Abstract: A method of etching a film of a workpiece, which includes: measuring a second flow rate of a first gas based on an increase rate of an internal pressure of a first chamber in a state in which a valve is closed and the first gas is supplied into the first chamber at a first flow rate adjusted by a flow rate controller, and calibrating the flow rate controller using the measured second flow rate; supplying a second gas into the first chamber; exhausting the first chamber; supplying a mixed gas of the first and second gases into the first chamber with the workpiece not mounted on a stage; forming a reaction product from the film by supplying the mixed gas into the first chamber with the workpiece mounted on the stage; and removing the reaction product by heating the workpiece with the workpiece accommodated in a second chamber.

Abstract: A system for calibrating a fluid additive dispensing system of an appliance such as e.g., a washing machine is provided. For example, the system can calibrate for significant differences in the pressure of the water supply provided to the appliance during operation. Calibrations can also be implemented for significant differences in viscosity and/or density of the fluid additives.

Abstract: A fuel flow meter assembly for detecting fraud caused by tampering. The fuel flow meter assembly comprises a fuel flow meter comprising a shaft and a fiber optic displacement sensor operatively connected to the fuel flow meter shaft for generating information representative of an amount of fuel delivered through the fuel flow meter. The fuel flow meter assembly also comprises at least one transponder coupled with one of the fuel flow meter shaft and the displacement sensor. Further, the fuel flow meter assembly comprises at least one interrogator electronics coupled with the other of the fuel flow meter shaft and the displacement sensor. The at least one interrogator electronics is configured for remote electronic communication with the at least one transponder.

Abstract: Volatile liquid vapors formed during the pour of the volatile liquid from a volumetric test measure apparatus are contained in a pour vapor-containment apparatus that enhances the rate of vapor formation inside the pour vapor-containment apparatus. The interface between a flow control component on the test measure apparatus and a pour inlet on the pour vapor-containment apparatus creates a positive pressure, vapor-saturated environment so that a sufficient positive vapor pressure is maintained between the interior of the test measure apparatus and the pour vapor-containment apparatus when the flow control component is inserted in the pour inlet and the test measure apparatus is rotated about vertical during the pour and drain processes so that the vapor-saturated air formed in the pour vapor-containment vessel transfers during the pour into the interior of the test measure apparatus to replace the liquid that is poured out of the test measure apparatus.

Abstract: A reader for mechanical actuation of fluids within a test cartridge. The instrument interface including multiple independently-controlled plungers aligned to respective fluidic pouches on a test cartridge that is inserted into a testing apparatus embodying the instrument interface. The plungers include tips for applying mechanical force to the respective fluidic pouches.

Abstract: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Abstract: A method of calibrating a flow meter is provided. The method initiates with identifying a calibration fluid for a processing fluid. The calibration fluid has physical properties in common with the processing fluid with the exception of an outgassing characteristic. The method includes adding the calibration fluid to a vessel, where the vessel is in fluid communication with the flow meter and a withdrawal unit. The vessel is pressurized and the calibration fluid is withdrawn from the vessel through the flow meter and into the withdrawal unit, where the withdrawing performed by the withdrawal unit. A withdrawal volume per unit time measured by the flow meter is compared to a withdrawal volume per unit time controlled and set through the withdrawal unit.

Abstract: An apparatus, method and system providing for calibration and/or control of a liquid dispensing system is disclosed. The hand-held calibration auditing tool includes a flow meter (36-37) with inlets adapted for quick connection to one or more liquid inputs to a liquid dispensing system (10). A sensor (94-95) having a data output of liquid flow information for a liquid input to the dispensing system (10) is operably connected to a controller (12) to receive the liquid flow information for the liquid input. The controller (12) provides a dilution rate and other liquid flow information for a liquid product input to a dispenser.

Abstract: A method of calibrating a dispenser of the type having an actuator that is movable over a variable stroke distance includes dispensing a quantity of viscous material from the dispenser by moving the actuator over one of a plurality of stroke distances, weighing the quantity of viscous material, repeating the acts of dispensing and weighing for each of the plurality of stroke distances, and displaying the weight of each of the dispensed quantities to a user using a user interface device.

