Vibratory Mass Patents (Class 73/504.12)
  • Patent number: 11402208
    Abstract: A processing mark that is thinned or removed in a thickness direction of a vibration arm is formed at a weight provided at a drive vibration arm of a vibration element, and including a pair of weight ends aligned in an extending direction of the vibration arm. The processing mark includes a first processing end and a second processing end aligned in the extending direction of the vibration arm, the first processing end overlaps one weight end of the weight in plan view in the extending direction of the vibration arm, and a width of the first processing end is smaller than a width of the second processing end.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: August 2, 2022
    Assignee: Seiko Epson Corporation
    Inventors: Shogo Sasaki, Masashi Shimura
  • Patent number: 11397084
    Abstract: A vibration gyroscope includes: a mass part supported to be displaceable in a first direction and a second direction; an exciter vibrating the mass part in the first direction; and a detector detecting a displacement amount of the mass part in the second direction. The first direction and the second direction are orthogonal to each other. A resonance frequency of the mass part in the first direction coincides with a resonance frequency of the mass part in the second direction. A Q-factor of vibration of the mass part in the second direction is smaller than a Q-factor of vibration of the mass part in the first direction.
    Type: Grant
    Filed: February 20, 2020
    Date of Patent: July 26, 2022
    Assignee: DENSO CORPORATION
    Inventors: Motohiro Fujiyoshi, Yoshiteru Omura, Takashi Ozaki, Tomoya Jomori, Katsuaki Goto, Megumi Suzuki
  • Patent number: 11393773
    Abstract: A stress isolating interposer includes: an outer pad; an inner pad configured to accommodate a positional sensor is mounted; and a stress isolating structure coupling the outer pad and the inner pad to each other. The outer pad, the stress isolating structure, and the inner pad are a monolithic structure.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: July 19, 2022
    Assignee: HRL LABORATORIES, LLC
    Inventors: Phuong Bui, Matthew J. Pelliccione, Kayleigh A. Porter, Tobias A. Schaedler, Logan D. Sorenson, Raviv Perahia
  • Patent number: 11383973
    Abstract: A device includes a substrate, a first electrode formed on the substrate and a structural layer formed on the substrate. The structural layer includes a movable mass and a fixed portion, the movable mass being suspended above the substrate and the first electrode being interposed between the substrate and the movable mass. A second electrode is spaced apart from an upper surface of the movable mass by a gap and an anchor couples the second electrode to the fixed portion of the structural layer. A method entails integrating formation of the second electrode into a wafer process flow in which the first electrode and the structural layer are formed.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: July 12, 2022
    Assignee: NXP USA, Inc.
    Inventors: Peng Shao, Lianjun Liu
  • Patent number: 11387749
    Abstract: A vibration energy harvester includes: a fixed electrode unit having a plurality of comb-tooth electrodes; a movable electrode unit having a plurality of comb-tooth electrodes; a weight fixed to the movable electrode unit; and an adjusting weight mounting structure capable of mounting an adjusting weight for additionally adjusting a mass of the weight.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: July 12, 2022
    Assignee: Saginomiya Seisakusho, Inc.
    Inventor: Daisuke Anai
  • Patent number: 11377346
    Abstract: The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: July 5, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Hannu Vesterinen, Ville-Pekka Rytkönen, Anssi Blomqvist
  • Patent number: 11340069
    Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: May 24, 2022
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Luca Guerinoni, Luca Giuseppe Falorni, Matteo Fabio Brunetto
  • Patent number: 11333499
    Abstract: A gyroscope assembly includes a sense proof mass and a compensation proof mass. The sense proof mass has a sense frequency response in a sense dimension and is configured to move in a drive dimension in response to a drive signal, and to move in the sense dimension in response to experiencing an angular velocity about a sense input axis while moving in the drive dimension. And the compensation proof mass has, in the sense dimension, a compensation frequency response that is related to the sense frequency response.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: May 17, 2022
    Assignee: Honeywell International Inc.
