Vibratory Mass Patents (Class 73/504.12)
  • Patent number: 11867509
    Abstract: A MEMS gyroscope includes a driven mass that moves in response to a drive force. A drive amplitude sense electrode is included as a feature of the drive mass and extends in a direction perpendicular to the drive direction. A change in capacitance is measured based on the relative location of the drive amplitude sense electrode to a known fixed position, which in turn is used to accurately determine a location of the driven mass.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: January 9, 2024
    Assignee: InvenSense, Inc.
    Inventors: Damiano Milani, Luca Coronato
  • Patent number: 11846508
    Abstract: A microelectromechanical gyroscope comprising first, second, third and fourth Coriolis masses, arranged in that order on an x-axis. In the primary oscillation mode, the Coriolis masses are configured to oscillate so that the second and third Coriolis masses move in linear translation along the x-axis away from a center point when the first and fourth Coriolis masses move in linear translation along the x-axis towards the first center point, and vice versa. When the gyroscope undergoes rotation about a y-axis which is perpendicular to the x-axis, the Coriolis masses are configured to oscillate so that the first, second, third and fourth Coriolis masses undergo vertical motion in a z-direction, wherein the first and third Coriolis masses move up when the second and fourth Coriolis masses move down, and vice versa.
    Type: Grant
    Filed: April 27, 2021
    Date of Patent: December 19, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Anssi Blomqvist, Ville-Pekka Rytkönen
  • Patent number: 11846509
    Abstract: A three-axis rotation rate sensor including a substrate and a double rotor. The double rotor includes a first rotor and a second rotor which are elastically connected to one another via a first coupling element so that the two rotors are excitable to rotary oscillations in phase opposition. The first rotor includes a first seismic mass and a second seismic mass that are deflectably supported with respect to the first rotor, and the second rotor includes a third seismic mass and a fourth seismic mass that are deflectably supported with respect to the second rotor. The first mass is connected to the third mass via a first rocker element so that upon a lateral deflection of the first mass, the third mass is deflected in a direction opposite the lateral deflection of the first mass.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: December 19, 2023
    Assignee: ROBERT BOSCH GMBH
    Inventor: Jochen Reinmuth
  • Patent number: 11844284
    Abstract: A method of manufacturing and resultant device are directed to an inverted wide-base double magnetic tunnel junction device having both high-efficiency and high-retention arrays. The method includes a method of manufacturing, on a common stack, a high-efficiency array and a high-retention array for an inverted wide-base double magnetic tunnel junction device. The method comprises, for the high-efficiency array and the high-retention array, forming a first magnetic tunnel junction stack (MTJ2), forming a spin conducting layer on the MTJ2, and forming a second magnetic tunnel junction stack (MTJ1) on the spin conducting layer. The first magnetic tunnel junction stack for the high-retention array has a high-retention critical dimension (CD) (HRCD) that is larger than a high-efficiency CD (HECD) of the first magnetic tunnel junction stack for the high-efficiency array. The second magnetic tunnel junction stack (MTJ1) is shorted for the high-retention array and is not shorted for the high-efficiency array.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: December 12, 2023
    Assignee: International Business Machines Corporation
    Inventors: Pouya Hashemi, Chandrasekharan Kothandaraman
  • Patent number: 11841228
    Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.
    Type: Grant
    Filed: September 3, 2021
    Date of Patent: December 12, 2023
    Assignee: INVENSENSE, INC.
    Inventors: Doruk Senkal, Robert Hennessy, Houri Johari-Galle, Joe Seeger
  • Patent number: 11837983
    Abstract: The current document is directed to various types of oscillating resonant modules (“ORMs”), including linear-resonant vibration modules, that can be incorporated in a wide variety of appliances, devices, and systems to provide vibrational forces. The vibrational forces are produced by back-and-forth oscillation of a weight or member along a path, generally a segment of a space curve. A controller controls each of one or more ORMs to produce driving oscillations according to a control curve or control pattern for the ORM that specifies the frequency of the driving oscillations with respect to time. The driving oscillations, in turn, elicit a desired vibration response in the device, appliance, or system in which the one or more ORMs are included. The desired vibration response is achieved by selecting and scaling control patterns in view of known resonance frequencies of the device, appliance, or system.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: December 5, 2023
    Assignee: Resonant Systems, Inc.
