Abstract: A valve assembly may include: a valve body with a fluid path extending between the inlet port and the outlet port; a valve member with a closed position blocking the fluid path and an open position; a sensor the fluid flow; an actuator coupled to the valve member; and a controller for the actuator with a set point value and a default flow rate indicative of nominal flow through the fluid path. The controller may: read the sensor; calculate a flow rate; compare the flow rate to a threshold value indicative of substantially zero flow rate; and if the measure of flow rate is below the threshold value, calculate a position of the valve member directly from the set point value and the default flow rate, produce a control signal from the calculated position, and communicate the control signal to the actuator.

Abstract: In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.

Abstract: A method and an apparatus are disclosed for measuring of fluid flow in a fluid distribution system, including a centrally located fluid source which is connected via separate feeding conduits to a number of fluid tap units, each including at least one fluid tap. The method comprises the steps of providing, for each said separate feeding conduit, a first fluid pressure sensor located anywhere along the separate feeding conduit or in the associated fluid tap unit, and a second fluid pressure sensor, serving as a reference pressure sensor common to all of the feeding conduits and being located adjacent to the centrally located fluid source. Each of the first and second fluid pressure sensors are connected to a control unit.

Abstract: A flow meter has a meter wheel housing connectable in-line in a liquid conduit such that liquid flows through the meter wheel housing from an input port to an output port. Liquid flowing from the input port to the output port rotates a meter wheel mounted in the housing, and a wheel sensor measures rotational speed of the meter wheel. A first jet member defining a first orifice with a first cross-sectional area is movable into a jet operating position between the upstream end of the liquid conduit and the input port such that liquid passes through the input port into the meter wheel housing only through the first orifice. A second jet member defining a second orifice with a second cross-sectional area is movable into the jet operating position. The second cross-sectional area is less than the first cross-sectional area.

Abstract: A subsea flow meter assembly includes a pipe section extending in an axial direction and providing a flow path for a medium. At least four measuring ports are provided at different locations in the pipe section. A first assembly measures at least a differential pressure between a first and second ports and an absolute pressure at one of the ports. A second assembly measures a differential pressure between a third and a fourth ports, and an absolute pressure at one of the ports. A first measuring unit is used to take measurements of the differential pressure and the absolute pressure via the first sensor assembly. A second measuring unit is used to take measurements of the differential pressure and the absolute pressure via the second sensor assembly. An evaluation unit of each determines a flow rate of a flow of medium through the pipe section based on the measurements.

Abstract: A system and method using a valve controller to control a valve. The valve controller including a position controller for moving the valve and a transmitter for providing information about the position of the valve. A calibration table and/or chart based on calibration data of the position controller is generated to provide a transmitter output value, wherein the transmitter need not be separately calibrated. The calibration table and/or chart may be stored in the position controller and provided to the transmitter upon completion of the calibration of the position controller. Dual power supply circuitry may be configured wherein a first power source supplies power to both the position controller and the transmitter to facilitate automatic calibration of the transmitter even when only the position controller is powered.

Abstract: A humidity sensor may include a first substrate having a recess formed in a first side, a second substrate and an insulating layer supported by the second substrate. The second substrate and the insulating layer may be supported by the first side of the first substrate and extend over the recess to form a diaphragm with the insulating layer facing the recess. The diaphragm may be at least partially thermally isolated from a remainder of the second substrate. A resistive heater element may be supported by the diaphragm. A pair of sensing electrodes are electrically separated from each other and supported by the diaphragm. A sensing material is disposed over the pair of sensing electrodes, wherein an electrical property of the sensing material changes in response to a change in moisture content of the sensing material.

Abstract: Systems and methods are disclosed for differential pressure meters having a constant beta edge boundary defined by fluid displacement members of the meter. In some embodiments, a differential pressure meter may have an interchangeable fluid displacement member, such that each fluid displacement member replaced in the meter maintains a constant beta edge boundary. In other embodiments, a family of differential pressure meters having permanent fluid displacement members may maintain a constant beta edge boundary for each meter of the family of differential pressure meters.