    Inventor: Daniel Endean
  • Patent number: 11323071
    Abstract: An oscillator includes a resonator, sustaining circuit and detector circuit. The sustaining circuit receives a sense signal indicative of mechanically resonant motion of the resonator generates an amplified output signal in response. The detector circuit asserts, at a predetermined phase of the amplified output signal, one or more control signals that enable an offset-reducing operation with respect to the sustaining amplifier circuit.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: May 3, 2022
    Assignee: SiTime Corporation
    Inventors: Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
  • Patent number: 11320265
    Abstract: The present invention relates to a capacitive MEMS gyroscope with drive-signal induced offset cancelling features. In a MEMS gyroscope of the type including force feedback circuitry, the drive signal is modulated according to a known modulation scheme or frequency. The modulation scheme/frequency of the drive signal is used by offset cancelling circuitry to determine the offset in the rate signal caused by the drive signal. The determined offset is subsequently removed from the rate signal.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: May 3, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Lasse Aaltonen, Anssi Blomqvist
  • Patent number: 11313681
    Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: April 26, 2022
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Gabriele Gattere, Carlo Valzasina, Luca Giuseppe Falorni
  • Patent number: 11305981
    Abstract: There is provided a dual-output microelectromechanical system (MEMS) resonator. The MEMS resonator can be operated selectively and concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration to obtain respectively a first electrical signal having a first frequency, and a second electrical signal having a second frequency being less than the first frequency. The first and second electrical signals are mixed to obtain a third electrical signal having a third frequency, where the third frequency is proportional to a temperature of the MEMS resonator. The temperature is determined based on the third frequency. Values of the first and second frequencies can be adjusted based on the determined temperature to compensate for frequency deviations due to temperature deviations. There is also provided methods and systems for determining the temperature of the dual-output MEMS, for compensating the frequency, and a method of manufacturing the dual-output MEMS.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: April 19, 2022
    Assignee: STATHERA IP HOLDINGS INC.
    Inventors: George Xereas, Vahid Tayari, Ahmed Khorshid, Charles Allan
  • Patent number: 11307033
    Abstract: Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.
    Type: Grant
    Filed: March 24, 2020
    Date of Patent: April 19, 2022
    Inventors: Ryuta Nishizawa, Seiichiro Ogura, Keiichi Yamaguchi
  • Patent number: 11293755
    Abstract: A vibrator device includes a vibrator element, a base, and a support configured to support the vibrator element with respect to the base. The support includes a frame shaped like a frame, a base mount disposed outside the frame, and fixed to the base, an element holder which is disposed inside the frame, and on which the vibrator element is mounted, a pair of first beams which extend along a first direction from the element holder, and couple the element holder and the frame to each other, and a pair of second beams which extend along a second direction from the frame, and couple the frame and the base mount to each other, and W12/L1<30, in which a length in the first direction of the first beam is L1 (?m), and a width in a direction perpendicular to the first direction of the first beam is W1 (?m).
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: April 5, 2022
    Inventors: Seiichiro Ogura, Keiichi Yamaguchi, Ryuta Nishizawa
  • Patent number: 11287440
    Abstract: An acceleration sensing structure includes a frame, a proof mass, a gimbal and at least two outer flexible arms. The proof mass is suspended from the frame and has a first thickness. The proof mass is surrounded by and connected to the gimbal. The gimbal has a second thickness. The at least two outer flexible arms are connected between the gimbal and the frame, and the at least two outer flexible arms are arranged symmetrically. The second thickness is larger than or equal to one-half of the first thickness and is smaller than or equal to the first thickness, and when the proof mass moves, the at least two outer flexible arms are deformed.
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: March 29, 2022
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Sheng-Shian Li, Ranjith Hosur Ganesh, Gayathri Pillai, Chien-Hao Weng
  • Patent number: 11280610
    Abstract: The disclosure describes a z-axis gyroscope where a proof mass is suspended from a peripheral suspender and a central suspender. The peripheral suspender forms a truncated triangle around the proof mass, and the central suspender extends through the truncated corner of the triangle formed by the peripheral suspender. The proof mass is driven into a primary oscillation mode by one or more piezoelectric drive transducers located on the peripheral suspender. One or more piezoelectric sense transducers located on the base of the peripheral suspender are configured to detect the secondary oscillation mode of the proof mass.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: March 22, 2022
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Heikki Kuisma
  • Patent number: 11280611
    Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.
    Type: Grant
    Filed: November 26, 2019
    Date of Patent: March 22, 2022
    Assignee: STMicroelectronics S.r.l.
