Abstract: The method and apparatus of the present invention will provide a means for a tank owner to determine the time until the next out-of-service API 653 internal inspection of an aboveground storage tank (AST) or an underground storage tank (UST) should be considered or performed based on in-service measurements of the tank filled with fuel or another liquid. The inspection interval is determined from a leak detection test with a pass and a probability distribution of the survival rate of the tank bottom that is representative of the tank being inspected. More accurate estimates are obtained by using measurements of the thickness and corrosion rate of the tank bottom at one or a few locations in the tank and the results of an acoustic emission (AE) corrosion activity test and/or previous out-of-service inspection measurements of the tank floor bottom thickness of the floor at many locations. The method is based on the concept of equivalent risk.

Abstract: A leak detection method of a reducing agent pumping system including a reducing agent tank, an injector, a line formed through the reducing agent tank and the injector, and a pumping module disposed in the line may include pumping a reducing agent to the injector with a pump of the pumping module and detecting a pressure thererof, operating the pump at a predetermined load or less and stopping an operation of the injector, when it is determined that a detected pressure is between a first set value and a second set value, operating a heater for heating the reducing agent in the pumping module for a predetermined time, and determining that leak occurred in the line between the pumping module and the injector, when it is determined a temperature of the reducing agent in the pumping module is lower than a predetermined value.

Abstract: A gas-leak detector includes a suction pump that sucks sample gas and reference gas, two gas detection sensors, and a cell block having a cell therein. The cell receives the gasses and has two suction-gas introduction channels and a single gas discharge channel opening thereinto. The gas-leak detector detects a gas leak on the basis of outputs from the sensors. The introduction channels and the discharge channel open into the cell at a first one of opposing surfaces of the cell, the opening of the discharge channel being arranged between the openings of the two introduction channels. The sensors are on the same plane as a second one of the opposing surfaces and are arranged between the opening of the discharge channel and the openings of the introduction channels. The suction pump is arranged on the cell block and communicates with the opening of the discharge channel.

Abstract: A method for leak testing of hand-held piston stroke pipettes and a corresponding leak testing apparatus (1) for performing the method. Essential to the system is a holder (8) for the sealed connection of a pipette tip (3) to the leak-testing apparatus. A line system (9) with connecting sections of the leak-testing apparatus forms a specific connection volume. The pipette tip (3) is evacuated to a measuring pressure below atmospheric pressure. With the vacuum pump (5) disconnected and the connection volume sealed off, the pressure is measured after a specific time interval, and any possible rise in pressure is determined. An indication of the serviceability of the pipette (2) is generated from the pressure rise determined.

Abstract: A method and system for conducting leak detection in an evaporative emission control system. The method performs a pressure-based leak test at selected intervals. The pressure-based test includes pressurizing the system, using a pump. Then, the system monitors pressure for a selected period. If system pressure falls below a threshold value during the selected period, the system identifies an initial leak. Upon identifying the initial leak, the system substitutes a vacuum-based leak test at each selected interval. The vacuum-based test includes evacuating the system, using the pump. The system then monitors system pressure for a selected period. If system pressure rises above a threshold value during the selected period, then the system identifies a subsequent leak. Upon receiving notification that the initial leak has been repaired, the system returns to pressure-based leak testing. Where a single pump is used, that pump is configured both for system pressurization and evacuation.

Abstract: A leak detection assembly includes a leak detection sensor mountable on a surface of a component of a water infrastructure system; and a communications device mountable on the component, the leak detection sensor connected to the communications device, the communications device including an antenna, wherein the communications device is a component of an infrastructure monitoring system.

Abstract: Some embodiments relate in part to endovascular devices such as prostheses and methods of testing same prior to deployment. Some embodiments may be directed more specifically to inflatable grafts or stent grafts and methods of in vitro leak testing of such grafts prior to in vivo deployment.

Abstract: A hose leakage detection system includes a ring configured to be disposed within a hose. The ring has a lateral slot formed in an outer surface, defining a first slot wall and a second slot wall. A sensor is disposed on one of the first slot wall and the second slot wall and a power source is electrically connected to the leakage detection system.

Abstract: A gas monitoring system for continuously detecting leakage of at least one gas and being operable in an extreme climate condition, the system involving a processor; at least one emergency shutdown valve responsive to a set of instructions from the processor; and a user interface in communication with the processor. The system further involves a weather-proof enclosure for housing system components. The weather-proof enclosure is adapted to operate at a temperature range of ambient temperature to a below-freezing temperature, wherein the at least one emergency shutdown valve comprises at least one latch valve.