    Inventors: Robin Elenga, Dan Knodle, Brian Pepin
  • Patent number: 11834326
    Abstract: According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: December 5, 2023
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Ryunosuke Gando, Shiori Kaji, Hiroki Hiraga, Fumito Miyazaki, Daiki Ono
  • Patent number: 11815354
    Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements. In further embodiments, a dynamically balanced 3-axis gyroscope architecture is provided.
    Type: Grant
    Filed: December 30, 2020
    Date of Patent: November 14, 2023
    Assignee: INVENSENSE, INC.
    Inventors: Doruk Senkal, Robert Hennessy, Houri Johari-Galle, Joseph Seeger
  • Patent number: 11808573
    Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements.
    Type: Grant
    Filed: April 25, 2022
    Date of Patent: November 7, 2023
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Luca Guerinoni, Luca Giuseppe Falorni, Matteo Fabio Brunetto
  • Patent number: 11808574
    Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: November 7, 2023
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Gabriele Gattere, Carlo Valzasina, Luca Giuseppe Falorni
  • Patent number: 11802768
    Abstract: A MEMS multiaxial angular rate sensor includes a substrate and a MEMS wafer layer correspondingly deposited and parallel to each other, and a plurality of anchors coupled to the MEMS wafer layer and fixing the MEMS wafer layer onto the substrate. The MEMS wafer layer includes at least two drive-sensing structures, a third driving ring and two pendulum masses. Each of the drive-sensing structures includes a driving ring, a plurality of driving comb pair structures and a plurality of sensing proof masses respectively coupled to the corresponding driving ring. A third driving ring is coupled to and deposited between the two driving rings of the two drive-sensing structures. In a driving mode, those driving comb pair structures drive the corresponding driving rings to perform periodical rotation motions, and the two driving rings in periodical rotation motions further actuate the third driving ring to perform periodical rotation motion together.
    Type: Grant
    Filed: February 9, 2022
    Date of Patent: October 31, 2023
    Assignee: MIRAMEMS SENSING TECHNOLOGY CO., LTD.
    Inventor: Li-Tien Tseng
  • Patent number: 11796319
    Abstract: According to one embodiment, a sensor includes a base body including a first surface including first and second base body regions, a first structure body provided in the first base body region, a second structure body provided in the second base body region, and a control device. The first structure body includes a first movable member configured to vibrate. The vibration of the first movable member includes first and second components. The second structure body includes a second movable member configured to vibrate. The control device includes a controller configured to perform a processing operation. The processing operation includes outputting a second rotation angle, The second rotation angle is obtained by correcting a first rotation angle based on a resonance frequency of the second movable member. The first rotation angle of the first movable member is obtained based on the first component and the second component.