    Inventors: Daniele Prati, Carlo Valzasina, Luca Giuseppe Falorni, Matteo Fabio Brunetto
  • Patent number: 11268828
    Abstract: The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyro-scope rotates around a sensitive axis.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: March 8, 2022
    Assignee: Albert-Ludwigs-Universitat Freiburg
    Inventors: Michael Maurer, Yiannos Manoli
  • Patent number: 11265656
    Abstract: A hearing assistance system and method are described herein. The system includes a first ear-worn device, a second ear-worn device, and a case. The system is configured to detect a vibration sequence at an IMU and decide whether to pair wireless communication devices of the first and second ear-worn devices based on the vibration sequence detected at the IMU.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: March 1, 2022
    Assignee: Starkey Laboratories, Inc.
    Inventors: Sidney A. Higgins, David Alan Fabry
  • Patent number: 11261082
    Abstract: A micromechanical device that includes a silicon substrate with an overlying oxide layer and with a micromechanical functional layer lying above same, which extend in parallel to a main extension plane, a cavity being formed at least in the micromechanical functional layer and in the oxide layer. An access channel is formed in the oxide layer and/or in the micromechanical functional layer which, starting from the cavity, extends in parallel to the main extension plane and in the process extends in a projection direction, as viewed perpendicularly to the main extension plane, all the way into an access area outside the cavity. A method for manufacturing a micromechanical device is also described.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: March 1, 2022
    Assignee: Robert Bosch GmbH
    Inventors: Eckhard Graf, Holger Rumpf, Jens Frey, Jochen Reinmuth, Kurt-Ulrich Ritzau, Achim Breitling
  • Patent number: 11243111
    Abstract: Disclosed is an integrated physiological signal detection sensor, comprising a movable housing member, a fixed housing member, and a sensing unit circuit board. The movable housing member and the fixed housing member are connected to form an internal space therebetween. The sensing unit circuit board is fixedly installed on the fixed housing member within the space. A piezoelectric film is attached to the sensing unit circuit board. A hollowed-out region surrounds the periphery of the piezoelectric film. A protrusion is provided on the movable housing member at a position corresponding to the piezoelectric film. The sensor of the present invention has advantages of simplified sensor installation, improved signal integrity, and simplified wire routing of an electromagnetic shield layer, thereby eliminating errors caused by sensor installation and improving the accuracy of data detection.
    Type: Grant
    Filed: August 1, 2018
    Date of Patent: February 8, 2022
    Assignees: Keeson Technology Corporation Limited, ZHEJIANG YANGTZE DELTA REGION INSTITUTE OF TSINGHUA UNIVERSITY
    Inventors: Huafeng Shan, Jiadong Wang, Kaimin Cao, Hongwen Li, Yuan Yu
  • Patent number: 11243078
    Abstract: A signal processing circuit for a gyroscope apparatus is disclosed. The signal processing circuit includes a first electrode and a second electrode pairing with the first electrode. The signal processing circuit, being a negative feedback loop circuit, is configured to be connected with the first electrode and the second electrode and comprises a demodulator configured to convert a current from the first electrode into a voltage and demodulate the converted voltage to output a demodulated signal, an analog-to-digital converter configured to convert the demodulated signal from the demodulator into a digital signal, a proportional-integral-derivative controller that is connected to the analog-to-digital converter, a digital-to-analog converter configured to convert an output signal from the proportional-integral-derivative controller to an analog signal, and a modulator configured to be electrically connected with the second electrode and to be electrically connected with the digital-to-analog converter.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: February 8, 2022
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Chihchuan Che, Yaesuk Jeong
  • Patent number: 11236999
    Abstract: A controller for a MEMS gyroscope includes a first portion for generating a drive signal in response to an output from drive capacitors of the MEMS gyroscope, wherein the output signal has a resonant frequency and a phase, a second portion for determining a sampling signal in response to the output, wherein the sampling signal has a frequency that is a multiple of the resonant frequency, and has the phase, a multiplexer for outputting a multiplexed data comprising first data signals from first capacitors and second capacitors of the MEMS gyroscope multiplexed in response to the sampling signal, and a processing portion for reducing the resonant frequency from the multiplexed data.
    Type: Grant
    Filed: September 10, 2019
    Date of Patent: February 1, 2022
    Assignee: mCube, Inc.