Abstract: The present invention relates to a method for detecting leakages in a system for conducting a medical fluid upstream a shut-off device of the system as well as systems related thereto. More specifically, the method is used with systems having a section conducting the medical fluid, the section being arranged upstream the shut-off device, which is configured to interrupt or reduce an escaping or outflow of the fluid out of the section into an area downstream the shut-off device. The system for use with the present method further has at least one conveying device for conveying the fluid through the section. The present invention further relates to a digital storage medium, a computer program product and a computer program for performing the method for detecting leakages.

Abstract: Internally shielded fuel passage orifices in nozzle rocket swirler airfoils are sealed with the pressure test tool. Pinch clamps on the test tool are introduced into the fuel nozzle rocket swirler. The clamps are tightened over the airfoil orifices to plug or otherwise seal them and their fuel passages within the nozzle assembly. The nozzle assembly fuel passages are subsequently pressurized. Pressure is monitored to determine whether the nozzle is properly sealed (i.e., no pressure decay) or whether it has a leak-causing structural defect. Pressure drop in the tested component during the test cycle is indicative of a leak, in the nozzle's fuel passages, caused for example by a structural defect in the component. The test system may also be utilized in conjunction with individual rocket swirlers that are not incorporated within a complete fuel nozzle assembly.

Abstract: A fuel vapor leak detecting device includes a pump, a housing having a pump passage connected to the pump, a switching valve, a pressure detector, and a control device detecting a shutoff pressure that corresponds to an interior pressure of the pump passage detected by the pressure detector when the pump is actuated while the switching valve is closed. The control device controls the switching valve to be opened at least once and to be closed at least once when the shutoff pressure is out of a specified range. The control device detects a fuel vapor leak when the shutoff pressure is in the specified range.

Abstract: A flow sentinel for improved remote monitoring and control of the flow in a water line serving a residential or commercial structure comprises: (1) a watertight case having a first side and a second side oppositely placed; (2) a water inlet positioned in the first side of the watertight case; (3) a water outlet positioned in the second side of the watertight case; (4) a water flow meter in operable contact with the water inlet and the water outlet; (5) at least one means for display and/or remote transmission of the flow rate of the water; (6) an alarm; (7) means for shutting off the flow in a water line; and (8) means for powering the water flow meter.

Abstract: An evaporated fuel processing apparatus includes a valve between a canister and a fuel tank, and maintains the fuel tank in hermetic state by closing the valve while a vehicle is stationary, and adsorbs evaporated fuel by the canister by opening the valve during fuel filling, wherein the evaporated fuel occurs in the fuel tank. A diagnostic apparatus includes: a pump connected to a canister-side region with respect to the valve, and configured to pressurize a system of the canister and the fuel tank; and a pressure sensor for sensing an internal pressure of the system. The diagnostic apparatus starts pressurization by the pump with the valve closed; brings the system into a pressurized state by opening the valve with a delay after the start of pressurization; and performs a leakage diagnosis based on a change in the internal pressure of the system from the pressurized state.

Abstract: Diagnostic system for bulk well material handling plants that includes multiple fluid flow pathways to transport well materials. The bulk well material handling system includes multiple connections, each connected to a fluid flow pathway. The system also includes a control system connected to the multiple connections and adapted to automatically operate one or more connections of the multiple connections to a fluid flow pathway to analyze a pneumatic integrity of the fluid flow pathway in the bulk material handling system.

Abstract: In order to determine leakage on a device, which contains gas that can be condensed, an adsorbent is used through which ambient gas of the object is conducted. The adsorbed gas is desorbed by means of actuating an excitation device and fed to a gas sensor containing a mass spectrometer. In this way, minute amounts of leaking gas can be determined by means of accumulation. The method is in particular suited for use in the serial production of refrigeration machines.

Abstract: The pipeline leak detector is a mobile device having a pressure sensor array for travel within a fluid pipeline for leak detection in the pipe wall. The sensor array is positioned close to the internal surface of the pipe wall and rotates circumferentially about the surface of the pipe wall as the device travels through the pipe, thus describing a helical path along the pipe wall to cover the entire internal surface of the pipe wall with a minimal number of sensors. The sensors comprise tubes with conical mouths, and flexible members and strain gauges within the tubes. Pressure changes due to leaks cause the flexible members to move, with the strain gauges sending signals to a central processor to indicate a leak. The device is supported by a drive wheel, a driven wheel, and an idler wheel bearing against the internal surface of the pipe and evenly circumferentially spaced.