    Type: Grant
    Filed: February 11, 2022
    Date of Patent: October 24, 2023
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Fumito Miyazaki, Yasushi Tomizawa, Ryunosuke Gando, Hiroki Hiraga, Kei Masunishi, Shiori Kaji, Daiki Ono, Etsuji Ogawa
  • Patent number: 11788840
    Abstract: One example includes a radar image interface system. The system includes an image processor configured to receive synthetic aperture radar (SAR) image data associated with a region of interest and to generate a radar image of the region of interest based on the SAR image data. The image processor can be further configured to divide the radar image into a plurality of sequential units corresponding to respective zones of the region of interest. The system also includes a display system configured to display zoomed sequential units corresponding to respective zoomed versions of the sequential units of the radar image to a user. The system further includes an input interface configured to facilitate sequentially indexing through each of the zoomed versions of the sequential units on the display system in response to an indexing input provided by the user.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: October 17, 2023
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventor: George Attila Pavlath
  • Patent number: 11768221
    Abstract: A micromechanical sensor, including a micromechanical chip having a first micromechanical structure, a first evaluation chip, having a first application-specific integrated circuit, and a second evaluation chip having a second application-specific integrated circuit. The first evaluation chip and the micromechanical chip are situated in a stacked manner, the micromechanical chip being directly electrically conductively connected with the first evaluation chip and the first evaluation chip being directly electrically conductively connected with the second evaluation chip. The first application-specific integrated circuit primarily includes analog circuit elements and the second application-specific circuit primarily includes digital circuit elements.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: September 26, 2023
    Assignee: ROBERT BOSCH GMBH
    Inventors: Andrea Visconti, Artjom Kosov, Jochen Hahn, Johannes Classen, Timo Giesselmann
  • Patent number: 11754452
    Abstract: Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.
    Type: Grant
    Filed: August 19, 2019
    Date of Patent: September 12, 2023
    Assignee: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventors: Didier Pohl, Florian Risser, Jacques Sellin, Patrice Ligneul, Kamran Danaie, Mihir Patel, Boris Valkov
  • Patent number: 11754395
    Abstract: A mechanical coupling device coupling in movement two elements able to move in translation along a first direction, configured to impose thereon movements in phase opposition, the coupling device including two arms rotationally articulated about a second out-of-plane direction, each arm to be connected to one of the movable elements, a coupling element to which the two arms are connected by elements having high rigidity in a third direction, the coupling element being configured to move in translation along the third direction, first and second devices for suspending the coupling element configured to guide the coupling element in translation along the third direction and to limit rotational movement thereof about the second direction.
    Type: Grant
    Filed: August 24, 2021
    Date of Patent: September 12, 2023
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Loïc Joet, Patrice Rey
  • Patent number: 11740088
    Abstract: A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: August 29, 2023
    Assignee: STMICROELECTRONICS S.r.l.
    Inventors: Luca Guerinoni, Luca Giuseppe Falorni
  • Patent number: 11709178
    Abstract: An accelerometer structure, a method for preparing the accelerometer structure and an acceleration measurement method are provided. The accelerometer structure includes a substrate having a groove structure, a test mass, a plurality of nano-tethers, and a nano-photonic-crystal measurement unit. The test mass, nano-tethers, and the nano-photonic-crystal measurement unit are suspended above the groove structure. A nano-photonic-crystal resonant cavity is formed in the nano-photonic-crystal measurement unit, and an acceleration of the test mass is characterized by a resonant frequency of the nano-photonic-crystal resonant cavity. The present disclosure provides a photoelasticity-based opto-micromechanical accelerometer structure, which uses a cavity resonance tension sensor in a nano-photonic-crystal cavity to measure a tension of the nano-photonic-crystal resonant cavity.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: July 25, 2023
    Assignee: Shenzhen Conjugate Technology Co., Ltd.
    Inventors: Hengjiang Ren, Jie Luo
  • Patent number: 11698388
    Abstract: A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.
