Vibratory Mass Patents (Class 73/504.12)
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Patent number: 12038282Abstract: A MEMS single-axis gyroscope includes an anchor point structure, a sensing unit elastically connected with the anchor point structure, and a driving decoupling structure elastically connected with the anchor point structure and the sensing unit. The sensing unit includes a plurality of mass blocks arranged side by side and rocker connecting pieces. Each of the rocker connecting pieces is connected between corresponding two adjacent mass blocks. Connecting positions between each of the rocker connecting pieces and the corresponding two adjacent mass blocks are located on a same side of the line connecting the centers of the plurality of mass blocks. The MEMS single-axis gyroscope is able to perform differential detection, which resists interference of external electrical and mechanical noise, and improves a signal-to-noise ratio. By adjusting the rocker connecting pieces arranged between each two adjacent mass blocks, a total vector displacement of the plurality of mass blocks is zero.Type: GrantFiled: July 26, 2022Date of Patent: July 16, 2024Assignee: AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTDInventors: Shan Yang, Hongtao Peng, Zhan Zhan, Shitao Yan, Zhao Ma, Xiao Kan, Kahkeen Lai, Veronica Tan
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Patent number: 12025445Abstract: A sensor system having a MEMS gyroscope. The sensor system includes a seismic mass for acquiring a measuring signal, a drive circuit, an acquisition circuit for reading out and demodulating the measuring signal, whereby a rate of rotation signal and a quadrature signal phase-shifted relative to the rate of rotation signal is generated, and a digital processing circuit for compensating an offset of the digitized rate of rotation signal using the digitized quadrature signal. The acquisition circuit and the digital processing circuit encompass a rate of rotation circuit, and a quadrature circuit for generating and processing the quadrature signal and generating a compensation signal for the offset compensation of the digitized rate of rotation signal. At least part of the quadrature circuit is operable in at least one other operating mode than the rate of rotation circuit, independently of the operating mode of the rate of rotation circuit.Type: GrantFiled: August 26, 2021Date of Patent: July 2, 2024Assignee: ROBERT BOSCH GMBHInventors: Francesco Diazzi, Ruslan Khalilyulin, Andrea Visconti
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Patent number: 12026313Abstract: A haptic device with coupled resonance at tunable frequencies includes an actuator, a first structure coupled to the actuator, a second structure coupled to the first structure and separate from the actuator, and at least one local mass coupled to the first or second structure; the first and second structure having resonance such that application by the actuator of a resonance frequency to the first structure causes the first and second structures to resonate in phase and displace the local mass. A method of forming a haptic device includes coupling an actuator to a first structure, coupling the first structure to a second structure, locating a mass on at least one of the first or second structures, and configuring the actuator to, upon activation, excite the first structure at a resonance frequency of the haptic device such that the first and second structures resonate in phase and displace the mass.Type: GrantFiled: May 27, 2021Date of Patent: July 2, 2024Assignee: META PLATFORMS TECHNOLOGIES, LLCInventors: Dongsuk Shin, Sai Sharan Injeti
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Patent number: 12022747Abstract: Embodiments disclosed herein include a resonator for use in quantum computing. The resonator can include a housing that is disposed along a resonator axis. The housing can have a first portion extending from a housing distal end to near a qubit location and a second portion extending from near the qubit location to a housing proximal end. The housing can define a cavity extending from a cavity proximal end to a cavity distal end along a portion of the resonator axis. The housing can include a protrusion extending axially from the housing distal end along the resonator axis to near the qubit location. A proximal portion of the protrusion can include a tapered portion. The resonator can include a qubit extending into the cavity at the qubit location.Type: GrantFiled: April 22, 2020Date of Patent: June 25, 2024Assignee: RadiaBeam Technologies, LLCInventors: Sergey Kutsaev, Ronald Agustsson, Kirill Taletski