Abstract: The pipeline leak detector is a mobile device having one or more pressure sensor arrays for travel within a fluid pipeline for leak detection in the pipe wall. The sensor array(s) is positioned close to the internal surface of the pipe wall, and rotates circumferentially about the surface of the pipe wall as the device travels through the pipe. The sensor array(s) thus describes a helical path along the pipe wall, covering the entire internal surface of the pipe wall with a minimal number of sensors. The device is supported by three wheels bearing against the internal surface of the pipe wall. A drive wheel provides motive power for the device. A driven wheel rotates as it travels along the pipe wall and communicates rotationally with the sensor array(s) to drive its rotation. The third wheel is an idler to stabilize the axial orientation of the device within the pipe.

Abstract: An apparatus for detecting a leak in a conduit line includes a housing in fluid communication with the line, a valve including a valve seat and a valve element movable relative to the seat between opened and closed positions, a bypass line around the valve, a flow detector coupled to the bypass line for detecting fluid flow therethrough, and a mechanism configured to urge the valve element toward the closed position and to maintain the valve element in the closed position until a threshold pressure drop is reached. The mechanism may operate on the principle of magnetism.

Abstract: System and method for detecting a leak in a pipeline with a sensing cable including an optical fiber sensor array aligned with a heating element. At least one heat pulse is propagated through the heating element along at least a portion of the sensing cable to affect an exchange of thermal energy between the heating element and fluid exposed to the sensing cable. A temperature profile of the sensing cable corresponding to the heat pulse at each of a plurality of sensor locations on the optical fiber sensor array is measured over time. A leak in a pipeline is detected by determining one or more properties of the fluid exposed to the sensing cable at each of the plurality of sensor locations based on the temperature profile corresponding thereto.

Abstract: A method and apparatus detects gas or liquid leaks in a building. The device may include a pressure gauge attached to liquid or gas piping in the building. The pressure gauge may detect fluctuations of pressure and may send signals of fluctuations to an indicator. Once the indicator receives the fluctuation, the indicator may be activated.

Abstract: A method of determining the thermal status of fuel in a fuel distribution system (10) includes pressurizing the distribution line (16) by activating a submersible pump (14) in an underground storage tank (12). Once the distribution line (16) is pressurized, the pump (14) is switched off, and the reverse flow rate out of the distribution line back into the tank (12) is monitored. The test is repeated after a period of time, and the reverse flow rates of the separate tests are compared to determine if the fuel in the distribution line (16) is in thermal stability with the surrounding environment based on flow rate changes between tests.

Abstract: The system includes structure for supporting at least one tube within a pipe. The tube has one end disposed close to, or in contact with, a wall of the pipe. A sensor is disposed within the at least one tube to detect a pressure gradient or fluid movement within the tube. Such pressure gradient or fluid movement indicates a leak in the pipe adjacent to the tube location. In a preferred embodiment, the structure is a ring sized to fit within the pipe and the ring supports a plurality of tubes. In another aspect, the tube includes a restriction to prevent flow and pressure is measured on each side of the restriction.

Abstract: A pump characteristics expression of a pump is developed based on a closed-state pressure detected when the pump is driven while a space between a pump passage and a first passage is closed, an open-time pressure detected immediately after the space is opened while the pump is operated, and a flow rate characteristics expression of the pump passage. A reference pressure is determined by an intersection point between the pump characteristics expression of the pump and a flow rate characteristics expression of an orifice having a predetermined passage area. A leak check portion determines whether a leak of fuel evaporation generated from a fuel tank is within an allowable range by comparing the reference pressure and a pressure detected when the pump is operated for a predetermined period while the space is opened.

Abstract: A evaporated fuel processing device includes a seal valve that seals off the fuel tank from the atmosphere, a canister, a changeover valve that allows or inhibits communication of the canister with the atmosphere, the canister internal pressure sensor, a controller that sends an open/close command to the seal valve and the changeover valve, a diagnosis unit that performs leak diagnosis of an evaporated fuel sealing system, and a negative pressure pump that generates pressure in the evaporated fuel sealing system. The diagnosis unit performs leak diagnosis of the entirety of the evaporated fuel sealing system before performing leak diagnosis of a canister side section. The diagnosis unit performs function diagnosis of the seal valve with the seal valve closed and the changeover valve at a shut-off position based on whether the detection value of the tank internal pressure sensor varies beyond a predetermined range of the generated pressure.