Abstract: An apparatus, method and system providing for calibration and/or control of a liquid dispensing system is disclosed. The hand-held calibration auditing tool includes a flow meter (36-37) with inlets adapted for quick connection to one or more liquid inputs to a liquid dispensing system (10). A sensor (94-95) having a data output of liquid flow information for a liquid input to the dispensing system (10) is operably connected to a controller (12) to receive the liquid flow information for the liquid input. The controller (12) provides a dilution rate and other liquid flow information for a liquid product input to a dispenser.

Abstract: A novel enhanced flow metering device is adapted for disposing into a flow material reservoir a known volume of flow material whereby software used in conjunction with a pressure sensor may be calibrated. Additionally, by measuring the known amount of flow material returning to the flow material reservoir, checks are quickly made to ensure the pressure sensor is behaving as expected.

Abstract: A method for determining spraying parameters for controlling a paint-spraying apparatus using a spraying agent is disclosed. A known spray pattern is provided which has been determined by means of known spraying parameters for the use of a first spraying agent. A provisional spray pattern is calculated using the known spraying parameters and the characteristics of a second spraying agent. The known spraying parameters are altered in order to acquire changed spraying parameters which yield a further spray pattern. The changed spraying parameters are altered to the point where the further spray pattern is similar to the known spray pattern within a similarity criterion. The changed spraying parameters corresponding to the further spray pattern are intended as spraying parameters for the second spraying agent and are provided to the paint-spraying apparatus whenever the second spraying agent is used.

Abstract: A system and method of detecting fuel theft at a fuel dispenser. The system has a fluid flow meter, a pulser operatively coupled to said fluid flow meter, and a control system in electrical communication with the pulser. The control system is configured to calculate a flow rate of fuel being dispensed from a gasoline dispenser during a single dispensing transaction. The flow rate is sampled at predetermined time intervals during the single dispensing transaction. The system then compares the sampled flow rates to a predetermined flow rate pattern indicative of potential fraud. A shutoff signal is then provided to the dispenser to stop fuel flow through the dispenser if the sampled flow rates are substantially similar to the predetermined pattern.

Abstract: An apparatus for improving the procedure for quantifying the volume of liquid dispensed by a liquid-dispensing mechanism of an analytical instrument. The apparatus of this invention comprises (a) at least one weigh cup; (b) at least one standard mass; (c) at least one transducer assembly to convert a value of weight to an electrical response; and (d) at least one electronic circuit for converting the electrical response to a measurement of volume. This invention provides a method for calibrating readings of the volume of liquid dispensed by a liquid-dispensing mechanism of an analytical instruments so that absolute measurements of the volume of liquid dispensed can be obtained.

Abstract: A method of calibrating a dispenser of the type having an actuator that is movable over a variable stroke distance includes dispensing a quantity of viscous material from the dispenser by moving the actuator over one of a plurality of stroke distances, weighing the quantity of viscous material, repeating the acts of dispensing and weighing for each of the plurality of stroke distances, and displaying the weight of each of the dispensed quantities to a user using a user interface device.

Abstract: A device for metering fluids includes a block provided with a channel connecting a fluid inlet in fluid communication with a fluid outlet. The device also includes a filter assembly within the channel and a fluid meter within the channel at a position downstream from the filter assembly. The device further includes a check valve assembly within the channel at a position downstream from the fluid meter. In addition, the device includes a calibration valve assembly within a channel section of the channel between the fluid outlet and the fluid meter. The calibration valve assembly is operable to move between a first position allowing passage of fluid from the fluid meter towards the fluid outlet and a second position blocking the passage of fluid from the fluid meter towards the fluid outlet.

Abstract: A liquid delivery apparatus is provided for depositing liquid materials onto prescribed areas. The apparatus includes a sensing and delivery pin and a photo sensor. The apparatus is sized to deliver a droplet of liquid material to the surface of a target area without coming into contact with the target surface. The apparatus is also capable of drawing geometric features, such as lines and grids of liquid material. The photo sensor measures the intensity of light during a processing cycle. Measured reflected-light intensity can be compared in real-time to a reference curve which is based on test process cycles representing the light intensity expected when the process proceeds in the preferred fashion to produce a normal spot having an expected droplet size. The light intensity measurements can also be fitted with a mathematical function such as an asymmetric double sigmoidal curve.