    Inventors: Sanjay Bhandari, Chia-Din Ting
  • Patent number: 11226245
    Abstract: A force sensor includes a frame and an oscillation structure which has arms and can oscillate freely in the frame. The arms are fixed to suspension frame regions and run transverse to one another at least in sections. At least one conductor extends along at least two arms. An AC voltage can be applied to the at least one conductor to excite at least one oscillation mode of the oscillation structure with a resonant frequency using Lorentz force. The force sensor is designed such that the suspension regions are at least partially spatially displaced relative to one another when a force is applied to the frame, that the magnitude of the spatial displacement of the suspension regions depends on the magnitude of the force, and that the spatial displacement of the suspension regions causes detuning of the resonant frequency, the magnitude of which depends on the spatial displacement magnitude.
    Type: Grant
    Filed: March 31, 2017
    Date of Patent: January 18, 2022
    Assignee: Technische Universitaet Wien
    Inventors: Alexander Dabsch, Franz Keplinger, Christoph Rosenberg
  • Patent number: 11221218
    Abstract: A vibrating structure angular rate sensor comprises a MEMS structure includes a mount, a plurality of supporting structures fixed to the mount, and a vibrating planar ring structure flexibly supported by the plurality of supporting structures to move elastically relative to the mount. At least one primary drive transducer is arranged to cause the ring structure to oscillate in a primary mode at the resonant frequency of the primary mode. At least one primary pick-off transducer arranged to detect oscillation of the ring structure in the primary mode. At least three secondary pick-off transducers are arranged to detect oscillation of the ring structure in a secondary mode induced by Coriolis force when an angular rate is applied around an axis substantially perpendicular to the ring structure. At least one secondary drive transducer is arranged to null the induced oscillation in the secondary mode.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: January 11, 2022
    Assignee: ATLANTIC INERTIAL SYSTEMS LIMITED
    Inventor: Christopher Paul Fell
  • Patent number: 11193366
    Abstract: A high-temperature miniaturized resonant gyroscope, which comprises a resonator, a circuit board, a piezoelectric element, a supporting base, a shell and a binding post, wherein the resonator is arranged in the shell and connected with the supporting base, the piezoelectric element is connected with the binding post through a metal conductor, and key process points of internal elements of the gyroscope are fixedly connected by high-temperature materials and high-temperature processes. The gyroscope is a small-sized gyroscope capable of working at a high temperature; the present disclosure also provides an inertial navigation system, which comprises a triaxial gyroscope, a triaxial accelerometer and a damper, wherein the gyroscope is fixedly connected with the damper, and the gyroscope adopts the high-temperature resonant gyroscope. A drilling measurement system and a measurement method.
    Type: Grant
    Filed: December 30, 2020
    Date of Patent: December 7, 2021
    Assignee: INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Xu Xue
  • Patent number: 11183951
    Abstract: A flexure stage with modularized flexure units for convenient manufacturing, assembly and repair is provided. The flexure stage comprises a base, a platform separated from the base, and a plurality of flexure units disposed between the base and the platform. Each flexure unit comprises a first section, a second section, and a third section. The first section is located on the base. The second section is connected with the platform and separated from the first section. The third section is coupled with the first section and the second section through the first bending part and the second bending part respectively wherein the first bending part and the second bending part comprises flexibility in different axial directions.
    Type: Grant
    Filed: February 5, 2019
    Date of Patent: November 23, 2021
    Assignee: HIWIN MTKROSYSTEM CORP.
    Inventors: Chun-Hsiang Li, Chih-Kai Fan, Yu-Jung Chang
  • Patent number: 11175138
    Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: November 16, 2021
    Assignee: STMicroelectronics, Inc.
    Inventors: Deyou Fang, Chao-Ming Tsai, Milad Alwardi, Yamu Hu, David McClure
  • Patent number: 11156458
    Abstract: A MEMS gyroscope is provided. The MEMS gyroscope includes a weight provided with elastic assemblies at four corners thereof. The elastic assemblies are arranged in one of diagonal directions of the weight. An electronic device is also provided applying the gyroscope of the present invention.
    Type: Grant
    Filed: December 9, 2019
    Date of Patent: October 26, 2021
    Assignee: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
    Inventors: Zhenkui Meng, Yuwei Liu
  • Patent number: 11137252
    Abstract: This disclosure describes a microelectromechanical multiaxis gyroscope comprising a proof mass quartet, a central suspension arrangement for suspending the proof mass quartet from the central anchor point. The gyroscope also comprises a synchronization frame and a detection mass quartet. One or more lateral corner springs extends to each detection mass from the laterally adjacent proof mass, and one or more transversal corner springs extends to each detection mass from the transversally adjacent proof mass.
