Vibratory Mass Patents (Class 73/504.12)
  • Patent number: 10996056
    Abstract: A sensor structure and a method for operating a vibrating sensor of angular velocity comprising a rotor mass and two linearly moving masses is disclosed. The sensor structure and method comprises a rotor mass, two linearly moving masses, and two T-shaped levers each coupled with the two linearly moving masses and to the rotor mass. The T-shaped levers enable the rotor mass and the two linearly moving masses to be excited into an anti-phase primary mode, where the direction of angular momentum of the rotor mass is opposite to the direction of angular momenta of the linearly moving masses. Angular momenta of the rotor mass and the linearly moving masses cancel each other to a high extent, so that the total sum of angular momentum of the structure is very small. Nominal frequency of the anti-phase primary mode is distinctively low as compared to nominal frequencies of other possible primary modes, such as a parallel phase primary mode.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: May 4, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Yoshitaka Kato
  • Patent number: 10969242
    Abstract: A navigation system includes a Coriolis vibratory gyroscope, a voltage input supply, and a controller. The voltage input supply is configured to supply a first voltage input to the Coriolis vibratory gyroscope at a first bias voltage, and supply a second voltage input to the Coriolis vibratory gyroscope at a second bias voltage, the second bias voltage being different than the first bias voltage. The controller is configured to detect a difference in responses of the Coriolis vibratory gyroscope to the first bias voltage and the second bias voltage, and determine a gyro rate of the Coriolis vibratory gyroscope as a function of the difference in responses and a correction term.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: April 6, 2021
    Assignee: The Boeing Company
    Inventors: Shaun Detloff, James K. Gingrich
  • Patent number: 10928263
    Abstract: A sensor device including: a sensor portion; a casing portion housing the sensor portion; an elastic portion that is provided in contact with the casing portion between the sensor portion and the casing portion and has a material having smaller elastic modulus than elastic modulus of the casing portion; and an adhesive that is provided between the sensor portion and the casing portion is provided. The adhesive may have an interface between the elastic portion and the adhesive. The elastic portion may have the same material as the adhesive. The elastic portion may have smaller elastic modulus than the adhesive.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: February 23, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Eiji Hosokawa
  • Patent number: 10921124
    Abstract: A circuit comprising a microelectromechanical (MEMS) gyroscope and a gain circuit coupled with the MEMS gyroscope. The gain circuit is configured to receive a digitized drive signal based at least in part on a digitized drive voltage amplitude of the MEMS gyroscope. The gain circuit is also configured to determine a percentage change in quality factor of the MEMS gyroscope based at least in part on the digitized drive signal and a stored trim value of the MEMS gyroscope. The gain circuit is also configured to compensate for an effect of a change in the quality factor of the MEMS gyroscope based at least in part on the percentage change in quality factor.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: February 16, 2021
    Assignee: InvenSense, Inc.
    Inventor: Kevin Hughes
  • Patent number: 10914584
    Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements. In further embodiments, a dynamically balanced 3-axis gyroscope architecture is provided.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: February 9, 2021
    Assignee: INVENSENSE, INC.
    Inventors: Doruk Senkal, Robert Hennessy, Houri Johari-Galle, Joseph Seeger
  • Patent number: 10900785
    Abstract: A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: January 26, 2021
    Assignee: Robert Bosch GmbH
    Inventors: Niels Bode, Andreas Lassi, Burkhard Kuhlmann, Jan-Timo Liewald, Matthias Kuehnel, Nils Felix Kuhlmann, Odd-Axel Pruetz, Peter Degenfeld-Schonburg, Reinhard Neul
  • Patent number: 10899603
    Abstract: A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.