    Type: Grant
    Filed: December 15, 2020
    Date of Patent: July 11, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Jean Marie Darmanin, Carlo Valzasina, Alessandro Tocchio, Gabriele Gattere
  • Patent number: 11692826
    Abstract: An anchor member supports a frame-shaped member. A first input electrode is located outside the frame-shaped member and separate from the frame-shaped member and fixed to a substrate. A second input electrode includes an electrode portion located outside the frame-shaped member and connected to the frame-shaped member. The second input electrode is displaceable in a prescribed direction. A first reference electrode is inside the frame-shaped member and fixed to the substrate. A second reference electrode includes an electrode portion located inside of the frame-shaped member and connected to the frame-shaped member. The second reference electrode is displaceable in the prescribed direction. In the structural component, the first input electrode and the electrode portion of the second input electrode are located between the frame-shaped member and a weight member in the prescribed direction in plan view in a thickness direction defined with respect to the substrate.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: July 4, 2023
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Shoichi Taji, Hiroyuki Aizawa, Soichiro Hiraoka
  • Patent number: 11692824
    Abstract: A gyrometer including a first dual-mass gyrometer including a planar substrate, first left and right inertial masses including a first left and right frames, respectively, aligned along a first excitation axis X1 parallel to an excitation direction, and mounted with the ability to slide on the substrate along the first excitation axis X1, and first left and right central masses, respectively, mounted with the ability to slide in the first left and right frames, respectively, parallel to a first detection direction perpendicular to the excitation direction; a first coupling spring interposed between the first left and right frames; a first rocker mounted with the ability to rotate on the substrate about a first rocker pivot, first left and right ends of the first rocker being connected to the first left and right central masses, respectively; second left and right inertial masses aligned along a second axis X2 parallel to the excitation direction, and mounted with the ability to slide on the substrate along th
    Type: Grant
    Filed: November 19, 2021
    Date of Patent: July 4, 2023
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Pierre Janioud, Guillaume Jourdan, Alexandra Koumela, Christophe Poulain
  • Patent number: 11662206
    Abstract: The present invention provides a micromachined gyroscope, including: a base; an anchor point fixed to the base; a number of vibration structures; and a drive structure used for driving the vibration structure to vibrate in a x-y plane along a ring direction. The drive structure includes at least four groups arranged at intervals along the ring direction and symmetrical about an x axis and a y axis. The micromachined gyroscope works in two vibration modes interchanging with each other, including a driving mode status working in a first mode status and a testing mode status working in a second mode status. By virtue of the configuration described in the invention, the micromachined gyroscope can realize three-axis detection at the same time, and greatly improves the quality utilization rate of the vibration structure.
    Type: Grant
    Filed: December 30, 2021
    Date of Patent: May 30, 2023
    Assignees: AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD, AAC Acoustic Technologies (Shenzhen) Co., Ltd.
    Inventors: Xiao Kan, Zhao Ma, Shan Yang, Zhan Zhan, Hongtao Peng, Yang Li, Veronica Tan, Yan Hong, Kahkeen Lai
  • Patent number: 11650221
    Abstract: A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component.
    Type: Grant
    Filed: August 5, 2020
    Date of Patent: May 16, 2023
    Assignee: STMICROELECTRONICS S.r.l.
    Inventors: Alessandro Tocchio, Francesco Rizzini
  • Patent number: 11639852
    Abstract: A three-axis microelectromechanical system (MEMS) gyroscope includes four proof masses, where the proof masses are connected by spring beams and/or rigid beams; a first proof mass is configured to move in an X-axis direction; a second proof mass is configured to rotate around an X-direction axis, a Y-direction axis, and a Z-direction axis, and when the first proof mass moves in the X-axis direction, the second proof mass is driven to rotate around the Z-direction axis; a third proof mass is configured to move in the X-axis direction and a Y-axis direction, and when the first proof mass moves in the X-axis direction, the third proof mass is driven to move in the Y-axis direction; a fourth proof mass is configured to move in the X-axis direction, and when the third proof mass moves in the X-axis direction, the fourth proof mass is driven to move in the X-axis direction.
    Type: Grant
    Filed: April 2, 2020
    Date of Patent: May 2, 2023
    Assignee: SENODIA TECHNOLOGIES (SHAOXING) CO., LTD.