Abstract: Embodiments of the present invention relate to detecting leaks in a fluid cooling system. One aspect of the present invention concerns an apparatus for detecting leaks in a fluid cooling system that includes a pressure exerting device for applying a pressure on a supply hose and a return hose of the cooling system, and a pressure gauge coupled to the pressure exerting device for detecting a drop of fluid pressure in the cooling system while the pressure is applied. The drop of fluid pressure indicates that there may be a leak in the cooling system.

Abstract: Method for checking the leakproffness of safety valves. Method for testing the leadkproofness of two controllable valves (V1, V2), wherein the vales are arranged at opposite ends of a test volume (10). An inlet pressure pe is present upstream of the test volume, in front of valve V1, and an outlet pressure pa is present downstream of the test volume, behind the valve V2. A control device controls the valves to open and close, and the control device is coupled to at least two pressure switches (26, 27) which are both operatively connected to the test volume (10) in order to monitor the pressure. The first pressure switch is set to a first triggering threshold d1, wherein d1=pe/x, where x>3. The second pressure switch is set to a second triggering threshold d2, wherein d2=pe(1?1/x). A valve is controlled in order to open the valve for a period of time tL1 and then to close said valve. The process then waits for a measurement period tM1 and a first pressure switch is checked.

Abstract: In a test pressurizing system for a hose such as fire hose, a device is arranged for bearing of a pressurized hose in a way that it is surrounded by protective wall parts. Further, a mechanism is provided on the inside of the wall parts for marking of holes and/or other damages that can be maneuvered automatically or manually via the operator so that at least some protective wall part protects the operator under pressurization. The marking device may be combined with a device for automatic detection of holes and damages. This can for example admit marking of the hose with high precision, and/or be part of a fully automated solution for detection and marking of holes in the hose.

Abstract: A pipe stub is provided that includes an elongated cylindrical portion that is selectively sealed on one end. For example, the cylindrical portion may be selectively sealed with a removable diaphragm. In operation, after the pipe stub is interconnected to a plumbing system and a leak test is completed, the plumber severs show otherwise circumvents the diaphragm to open the pipe stub, which can be used to receive additional plumbing components.

Abstract: A valve leak detecting method includes a pressure setting step before closing valves individually to set a pressure in a pipe, a first threshold value evaluating step for closing the valves after the pressure has been set to no less than the threshold value, and evaluating whether the pressure, after a specific time interval has elapsed, is at least threshold value, a second valve normalcy evaluating step for evaluating that one of the valves is operating properly or faultily if the pressure is at least or less than the threshold value, respectively, a second threshold value evaluating step for closing the valves and evaluating whether the pressure is less than the threshold value after a specific time interval has elapsed, and a first valve normalcy evaluating step for evaluating whether the valve is operating properly or faultily depending on the pressure being less or no less than the threshold value.

Abstract: Micro-leaks are detected by means of a sniffer device including, in an original manner, a flat suction capsule (11) with divergent channels where the flow is regular, a resonant optical cavity (15) as a means of detection and a pump (16) with a low flow rate, which is insufficient to create a vacuum which would be required with other means of detection. Much fainter micro-leaks can be detected.

Abstract: Method and a device for assessing the consumption of a medium in a supply distribution system using at least one consumption meter, in which the consumption flow values ({dot over (V)}) of the medium consumed are determined based on the consumption values measured over time (Vcum) by the consumption meter. Thereby, a frequency distribution is generated using the consumption flow values ({dot over (V)}), and the consumption is assessed by analyzing the frequency distribution.

Abstract: Various embodiments include a leak detection system for a turbine compartment. In some embodiments, the leak detection system includes: a tracer fluid system fluidly connected with the turbine compartment, the tracer fluid system configured to provide an optically detectable fluid to a fluid supply of the turbine compartment; an optical detection system operably connected to the turbine compartment, the optical detection system configured to detect the presence of the optically detectable fluid in at least one location of the turbine compartment; and a control system operably connected to the tracer fluid system and the optical detection system, the control system configured to obtain data about the presence of the optically detectable fluid in the at least one location, and provide an indicator indicating a potential leak location based upon the data about the presence of the optically detectable fluid in the at least one location.

Abstract: A leak detection system is provided for detecting a leak in a fuel line. A controller determines the presence of a leak in the fuel line based on an analysis of data obtained from individual leak tests performed on the fuel line, the individual leak tests may span one or more fuel delivery events.