    Type: Grant
    Filed: November 2, 2018
    Date of Patent: January 26, 2021
    Assignee: Robert Bosch GmbH
    Inventors: Ralf Boessendoerfer, Jan Waldmann, Jochen Reinmuth
  • Patent number: 10884020
    Abstract: A sensing structure for an accelerometer includes a support and a proof mass mounted thereto by flexible legs. The proof mass has moveable electrode fingers perpendicular to the sensing direction and at least four fixed capacitor electrodes, with fixed capacitor electrode fingers perpendicular to the sensing direction. The fixed capacitor electrode fingers interdigitate with the movable electrode fingers and the proof mass is mounted to the support by an anchor on a centre line of the proof mass. The proof mass has an outer frame surrounding the fixed capacitor electrodes and the flexible legs extend laterally inwardly from the proof mass to the anchor. The fixed capacitor electrodes comprise two inner electrodes, one on each side of the proof mass centre line, and two outer electrodes, one on each side of the proof mass centre line.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: January 5, 2021
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventors: Alan Malvern, Louise Snell
  • Patent number: 10852135
    Abstract: A device includes a proof mass of a sensor, capacitive elements, an electrode circuitry, a time multiplexing circuitry, a sense circuitry, and a force feedback circuitry. The proof mass moves from a first position to a second position responsive to an external actuation. The capacitive elements change capacitive charge in response thereto. The electrode circuitry coupled to the capacitive elements generates a charge signal. The time multiplexing circuitry pass the charge signal during a sensing time period and prevents the charge signal from passing through during a forcing time period. The sense circuitry generates a sensed signal from the charge signal. The force feedback circuitry applies a charge associated with the sensed signal to the electrode circuitry during the forcing time period. The electrode circuitry applies the charge received from the force feedback circuitry to the capacitive elements, moving the proof mass from the second position to another position.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: December 1, 2020
    Assignee: InvenSense, Inc.
    Inventors: Alireza Shirvani, Michael Perrott
  • Patent number: 10852159
    Abstract: A method is proposed for controlling the precession of a gyroscope (1) comprising a support (2) and a resonator (3), the support (2) being mobile in a platform coordinate system and stationary in a measurement coordinate system, the method comprising the generation (101) of a first control signal suitable for rotating the resonator (3) with respect to the support (2) in two opposite directions of rotation during a first period, the method being characterized by the following steps: reception (104) of data (Tpm) on relative positioning between the measurement coordinate system and the platform coordinate system, calculation (105) of a second control signal to be generated during a second period on the basis of the first control signal and the relative-positioning data, the second control signal being chosen in such a way as to minimize an average of accumulated angular errors in the angular measurements acquired by the gyroscope during the entirety of the first and second period, the angular errors being ex
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: December 1, 2020
    Assignee: SAFRAN ELECTRONICS AND DEFENSE
    Inventors: Pascal Debanne, Arnaud Pinturaud, Benjamin Deleaux, Jean-Christophe Charlaix
  • Patent number: 10837777
    Abstract: The invention relates to a device for maintaining the attitude of a carrier, the device comprising three primary gyroscopes (1, 2, 3) that are arranged to measure primary speeds of rotation (Rbc) of a carrier about three primary axes, a secondary gyroscope (4) that is arranged to measure a secondary speed of rotation (Rhp) of the carrier about a secondary axis that is different from each of the primary axes, a video camera (5) having an optical axis that is different from each of the primary axes, and a data processing module (6) that is configured to estimate scale-factor and drill errors that corrupt the primary speeds of rotation (Rbc) using data issued from the secondary speed of rotation (Rhp) and images acquired by the video camera (5), and to correct the primary speeds of rotation with said estimated errors.
    Type: Grant
    Filed: January 16, 2017
    Date of Patent: November 17, 2020
    Assignee: SAFRAN ELECTRONICS & DEFENSE
    Inventors: Joël Budin, Arnaud Pinturaud, Arnaud Woiselle, Clément Ponssard
  • Patent number: 10823569
    Abstract: A MEMS device includes a first inertial mass system having first drive and sense masses elastically coupled to one another and a second inertial mass system having second drive and sense masses elastically coupled to one another. The first and second drive masses undergo antiphase drive motion along a first axis parallel to the surface of the substrate. First and second sense springs anchor and suspend first and second sense masses spaced apart from the surface of the substrate. The first and second sense springs enable antiphase sense motion of the first and second sense masses along a second axis parallel to the surface in response to an angular rotation about a third axis perpendicular to the surface. The first and second sense springs further enable in-phase sense motion of the first and second sense masses along the second axis in response to a linear acceleration along the second axis.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: November 3, 2020
    Assignee: NXP USA, Inc.
    Inventor: Peng Shao
  • Patent number: 10816339
    Abstract: An annular resonator for a vibrating structure angular rate sensor comprises a planar annular member that lies in the X-Y plane and one or more supporting structures arranged to flexibly support the annular member in the X-Y plane. The one or more supporting structures each comprise a radial portion, extending radially from the annular member and having a first thickness in the X-Y plane, and a circumferential portion, extending circumferentially from the radial portion and having a second thickness in the X-Y plane, wherein the first thickness is greater than the second thickness.