    Inventors: Bo Zou, Qinglong Zheng, Shuang Liu
  • Patent number: 11623860
    Abstract: An interposer substrate, a MEMS device and a corresponding manufacturing method. The interposer substrate is equipped with a front side and a rear side, a cavity starting from the rear side, which extends up to a first depth, a through-opening and a sunken area situated between the cavity and the through-opening, which is sunken from the rear side up to a second depth in relation to the rear side, the first depth being greater than the second depth.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: April 11, 2023
    Assignee: ROBERT BOSCH GMBH
    Inventors: Corinna Koepernik, Joerg Muchow, Rainer Straub, Stefan Mark
  • Patent number: 11614327
    Abstract: The present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second flexibility. The second plate is connected to the second plate, the second plate is connected to the third plate with a fourth flexible element, the second plate is provided with a first through-hole, and a rotating plate is pivotally connected in the first through-hole. The rotating plate is connected to a supporting column of the substrate by a fifth flexible part, and then a sensing element is provided on the substrate corresponding to the first, second, and third plates to sense the movement and movement of the plates. Rotating, in one embodiment, the first and third plates are provided with through-holes, and corresponding sensing elements and driving elements are provided.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: March 28, 2023
    Assignee: Sensortek Technology Corp.
    Inventors: Shih-Hsiung Tseng, Shih-Wei Lee, Chao-Shiun Wang
  • Patent number: 11591209
    Abstract: A method for operating a capacitive MEMS sensor. The method includes: supplying a defined electrical potential on a deflectably mounted, seismic mass of the MEMS sensor; capacitively inducing a vibrational motion of the seismic mass with the aid of a clocked electrical control voltage; compensating for fluctuations in the supplied electrical potential on the seismic mass caused by the clocked electrical control voltage, by selectively charging and/or discharging an electrical storage element connected to the seismic mass in accordance with the frequency of the clocked electrical control voltage.
    Type: Grant
    Filed: January 20, 2020
    Date of Patent: February 28, 2023
    Assignee: Robert Bosch GmbH
    Inventors: Francesco Diazzi, Andrea Visconti, Luca Valli
  • Patent number: 11584635
    Abstract: A dual-output microelectromechanical system (MEMS) resonator can be operated selectively and concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration to obtain, respectively, a first electrical signal having a first frequency and a second electrical signal having a second frequency that is less than the first frequency. The first and second electrical signals are mixed to obtain a third electrical signal having a third frequency, where the third frequency is proportional to a temperature of the MEMS resonator. The temperature is determined based on the third frequency. Values of the first and second frequencies can be adjusted based on the determined temperature to compensate for frequency deviations due to temperature deviations. Also described herein are methods and systems for determining the temperature of the dual-output MEMS and for performing frequency compensation, as well as a method of manufacturing the dual-output MEMS.
    Type: Grant
    Filed: April 8, 2022
    Date of Patent: February 21, 2023
    Assignee: Stathera IP Holdings Inc.
    Inventors: George Xereas, Vahid Tayari, Ahmed Khorshid, Charles Allan
  • Patent number: 11579164
    Abstract: An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.
    Type: Grant
    Filed: February 18, 2021
    Date of Patent: February 14, 2023
    Inventors: Kazuyuki Nagata, Satoru Tanaka
  • Patent number: 11579165
    Abstract: Sensor apparatus and methods for operating the same for measuring acceleration are disclosed. In some embodiments, circuitry inside a sensor digitizes a measured acceleration signal from an accelerometer into a digitized acceleration signal, which is processed by a digital equalization filter within the sensor to provide an equalized acceleration signal. The equalized acceleration signal may have a frequency response that is substantially flat over a frequency range that extends beyond the resonant frequency of a MEMs sensor within the accelerometer of the sensor.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: February 14, 2023
    Assignee: Analog Devices, Inc.