Abstract: A microradio is provided with a hysteretic switch to permit an optimum range increasing charging cycle, with the charging cycle being long relative to the transmit cycle. Secondly, an ensemble of microradios permits an n2 power enhancement to increase range with coherent operation. Various multi-frequency techniques are used both for parasitic powering and to isolate powering and transmit cycles. Applications for microradios and specifically for ensembles of microradios include authentication, tracking, fluid flow sensing, identification, terrain surveillance including crop health sensing and detection of improvised explosive devices, biohazard and containment breach detection, and biomedical applications including the use of microradios attached to molecular tags to destroy tagged cells when the microradios are activated. Microradio deployment includes the use of paints or other coatings containing microradios, greases and aerosols.

Abstract: A pressure sensor includes a flexible membrane deformable in response to pressure. The flexible membrane covers a cavity and includes a strain gauge that produces signals corresponding to deformation of the flexible membrane. The flexible membrane is a flexible monolithic integrated circuit foil.

Abstract: A multi-sensor control circuit used in an electronic cigarette comprises a control module, at least two inhalation sensors, and at least two unidirectional circuits corresponding to the inhalation sensors. An output terminal of each inhalation sensor is connected to an input terminal of a corresponding unidirectional circuit, and output terminals of the unidirectional circuits are all connected to a same input pin of the control module. Each inhalation sensor outputs a sensing voltage signal to the corresponding one of the unidirectional circuits upon sensing airflow. Each unidirectional circuit filters the sensing voltage signal received from a corresponding inhalation sensor to generate a unidirectional voltage signal, and outputs the unidirectional voltage signal to the input pin of the control module. The control module controls the electronic cigarette to work upon receiving the unidirectional voltage signal outputted from any unidirectional circuit.

Abstract: One or more techniques and/or systems are disclosed for generating a linearized pressure sensor pattern for a pressure sensor. Force may be applied to a pressure sensor sample, comprising the pressure sensor without conductors. A patch, comprising an area of contact between a top and bottom surface of the sensor sample, can be measured, which corresponds to the applied force. Patch measurements can be made for respective applied force intervals, resulting in one or more indications of applied force, respectively corresponding to an indication of a patch measurement. The linearized pressure sensor pattern can be generated using the one or more force indications and corresponding patch measurement indications.

Abstract: An airflow managing system for monitoring airflow of a HVAC system, a HVAC system and a method of monitoring the airflow in a HVAC system is provided. In one embodiment, the airflow managing system includes: (1) an air pressure sensor configured to obtain an air pressure measurement directly from a scroll of an air blower of the HVAC system and (2) a HVAC controller configured to determine an airflow rate for the HVAC system based on the air pressure measurement and corresponding parameters associated with the air blower.

Abstract: A gas flow monitoring system is provided in process gas lines each arranged to supply gas to a predetermined process chamber via a flow control device, the system being configured to measure lowering or rising of gas pressure before and after the flow control device to monitor a flow rate of the flow control device. The system includes a first flow monitoring unit placed upstream of the flow control device in a selected one of the process gas lines, a second flow monitoring unit placed in a discharge passage upstream of the process chamber, and a controller that constantly monitors the flow rate of the flow control device with the first flow monitoring unit and, when the first flow monitoring unit detects the flow-rate abnormality two or more times, commands the second flow monitoring unit to re-verify whether flow-rate abnormality is present or not in the flow control device.

Abstract: The flow rate control device is provided with: a fluid resistor provided on the flow channel; a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor; a pressure calculating part configured to calculate a pressure in a side with respect to the fluid resistor where the pressure sensor is not provided; a flow rate calculating part configured to calculate a flow rate based on the measurement pressure value and a calculation pressure value calculated by the pressure calculating part; and an abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on the measurement flow rate value and a calculation flow rate value.

Abstract: An automated calibration device that comprises a tube for trapping a multiphase sample between three ultrasound (US) transducer pairs wherein each of the three transducer pairs is positioned to measure a different fraction of the multiphase sample.

Abstract: A flow measurement in a conduit is combined with a thermal flow measurement made in a bypass channel to provide an increased range of flows over which an accurate measurement can be made. The thermal flow sensor in this combination is responsive only to a modulated component of the flow and thus provides a means of calibrating the zero of the composite instrument.