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Patent number: 12013240Abstract: A MEMS gyroscope includes an anchor point unit, a sensing unit elastically connected with the anchor point unit, and a driving unit elastically connected with the anchor point unit and the sensing unit. The anchor point unit includes four corner anchor point structures arranged at four corners of the MEMS gyroscope and four central anchor points. The sensing unit includes four first mass blocks elastically connected with the corner anchor point structures and the central anchor points to form avoiding spaces, four second mass blocks arranged within the avoiding spaces, and four decoupling mass blocks. The driving unit includes four driving pieces respectively connected with outer sides of the second mass blocks. The MEMS gyroscope realizes independent detection of angular velocities of three axes and realizes differential detection and balance of vibration moment, which immune to influence of acceleration shock and quadrature error and improves detection accuracy.Type: GrantFiled: July 25, 2022Date of Patent: June 18, 2024Assignee: AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTDInventors: Zhao Ma, Zhan Zhan, Xiao Kan, Shan Yang, Shitao Yan, Hongtao Peng, Yang Li, Kahkeen Lai, Veronica Tan
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Patent number: 11988511Abstract: A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.Type: GrantFiled: April 14, 2021Date of Patent: May 21, 2024Assignee: ROBERT BOSCH GMBHInventors: Matthias Kuehnel, Nils Felix Kuhlmann, Robert Maul, Rolf Scheben, Steffen Markisch, Thorsten Balslink, Wolfram Geiger
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Patent number: 11977094Abstract: A microelectromechanical accelerometer for measuring acceleration, comprising a first proof mass and ae second proof mass. The first proof mass is adjacent to the second proof mass. A suspension structure allows the first proof mass to undergo rotation out of the device plane about a first rotation axis and the suspension structure allows the second proof mass to undergo rotation out of the device plane about a second rotation axis. The first and second rotation axes are parallel to each other and define an x-direction which is parallel to the first and the second rotation axes and a y-direction which is perpendicular to the x-direction. The y-coordinate of the first rotation axis is greater than the y-coordinate of the second rotation axis by a nonzero distance D.Type: GrantFiled: July 5, 2022Date of Patent: May 7, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Matti Liukku, Ville-Pekka Rytkönen, Anssi Blomqvist
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Patent number: 11959801Abstract: Shortwave infrared (SWIR) hyperspectral imaging (HSI) systems comprise a supercontinuum laser source configured to illuminate objects and a receiver comprising a spectrometer configured to receive light reflected from the objects. In some cases, hyperspectral images can be created by raster scanning of the source/receiver across a scene. The supercontinuum laser source provides active illumination to allow collection of hyperspectral imagery during day (including overcast conditions) and night.Type: GrantFiled: September 1, 2022Date of Patent: April 16, 2024Inventors: James F. Coward, David Alan Pechner, Gregory Mitchell, Ji Li
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Patent number: 11953323Abstract: A micromechanical rate-of-rotation sensor set-up, including a first rate-of-rotation sensor device capable of being driven rotationally by a driving device via a drive frame device, so as to oscillate about a first axis, and is for measuring a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis; and a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the second axis, and is for measuring a third outer rate of rotation about the first axis. The first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device. The drive frame device includes a first and second drive frame, which may be driven by the driving device in phase opposition, along the third axis, in an oscillatory manner.Type: GrantFiled: January 29, 2021Date of Patent: April 9, 2024Assignee: ROBERT BOSCH GMBHInventors: Reinhard Neul, Andreas Lassl, Burkhard Kuhlmann, Jan-Timo Liewald, Matthias Kuehnel, Niels Bode, Nils Felix Kuhlmann, Odd-Axel Pruetz, Peter Degenfeld-Schonburg
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Patent number: 11946743Abstract: Angular sensor with vibrating resonator includes a supporting structure, a first mass and a second mass which are concentric, and mechanical springs arranged symmetrically in pairs, the pairs themselves being arranged symmetrically with respect to one another. Each spring comprises a first elastic leaf and a second elastic leaf which are connected to one another by one end, the first elastic leaf of one of the springs of each pair being parallel to the second elastic leaf of the other of the springs of the same pair. The four elastic leaves of at least one pair comprise two adjacent pairs of leaves making an angle of approximately 45° between them. The sensor is not provided with electrostatic springs.Type: GrantFiled: October 15, 2020Date of Patent: April 2, 2024Assignee: SAFRAN ELECTRONICS & DEFENSEInventors: Alain Jeanroy, Philippe Onfroy