Abstract: A leak detection system includes a water delivery device having a flow chamber, closing valve member and at least one contact seat for receiving a portion of the closing valve member. A first contact is located on the closing valve member and a second contact is located on the contact seat, where the first and second contacts are coupled to a leak detection circuitry. A water flow detection element is located within the flow chamber, where the leak detection circuitry is configured to be in an inactive mode when the first and second contacts are apart and where the leak detection circuit is set to active when the first and second contacts are in contact with one another, when the closing valve member and contact seat are in a closed arrangement.

Abstract: A method of determining the accuracy and repeatability of leak testing instrumentation comprises the following steps: providing a two chamber vessel having an access port and a flow controlling reference orifice associated with each chamber and a third reference orifice communicating between the two chambers, providing a leak testing device and connecting such leak testing device first to one of such ports, pressurizing the associated chamber and, with the associated orifice open, observing and recording the pressure measured by the leak testing device under test as a function of time. The second test repeats this activity with the other chamber and the other orifice. A third test is undertaken with the third orifice open. One of the chambers is smaller and incorporates a smaller orifice and the other chamber is larger and incorporates a larger orifice thus achieving leak testing under different conditions.

Abstract: A testing system for connectors usable with oil or natural gas wells using a test part connector and a control component connector. The system uses a test fluid in a test reservoir that is pumped to each connector simultaneously and using a test part pressure transducer and a control component pressure transducer to create a test response and a control response. The responses are then transmitted to a processor, which then compares the responses and presents compared results on a display, through a network and transmitted to a client device of a user.

Abstract: An externally engaging test barrier for use in testing hydrostatic pressure in a plumbing system having two abutting plumbing components. The test barrier includes a barrier body having a first face, a second face, and at least one peripheral engagement for engaging an external surface of at least one of the two abutting plumbing components to hold the barrier body in position across an end of at least one of the two abutting plumbing components. The peripheral engagement extends perpendicularly from the first face or the second face. A removable portion of the barrier body is defined by a frangible connection. The peripheral engagement of the barrier body is incapable of sealing the plumbing system during a hydrostatic pressure test, unless used in combination with a pipe coupling that forms an overlying sealing sleeve.

Abstract: An emissions control system is provided that comprises a fuel tank, a hydrocarbon filter element, and a three-way valve coupled between the hydrocarbon filter element and the atmosphere. The three-way valve is comprised of three ports, a purge port, a reference port, and a sealed port, and enables identification of degradation of the emissions control system. The arrangement of the ports on the valve enables a simplified testing method that reduces background errors caused by transitioning between various operating positions.

Abstract: The pipeline leak detector travels through a pipeline passively due to the flow of liquid through the pipeline. The device includes leading and trailing rings shaped to produce hydrodynamic resistance in order for the device to be carried through the pipeline. Wheels are provided about each ring. At least one wheel has an odometer to measure distance traveled through the pipe. The rings are joined by a plurality of axially oriented connecting rods. A plurality of sensing elements extend between the rings. Each sensing element has a thin laminate of a piezoelectric film sandwiched between two electrically conductive layers, and an electrically insulating coating on the outside of each conductive layer. One of the rings, e.g., the trailing ring, includes microelectronic circuitry for data acquisition and storage, e.g., estimates of the magnitude of any leakage encountered, the location of the leakage based upon the odometer travel, etc.

Abstract: A water leakage checking apparatus includes: a plurality of attachment portions for attaching an endoscope; a water leakage sensing portion that communicates with the plurality of attachment portions and simultaneously carries out a plurality of items of a water leakage check menu; and an endoscope information reading portion that reads endoscope information from the endoscope. Also, the water leakage checking apparatus includes: a control portion that determines an item of the water leakage check menu based on the read endoscope information, assigns the determined item of the water leakage check menu to one of the plurality of attachment portions, and outputs attachment portion identifying information for identifying the assigned one of the attachment portions; and a notifying portion that notifies the attachment portion identifying information outputted from the control portion.

Abstract: A system for measuring hot or cold aisle containment air leakage in a data center includes a plurality of equipment enclosures arranged in a first row and a second row, a plurality of panels cooperatively arranged with the plurality of equipment enclosures to form an air containment region, and a conduit mounted within the air containment region and sealed at each end, the conduit having an orifice and a plurality of openings distributed at substantially uniform intervals along a length of the conduit.

Abstract: A method and a device including the steps of: locally detecting an event in a pipe; generating at least one signal, coded according to the detected event; and detecting a frequency signature of said signal in images generated by a synthetic aperture radar.