Abstract: A dynamic calibration system and method for measuring flow rates for individual petroleum wells in a well pad are provided. The dynamic calibration system and method include means for performing custom-calibration of said pressure sensor for each individual well to enhance the accuracy of the resulting flow rate measurements.

Abstract: Methods and apparatus for calibrating a plurality of gas flows in a substrate processing system are provided herein. In some embodiments, a substrate processing system may include a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber; a first flow controller to provide a process gas to the first process chamber; a second flow controller to provide the process gas to the second process chamber; a mass flow verifier to verify a flow rate from each of the first and second flow controllers; a first conduit to selectively couple the first flow controller to the mass flow verifier; and a second conduit to selectively couple the second flow controller to the mass flow verifier.

Abstract: An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.

Abstract: In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

Abstract: A system for measuring flow of process fluid through process piping, includes a flow restriction in the process piping generating a differential pressure between an upstream side of the restriction and a downstream side of the restriction. The differential pressure is related to flow of the process fluid. First and second upstream pressure transmitters are coupled to the process piping on the upstream side of the flow restriction and measure respective first and second upstream pressures. First and second downstream pressure transmitters are coupled to the process piping on the downstream side of the flow restriction and measure respective first and second downstream pressure of the process fluid. Flow rate of the process fluid is calculated based upon at least one upstream pressure and one downstream pressure. Further, degradation in at least one of the pressure transmitters is identified based upon at least two pressure measurements.

Abstract: A pressure differential meter (13) measures and the volume flow rate of a liquid (6) and a Coriolis meter (14) monitors the density of the liquid (6). When the density as monitored by the Coriolis meter (14) indicates that density is reaching the range limit of the pressure differential meter (13), the pressure differential meter (13) is re-calibrated.

Abstract: A novel enhanced flow metering device is adapted for disposing into a flow material reservoir a known volume of flow material whereby software used in conjunction with a pressure sensor may be calibrated. Additionally, by measuring the known amount of flow material returning to the flow material reservoir, checks are quickly made to ensure the pressure sensor is behaving as expected.

Abstract: A method to calibrate a flow meter includes passing a predetermined volume of fluid through a flow meter for calibration and determining a time duration of calibration from a start time to a stop time. One or more characteristics of the flow rate of the fluid is measured with the flow meter during the time duration and a plurality of time stamped measurements based on the one or more measured flow rate characteristics are generated. The flow meter is then calibrated based on the start time, the stop time, and the plurality of time stamped measurements.

Abstract: In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

Abstract: Systems and methods are disclosed for differential pressure meters having a constant beta edge boundary defined by fluid displacement members of the meter. In some embodiments, a differential pressure meter may have an interchangeable fluid displacement member, such that each fluid displacement member replaced in the meter maintains a constant beta edge boundary. In other embodiments, a family of differential pressure meters having permanent fluid displacement members may maintain a constant beta edge boundary for each meter of the family of differential pressure meters.

Abstract: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

Abstract: A method for calibrating a dust load flow measuring system is provided. The dust delivery line may be connected from a metering vessel to a calibration line leading to the input sluice in the delivery direction downstream of the installed dust load flow measuring device instead of to the gasification reactor. The input sluice is provided with a weighing unit such that the weight of the content of the input sluice is determined. A differential pressure that may be set is controlled between the metering vessel and the input sluice, the dust load flow is determined in a time interval.

Abstract: A device for automated calibration of a multiphase flowmeter comprising a tube for trapping a multiphase sample along with three ultrasound (US) transducers is described herein. The calibration device is placed vertically, using two valves the tube traps a sample of the liquid in the tube. Then, once the three phases of the liquid separate, the ultrasound transmitters are used to determine the phase fractions of each phase.

Abstract: A system and method for calibrating an ultrasonic flow meter. In one embodiment, a method includes disposing a fluid circulating device within a flow meter. Fluid is circulated in the flow meter by operation of the fluid circulating device. An acoustic signal transit time within the flow meter is measured during the circulating. Based on the measuring, a portion of the acoustic signal transit time caused by latency induced by components of the flow meter is determined.