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Patent number: 11932531Abstract: The present disclosure relates to an integrated chip structure including a MEMS actuator. The MEMS actuator includes an anchor having a first plurality of branches extending outward from a central region of the anchor. The first plurality of branches respectively include a first plurality of fingers. A proof mass surrounds the anchor and includes a second plurality of branches extending inward from an interior sidewall of the proof mass. The second plurality of branches respectively include a second plurality of fingers interleaved with the first plurality of fingers as viewed in a top-view. One or more curved cantilevers are coupled between the proof mass and a frame wrapping around the proof mass. The one or more curved cantilevers have curved outer surfaces having one or more inflection points as viewed in the top-view.Type: GrantFiled: March 14, 2022Date of Patent: March 19, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Ting-Jung Chen
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Patent number: 11927444Abstract: Disclosed is a chip-level resonant acousto-optic coupling solid-state wave gyroscope based on MEMS technology. A surface acoustic progressive wave mode sensitive structure and a micro-ring resonant cavity optical detection structure are combined in the gyroscope. Through acousto-optic effect, mechanical strain of the device crystal caused by wave vibration of a primary surface acoustic wave and a secondary surface acoustic wave caused by Coriolis force is converted into a variation in the refractive index of an optical waveguide etched on the device, so that the optical signal transmitted in the waveguide diffracts, thereby generating frequency modulation. Meanwhile, a micro-ring resonant cavity using the resonance principle peels off the frequency change introduced by the primary surface acoustic wave, and obtains an output signal containing external angular velocity information.Type: GrantFiled: September 6, 2021Date of Patent: March 12, 2024Assignee: NORTHWESTERN POLYTECHNICAL UNIVERSITYInventors: Honglong Chang, Lu Tian, Qiang Shen
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Patent number: 11920931Abstract: A microelectromechanical gyroscope which comprises one or more Coriolis masses driven by a drive transducer and a force-feedback system. The force-feedback circuit comprises first and second sideband modulators and the self-test circuit comprises first and second sideband demodulators.Type: GrantFiled: May 4, 2021Date of Patent: March 5, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventor: Heikki Kuisma
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Patent number: 11867509Abstract: A MEMS gyroscope includes a driven mass that moves in response to a drive force. A drive amplitude sense electrode is included as a feature of the drive mass and extends in a direction perpendicular to the drive direction. A change in capacitance is measured based on the relative location of the drive amplitude sense electrode to a known fixed position, which in turn is used to accurately determine a location of the driven mass.Type: GrantFiled: February 24, 2022Date of Patent: January 9, 2024Assignee: InvenSense, Inc.Inventors: Damiano Milani, Luca Coronato
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Patent number: 11846509Abstract: A three-axis rotation rate sensor including a substrate and a double rotor. The double rotor includes a first rotor and a second rotor which are elastically connected to one another via a first coupling element so that the two rotors are excitable to rotary oscillations in phase opposition. The first rotor includes a first seismic mass and a second seismic mass that are deflectably supported with respect to the first rotor, and the second rotor includes a third seismic mass and a fourth seismic mass that are deflectably supported with respect to the second rotor. The first mass is connected to the third mass via a first rocker element so that upon a lateral deflection of the first mass, the third mass is deflected in a direction opposite the lateral deflection of the first mass.Type: GrantFiled: January 19, 2022Date of Patent: December 19, 2023Assignee: ROBERT BOSCH GMBHInventor: Jochen Reinmuth
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Patent number: 11846508Abstract: A microelectromechanical gyroscope comprising first, second, third and fourth Coriolis masses, arranged in that order on an x-axis. In the primary oscillation mode, the Coriolis masses are configured to oscillate so that the second and third Coriolis masses move in linear translation along the x-axis away from a center point when the first and fourth Coriolis masses move in linear translation along the x-axis towards the first center point, and vice versa. When the gyroscope undergoes rotation about a y-axis which is perpendicular to the x-axis, the Coriolis masses are configured to oscillate so that the first, second, third and fourth Coriolis masses undergo vertical motion in a z-direction, wherein the first and third Coriolis masses move up when the second and fourth Coriolis masses move down, and vice versa.Type: GrantFiled: April 27, 2021Date of Patent: December 19, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Anssi Blomqvist, Ville-Pekka Rytkönen
