Abstract: The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.

Abstract: Couplers for selectively coupling in-plane and out-of-plane motion between moving masses are provided herein. In particular, aspects of the present application provide for a coupler configured to couple in-plane motion between moving masses while decoupling out-of-plane motion between the moving masses. The selective couplers as described herein may be used in a device, such as a microelectromechanical systems (MEMS) inertial sensor. In some embodiments, a MEMS inertial sensor comprises a first mass configured to move in-plane, a second mass configured to move in-plane and out-of-plane, and a coupler coupling the first and second masses and comprising two levers coupled to an anchor point by respective tethers and coupled to each other by a spring.

Abstract: An angular velocity sensor includes an angular velocity sensor element, a drive circuit, a detection circuit, and a reference potential supply circuit. The angular velocity sensor element has a monitor electrode, a drive electrode, a sense electrode, and a weight. The reference potential supply circuit supplies a reference potential to the angular velocity sensor element. The reference potential supply circuit has a first CV converter, a second CV converter, a comparator, and a reference potential adjustment circuit. The first CV converter is connected to the monitor electrode. The second CV converter is connected to the sense electrode. The comparator compares a frequency of a signal being output from the first CV converter with a frequency of a signal being output from the second CV converter, and outputs a signal depending on a result of the comparison.

Abstract: An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.

Abstract: An oscillator disclosed herein includes an oscillation circuit including a negative resistance element, a voltage bias circuit applying voltage to the oscillation circuit. The oscillator further includes a switch provided in a path, in which the voltage bias circuit and the oscillation circuit are electrically coupled to each other, and implementing switching between a conductive state and a non-conductive state of the path, and a constant voltage element electrically coupled in parallel to the switch.

Abstract: An inertial sensor for sensing an external acceleration includes: a first and a second proof mass; a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly, configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval.

Abstract: A MEMS gyroscope includes a proof mass of a suspended spring mass system that is driven at a drive frequency. The proof mass moves relative to a sense electrode such that an overlap of the proof mass and sense electrode changes during the drive motion. A Coriolis force causes the proof mass to move relative to the sense electrode. The overlap and the movement due to the Coriolis force are sensed, and angular velocity is determined based on the magnitude of a signal generated due to a change in overlap and the Coriolis force.

Abstract: A rotation rate sensor includes first, second, third and fourth structures that are each movable relative to a substrate, a drive device configured to deflect each of the first, second, third, and fourth structures essentially parallel to a drive direction and out of respective resting positions of the first, second, third, and fourth structures, such that, at a first frequency, the first and fourth structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the second and third structures, and, at a second frequency, the first and second structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the third and fourth structures.

Abstract: The present disclosure relates to an inertia measurement module for an unmanned aircraft, which comprises a housing assembly, a sensing assembly and a vibration damper. The vibration damper comprises a first vibration-attenuation cushion; and the sensing assembly comprises a first circuit board, a second circuit board and a flexible signal line for connecting the first circuit board and the second circuit board. An inertia sensor is fixed on the second circuit board, and the first circuit board is fixed on the housing assembly. The inertia measurement module further comprises a weight block, and the second circuit board, the weight block, the first vibration-attenuation cushion and the first circuit board are bonded together. The present disclosure greatly reduces the influence of the operational vibration frequency of the unmanned aircraft on the inertia sensor and improves the measurement stability of the inertia sensor.

Abstract: A sensor device for capturing the displacement position of an optical component includes a plurality of stator electrodes and a mechanism or restricting the electric field that is relevant to the measurement of the displacement position to the region of the stator electrodes.

Abstract: A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

Abstract: An electronic device includes a vibration element having a detection signal electrode and a drive signal electrode, an IC disposed so as to be opposed to the vibration element, a first wiring pattern located between the IC and the vibration element, and electrically connected to the drive signal electrode, and a shield wiring pattern located on the vibration element side of the first wiring pattern, and electrically connected to a constant potential (ground).