    Inventors: Khiem Quang Nguyen, Adam R. Spirer
  • Patent number: 11575855
    Abstract: Methods and apparatus to perform an automated gain control protocol with an amplifier based on historical data corresponding to contextual data are disclosed. Example apparatus disclosed herein are to select an automatic gain control (AGC) parameter for an AGC protocol based on historical data corresponding to contextual data, the contextual data including at least one of a time during which the AGC protocol is performed, a panelist identified by a meter, demographics of an audience identified by the meter, a location of the meter, a station identified by the meter, a media type identified by the meter, or a sound pressure level identified by the meter. The disclosed example apparatus are also to perform the AGC protocol based on the selected AGC parameter.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: February 7, 2023
    Assignee: The Nielsen Company (US), LLC
    Inventors: John T. Livoti, Susan Cimino, Rajakumar Madhanganesh, Stanley Wellington Woodruff
  • Patent number: 11566954
    Abstract: The disclosure relates to a force measurement device including central portion, fixing portion, first and second sensing portions, and first and second electromechanical elements. The first sensing portion has first natural frequency. The first sensing portion is connected to the central portion. The second sensing portion has a second natural frequency. The second sensing portion is connected to the first sensing portion and the fixing portion. The first electromechanical element is disposed on the first sensing portion to measure a first vibration amplitude. The second electromechanical element is disposed on the second sensing portion to measure a second vibration amplitude. When the central portion is subjected to a first force, the first vibration amplitude is larger than the second vibration amplitude. When the central portion is subjected to a second force, the first vibration amplitude is smaller than the second vibration amplitude.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: January 31, 2023
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chih-Che Lin, Chih-Yuan Chen, Chung-Yuan Su, Chao-Ta Huang
  • Patent number: 11561097
    Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: January 24, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Anssi Blomqvist, Ville-Pekka Rytkönen, Mikko Partanen
  • Patent number: 11561101
    Abstract: A physical quantity sensor includes a substrate, a movable body that includes a movable drive electrode, a movable detection electrode, and a connection portion for connecting the movable drive electrode and the movable detection electrode and is allowed to vibrate along a first axis with respect to the substrate, a fixed drive electrode that is fixed to the substrate, is disposed to face the movable drive electrode, and vibrates the movable body along the first axis, and a fixed monitor electrode that is fixed to the substrate, is disposed to face the movable detection electrode and detects vibration of the movable body along the first axis.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: January 24, 2023
    Inventors: Makoto Furuhata, Takayuki Kikuchi, Kazuyuki Nagata
  • Patent number: 11561095
    Abstract: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: January 24, 2023
    Assignee: HRL LABORATORIES, LLC
    Inventors: Lian X. Huang, Logan Sorenson, Raviv Perahia, Hung Nguyen, David T. Chang
  • Patent number: 11530917
    Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
    Type: Grant
    Filed: September 24, 2019
    Date of Patent: December 20, 2022
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventors: Eugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc Steven Weinberg, William Sawyer
  • Patent number: 11525662
    Abstract: A displacement sensor measures capacitance between a rotor-stator pair. The displacement sensor includes a plurality of stators coupled to a first object. The plurality of stators is oriented parallel to an axis of motion between the first object and a second object. The displacement sensor further includes a plurality of rotors coupled to the second object. The plurality of rotors is oriented parallel to the axis of motion. Each rotor of the plurality of rotors is aligned with and configured to receive a corresponding stator of the plurality of stators to create a respective rotor-stator pair. Capacitance between the rotor-stator pairs change as a function of position of the first object relative to the second object along the axis of motion. An amount of displacement of the first object relative to the second object is determined based in part on the capacitance values.
    Type: Grant
    Filed: September 2, 2020
    Date of Patent: December 13, 2022
    Assignee: Meta Platforms Technologies, LLC
    Inventors: Yuri Toride, Tamer Elazhary
  • Patent number: 11525679
    Abstract: In an angular velocity sensor, a pair of support parts are separated from each other in an x-axis direction in an orthogonal coordinate system xyz. A main part extends along the x-axis. A pair of extension parts connect two ends of the main part and inner sides of the support parts. The driving arms extend from the main part alongside each other in a y-axis direction separated from each other in the x-axis direction. The detecting arm extends from the main part in the y-axis direction at a position which is between the pair of driving arms. The driving circuit supplies voltages so that the pair of driving arms vibrate so as to bend to inverse sides from each other in the x-axis direction. The detecting circuit detects the signal generated due to bending deformation of the detecting arm in the z-axis direction.