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Patent number: 11844284Abstract: A method of manufacturing and resultant device are directed to an inverted wide-base double magnetic tunnel junction device having both high-efficiency and high-retention arrays. The method includes a method of manufacturing, on a common stack, a high-efficiency array and a high-retention array for an inverted wide-base double magnetic tunnel junction device. The method comprises, for the high-efficiency array and the high-retention array, forming a first magnetic tunnel junction stack (MTJ2), forming a spin conducting layer on the MTJ2, and forming a second magnetic tunnel junction stack (MTJ1) on the spin conducting layer. The first magnetic tunnel junction stack for the high-retention array has a high-retention critical dimension (CD) (HRCD) that is larger than a high-efficiency CD (HECD) of the first magnetic tunnel junction stack for the high-efficiency array. The second magnetic tunnel junction stack (MTJ1) is shorted for the high-retention array and is not shorted for the high-efficiency array.Type: GrantFiled: June 29, 2021Date of Patent: December 12, 2023Assignee: International Business Machines CorporationInventors: Pouya Hashemi, Chandrasekharan Kothandaraman
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Patent number: 11841228Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.Type: GrantFiled: September 3, 2021Date of Patent: December 12, 2023Assignee: INVENSENSE, INC.Inventors: Doruk Senkal, Robert Hennessy, Houri Johari-Galle, Joe Seeger
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Patent number: 11834326Abstract: According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.Type: GrantFiled: August 30, 2021Date of Patent: December 5, 2023Assignee: Kabushiki Kaisha ToshibaInventors: Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Ryunosuke Gando, Shiori Kaji, Hiroki Hiraga, Fumito Miyazaki, Daiki Ono
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Patent number: 11837983Abstract: The current document is directed to various types of oscillating resonant modules (“ORMs”), including linear-resonant vibration modules, that can be incorporated in a wide variety of appliances, devices, and systems to provide vibrational forces. The vibrational forces are produced by back-and-forth oscillation of a weight or member along a path, generally a segment of a space curve. A controller controls each of one or more ORMs to produce driving oscillations according to a control curve or control pattern for the ORM that specifies the frequency of the driving oscillations with respect to time. The driving oscillations, in turn, elicit a desired vibration response in the device, appliance, or system in which the one or more ORMs are included. The desired vibration response is achieved by selecting and scaling control patterns in view of known resonance frequencies of the device, appliance, or system.Type: GrantFiled: September 30, 2021Date of Patent: December 5, 2023Assignee: Resonant Systems, Inc.Inventors: Robin Elenga, Dan Knodle, Brian Pepin
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Patent number: 11815354Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements. In further embodiments, a dynamically balanced 3-axis gyroscope architecture is provided.Type: GrantFiled: December 30, 2020Date of Patent: November 14, 2023Assignee: INVENSENSE, INC.Inventors: Doruk Senkal, Robert Hennessy, Houri Johari-Galle, Joseph Seeger
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Patent number: 11808574Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.Type: GrantFiled: March 21, 2022Date of Patent: November 7, 2023Assignee: STMICROELECTRONICS S.R.L.Inventors: Gabriele Gattere, Carlo Valzasina, Luca Giuseppe Falorni
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Patent number: 11808573Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements.Type: GrantFiled: April 25, 2022Date of Patent: November 7, 2023Assignee: STMICROELECTRONICS S.R.L.Inventors: Luca Guerinoni, Luca Giuseppe Falorni, Matteo Fabio Brunetto
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Patent number: 11802768Abstract: A MEMS multiaxial angular rate sensor includes a substrate and a MEMS wafer layer correspondingly deposited and parallel to each other, and a plurality of anchors coupled to the MEMS wafer layer and fixing the MEMS wafer layer onto the substrate. The MEMS wafer layer includes at least two drive-sensing structures, a third driving ring and two pendulum masses. Each of the drive-sensing structures includes a driving ring, a plurality of driving comb pair structures and a plurality of sensing proof masses respectively coupled to the corresponding driving ring. A third driving ring is coupled to and deposited between the two driving rings of the two drive-sensing structures. In a driving mode, those driving comb pair structures drive the corresponding driving rings to perform periodical rotation motions, and the two driving rings in periodical rotation motions further actuate the third driving ring to perform periodical rotation motion together.Type: GrantFiled: February 9, 2022Date of Patent: October 31, 2023Assignee: MIRAMEMS SENSING TECHNOLOGY CO., LTD.Inventor: Li-Tien Tseng