Abstract: Volatile liquid vapors formed during the pour of the volatile liquid from a volumetric test measure apparatus are contained in a pour containment apparatus that enhances the rate of vapor formation inside the pour containment apparatus. The interface between a flow control component on the test measure apparatus and a pour inlet on the pour vapor-containment apparatus creates a positive pressure, vapor-saturated environment so that a sufficient positive vapor pressure is maintained between the interior of the test measure apparatus and the pour vapor-containment apparatus when the flow control component is inserted in the pour inlet and the test measure apparatus is rotated about vertical during the pour and drain processes so that the vapor-saturated air formed in the pour vapor-containment vessel transfers during the pour into the interior of the test measure apparatus to replace the liquid that is poured out of the test measure apparatus.

Abstract: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Abstract: A method, apparatus and system provides for accurately measuring and calibrating liquid products dispensed from a dispenser. A liquid diluent enters an aspirator assembly (12). A liquid product is drawn from a product container through a flow meter (36) into the aspirator assembly (12), wherein liquid product and diluent are mixed to dispense at the outlet of the aspirator (14). The flow meter (36) monitors the amount of liquid product drawn into and dispensed from the aspirator (14).

Abstract: An electronics module for an industrial device is associated with an individual industrial device. Audit data for the industrial device is stored in a memory of the electronics module. The audit data includes information related to one or more steps that have been performed while making the individual industrial device. Operating instructions for the industrial device are stored in the memory of the electronics module. The operating instructions are operable to enable the electronics module to control and/or monitor one or more aspects of the flow control device operation.

Abstract: A system for preventing overflow of a toilet includes a sensor, a processor and an actuator. The sensor senses a parameter caused by fluid dynamics within the toilet during a flush cycle. The parameter may involve vibration, sound, pressure, fluid flow rate or other detectible characteristics of the toilet. The processor uses information regarding the parameter that is gathered by the sensor to evaluate the condition of the flush cycle to determine if an impeded flush condition exists. In the event of an impeded flush condition, the processor directs the actuator to close a valve, which may be the toilet flapper valve in some embodiments. Also disclosed are methods for preventing toilet overflow, detecting an impeded flush condition and calibrating the system.

Abstract: Methods and systems for determining an LPG fuel output characteristic of an LPG injector. The output characteristic of the LPG can be determined by calculating a total mass of LPG injected into a canister of known volume by the injector during a plurality of open/closed cycles of the injector. The pressure differential and temperature in the canister can be used in the calculation of total LPG mass along with a gas constant of the LPG and the volume of the canister. The total LPG mass can then be used to determine the mass of LPG injected by the injector during each open/closed cycle.

Abstract: Methods, systems, and computer program products for using a reference meter to provide automated calibration for a fuel dispenser are disclosed. According to one method, first historical metering data associated with a fuel flow meter and second historical metering data associated with a reference meter are maintained within a memory. The first historical metering data is compared with the second historical metering data. It is determined whether a difference exists between the first historical metering data and the second historical metering data that can be corrected by calibration of the fuel flow meter. In response to determining that a difference exists between the first historical metering data and the second historical metering data that can be corrected by calibration of the fuel flow meter, an automated calibration of the fuel flow meter is performed.

Abstract: A volume-based, rather than time-based, system for dispensing fluid incorporates a microprocessor-based controller, software, pump, and positive displacement flow meter. The volume being pumped and the time it takes to pump that volume is calculated and tracked by the software, giving a flow rate. This rate is then tracked by the software for any changes. Any conditional changes that occur, affecting this rate, are tracked, and if the rate becomes too excessive outside of the normal rate established at initial calibration, then an alarm or other indication is provided to the operator.

Abstract: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Abstract: Analyzing the pressure profile generated during a limited period of time immediately prior to the end of a liquid aspiration process and comparing the standard deviation of the residuals to a critical value to determine if the liquid was of a desired sufficient volume.