Abstract: A rotation rate sensor which includes a substrate, a first structure which is movable relative to the substrate and a second structure which is movable relative to the substrate and relative to the first structure. The first structure includes at least one first drive device and the second structure includes at least one second drive device. The first and second drive devices are situated for the joint deflection of the first structure from a neutral position of the first structure in parallel to a drive direction and of the second structure from a neutral position of the second structure in parallel to the drive direction, due to an interaction between the first and second drive devices in such a way that the first and second structures are excitable into an oscillation in phase opposition, in each case with a motion component in parallel to the drive direction.

Abstract: A sensor device has a gyro sensor and an acceleration sensor. The gyro sensor has a fixed base portion formed in a rectangular frame shape. The acceleration sensor is formed in an inside space of the fixed base portion of the rectangular frame shape. The gyro sensor is formed in an outside space formed between the fixed base portion and an outer frame portion of a sensor base plate. The gyro sensor and the acceleration sensor are formed in one chip. As a result, the sensor device can be made smaller in size.

Abstract: An accelerometer includes a measurement mass, a top cap silicon wafer and a bottom cap silicon wafer, both of which are coupled with the measurement mass. The measurement mass includes a support frame, a mass, and a plurality of resilient beams. The mass and the resilient beams are located within the support frame. The mass and the support frame are connected by several sets of the resilient beams, and each set comprises two resilient folding beams. The resilient folding beams are symmetrically provided with respect to the midline of the mass. A connection beam is provided in between each set of the resilient folding beams to connect the resilient folding beams together. Silicon wafers with electrodes are bonded on the top and bottom surfaces of the measurement mass, and form a capacitor with the measurement mass. The accelerometer has a large mode isolation ratio and is symmetrical in high order vibrational modes, which further decreases the noise of a MEMS chip.

Abstract: A quadrature error signal cancellation circuit and technique can detect an undesired quadrature signal component in the output of a MEMS gyroscope and null the quadrature signal component. In one embodiment, the cancellation circuit is configured in a feedback loop with the MEMS gyroscope and includes components to detect and condition the quadrature signal, digitize the conditioned quadrature signal, and generate a quadrature error cancellation signal which is provided back to the MEMS gyroscope.

Abstract: The present invention discloses a MEMS device. The MEMS device includes a substrate, a proof mass, a frame spring and an anchor. The proof mass is connected to the substrate through the frame spring and the anchor. The proof mass includes a proof mass body, a proof mass frame surrounding the proof mass body, a linking element connecting the proof mass body to the proof mass frame, and a stopper between the proof mass body and the proof mass frame in a displacement direction to limit the displacement of the proof mass body. The stopper is connected to the proof mass frame as a part of the proof mass and contributes to the mass quantity of the proof mass.

Abstract: A MEMS device includes a drive spring system coupling a pair of drive masses and a sense spring system coupling a pair of sense masses. The drive spring system includes a constrained stiff beam and flexures interconnecting the pair of drive masses. In response to drive movement of the drive masses the flexures enable pivotal movement of the constrained stiff beam about its center hinge point to enable anti-phase drive motion of the drive masses and to suppress in-phase motion of the drive masses. The sense spring system includes diagonally oriented stiff beams and a spring system that enable anti-phase sense motion of the sense masses while suppressing in-phase motion of the sense masses. Coupling masses interposed between the drive and sense masses decouple the drive motion of the drive masses from the sense motion of the sense masses.

Abstract: A sensor for detecting a rotation rate of an object, including: a sensor element, which is designed to vibrate at an angle to the rotation axis of the rotation rate to be detected at an excitation frequency on a resetting element fastened in a spatially fixed manner to the object, such that the sensor element is deflected at a reaction frequency in a reaction direction at an angle to the rotation axis and at an angle to the vibration direction owing to the Coriolis force; and a measuring transducer, which is designed to detect the vibration in the reaction direction wherein the vibratable sensor element is formed in such a manner that a comparison of a temperature-dependent displacement of a frequency spacing between the excitation frequency and the reaction frequency and a temperature-dependent position of the sensor element on the object satisfies a predefined condition.