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Patent number: 11796319Abstract: According to one embodiment, a sensor includes a base body including a first surface including first and second base body regions, a first structure body provided in the first base body region, a second structure body provided in the second base body region, and a control device. The first structure body includes a first movable member configured to vibrate. The vibration of the first movable member includes first and second components. The second structure body includes a second movable member configured to vibrate. The control device includes a controller configured to perform a processing operation. The processing operation includes outputting a second rotation angle, The second rotation angle is obtained by correcting a first rotation angle based on a resonance frequency of the second movable member. The first rotation angle of the first movable member is obtained based on the first component and the second component.Type: GrantFiled: February 11, 2022Date of Patent: October 24, 2023Assignee: Kabushiki Kaisha ToshibaInventors: Fumito Miyazaki, Yasushi Tomizawa, Ryunosuke Gando, Hiroki Hiraga, Kei Masunishi, Shiori Kaji, Daiki Ono, Etsuji Ogawa
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Patent number: 11788840Abstract: One example includes a radar image interface system. The system includes an image processor configured to receive synthetic aperture radar (SAR) image data associated with a region of interest and to generate a radar image of the region of interest based on the SAR image data. The image processor can be further configured to divide the radar image into a plurality of sequential units corresponding to respective zones of the region of interest. The system also includes a display system configured to display zoomed sequential units corresponding to respective zoomed versions of the sequential units of the radar image to a user. The system further includes an input interface configured to facilitate sequentially indexing through each of the zoomed versions of the sequential units on the display system in response to an indexing input provided by the user.Type: GrantFiled: November 8, 2021Date of Patent: October 17, 2023Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventor: George Attila Pavlath
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Patent number: 11768221Abstract: A micromechanical sensor, including a micromechanical chip having a first micromechanical structure, a first evaluation chip, having a first application-specific integrated circuit, and a second evaluation chip having a second application-specific integrated circuit. The first evaluation chip and the micromechanical chip are situated in a stacked manner, the micromechanical chip being directly electrically conductively connected with the first evaluation chip and the first evaluation chip being directly electrically conductively connected with the second evaluation chip. The first application-specific integrated circuit primarily includes analog circuit elements and the second application-specific circuit primarily includes digital circuit elements.Type: GrantFiled: September 15, 2021Date of Patent: September 26, 2023Assignee: ROBERT BOSCH GMBHInventors: Andrea Visconti, Artjom Kosov, Jochen Hahn, Johannes Classen, Timo Giesselmann
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Patent number: 11754395Abstract: A mechanical coupling device coupling in movement two elements able to move in translation along a first direction, configured to impose thereon movements in phase opposition, the coupling device including two arms rotationally articulated about a second out-of-plane direction, each arm to be connected to one of the movable elements, a coupling element to which the two arms are connected by elements having high rigidity in a third direction, the coupling element being configured to move in translation along the third direction, first and second devices for suspending the coupling element configured to guide the coupling element in translation along the third direction and to limit rotational movement thereof about the second direction.Type: GrantFiled: August 24, 2021Date of Patent: September 12, 2023Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Loïc Joet, Patrice Rey
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Patent number: 11754452Abstract: Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.Type: GrantFiled: August 19, 2019Date of Patent: September 12, 2023Assignee: SCHLUMBERGER TECHNOLOGY CORPORATIONInventors: Didier Pohl, Florian Risser, Jacques Sellin, Patrice Ligneul, Kamran Danaie, Mihir Patel, Boris Valkov
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Patent number: 11740088Abstract: A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.Type: GrantFiled: November 11, 2021Date of Patent: August 29, 2023Assignee: STMICROELECTRONICS S.r.l.Inventors: Luca Guerinoni, Luca Giuseppe Falorni
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Patent number: 11709178Abstract: An accelerometer structure, a method for preparing the accelerometer structure and an acceleration measurement method are provided. The accelerometer structure includes a substrate having a groove structure, a test mass, a plurality of nano-tethers, and a nano-photonic-crystal measurement unit. The test mass, nano-tethers, and the nano-photonic-crystal measurement unit are suspended above the groove structure. A nano-photonic-crystal resonant cavity is formed in the nano-photonic-crystal measurement unit, and an acceleration of the test mass is characterized by a resonant frequency of the nano-photonic-crystal resonant cavity. The present disclosure provides a photoelasticity-based opto-micromechanical accelerometer structure, which uses a cavity resonance tension sensor in a nano-photonic-crystal cavity to measure a tension of the nano-photonic-crystal resonant cavity.Type: GrantFiled: April 11, 2022Date of Patent: July 25, 2023Assignee: Shenzhen Conjugate Technology Co., Ltd.Inventors: Hengjiang Ren, Jie Luo