Abstract: The sheath flow forming device includes: a container for storing sample fluid and having a supply port for supplying the sample fluid; a second container for storing sheath fluid and having a supply port for supplying the sheath fluid; a flow cell having a sample fluid inlet for receiving sample fluid supplied from the supply port of the first container, a sheath fluid inlet for receiving the sheath fluid from the supply port of the second container, and an outlet for discharging the mixture of the sheath fluid and the sample fluid; a first pump for supplying a sheath fluid to the sheath fluid inlet; a second pump for suctioning fluid within the flow cell through the outlet of the flow cell; and a first drive source for driving the first pump and second pump.

Abstract: A method for adding material to an FCC unit is provided. In one embodiment, a method for adding material to an FCC unit includes providing a first vessel under low pressure containing a first material, moving the material through a first eductor to the FCC unit, and determining an amount of material moved dispensed from the vessel through the eductor.

Abstract: A tool is provided that is adapted to calibrate a dispenser operative to dispense a selected granular material received from the interior of a receptacle. The tool may include a handle extending longitudinally from a first handle end to a second handle end along a longitudinal axis and a positioning element located proximately to the second handle end. The positioning element is adapted to locate the flow control member associated with the dispenser at a selected position thereby to set a desired delivery rate of the granular material. The positioning element may be formed as an elongate projection extending upwardly from a location proximate to the second handle end or as a flat blade. A set of tools is also provided such that the dispenser can be set at alternative desired delivery rates. A method of calibrating the delivery rate of a dispenser is also provided.

Abstract: A hydraulic scale for planter calibration is disclosed. The hydraulic scale includes a tube having indicia disposed thereon. The tube has a substantially closed bottom and a substantially open top. The indicia disposed on the tube include at least one scale having a zero line. The tube is configured to float substantially upright when positioned in a liquid, such that the zero line is substantially aligned with the surface of the liquid. A non-zero line portion of the scale is configured to align with the surface of the liquid when at least one of seeds and feed are placed within the tube.

Abstract: A method of auto-calibrating a meter is provided herein. The method can include disposing a sensor within a sensor dispenser associated with a tag element wherein the tag element is configured to store a plurality of sensor-specific information as well as communicate the information to a meter. Next, the method can include placing the sensor dispenser into communication with a meter which is configured to receive and retain a sensor from the sensor dispenser, and also configured to receive the sensor-specific information from the tag element thereby allowing the meter to perform an auto-calibration procedure which is at least partially dependent upon the sensor-specific information. Similarly, a system for auto-calibrating a meter is also provided herein. Additionally, various embodiments of a meter and various embodiments a sensor dispenser are also provided herein.

Abstract: A system and method of flow rate compensation is provided to allow precise volume dispensing over widely varied and varying input process media pressure and flow conditions. This system utilizes empirical data of actual flow rate versus flow rate measured by a flow meter to characterize flow meter non-linearities. This data is used to generate a compensation control curve. The system controller receives flow data from a flow meter in the field and calculates pulse duration of the output of the flow meter. The compensation control curve is then used to determine the volume of process media flowing at any given time. This instantaneous volume information is added to an accumulator to determine the volume of process media dispensed. This volume is compared to a target volume. Once this target volume is reached, the flow of process media is stopped.

Abstract: A flow verifier for verifying measurement by a fluid delivery device under test (DUT) includes a chamber configured to receive a flow of the fluid from the DUT, at least one temperature sensor to provide gas temperature in the chamber, at least one pressure transducer to provide gas pressure in the chamber, and a critical flow nozzle located upstream of the chamber along a flow path of the fluid from the DUT to the chamber. The critical flow nozzle and the flow verification process are configured to maintain the flow rate of the fluid through the nozzle at the critical flow condition such that the flow rate through the nozzle is substantially constant and substantially insensitive to any variation in pressure within the chamber downstream of the nozzle.