    Type: Grant
    Filed: August 24, 2018
    Date of Patent: December 13, 2022
    Assignee: KYOCERA CORPORATION
    Inventor: Munetaka Soejima
  • Patent number: 11525680
    Abstract: An angular rate sensor includes first, second, third, and fourth proof masses spaced apart from a surface of a substrate, each of the first, second, third, and fourth proof masses being configured to move along first and second transverse axes parallel to the surface of the substrate. A first coupling structure is interposed between and interconnects the first and second proof masses. A second coupling structure is interposed between and interconnects the second and third proof masses. A third coupling structure is interposed between and interconnects the third and fourth proof masses. A fourth coupling structure is interposed between and interconnects the fourth and first proof masses. The first, second, third, and fourth coupling structures are configured to constrain an in-phase motion of adjacent ones of the first, second, third, and fourth proof masses along the first and second transverse axes.
    Type: Grant
    Filed: February 17, 2021
    Date of Patent: December 13, 2022
    Assignee: NXP USA, Inc.
    Inventors: Aaron A. Geisberger, Peng Shao
  • Patent number: 11486782
    Abstract: A micromechanical device that includes a carrier substrate; a sensor device that is situated on the carrier substrate and spaced apart from a surface section of the carrier substrate with the aid of spring elements in such a way that the sensor device is oscillatable relative to the surface section; and at least one stopper element, situated on the sensor device and/or on the surface section of the carrier substrate, which limits a deflection of the sensor device in the direction of the surface section.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: November 1, 2022
    Assignee: Robert Bosch GmbH
    Inventors: Friedjof Heuck, Mike Schwarz, Thomas Friedrich, Volkmar Senz
  • Patent number: 11467251
    Abstract: A radar sensor system having at least one transmitter device, all transmitter devices having a total of at least two transmit channels; and at least one receiver device, with all receiver devices having a total of at least two receive channels; a temperature sensor in each case for sensing the temperatures of the at least one transmitter device and the at least one receiver device, a modeling device for modeling at least one temperature dependency of the at least one transmitter device from the at least one receiver device; and a compensation device for compensating for the modeled temperature dependency.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: October 11, 2022
    Assignee: Robert Bosch GmbH
    Inventors: Benedikt Loesch, Marcel Mayer, Matthias Steinhauer, Michael Schoor
  • Patent number: 11466986
    Abstract: Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: October 11, 2022
    Assignee: INVENSENSE, INC.
    Inventors: Sriraman Dakshinamurthy, Carlo Pinna, Ronak Chetan Desai
  • Patent number: 11466985
    Abstract: A rotation-rate sensor having a substrate, the substrate having a main-extension-plane, and the rotation-rate sensor includes at least one first and one second mass-element which are oscillate-able, and a first main-extension-direction of the substrate points from the first mass-element to the second mass-element, and a coupling-structure is situated in the first main-extension-direction between the first and second mass-element, in which a first coupling-region of the coupling-structure is situated in a first function-layer, and a first mass-region of the first mass-element is situated in the first function-layer and a second mass-region of the first mass-element is situated in a second function-layer, the first function-layer being situated in an extension-direction perpendicular to the main-extension-plane between the substrate and the second function-layer, a second main-extension-direction being situated perpendicular to the first main-extension-direction, and the first coupling-region having a greater e
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: October 11, 2022
    Assignee: Robert Bosch GmbH
    Inventors: Jan-Timo Liewald, Andreas Lassl, Burkhard Kuhlmann, Matthias Kuehnel, Niels Bode, Nils Felix Kuhlmann, Odd-Axel Pruetz, Peter Degenfeld-Schonburg, Reinhard Neul
  • Patent number: 11448507
    Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition.