    Type: Grant
    Filed: July 9, 2018
    Date of Patent: October 27, 2020
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventor: Jason Baxter
  • Patent number: 10809063
    Abstract: A yaw rate sensor having a drive for exciting an oscillation of an oscillatory mass, the drive having at least one drive amplifier circuit, and having a detector for detecting a displacement of the oscillatory mass, the detector having at least one detector amplifier circuit, either a low bias current being able to be set for operating the drive amplifier circuit and/or the detector amplifier circuit in an energy-saver mode, or a higher bias current being able to be set for operating the drive amplifier circuit and/or the detector amplifier circuit in a normal mode.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: October 20, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Guangzhao Zhang, Andrea Visconti, Francesco Diazzi, Ruslan Khalilyulin
  • Patent number: 10809277
    Abstract: A single axis inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has first, second, third, and fourth sections. The third section diagonally opposes the first section relative to a center point of the proof mass and the fourth section diagonally opposes the second section relative to the center point. A first mass of the first and third sections is greater than a second mass of the second and fourth sections. A first lever structure is connected to the first and second sections, a second lever structure is connected to the second and third sections, a third lever structure is connected to the third and fourth sections, and a fourth lever structure is connected to the fourth and first sections. The lever structures enable translational motion of the proof mass in response to Z-axis linear acceleration forces imposed on the sensor.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: October 20, 2020
    Assignee: NXP USA, Inc.
    Inventors: Jun Tang, Andrew C. McNeil, Kajal Rahimian Kordestani
  • Patent number: 10794778
    Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: October 6, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Ryuta Nishizawa, Keiji Nakagawa, Keiichi Yamaguchi, Atsushi Matsuo, Fumio Ichikawa
  • Patent number: 10794745
    Abstract: A vibratory meter (5), and methods of manufacturing the same are provided. The vibratory meter includes a pickoff (170l), a driver (180), and a flow tube (400) comprising a tube perimeter wall with: a first substantially planar section (406a), a second substantially planar section (406b) coupled to the first substantially planar section to form a first angle ?1 (404), and a first curved section (406c).
    Type: Grant
    Filed: August 23, 2017
    Date of Patent: October 6, 2020
    Assignee: Micro Motion, Inc.
    Inventors: Mark James Bell, Joel Weinstein, Mitalee Nayan Desai, Clinton R. Griffin
  • Patent number: 10775169
    Abstract: In a vibrating structure angular rate sensor, a signal generator generates a phase change suppressing signal in which a phase change according to an amplitude of a rectangular wave signal generated by at least one of a first modulator and a second modulator is suppressed.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: September 15, 2020
    Assignee: Sumitomo Precision Products Co., Ltd.
    Inventor: Takafumi Moriguchi
  • Patent number: 10767993
    Abstract: A sensor element, for detecting angular velocity about a detection axis perpendicular to a plane of the sensor element, comprises two primary masses and two Coriolis masses, and two sensing cells. Two coupling levers are each coupled to the two primary masses by first springs and to one of the two Coriolis masses by second springs. The coupling levers enable the primary masses and Coriolis masses to be excited into a combined primary motion in the plane of the planar sensor element. In the primary motion, a direction of angular momenta of linear primary oscillation motions of the primary masses and angular momenta of rotational primary motions of the coupling levers with respect to the geometrical centroid of the sensor element is opposite to the direction of the angular momenta of linear primary oscillation motions of the Coriolis masses with respect to the geometrical centroid of the sensor element.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: September 8, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Yoshitaka Kato
  • Patent number: 10768199
    Abstract: A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: September 8, 2020
    Assignee: STMICROELECTRONICS S.r.l.