Abstract: A micromechanical sensor is provided which includes a substrate having a main plane of extension and a rocker structure which is connected to the substrate via a torsion means. The torsion means extends primarily along a torsion axis, and the torsion axis is situated essentially in parallel to the main plane of extension of the substrate. The rocker structure is pivotable about the torsion axis from a neutral position into a deflected position, and the rocker structure has a mass distribution which is asymmetrical with respect to the torsion axis. The mass distribution is designed in such a way that a torsional motion of the rocker structure about the torsion axis is effected as a function of an inertial force which is oriented along a Z direction which is essentially perpendicular to the main plane of extension of the substrate.

Abstract: A vibrator equipped with a piezoelectric element includes a vibrating member which is formed into a flat type and of which both ends are coupled to an object; a piezoelectric element which is coupled to an upper or lower surface of the vibrating member; and a power supply part which supplies power to the piezoelectric element, wherein the vibrating member includes an operating part including a first operating surface which is disposed horizontally and a second operating surface which is bent down and extended from both ends of the first operating surface; and a fixing part which is extended from the both ends of the operating so as to be coupled to the object.

Abstract: A packaged device of one embodiment includes a device layer section, and first and second packaging members. The device layer section is one where a movable microdevice including a movable part and a terminal part is formed. The first packaging member is joined to the device layer section, and includes a wiring region provided at a position corresponding to the terminal part and a conductive plug extending through the wiring region. The second packaging member is joined to a side of the device layer section opposite the first packaging member.

Abstract: The displacement amount monitoring electrode structure includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a direction parallel to a substrate. The fixed electrode and the movable electrode face each other such that the electrode fingers are meshed together. The fixed electrode is fixed to the substrate and the movable electrode can be displaced in the direction. The displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode. A change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode, becomes larger after the displacement of the movable electrode reaches a target amount corresponding to the target amplitude.

Abstract: An angular velocity sensor is described with improved ageing and hysteresis properties. The sensor may be of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The gain of the primary pickoff signal and the capacitance of the primary portions of the sensor are controlled relative to the gain of the secondary pickoff and the capacitance of the secondary portions of the sensor. Control electronics is provided that enables matching of the relative signals from the respective channels. In this way, temperature hysteresis and ageing effects of materials used in forming the sensor are overcome.

Abstract: The invention relates to a frequency generator assembly, including at least one oscillator and an electronic signal processing device, which is designed in such a way that the electronic signal processing device provides an electric clock signal (f) having a defined frequency as an output signal of the frequency generator assembly, wherein the defined frequency depends on the vibration frequency of the oscillator, wherein the oscillator includes at least one micromechanical seismic mass which is vibrationally excited by at least one driving device, whereupon the electronic signal processing device generates and provides the electric clock signal (f) according to the vibration frequency of the at least one seismic mass.

Abstract: A vibration gyro having a structure for canceling a quadrature error generated by structural asymmetricity due to production tolerance and a means for correcting a bias value when an angular velocity is zero. In order to apply a counter torque to a sense mass for canceling the quadrature error, left correction comb electrodes are fixed to a substrate adjacent to a left drive mass, and comb electrodes opposed to the correction comb electrodes are arranged on an inner portion of a frame member which constitutes the left drive mass. By applying DC voltage to the correction electrodes, electrostatic force, for canceling the leakage rotational displacement of the sense mass generated when the input angular velocity is zero, is generated.

Abstract: A micromechanical rotation rate sensor has at least one first and one second seismic mass coupled to at least one first drive device and are suspended such that the first and second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the first and second seismic masses are designed and suspended such that they oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis is detected, and the first and second seismic masses and/or additional seismic masses are designed and suspended such that they oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis is detected.

