being configured to be a required file in the configuring the specific plasma tool.

Abstract: A process monitoring system (100) for monitoring a plasma processing system. The process monitoring system (100) includes a plurality of processing subsystems (120), and a control system (110) coupled to the processing subsystems (120). The control system (110) is configured to receive monitor data from the processing subsystems (120) and send control data to the processing subsystems (120). The process monitoring system (100) also includes an external interface (140) coupled to the control system (110), where the external interface (140) includes a paging system. The process monitoring system further includes a man-machine interface (MMI) coupled to the control system (110). The MMI is configured to display the monitor data, display the control data, and access the paging system.

Abstract: The present invention relates to a system and methodology facilitating material class processing and quality controls in an industrial controller environment. One or more classes are provided that generically describe materials or components of a recipe. The classes are associated with the recipe and resolved or determined before or during runtime of automated processes producing the recipe. If a class designation is encountered during recipe execution, an operator can be queried for which material or materials from the detected class is desired for the recipe currently being produced. After a material is selected from the class, the recipe is then processed according to the selected material from the respective class. In another aspect, automatic selections can be made to resolve members of class-based recipes.

Abstract: A computing product is first assembled according to a predetermined hardware configuration and placed in a shipping container thus providing a containerized computer system. The computing product has a wireless communication subsystem for wirelessly receiving configuration information. The containerized computer system is fully configured before shipping the computer system to a predetermined customer by exchanging information between the wireless communication subsystem and a wireless information network in the manufacturing facility.

Abstract: An inkjet manufacturing device 2 includes a discharger 10 for discharging a liquid material onto anything onto which the liquid material is to be discharged, a communication section 22 for transmitting and receiving data through a communication line, and a monitoring section 21 for monitoring the state of the discharger 10 and outputting data obtained by the monitoring through the communication section 22.

Abstract: Plural processing apparatuses 3 such as CVD apparatuses 31 and diffusion apparatuses 33, measuring apparatuses 5, and a control computer 7 for management are connected through a LAN 9. Each processing apparatuses 3 stores control data for performing a treatment. The control computer 7 also stores the control data for the processing apparatuses 3. The control computer 7 makes each processing apparatus perform a treatment for calibration. The control computer 7 receives a result of the treatment performed by the processing apparatus 3 to be calibrated, and calibrates the control data stored in the control computer 7 based on the treatment result. The control computer sends the calibrated control data to the processing apparatus 3 after completion of the calibration procedure. The processing apparatus 3 stores the calibrated control data, which is used for subsequently performed treatment.