    Inventors: Alessandro Tocchio, Francesco Rizzini
  • Patent number: 10767992
    Abstract: According to one embodiment, a gyro sensor system including a gyro sensor unit is disclosed. The unit includes a movable body, a spring mechanism, a detector, an adjuster, and a rotation angle acquisition unit. The spring mechanism vibrates the movable body. A detector detects an amplitude of vibration of the movable body due to Coriolis force. The adjuster adjusts a first resonance frequency of vibration of the movable body in free vibration and a second resonance frequency of vibration of the movable body due to Coriolis force on the movable body so that the first and second resonance frequencies are to coincide with each other based on the amplitude of the vibration due to Coriolis force. The rotation angle acquisition unit acquires a rotation angle of the movable body, based on the amplitude of the vibration due to Coriolis force.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: September 8, 2020
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Tamio Ikehashi
  • Patent number: 10760909
    Abstract: A MEMS device includes first, second, third, and fourth sense masses spaced apart from a surface of a substrate. A first drive coupler interconnects the first sense mass with a first actuator, a second drive coupler interconnects the second sense mass with a second actuator, a third drive coupler interconnects the third sense mass with a third actuator, and a fourth drive coupler interconnects the fourth sense mass with a fourth actuator. Each of the drive couplers includes a torsion bar having a length aligned parallel to an outer sidewall of an adjacent sense mass and first and second coupling links coupled to opposing first and second ends of the torsion bar. The first and second coupling links couple an adjacent one of the first, second, third, and fourth sense masses with a corresponding one of the first, second, third, and fourth actuators.
    Type: Grant
    Filed: June 18, 2018
    Date of Patent: September 1, 2020
    Assignee: NXP USA, Inc.
    Inventor: Aaron A. Geisberger
  • Patent number: 10760910
    Abstract: According to one embodiment, a sensor device includes a movable body capable of vibrating, and a catch-and-release mechanism capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member configured to reduce a force acting between the movable body and the stopper portion.
    Type: Grant
    Filed: February 28, 2018
    Date of Patent: September 1, 2020
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Ryunosuke Gando, Tamio Ikehashi, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda
  • Patent number: 10753744
    Abstract: A MEMS sensor device comprises a support substrate, a proof mass movably connected to the support substrate, a first drive comb fixedly connected to the support substrate in a first orientation and adjacent to the proof mass, and a second drive comb fixedly connected to the support substrate in a second orientation and adjacent to the proof mass. The second orientation is opposite of the first orientation such that the first and second drive combs face toward each other. A parallel plate sense electrode is located under the proof mass on the support substrate. The drive combs and the parallel plate sense electrode are each electrically charged and configured with respect to the proof mass such that a combination of a levitation force and a parallel plate force produces a linear out-of-plane actuation that depends only on an applied voltage.
    Type: Grant
    Filed: March 15, 2017
    Date of Patent: August 25, 2020
    Assignee: Honeywell International Inc.
    Inventors: Mikulas Jandak, Tomas Neuzil, Hana Krausova, Michael Schneider, Ulrich Schmid
  • Patent number: 10753745
    Abstract: There is provided a method of sensing a rotation rate using a vibrating structure gyroscope, said gyroscope comprising an electronic control system comprising one or more control loops, wherein at least one of said control loops comprises a filter having a variable time constant, said method comprising the steps of: determining or estimating a characteristic of the vibrating structure of said gyroscope; and adapting or varying said time constant of said filter with the determined or estimated characteristic of said vibrating structure.
    Type: Grant
    Filed: January 26, 2016
    Date of Patent: August 25, 2020
    Assignee: ATLANTIC INERTIAL SYSTEMS LIMITED
    Inventors: Kevin Townsend, Andrew Clifford, Nicholas Wilkinson
  • Patent number: 10746809
    Abstract: A physical quantity measurement device includes a sensor element having a coupling capacitance formed between a drive electrode and a detection electrode, and a circuit device having a drive circuit adapted to supply a drive signal to the drive electrode, a detection circuit adapted to detect physical quantity information corresponding to a physical quantity based on a detection signal from the detection electrode, and a fault diagnosis circuit, and the fault diagnosis circuit has an electrostatic leakage component extraction circuit adapted to extract an electrostatic leakage component due to the coupling capacitance from one of the detection signal and an amplified signal of the detection signal, and performs a fault diagnosis based on the electrostatic leakage component extracted.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: August 18, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Yutaka Takada
  • Patent number: 10732199
    Abstract: A multi-stage MEMS accelerometer is disclosed that includes a MEMS sensor that has two suspended structures (proof masses) suspended by suspension members. The suspended structures move together in response to input acceleration when less the acceleration is less than a threshold value. When the input acceleration is greater than the threshold value, one of the suspended structures makes contact with a mechanical stop while the other suspended structure continues to move with increased stiffness due to the combined stiffness of the suspension members. The contact with the mechanical stop contributes a nonlinear mechanical stiffening effect that counteracts the nonlinear capacitive effect inherent in capacitive based MEMS accelerometers. In some embodiments, more than two suspended structures can be used to allow for optimization of sensitivity for multiple full-scale ranges, and for higher fidelity tuning of mechanical sensitivity with nonlinear capacitance.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: August 4, 2020
    Assignee: Apple Inc.