Abstract: Systems and methods are disclosed for differential pressure meters having a constant beta edge boundary defined by fluid displacement members of the meter. In some embodiments, a differential pressure meter may have an interchangeable fluid displacement member, such that each fluid displacement member replaced in the meter maintains a constant beta edge boundary. In other embodiments, a family of differential pressure meters having permanent fluid displacement members may maintain a constant beta edge boundary for each meter of the family of differential pressure meters.

Abstract: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

Abstract: A method and apparatus that solve the problem of accurate measurement of gas flow so that the delivery of gases in semiconductor processing may be performed with greater confidence and accuracy by performing real-time characterization of a lead-line for mass flow controller (MFC) flow verification are provided. In one embodiment a mass flow verifier (MFV) provides rate of rise information to a controller via a digital interface without correcting for lead-line influences. After receiving the rate of rise data, the tool host computer computes a gas mass correction factor in real-time based on at least one of the following: MFC temperature sensor data, lead-line temperature sensor data, lead-line pressure transducer data, and lead-line volume. The rate of rise data and gas mass correction factor are used to compute accurate mass flow. The accurate mass flow information may be used to calibrate the MFC.

Abstract: A method of providing configuration information for a process fluid flow device is provided. The method includes receiving a process fluid selection and providing at least one selectable fluid property relative to the selected process fluid and receiving at least one process fluid property selection. Information relative to a primary element is also received. Reception of a reset relative to the process fluid selection, the process fluid property, and the primary element selection, clears the respective information. The configuration information is provided to a process fluid flow device based on the process fluid selection, the process fluid property and the primary element information.

Abstract: Systems, devices, and methods to mitigate the pressure disturbance associated with the injection of low-pressure analyte samples into a high-pressure HPLC fluid stream, to enhance chromatographic performance related to retention time and reproducibility. The preferred embodiment coordinates the injection run with active pressure control of a binary solvent delivery system to virtually eliminate the customary pressure drop when the low-pressure loop is brought on line. An additional benefit that enhances reproducibility is accomplished by forcing a consistent timing relationship between the injection run, the mechanical position of the delivery pump pistons, and the start and subsequent gradient delivery.

Abstract: A pressure gauge for determining at least one pressure value describing a pressure of a fluid flowing in a pulsating manner in a phase of the pulsating flow, includes a pulse wave characterizer. The pulse wave characterizer is configured to obtain transmit time information of a pulse wave, and amplitude information of the pulse wave. The pressure gauge additionally includes a pressure value determiner configured to obtain a first pressure value describing a pressure of the fluid in a first phase, on the basis of the transmit time information and while using a mapping. The pressure value determiner is further configured to obtain a second pressure value describing a pressure of the fluid in a second phase, on the basis of the first pressure value and the amplitude information while using a mapping.

Abstract: A testing method for testing a flow controller with high accuracy by shortening as much as possible the time required for the test including the wait time. A testing-subject flow controller and a testing-standard flow controller are arranged in that order in series from the upstream side in a flow channel through which a fluid whose flow is to be controlled flows. In a flow-uncontrolled state in which the valve of the testing-subject flow controller is practically in the full-open state, and with the fluid flow controlled to a predetermined flow rate by the testing-standard flow controller, whether the actual flow-rate measurement according to the testing-subject flow controller falls within a predetermined range of actual flow-rate measurements according to the testing-standard flow controller is determined.

Abstract: A method of determining a flow rate of a pump involves determining a volume capacity for a flow line carrying produced fluids from the pump, determining a starting pressure for the flow line and setting an arbitrary target pressure for the purpose of testing. The test is initiated by preventing flow in the flow line while continuing to operate the pump and monitoring pressure in the flow line to determine a time interval required to reach the target pressure. The method then involves performing calculations to determine flow rate using the volume capacity, the starting pressure, the change in pressure over the time interval required to reach the target pressure. The flow rate is equivalent to ?V divided by a change in time ?T. The method is preferably used as part of a manual or automated pump control strategy to keep the pump operating within flow rate ranges that provide optimum pump efficiency.

Abstract: One embodiment provides a flow meter including an airfoil movably secured in the airflow path of a fan in an electronic system. The airfoil is configured to generate a lift component in response to the airflow. A sensor engages the airfoil and generates a signal in relation to the movement of the airfoil. Airflow parameters such as volumetric airflow rate and turbulence may be identified by an analysis of the movement of the airfoil.