Abstract: Methods, systems, and computer program products for using a reference meter to provide automated calibration for a fuel dispenser are disclosed. According to one method, first historical metering data associated with a fuel flow meter and second historical metering data associated with a reference meter are maintained within a memory. The first historical metering data is compared with the second historical metering data. It is determined whether a difference exists between the first historical metering data and the second historical metering data that can be corrected by calibration of the fuel flow meter. In response to determining that a difference exists between the first historical metering data and the second historical metering data that can be corrected by calibration of the fuel flow meter, an automated calibration of the fuel flow meter is performed.

Abstract: The present invention generally provides methods and apparatus for monitoring performance of an injection valve. In one embodiment, a control signal relates to an actuator movement is monitored and correlated to performance of the injection valve.

Abstract: An on-chip chemical compound dilution system for providing dilution of a chemical compound in a microfluidic application includes at least one sample well for providing a selected chemical compound to be diluted, a dilution well for providing a diluent for diluting the chemical compound, a network of channels for carrying the chemical compound and diluent, a first syringe pump for effecting dilution, a second syringe pump, a detector and a plurality of valves for selectively controlling the flow of liquid through the channels. The dilution system may be a multiple-stage dilution system for precisely mixing a plurality of chemical compounds in a diluent. The dilution system allows for accurate calibration to compensate for variations due to manufacturing, thereby providing precise dilution ratios. The dilution system further enables flushing to allow re-use of the system with another chemical compound.

Abstract: A system for measuring and controlling the concentration of a chemical agent in a solution has a reaction cell for receiving a sample, a titrant dropper for releasing one or more drops of titrant into the sample, a first photosensor for sensing disruptions of light for every drop of titrant released, and a controller that communicates with the photosensor and computes the concentration of the chemical agent based on the number of disruptions of light at the photosensor. The present invention also includes a method for sensing and controlling the concentration of a chemical agent in a solution. The method includes having a sample containing the chemical agent, triggering the release of a number of drops of titrant into the sample, detecting the number of drops released into the sample, and computing the concentration of the chemical agent in the sample based on the number of drops of titrant released into the sample.

Abstract: A hole inspection system for a pierced container 1 for inspecting an outwardly opened hole 1a formed in a flexible container 1 for performing a proper inspection for the size of the hole 1a of the flexible pierced container 1. The flexible container 1 is pressed from outside to blow out the gas A present within the container through the hole 1a thereby to detect a jet pressure of the gas blown out through the hole 1a by the pressing operation and to determine the size of the hole 1a by comparing a detected value of the jet pressure in a predefined period while the jet pressure is rising with an upper limit pressure value corresponding to a maximum size of the hole 1a and a lower limit pressure value corresponding to a minimum size of the hole 1a.

Abstract: A tool is provided that is adapted to calibrate a dispenser operative to dispense a selected granular material received from the interior of a receptacle. The tool may include a handle extending longitudinally from a first handle end to a second handle end along a longitudinal axis and a positioning element located proximately to the second handle end. The positioning element is adapted to locate the flow control member associated with the dispenser at a selected position thereby to set a desired delivery rate of the granular material. The positioning element may be formed as an elongate projection extending upwardly from a location proximate to the second handle end or as a flat blade. A set of tools is also provided such that the dispenser can be set at alternative desired delivery rates. A method of calibrating the delivery rate of a dispenser is also provided.

Abstract: A method for performing system characterization in situ for a system comprising a actuator controlled by a proportional controller. The system includes a quasi-linear region characterized by a slope of the system response and by a delay in the quasi-linear region of the system. The system includes at least one dead zone (DZ).

Abstract: The present invention is directed to a rest room control system including one or more sensors configured to monitor or control a function associated with the rest room. The system also includes a controller operably coupled to the one or more sensors, and configured to receive data therefrom associated with the function, and communicate a status condition associated with the function in response thereto.

Abstract: A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target value of the process variable and the deadband is an allowable tolerance around the setpoint that determines when the control logic is activated to control the process variable. The method further includes transmitting the AO signal to a control device and adjusting the process variable proportional to the value of the AO signal.