    Inventors: Christopher C. Painter, See-Ho Tsang
  • Patent number: 10710869
    Abstract: A micromechanical sensor includes a first functional layer, a second functional layer, and a third functional layer The second functional layer is situated between the first and third functional layers. The second and third functional layers are connected to each other by a connecting area of the third functional layer. The second functional layer is underneath the connecting area at a defined distance from the first functional layer. The first functional layer is underneath the connecting area on an oxide that is situated on a substrate.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: July 14, 2020
    Assignee: Robert Bosch GmbH
    Inventor: Benny Pekka Herzogenrath
  • Patent number: 10707405
    Abstract: This invention relates to an electromechanical actuator comprising a support and a deformable element comprising a portion anchored to at least one anchoring zone of the support and mobile portion, the deformable element comprising an electro-active layer, a reference electrode arranged on a first face of the electro-active layer an actuating electrode arranged on a second face, opposite the first face, of the electro-active layer comprises a capacitive device for measuring the deformation of the deformable element, said device being at least partially formed by a capacitive stack comprising a measuring electrode on the second face of the electro-active layer, a measuring portion of the reference electrode located facing the measuring electrode, and a portion of the electro-active layer inserted between the measuring electrode.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: July 7, 2020
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Julie Abergel, Jean-Sebastien Danel, Emmanuel Defay, Gwenael Le Rhun
  • Patent number: 10697772
    Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: June 30, 2020
    Assignee: HRL Laboratories, LLC
    Inventors: Logan D. Sorenson, Raviv Perahia, David T. Chang, Randall L. Kubena, Deborah J. Kirby, Hung Nguyen, Richard J. Joyce
  • Patent number: 10697774
    Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: June 30, 2020
    Assignee: Analog Devices, Inc.
    Inventors: Igor P. Prikhodko, John A. Geen, Jeffrey A. Gregory
  • Patent number: 10690500
    Abstract: A sensor element includes a base portion, a drive arm that extends from the base portion or a portion which is connected to the base portion, and a detection arm that extends from the base portion. The drive arm includes a drive arm portion that extends from the base portion or a portion which is connected to the base portion, and a drive weight portion that is provided on a front end side with respect to the drive arm portion and has a larger width than the drive arm portion. When a length of the drive weight portion in an extending direction of the drive arm is referred to as DHL and a width of the drive weight portion in a direction orthogonal to the extending direction in a planar view is referred to as DHW, a relationship of 1.5?DHL/DHW is satisfied.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: June 23, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Ryuta Nishizawa, Keiichi Yamaguchi
  • Patent number: 10677611
    Abstract: The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyroscope rotates around a sensitive axis.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: June 9, 2020
    Assignee: Albert-Ludwigs-Universitat Freiburg
    Inventors: Michael Maurer, Yiannos Manoli
  • Patent number: 10677813
    Abstract: A physical quantity detector according to the invention includes a substrate section including a base section, a movable part connected to the base section, a support section extending from the base section, an extending part extending from the support section, and a physical quantity detection element fixed to the base section and the movable part, and a weight fixed to the movable part, and the extending part and the weight overlap each other in a planar view from the thickness direction of the extending part.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: June 9, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Kenta Sato
  • Patent number: 10674295
    Abstract: An improved method and system for varying an amount of mechanical coupling in a speakerphone is disclosed. Solutions and implementations provided vary the amount of mechanical coupling between one or more speakers and one or more microphones of the speakerphone to generate high-quality sounds. Implementations include receiving a signal for a first speaker, transforming the signal to send to a second speaker or actuator to generate either complementary or opposing vibration forces to those generated by the first speaker, and an accelerometer to measure the amount of vibration caused by the speaker and adjust the transformation applied to the signal to increase or decrease the amount of mechanical coupling, as needed.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: June 2, 2020
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Antti Pekka Kelloniemi, Ross Garrett Cutler, Sailaja Malladi, Tommi Antero Raussi
  • Patent number: 10670428
    Abstract: A circuit device adapted to perform detection of angular velocity observed by a capacitance type angular velocity transducer includes a drive device, a detection device, a vibration frequency controller adapted to variably control at least one of a detection frequency and a drive frequency of the capacitance type angular velocity transducer, and a storage adapted to store a correction parameter group adapted to correct a sensor characteristic of the capacitance type angular velocity transducer due to a variation of at least one of the detection frequency and the drive frequency.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: June 2, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Ryuta Nishizawa, Kei Kanemoto, Takayuki Kikuchi