Abstract: A micromechanical rotation rate sensor, including a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system, with the rotation rate sensor having at least one first seismic mass and a second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the second seismic mass is in the form of a frame which at least partially surrounds the first seismic mass with respect to the position on the x-y plane.

Abstract: A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled.

Abstract: An inertia force sensor that shortens a time from power activation until inertia force can be detected includes an oscillator, an oscillation circuit unit, and a detection circuit unit. The oscillation circuit unit functions as a closed loop self oscillation circuit with the oscillator as a resonant element, and includes a CV conversion circuit converting a monitor signal based on electrostatic capacitance according to an oscillating state of oscillator into a monitor signal based on a voltage corresponding to an amount in change of the electrostatic capacitance, and an automatic gain control circuit controlling gain based on the monitor signal converted at the CV conversion circuit to generate a driving signal, and supplying the driving signal to the oscillator. The CV conversion circuit includes an amplifier that amplifies a monitor signal with an amplification factor for a predetermined period after power activation.

Abstract: Embodiments of compact micro-electro-mechanical systems (MEMS) devices are provided, as are embodiments of methods for fabricating MEMS devices. In one embodiment, the MEMS device includes a substrate, a movable structure resiliently coupled to the substrate, and an anchored structure fixedly coupled to the substrate. The movable structure includes a first plurality of movable fingers, and a second plurality of movable fingers electrically isolated from and interspersed with the first plurality of movable fingers. The anchored structure includes fixed fingers interspersed with first and second pluralities of movable fingers in a capacitor-forming relationship. First and second interconnects are electrically coupled to the first and second pluralities of movable fingers, respectively.

Abstract: A gyroscope having a vibrating structure, produced by micromachining in a thin planar wafer, the gyroscope including two symmetrical moving assemblies that are coupled by a coupling structure connecting the two assemblies so as to allow mechanical vibration energy to be transferred between them, each moving assembly including a first moving element connected to the coupling structure and able to vibrate with two degrees of freedom in orthogonal directions Ox and Oy of the plane of the wafer, and a second moving element adjacent the first moving element, capable of vibrating only in the Oy direction and connected to the first moving element via linkage element, wherein the linkage element allow the transmission, in phase opposition, to the second moving element of the vibration movement of the first moving element in the Oy direction.

Abstract: According to a displacement amount monitoring electrode arrangement, there are a linear change region in which the change amount of capacitance changes linearly with the displacement of the movable electrode in the predetermined axis direction, and a nonlinear change region in which the change amount of the capacitance changes nonlinearly with the displacement of the movable electrode in the predetermined axis direction. The nonlinear change region includes a characteristic in which a change sensitivity of the change amount of the capacitance with respect to the displacement amount of the movable electrode in the predetermined axis direction is greater than that in the linear change region, and a target capacitance change amount of the capacitance when the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude is set in the nonlinear change region.

Abstract: A yaw rate sensor includes a drive device, at least one mass element which is connected to the drive device, and at least one detection electrode for detecting a motion of the mass element. The mass element has a base layer and at least one web which is situated on the base layer. Also, a method for manufacturing a mass element.

Abstract: An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Abstract: The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures (1), (2), excitation structures (3), (4) and coupling seesaw type springs (6), (7). The objective of the invention is to provide an improved sensor structure, which enables reliable measuring with good efficiency particularly in small vibrating micro-mechanical angular velocity sensor solutions.

Abstract: An apparatus includes a microelectromechanical system (MEMS) device including a mass anchored to a substrate. The MEMS device is configured to generate an output signal indicative of motion of the mass with respect to the substrate. The MEMS device includes a feedback module configured to provide a control signal to the MEMS device. The control signal is based on the output signal. The MEMS device is configured to apply a damping force to the mass in response to the control signal.