    Type: Grant
    Filed: November 26, 2019
    Date of Patent: September 20, 2022
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Alessandro Tocchio, Luca Giuseppe Falorni, Claudia Comi, Valentina Zega
  • Patent number: 11448661
    Abstract: The Coaxial Angular Velocity Sensor System is an electronic sensor, which processes and supplies the output signal of the inertial angular velocity with high accuracy and great reliability. The device consists of the main components: angular velocity sensor, analog-digital converter, microcontroller, temperature sensor, power source, mechanical anti-noise-proof chassis. The device's microprocessor comes with a signal processing algorithm that helps increase the accuracy of the device's output. Because of its compact size, high precision, and low cost, the device is used in high precision devices such as UAV cameras, or in life applications such as self-balancing vehicles.
    Type: Grant
    Filed: January 2, 2020
    Date of Patent: September 20, 2022
    Assignee: VIETTEL GROUP
    Inventors: Luu Phong Mac, Van Tam Nguyen, Duc Bang Duong, Van Tien Pham
  • Patent number: 11442077
    Abstract: The present invention relates to capacitive micromechanical accelerometers, and in particular to acceleration sensors with movable rotors which may rotate out of a substrate plane when the accelerometer undergoes movement with an acceleration component perpendicular to the substrate plane. The capacitive micromechanical accelerometer includes additional damping springs to reduce unwanted movement of the rotor in the substrate plane, thereby reducing the parasitic capacitance that results from motion of the rotor in the substrate plane. The damping springs are vertically recessed with respect to other components of the accelerometer in order to minimise the effect of the damping springs on movement of the rotor out of the substrate plane.
    Type: Grant
    Filed: June 25, 2020
    Date of Patent: September 13, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Akira Konno, Yoshitaka Kato, Ville-Pekka Rytkönen
  • Patent number: 11444235
    Abstract: The vibrator device includes: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element. In addition, the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: September 13, 2022
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Seiichiro Ogura, Ryuta Nishizawa, Keiichi Yamaguchi
  • Patent number: 11422154
    Abstract: A physical quantity detection circuit includes a detection signal generation circuit that generates a detection signal according to a physical quantity based on an output signal of a physical quantity detection element that detects the physical quantity, an analog/digital conversion circuit that converts the detection signal into a digital signal, a reference voltage generation circuit that generates a reference voltage supplied to the analog/digital conversion circuit, and a failure diagnosis circuit that performs a failure diagnosis of the reference voltage generation circuit by monitoring the reference voltage and outputs a failure diagnosis signal indicating a result of the failure diagnosis, in which the failure diagnosis circuit performs the failure diagnosis at a predetermined timing different from a timing when the reference voltage varies temporarily according to an operation of the analog/digital conversion circuit.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: August 23, 2022
    Inventors: Kiminori Nakajima, Takashi Aoyama
  • Patent number: 11415418
    Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: August 16, 2022
    Assignee: INVENSENSE, INC.
    Inventors: Jaakko Ruohio, Luca Coronato, Giacomo Gafforelli
  • Patent number: 11415595
    Abstract: Single-axis teeter-totter accelerometers having a plurality of anchors are disclosed. The plurality of anchors may be arranged about a rotation axis of the teeter-totter proof mass. Each of the plurality of anchors may be coupled to the proof mass by two torsional springs each extending along the rotation axis. The plurality of anchors allows an increased number of torsional springs to be coupled to the proof mass and thus greater torsional stiffness for the proof mass may be achieved. Due to the higher torsional stiffness, the disclosed single-axis teeter-totter accelerometers may be deployed in high-frequency environments where such increased torsional stiffness is required, for example, around 20 kHz and above.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: August 16, 2022
    Assignee: Analog Devices, Inc.
    Inventors: Gaurav Vohra, Xin Zhang, Michael Judy