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Patent number: 11698388Abstract: A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.Type: GrantFiled: December 15, 2020Date of Patent: July 11, 2023Assignee: STMicroelectronics S.r.l.Inventors: Jean Marie Darmanin, Carlo Valzasina, Alessandro Tocchio, Gabriele Gattere
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Patent number: 11692826Abstract: An anchor member supports a frame-shaped member. A first input electrode is located outside the frame-shaped member and separate from the frame-shaped member and fixed to a substrate. A second input electrode includes an electrode portion located outside the frame-shaped member and connected to the frame-shaped member. The second input electrode is displaceable in a prescribed direction. A first reference electrode is inside the frame-shaped member and fixed to the substrate. A second reference electrode includes an electrode portion located inside of the frame-shaped member and connected to the frame-shaped member. The second reference electrode is displaceable in the prescribed direction. In the structural component, the first input electrode and the electrode portion of the second input electrode are located between the frame-shaped member and a weight member in the prescribed direction in plan view in a thickness direction defined with respect to the substrate.Type: GrantFiled: March 5, 2020Date of Patent: July 4, 2023Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Shoichi Taji, Hiroyuki Aizawa, Soichiro Hiraoka
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Patent number: 11692824Abstract: A gyrometer including a first dual-mass gyrometer including a planar substrate, first left and right inertial masses including a first left and right frames, respectively, aligned along a first excitation axis X1 parallel to an excitation direction, and mounted with the ability to slide on the substrate along the first excitation axis X1, and first left and right central masses, respectively, mounted with the ability to slide in the first left and right frames, respectively, parallel to a first detection direction perpendicular to the excitation direction; a first coupling spring interposed between the first left and right frames; a first rocker mounted with the ability to rotate on the substrate about a first rocker pivot, first left and right ends of the first rocker being connected to the first left and right central masses, respectively; second left and right inertial masses aligned along a second axis X2 parallel to the excitation direction, and mounted with the ability to slide on the substrate along thType: GrantFiled: November 19, 2021Date of Patent: July 4, 2023Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Pierre Janioud, Guillaume Jourdan, Alexandra Koumela, Christophe Poulain
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Patent number: 11662206Abstract: The present invention provides a micromachined gyroscope, including: a base; an anchor point fixed to the base; a number of vibration structures; and a drive structure used for driving the vibration structure to vibrate in a x-y plane along a ring direction. The drive structure includes at least four groups arranged at intervals along the ring direction and symmetrical about an x axis and a y axis. The micromachined gyroscope works in two vibration modes interchanging with each other, including a driving mode status working in a first mode status and a testing mode status working in a second mode status. By virtue of the configuration described in the invention, the micromachined gyroscope can realize three-axis detection at the same time, and greatly improves the quality utilization rate of the vibration structure.Type: GrantFiled: December 30, 2021Date of Patent: May 30, 2023Assignees: AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD, AAC Acoustic Technologies (Shenzhen) Co., Ltd.Inventors: Xiao Kan, Zhao Ma, Shan Yang, Zhan Zhan, Hongtao Peng, Yang Li, Veronica Tan, Yan Hong, Kahkeen Lai
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Patent number: 11650221Abstract: A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component.Type: GrantFiled: August 5, 2020Date of Patent: May 16, 2023Assignee: STMICROELECTRONICS S.r.l.Inventors: Alessandro Tocchio, Francesco Rizzini