Abstract: An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

Abstract: A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.

Abstract: A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs, wherein the proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one fixed anchor having a second plurality of combs. The first plurality of combs is interleaved with the second plurality of combs. Each of the combs in the first plurality of combs and the second plurality of combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that fringing electric fields are screened to reduce motion of the first plurality of combs along a sense axis due to the fringing electric fields.

Abstract: An electronic component includes: a semiconductor element including a circuit; a vibration element; a first electrode arranged on a first surface of the semiconductor element and connected to the circuit and the vibration element arranged on the first surface side; a second electrode arranged on the first surface; a first wiring board including a first wire connected to the second electrode; and a second wiring board including a second wire to which the first wire is connected. At least a part of an inner side region of an outer contour of the vibration element is arranged to overlap the second electrode in plan view facing the first surface.

Abstract: An inertial sensor (20) includes a drive mass (30) configured to undergo oscillatory motion and a sense mass (32) linked to the drive mass (30). On-axis torsion springs (58) are coupled to the sense mass (32), the on-axis torsion springs (58) being co-located with an axis of rotation (22). The inertial sensor (20) further includes an off-axis spring system (60). The off-axis spring system (60) includes off-axis springs (68, 70, 72, 74), each having a connection interface (76) coupled to the sense mass (32) at a location on the sense mass (32) that is displaced away from the axis of rotation (22). Together, the on-axis torsion springs (58) and the off-axis spring system (60) enable the sense mass (32) to oscillate out of plane about the axis of rotation (22) at a sense frequency that substantially matches a drive frequency of the drive mass (30).

Abstract: A yaw rate sensor includes a substrate having a substrate surface, a first movable element, which is disposed above the substrate surface and has a drive frame and a first detection mass, a first electrode, which is disposed at a distance underneath the first detection mass and connected to the substrate surface, and a second electrode which is disposed at a distance above the first detection mass and connected to the substrate surface. The drive frame is connected to the substrate via at least one drive spring, the detection mass is connected to the drive frame via at least one detection spring, and the first movable element is excitable to a drive oscillation parallel to the substrate surface, and the first detection mass is deflectable perpendicular to the substrate surface.

Abstract: A gyroscope comprising: a multi-layer substrate, comprising drive spring and sense spring layers; a rigid support structure formed from the substrate; a plurality of drive springs formed in each drive spring layer wherein each drive spring is operatively coupled to the support structure; a drive mass formed from at least one layer of the substrate, wherein the drive mass is coupled to the support structure via the drive springs; a drive mass driver operatively coupled to the drive mass and configured to cause movement of the drive mass with respect to the support structure; a plurality of sense springs formed in each sense spring layer, wherein each sense spring is operatively coupled to the drive mass; and a sense mass formed from at least one layer, wherein the sense mass is coupled to the drive mass via the sense springs.

Abstract: In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+?1) occurs in the beam 4a and a compressive stress (??2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

Abstract: In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis eleme

Abstract: Disclosed are methods and a sensor architecture that utilizes the residual quadrature error in a gyroscope to achieve and maintain perfect mode-matching, i.e., ˜0 Hz split between the drive and sense mode frequencies, and to electronically control sensor bandwidth. In a reduced-to-practice embodiment, a 6 mW, 3V CMOS ASIC and control algorithm are interfaced to a mode-matched MEMS tuning fork gyroscope to implement an angular rate sensor with bias drift as low as 0.15°/hr and angle random walk of 0.003°/?hr, which is the lowest recorded to date for a silicon MEMS gyroscope. The system bandwidth can be configured between 0.1 Hz and 1 kHz.

Abstract: An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

Abstract: An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted and constrained for anti-phase linear movement along the drive axis in drive-mode. Detectors responsive to the anti-phase movement of the masses in directions parallel to the sense axis in response to Coriolis forces produced by rotation of the masses about the input axis for monitoring rate of rotation about the input axis.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.