Abstract: A leak detector includes a fabric having a conductor. The fabric has an electric property between the conductor and a reference. The electric property has a first value in response to the fabric being in a non-wetted state with regard to a working fluid and the electrical property has a second value different than the first value in response to the fabric being in a wetted state with regard to the working fluid.

Abstract: A tester and method for testing for a leak in an evaporative-emissions system of a motor vehicle comprise a/an power supply, computer, display communicating with the computer, analog-to-digital board communicating with the power supply and computer, pressure sensor communicating with the hoard, housing into which the power supply, board, and sensor are integrated, stationary enclosure, and test connection including a hose to the enclosure. A fuel-vapor pressure-rise rate is recorded with an engine of a motor vehicle turned “off.” A value is recorded that directly correlates with an out-gassing affect created by a volume, blend, and temperature of fuel. A “purge” cycle occurs at idling of the vehicle within a short period of time. The engine applies a vacuum to a fuel-delivery system of the vehicle. Vacuum decay is recorded. A leak rate is determined by off-setting the recorded fuel-vapor pressure-rise rate with the recorded vacuum decay.

Abstract: A flow reversing device for performing blood treatment can include a flow reversing actuator. The flow reversing actuator can receive and engage a disposable tubing set with multiple branches that form forward and reverse blood flow paths respectively when blood the flow reversing actuator is selectively changed between forward and reverse configurations. The shape of the tubing can be such that during forward operation, dead regions of non-flowing blood are defined. The flow reversing actuator can have a controller configured to operate generally in forward mode. At first times, the controller can cause the flow reversing actuator to clear the dead regions. At second times, the controller can cause the flow reversing actuator to test for leaks by reversing the flow of blood for a period of time sufficient to cause air to be drawn into the tubing set and conveyed to an air sensor.

Abstract: A gas-leak detector includes a suction pump that sucks sample gas and reference gas, two gas detection sensors, and a cell block having a cell therein. The cell receives the gasses and has two suction-gas introduction channels and a single gas discharge channel opening thereinto. The gas-leak detector detects a gas leak on the basis of outputs from the sensors. The introduction channels and the discharge channel open into the cell at a first one of opposing surfaces of the cell, the opening of the discharge channel being arranged between the openings of the two introduction channels. The sensors are on the same plane as a second one of the opposing surfaces and are arranged between the opening of the discharge channel and the openings of the introduction channels. The suction pump is arranged on the cell block and communicates with the opening of the discharge channel.

Abstract: A leakage diagnosis apparatus for diagnosing presence/absence of refrigerant leakage in a refrigerant circuit performing a refrigeration cycle, wherein refrigerant leakage diagnosis using the amount of refrigerant exergy loss in a circuit component of the refrigerant circuit is realized. In a leakage diagnosis apparatus, an exergy calculation section calculates a leakage index value which changes in accordance with the amount of refrigerant leaking out of a refrigerant circuit based on the amount of refrigerant exergy loss in the circuit component. Then, a leakage determination section determines whether there is refrigerant leakage in the refrigerant circuit based on the leakage index value calculated by the exergy calculation section.

Abstract: A plating method includes holding a substrate with a substrate holder while bringing a sealing member into pressure contact with a peripheral portion of the substrate to form an enclosed internal space in the substrate holder; performing a first-stage leakage test of the substrate holder by producing a vacuum in the internal space and checking whether pressure in the internal space reaches a predetermined vacuum pressure within a certain period of time; and if the substrate holder has passed the first-stage leakage test, performing a second-stage leakage test of the substrate holder by closing off the internal space after producing the vacuum therein and checking whether a change in the pressure in the internal space reaches a predetermined value within a certain period of time.

Abstract: The leak detection device is adapted to test the tightness of an inner tank (24) of a valve cell (20) of the vacuum deposition apparatus, either at its filling flange (25) or at its inner tank valve (28). A vacuum deposition apparatus equipped with a helium detector (51) mounted as a by-pass of the output of a high-flow-rate turbomolecular pump (42) which is connected to the vacuum deposition chamber (30) of the vacuum deposition apparatus by a slide gate valve (43). A valve-cell vacuum deposition apparatus equipped with a helium-based leak detection device including gas injection elements (52, 53) adapted to inject a gaseous mixture into the outer enclosure, the gaseous mixture being consisted of pure helium and an inert gas, and a method for detecting a leak in a valve-cell vacuum deposition apparatus are also described.