Abstract: An apparatus for improving the procedure for quantifying the volume of liquid dispensed by a liquid-dispensing mechanism of an analytical instrument. The apparatus of this invention comprises (a) at least one weigh cup; (b) at least one standard mass; (c) at least one transducer assembly to convert a value of weight to an electrical response; and (d) at least one electronic circuit for converting the electrical response to a measurement of volume. This invention provides a method for calibrating readings of the volume of liquid dispensed by a liquid-dispensing mechanism of an analytical instruments so that absolute measurements of the volume of liquid dispensed can be obtained.

Abstract: A fraud detection system within a fuel dispenser includes the ability to measure the amount of fuel dispensed through the fuel dispenser. The measurement is compared to a value independently created representing what the amount of fuel dispensed should approximate. If the values are not comparable, an alarm may be generated to indicate that the fuel dispenser has been modified to perpetrate fraud upon the customers. In particular, a reference used in the comparison is created bearing on a flow rate of the fuel being dispensed through the fuel dispenser. The flow rate is derived from a source independent of a pulser within the fuel dispenser providing the needed authenticity.

Abstract: A method of preventing the scrapping of semiconductor substrates due to improper deposition of thin films in a thin film vaporization system is disclosed. This is accomplished by providing a method of self-calibrating and testing the flow of liquid precursors in the vaporization system prior to the start of the deposition process. The vaporization of the liquid precursor in the deposition chamber and the concomitant pressure change in the chamber are correlated. This correlation is then used as a real time monitoring mechanism for self-calibrating and testing the flow of liquid precursors through the vaporization system. That the pressure change due to vaporization in the chamber is used as the key parameter, the thin film deposition is hence monitored by that parameter which directly predicts the film deposition characteristics. Consequently, each thin film run is assured of a successful run.

Abstract: In a method for measuring the injection quantity of injection systems, in particular for motor vehicles and in particular in production testing, an injection system injects a testing fluid into a measuring chamber. A detection device detects a movement of a piston, which at least partially defines the measuring chamber. This detection device generates a corresponding measurement signal. In order to increase the precision of the calculation of the injected testing fluid mass, the invention proposes that the pressure of the testing fluid in the measuring chamber be detected and that the measurement signal be processed taking into account the detected pressure.

Abstract: A universal calibration apparatus and method to estimate the dispense output from a low volume, non-contact, liquid dispensing systems that may be applied for every hardware configuration (e.g., tube length, orifice diameter, tip design, etc), reagent solution property and environmental condition. This same calibration technique is applied to calibrate or tune these non-contact liquid dispensing systems to dispense desired volumes (in the range of about 0.050 ?L to 50 ?L), irrespective of the hardware configuration or the solution properties. That is, the calibration technique is not dependent on any variables, but the result (the actual dispense volume) is dependant on the variable mentioned. By actuating selected pulse widths, and measuring the resulting volume, a Calibration Profile can be generated correlating the liquid volume dispensed from the orifice to the respective pulse width of the dispensing valve thereof through calibration points.

Abstract: A system and method for in-situ verification and calibration of flow control devices includes a first network physical layer connecting the flow control devices to a flow verification device. A controller of the flow verification device is programmed to communicate with each of the flow control devices through the first network physical layer, receive gas specific information and a transfer function from each of the flow control devices, and verify the flow of each flow control device. The controller of the flow verification device is further programmed to communicate with each of the flow control devices through the first network physical layer and, if necessary, calibrate the flow control devices. The verification and calibration of the flow control devices is preferably carried out based upon a single command provided through a tool controller connected to a second network physical layer connected to the flow control devices.

Abstract: A grease supply confirming device confirming the supply of a grease into a bearing, according to the present invention includes a detecting member an elastic supporting member and a movable body. The movable body such as a metal spherical body is movably provided in a piping through which a grease to be supplied flows. The elastic supporting member is provided in the piping for supporting the movable body. The detecting member such as an eddy current type displacement sensor detects to see whether or not the grease is supplied in accordance with the displacement of the movable body. The grease supply confirming device further includes an abnormality judging circuit connected to the detecting member for judging the abnormality in grease supply, and an outputting portion for outputting an alarm according to the instruction from the abnormality judging circuit.