    Type: Grant
    Filed: January 21, 2020
    Date of Patent: October 5, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Anssi Blomqvist, Ville-Pekka Rytkönen
  • Patent number: 11118907
    Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: September 14, 2021
    Assignee: INVENSENSE, INC.
    Inventors: Doruk Senkal, Robert Hennessy, Houri Johari-Galle, Joe Seeger
  • Patent number: 11117795
    Abstract: A MEMS vibration element includes: a base unit; a fixed unit fixed to the base unit; a movable unit that is movable relative to the fixed unit; and an elastic support unit that elastically supports the movable unit at the base unit. The elastic support unit is made of a material different from a material of the fixed unit and the movable unit.
    Type: Grant
    Filed: August 8, 2018
    Date of Patent: September 14, 2021
    Assignees: National University Corporation Shizuoka University, Saginomiya Seisakusho, Inc.
    Inventors: Gen Hashiguchi, Hideaki Koga
  • Patent number: 11112248
    Abstract: A secondary sense loop for a MEMS gyroscope comprises a secondary element comprising at least one mechanical resonator, an analog front end circuitry, a digital secondary loop circuitry and an analog back end circuitry. The digital secondary loop circuitry comprises a signal path receiving at its input an analog secondary input signal representing a detection motion of a mechanical resonator and providing at its output an output signal indicating an angular velocity said MEMS gyroscope is subject to, said signal path comprising an analog-to-digital converter configured to digitize the analog secondary input signal into a digitized secondary signal, and a digital force feedback circuitry controlling operation of a closed force feedback loop configured to adjust response function of the secondary sense loop.
    Type: Grant
    Filed: May 11, 2017
    Date of Patent: September 7, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Rauli Collin, Konsta Wjuga, Lasse Aaltonen
  • Patent number: 11112247
    Abstract: An angular velocity sensor includes a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body includes a pair of frames, a pair of drive arms, and a pair of detection arms. The pair of frames face each other in a y-axis direction in an orthogonal coordinate system xyz. The pair of drive arms are respectively laid bridging the pair of frames and face each other in an x-axis direction. The pair of detection arms extend from the pair of frames in the y-axis direction at positions between the pair of drive arms in the x-axis direction. The drive circuit applies voltages of mutually reverse phases to the pair of drive arms so that the drive arms vibrate bending to mutually reverse sides in the x-axis direction. The detection circuit detects signals generated due to the bending deformations of the pair of detection arms in a z-axis direction.
    Type: Grant
    Filed: July 21, 2017
    Date of Patent: September 7, 2021
    Assignee: KYOCERA CORPORATION
    Inventor: Munetaka Soejima
  • Patent number: 11112229
    Abstract: A magnetic type azimuth/position measurement device is disclosed, comprising: a plurality of coils driven by circuitry, the circuitry and coils configured to selectively generate a uniform magnetic field and an inclined magnetic field in a three-dimensional space; a uniaxial magnetic field sensor configured to measure a strength of a magnetic field formed by the plurality of coils driven by circuitry; and arithmetic operation circuitry configured to receive signals representative of the strength of the magnetic field from the uniaxial magnetic field sensor and calculate a position and an azimuth of the uniaxial magnetic field sensor in the three-dimensional space.
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: September 7, 2021
    Assignee: ASAHI INTECC CO., LTD.
    Inventors: Yoshinobu Honkura, Shinpei Honkura
  • Patent number: 11085765
    Abstract: A frequency adjustment method of a vibration element includes adjusting a resonance frequency of the vibration element by irradiating the vibration element, which includes a vibrating arm having a first principal surface and a second principal surface that are in a front and back relationship with each other with an energy ray, to remove a part of the vibrating arm on the first principal surface, and in which an activation amount by the energy ray on the second principal surface of the vibrating arm is smaller than an activation amount by the energy ray on the first principal surface of the vibrating arm.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: August 10, 2021
    Inventors: Shogo Sasaki, Masashi Shimura, Keiichi Yamaguchi, Masahiro Oshio, Ryuta Nishizawa, Seiichiro Ogura
  • Patent number: 11085768
    Abstract: A microelectromechanical z-axis gyroscope which comprises a proof mass system centred around a gyroscope center point. The oscillation of first and second proof mass pairs is synchronized by a substantially circular synchronization element which is centred at the gyroscope center point and comprises four first attachment points. Each proof mass is attached to the nearest first attachment point on the substantially circular synchronization element. The substantially circular synchronization element also comprises two or more second attachment points, and a substantially linear suspender extends tangentially from each second attachment point to an anchor point.