  • Patent number: 10673403
    Abstract: A resonator is provided that suppresses a shift in resonant frequency. The resonator includes a vibration member including vibration arms extending therefrom with two or more of the vibration arms performing out-of-plane bend with different phases. Moreover, the resonator includes a base having a front end connected to the vibration arms and a rear end opposing the front end and structured to bend in a direction of the out-of-plane bend when the vibration arms perform the out-of-plane bend. Moreover, a frame surrounds a periphery of the vibration member and one or more holding arms are positioned between the vibration member and the frame. One end of each holding arm is connected to the base and the other end of the holding arm is connected to the frame. The holding arms bend in the direction of the out-of-plane bend when the base bends.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: June 2, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Wakana Hirota, Ville Kaajakari
  • Patent number: 10634498
    Abstract: A physical quantity sensor includes: a base; an IC disposed on the base; an angular rate sensor and an acceleration sensor disposed on the IC; a first stress buffer layer disposed between the IC and the angular rate sensor; and a second stress buffer layer disposed between the IC and the acceleration sensor. The first and second stress buffer layers are disposed spaced apart from each other.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: April 28, 2020
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Tsugio Ide
  • Patent number: 10627234
    Abstract: A gyro sensor includes: a substrate; a first drive section; and a first detection section and a second detection section that detect angular velocity. The first detection section includes a first movable body including a first movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a first fixed electrode fixed to the substrate and facing the first movable electrode. The second detection section includes a second movable body including a second movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a second fixed electrode fixed to the substrate and facing the second movable electrode. The first movable body and the second movable body are coupled together by a first coupling section.
    Type: Grant
    Filed: January 3, 2018
    Date of Patent: April 21, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Kikuchi, Kei Kanemoto
  • Patent number: 10608557
    Abstract: A MEMS electrostatic piston-tube actuator that provides 4 degrees of freedom (4-DOF) motion is disclosed. The actuator comprises of an inner and an outer MEMS structure. The inner MEMS structure comprises of an inner moving stage (rotor) and an inner fixed frame (stator). The inner rotor comprises of a central load stage, a plurality of rotary comb drive electrodes surrounding the central rotor. The outer MEMS structure comprises of an outer moving stage (outer rotor) and outer stator frame. The outer rotor holds the entire inner MEMS structure and is rigidly attached to it through a fixed periphery of the inner MEMS structure. The outer rotor comprises of a plurality of through openings (tubes) and attached to a fixed outer periphery through a plurality of mechanical springs. A load set on the central stage can be controlled in 4-DOF comprising of translational and rotational motions of roll, yaw, pitch, and z-axis translation.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: March 31, 2020
    Inventors: Faez Ba-Tis, Ali Banss, Ahmed Galaom, Ridha Ben-Mrad
  • Patent number: 10598491
    Abstract: A resonator array comprises substantially paralleled first and second resonant layers having resonating masses. A first set of lateral drive electrodes cause the first resonating mass to vibrate along an axis in a first geometric plane. A second set of lateral drive electrodes cause the second resonating mass to vibrate along an axis in a second geometric plane in an opposite direction of the first resonating mass by about 180 degrees. Rotation in the system causes the masses to vibrate out-of-plane in opposite directions. The opposite vibrational directions of the first and second resonating masses produces a balanced system with small motion in a bonding area between the stacked resonators. As a result, there is minimal propagation of mechanical waves from the balanced system to a substrate resulting in lower anchor loss and a high Q-factor.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: March 24, 2020
    Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Khalil Najafi, Ali Darvishian
  • Patent number: 10591593
    Abstract: Sensors, devices, systems, devices, and methods for providing wireless modular self-contained units with battery power supply that can use radar, ultrasonic, and IR measuring techniques and sensors for directional detection of impeding objects, persons, or moving targets, and can be used with mobile smart phones and the like. The modular sensor units can be used as a displacement and motion measurement sensor for point of reference measurement applications. The displacement sensing method can use radar, ultrasonic, and IR measuring techniques for directional detection of impeding objects, persons, or moving targets. Upon the detection of the said target, algorithms make use of the direction, angle of ascent, and speed to provide real time position data represented in discrete format.