Abstract: A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal.

Abstract: Systems, devices, and methods to mitigate the pressure disturbance associated with the injection of low-pressure analyte samples into a high-pressure HPLC fluid stream to enhance chromatographic performance related to retention time and reproducibility. The injection event is coordinated with active pressure control of a binary solvent delivery system to virtually eliminate the customary pressure drop when the low-pressure loop is brought on line. Consistent timing with the injection event of the mechanical position of the delivery pump pistons, and the start and subsequent gradient delivery generates reproducible results.

Abstract: A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure transducer that measures the pressure of the fluid within the chamber, a temperature sensor that measures the temperature of the fluid within the chamber, and a controller. The controller is configured to control opening and closing of the inlet and outlet valves, using the measurements of the pressure and the temperature change within the chamber, so as to verify, when in a first mode, a measurement of the flow rate of the fluid by a device, and so as to deliver, when in a second mode, a desired amount of the fluid from the chamber into a processing facility.

Abstract: Valve positioning systems may include one or more components and a controller. Components may include one or more electric-to-pressure output converters, relays, gas supplies, and/or actuators. A controller may adjust a position of a valve by sending a signal. The valve positioning system may individually monitor components and determine the condition of each component being individually monitored. The valve positioning system may determine if a component will fail prior to failure and/or determine if a problem will occur in a component prior to the problem occurring.

Abstract: A method for detecting a deviation in a flow meter parameter of a flow meter that is adapted to measure a fluid flow rate is provided. The method comprises measuring a differential pressure across at least a portion of the flow meter. The method further comprises comparing the measured differential pressure to an expected differential pressure; the expected differential pressure being based on the measured flow rate. The method further comprises detecting a deviation in the flow meter parameter if the difference between the measured differential pressure and the expected differential pressure exceeds a threshold limit.

Abstract: An oil leakage detector for detecting the leakage of e.g. diesel or fuel oil in an engine room of a vessel comprises a conduit for an airflow therethrough, and a screen in the conduit. The screen is meshed to prevent oil particles or droplets from passing therethrough. A sensor determines a pressure loss across the screen, and a control system operatively connected to the sensor is configured to output an oil leakage warning signal if the pressure loss exceeds a predetermined threshold value. A fan may be provided for generating the airflow through the conduit. A gas sensor for determining the presence of hydrocarbon, carbon monoxide or carbon dioxide is optionally provided.

Abstract: A novel enhanced flow metering device is adapted for disposing into a flow material reservoir a known volume of flow material whereby software used in conjunction with a pressure sensor may be calibrated. Additionally, by measuring the known amount of flow material returning to the flow material reservoir, checks are quickly made to ensure the pressure sensor is behaving as expected.

Abstract: A method for calibrating a dust load flow measuring system is provided. The dust delivery line may be connected from a metering vessel to a calibration line leading to the input sluice in the delivery direction downstream of the installed dust load flow measuring device instead of to the gasification reactor. The input sluice is provided with a weighing unit such that the weight of the content of the input sluice is determined. A differential pressure that may be set is controlled between the metering vessel and the input sluice, the dust load flow is determined in a time interval.

Abstract: The sheath flow forming device includes: a container for storing sample fluid and having a supply port for supplying the sample fluid; a second container for storing sheath fluid and having a supply port for supplying the sheath fluid; a flow cell having a sample fluid inlet for receiving sample fluid supplied from the supply port of the first container, a sheath fluid inlet for receiving the sheath fluid from the supply port of the second container, and an outlet for discharging the mixture of the sheath fluid and the sample fluid; a first pump for supplying a sheath fluid to the sheath fluid inlet; a second pump for suctioning fluid within the flow cell through the outlet of the flow cell; and a first drive source for driving the first pump and second pump.

Abstract: A field mountable dedicated process diagnostic device is used for diagnosing operation of an industrial control or monitoring system. An input is configured to receive at least one process signal related to operation of the industrial process. A memory contains diagnostic program instructions configured to implement a diagnostic algorithm using the process signal. The diagnostic algorithm is specific to the industrial process. A microprocessor performs the diagnostic program instructions and responsively diagnoses operation of the process based upon the process signal.