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Patent number: 11639852Abstract: A three-axis microelectromechanical system (MEMS) gyroscope includes four proof masses, where the proof masses are connected by spring beams and/or rigid beams; a first proof mass is configured to move in an X-axis direction; a second proof mass is configured to rotate around an X-direction axis, a Y-direction axis, and a Z-direction axis, and when the first proof mass moves in the X-axis direction, the second proof mass is driven to rotate around the Z-direction axis; a third proof mass is configured to move in the X-axis direction and a Y-axis direction, and when the first proof mass moves in the X-axis direction, the third proof mass is driven to move in the Y-axis direction; a fourth proof mass is configured to move in the X-axis direction, and when the third proof mass moves in the X-axis direction, the fourth proof mass is driven to move in the X-axis direction.Type: GrantFiled: April 2, 2020Date of Patent: May 2, 2023Assignee: SENODIA TECHNOLOGIES (SHAOXING) CO., LTD.Inventors: Bo Zou, Qinglong Zheng, Shuang Liu
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Patent number: 11623860Abstract: An interposer substrate, a MEMS device and a corresponding manufacturing method. The interposer substrate is equipped with a front side and a rear side, a cavity starting from the rear side, which extends up to a first depth, a through-opening and a sunken area situated between the cavity and the through-opening, which is sunken from the rear side up to a second depth in relation to the rear side, the first depth being greater than the second depth.Type: GrantFiled: November 30, 2018Date of Patent: April 11, 2023Assignee: ROBERT BOSCH GMBHInventors: Corinna Koepernik, Joerg Muchow, Rainer Straub, Stefan Mark
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Patent number: 11614327Abstract: The present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second flexibility. The second plate is connected to the second plate, the second plate is connected to the third plate with a fourth flexible element, the second plate is provided with a first through-hole, and a rotating plate is pivotally connected in the first through-hole. The rotating plate is connected to a supporting column of the substrate by a fifth flexible part, and then a sensing element is provided on the substrate corresponding to the first, second, and third plates to sense the movement and movement of the plates. Rotating, in one embodiment, the first and third plates are provided with through-holes, and corresponding sensing elements and driving elements are provided.Type: GrantFiled: July 23, 2021Date of Patent: March 28, 2023Assignee: Sensortek Technology Corp.Inventors: Shih-Hsiung Tseng, Shih-Wei Lee, Chao-Shiun Wang
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Patent number: 11591209Abstract: A method for operating a capacitive MEMS sensor. The method includes: supplying a defined electrical potential on a deflectably mounted, seismic mass of the MEMS sensor; capacitively inducing a vibrational motion of the seismic mass with the aid of a clocked electrical control voltage; compensating for fluctuations in the supplied electrical potential on the seismic mass caused by the clocked electrical control voltage, by selectively charging and/or discharging an electrical storage element connected to the seismic mass in accordance with the frequency of the clocked electrical control voltage.Type: GrantFiled: January 20, 2020Date of Patent: February 28, 2023Assignee: Robert Bosch GmbHInventors: Francesco Diazzi, Andrea Visconti, Luca Valli
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Patent number: 11584635Abstract: A dual-output microelectromechanical system (MEMS) resonator can be operated selectively and concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration to obtain, respectively, a first electrical signal having a first frequency and a second electrical signal having a second frequency that is less than the first frequency. The first and second electrical signals are mixed to obtain a third electrical signal having a third frequency, where the third frequency is proportional to a temperature of the MEMS resonator. The temperature is determined based on the third frequency. Values of the first and second frequencies can be adjusted based on the determined temperature to compensate for frequency deviations due to temperature deviations. Also described herein are methods and systems for determining the temperature of the dual-output MEMS and for performing frequency compensation, as well as a method of manufacturing the dual-output MEMS.Type: GrantFiled: April 8, 2022Date of Patent: February 21, 2023Assignee: Stathera IP Holdings Inc.Inventors: George Xereas, Vahid Tayari, Ahmed Khorshid, Charles Allan
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Patent number: 11579165Abstract: Sensor apparatus and methods for operating the same for measuring acceleration are disclosed. In some embodiments, circuitry inside a sensor digitizes a measured acceleration signal from an accelerometer into a digitized acceleration signal, which is processed by a digital equalization filter within the sensor to provide an equalized acceleration signal. The equalized acceleration signal may have a frequency response that is substantially flat over a frequency range that extends beyond the resonant frequency of a MEMs sensor within the accelerometer of the sensor.Type: GrantFiled: January 23, 2020Date of Patent: February 14, 2023Assignee: Analog Devices, Inc.Inventors: Khiem Quang Nguyen, Adam R. Spirer