    Type: Grant
    Filed: March 15, 2017
    Date of Patent: March 17, 2020
    Assignee: HIPSCIENCE, LLC
    Inventor: Marquette Trishaun
  • Patent number: 10578435
    Abstract: Circuits and methods for compensating microelectromechanical system (MEMS) gyroscopes for quality factor variations are described. Quality factor variations arise when mechanical losses are introduced in the gyroscope's resonator, for example due to thermoelastic damping or squeeze-film damping, which may hinder the gyroscope's ability to accurately sense angular velocity. Quality factor compensation may be performed by generating a compensation signal having a time decay rate that depends on the quality factor of resonator. In this way, artifacts that may otherwise arise in gyroscope's output are limited. Additionally, or alternatively, quality factor compensation may be performed by controlling the force with which the gyroscope's resonator is driven. This may be achieved, for example, by controlling the average value of the drive signal.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: March 3, 2020
    Assignee: Analog Devices, Inc.
    Inventors: James Lin, Ronald A. Kapusta, Jr., Lijun Gao
  • Patent number: 10556789
    Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity: in a first method step, an access opening, connecting the first cavity to surroundings of the micromechanical component, being formed in the substrate or in the cap; in a second method step, the first pressure and/or the first chemical composition being adjusted in the first cavity; in a third method step, the access opening being sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; in a fourth method step, a recess being formed, and/or an elevation being formed, and/or a reflection area being formed, and/or an absorption area being formed.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: February 11, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Frank Reichenbach, Jochen Reinmuth, Philip Kappe, Mawuli Ametowobla
  • Patent number: 10544033
    Abstract: A micromechanical component includes a substrate that extends along a main extension plane of the micromechanical component, the micromechanical component including a drive mass which is suspended on the substrate via a drive spring of the micromechanical component so as to be able to move relative to the substrate, the micromechanical component including a test mass that is movably suspended relative to the drive mass, the drive spring being disposed in such a way that the drive mass and/or the test mass surround(s) the drive spring at least in part essentially parallel to the main extension plane.
    Type: Grant
    Filed: May 10, 2017
    Date of Patent: January 28, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Rudy Eid, Stefano Cardanobile
  • Patent number: 10545167
    Abstract: Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: January 28, 2020
    Assignee: Analog Devices, Inc.
    Inventors: Xin Zhang, Michael W. Judy, Mehrnaz Motiee
  • Patent number: 10539420
    Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: January 21, 2020
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Daniele Prati, Carlo Valzasina, Luca Giuseppe Falorni, Matteo Fabio Brunetto
  • Patent number: 10527420
    Abstract: A MEMS device includes at least one proof mass, the at least one proof mass is capable of moving to contact at least one target structure. The MEMS device further includes at least one elastic bump stop coupled to the proof mass and situated at a first distance from the target structure. The MEMS device additionally includes at least one secondary bump stop situated at a second distance from the target structure, wherein the second distance is greater than the first distance, and further wherein the at least one elastic bump stop moves to reduce the first distance when a shock is applied.
    Type: Grant
    Filed: July 24, 2018
    Date of Patent: January 7, 2020
    Assignee: Invensense, Inc.
    Inventors: Jin Qiu, Joseph Seeger
  • Patent number: 10520331
    Abstract: According to one aspect, embodiments herein provide a whole angle gyroscope comprising a central point, at least one mass arranged symmetrically about the central point, a plurality of transducers, each configured to perform at least one of driving and sensing motion of the at least one mass, and a processor coupled to the plurality of transducers, the processor configured to operate the plurality of transducers to drive the at least one mass in at least a first vibratory mode and a second vibratory mode, identify a rate dead zone of the whole angle gyroscope, and operate the plurality of transducers to apply a force to the at least one mass to reduce the identified rate dead zone of the whole angle gyroscope.
    Type: Grant
    Filed: February 27, 2018
    Date of Patent: December 31, 2019
    Assignee: THE CHARLES STARK DRAPER LABORATORY, INC.
    Inventors: Marc Steven Weinberg, Ralph Cohn, Eugene H. Cook
  • Patent number: 10520315
    Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: December 31, 2019
    Assignee: STMicroelectronics S.R.L.
    Inventors: Alessandro Tocchio, Luca Giuseppe Falorni, Claudia Comi, Valentina Zega