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Patent number: 11579164Abstract: An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.Type: GrantFiled: February 18, 2021Date of Patent: February 14, 2023Inventors: Kazuyuki Nagata, Satoru Tanaka
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Patent number: 11575855Abstract: Methods and apparatus to perform an automated gain control protocol with an amplifier based on historical data corresponding to contextual data are disclosed. Example apparatus disclosed herein are to select an automatic gain control (AGC) parameter for an AGC protocol based on historical data corresponding to contextual data, the contextual data including at least one of a time during which the AGC protocol is performed, a panelist identified by a meter, demographics of an audience identified by the meter, a location of the meter, a station identified by the meter, a media type identified by the meter, or a sound pressure level identified by the meter. The disclosed example apparatus are also to perform the AGC protocol based on the selected AGC parameter.Type: GrantFiled: May 24, 2021Date of Patent: February 7, 2023Assignee: The Nielsen Company (US), LLCInventors: John T. Livoti, Susan Cimino, Rajakumar Madhanganesh, Stanley Wellington Woodruff
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Patent number: 11566954Abstract: The disclosure relates to a force measurement device including central portion, fixing portion, first and second sensing portions, and first and second electromechanical elements. The first sensing portion has first natural frequency. The first sensing portion is connected to the central portion. The second sensing portion has a second natural frequency. The second sensing portion is connected to the first sensing portion and the fixing portion. The first electromechanical element is disposed on the first sensing portion to measure a first vibration amplitude. The second electromechanical element is disposed on the second sensing portion to measure a second vibration amplitude. When the central portion is subjected to a first force, the first vibration amplitude is larger than the second vibration amplitude. When the central portion is subjected to a second force, the first vibration amplitude is smaller than the second vibration amplitude.Type: GrantFiled: June 11, 2020Date of Patent: January 31, 2023Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Chih-Che Lin, Chih-Yuan Chen, Chung-Yuan Su, Chao-Ta Huang
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Patent number: 11561101Abstract: A physical quantity sensor includes a substrate, a movable body that includes a movable drive electrode, a movable detection electrode, and a connection portion for connecting the movable drive electrode and the movable detection electrode and is allowed to vibrate along a first axis with respect to the substrate, a fixed drive electrode that is fixed to the substrate, is disposed to face the movable drive electrode, and vibrates the movable body along the first axis, and a fixed monitor electrode that is fixed to the substrate, is disposed to face the movable detection electrode and detects vibration of the movable body along the first axis.Type: GrantFiled: September 28, 2018Date of Patent: January 24, 2023Inventors: Makoto Furuhata, Takayuki Kikuchi, Kazuyuki Nagata
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Patent number: 11561097Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.Type: GrantFiled: May 24, 2021Date of Patent: January 24, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Anssi Blomqvist, Ville-Pekka Rytkönen, Mikko Partanen
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Patent number: 11561095Abstract: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.Type: GrantFiled: April 13, 2020Date of Patent: January 24, 2023Assignee: HRL LABORATORIES, LLCInventors: Lian X. Huang, Logan Sorenson, Raviv Perahia, Hung Nguyen, David T. Chang
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Patent number: 11530917Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.Type: GrantFiled: September 24, 2019Date of Patent: December 20, 2022Assignee: The Charles Stark Draper Laboratory, Inc.Inventors: Eugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc Steven Weinberg, William Sawyer
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Patent number: 11525679Abstract: In an angular velocity sensor, a pair of support parts are separated from each other in an x-axis direction in an orthogonal coordinate system xyz. A main part extends along the x-axis. A pair of extension parts connect two ends of the main part and inner sides of the support parts. The driving arms extend from the main part alongside each other in a y-axis direction separated from each other in the x-axis direction. The detecting arm extends from the main part in the y-axis direction at a position which is between the pair of driving arms. The driving circuit supplies voltages so that the pair of driving arms vibrate so as to bend to inverse sides from each other in the x-axis direction. The detecting circuit detects the signal generated due to bending deformation of the detecting arm in the z-axis direction.Type: GrantFiled: August 24, 2018Date of Patent: December 13, 2022Assignee: KYOCERA CORPORATIONInventor: Munetaka Soejima