    Type: Grant
    Filed: May 8, 2019
    Date of Patent: August 10, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Heikki Kuisma
  • Patent number: 11085769
    Abstract: A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.
    Type: Grant
    Filed: January 9, 2019
    Date of Patent: August 10, 2021
    Assignees: STMICROELECTRONICS S.R.L., STMICROELECTRONICS, INC., STMICROELECTRONICS INTERNATIONAL N.V.
    Inventors: Carlo Valzasina, Huantong Zhang, Matteo Fabio Brunetto, Gert Ingvar Andersson, Erik Daniel Svensson, Nils Einar Hedenstierna
  • Patent number: 11085767
    Abstract: A three-axis micro electro mechanical system (MEMS) gyroscope includes a central anchor, a first subsidiary proof mass, a first decoupling structure, a second subsidiary proof mass and a third subsidiary proof mass arranged in order from the inside out. When the first subsidiary proof mass resonates in a driving mode around a third direction, the first subsidiary proof mass approximately moves along the first direction. When the first subsidiary proof mass is subjected to an angular velocity around a second direction, a Coriolis force is generated along the third direction, and the first subsidiary proof mass produces a displacement around the first direction under the effect of the Coriolis force. The axis of the first decoupling structure is also in the first direction.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: August 10, 2021
    Assignee: SENODIA TECHNOLOGIES (SHAOXING) CO., LTD
    Inventors: Bo Zou, Meihan Guo
  • Patent number: 11088637
    Abstract: The power generation efficiency is to be enhanced by converting vibration energy including various direction components into electric energy without waste. A cantilever structure is adopted, in which a first plate-like bridge portion (120) and a second plate-like bridge portion (130) extend in a shape of a letter U from a fixing-portion (110) fixed to the device housing (200) and a weight body (150) is connected to the end. On the upper surface of the cantilever structure, a common lower layer electrode (E00), a layered piezoelectric element (300) and discrete upper layer electrodes (Ex1 to Ez4) are formed. The upper layer electrodes (Ez1 to Ez4) disposed on a center line (Lx, Ly) of each plate-like bridge portion take out charge generated in the piezoelectric element (300) due to deflection caused by the Z-axis direction vibration of the weight body (150).
    Type: Grant
    Filed: December 5, 2018
    Date of Patent: August 10, 2021
    Assignee: TRI-FORCE MANAGEMENT CORPORATION
    Inventors: Kazuhiro Okada, Satoshi Era, Miho Okada
  • Patent number: 11079226
    Abstract: A physical quantity sensor includes: a supporting member; and a sensor element supported by the supporting member, in which the sensor element includes a vibrator element, a drive signal wiring disposed on the vibrator element, and a first detection signal terminal and a second detection signal terminal disposed on the vibrator element, the supporting member includes a substrate on which the sensor element is joined, and a first detection signal wiring and a second detection signal wiring disposed on the substrate, and the first detection signal wiring and the second detection signal wiring respectively include areas that extend along a second axis intersecting with the first axis and that intersect with the drive signal wiring in a plan view as seen in a direction in which the sensor element and the substrate overlap with each other.
    Type: Grant
    Filed: March 29, 2019
    Date of Patent: August 3, 2021
    Inventors: Keiichi Yamaguchi, Ryuta Nishizawa
  • Patent number: 11079228
    Abstract: According to one embodiment, a detector is disclosed. The detector has a mechanism with first and second vibrators which vibrate in first and second directions. Circuits detect output first and second signals conforming to the detected positions of the vibrators. A detection circuit detects second signal using the first signal as a reference of synchronous detection and outputs a detection signal. A filter continues a moving average process on the detection signal for a period set based on the first signal. A controller circuitry controls the mechanism to causes the first vibrator to start vibrating in the first direction in synchronization with a clock signal.
    Type: Grant
    Filed: August 31, 2018
    Date of Patent: August 3, 2021
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yohei Hatakeyama, Tetsuro Itakura
  • Patent number: 11060865
    Abstract: Dimensions of a disk resonator gyroscope along the radial line of a resonator can be varied to engineer radial stiffness. An apparatus may comprise: a resonator comprising a plurality of concentric circumferential segments and a plurality of slots formed between the concentric circumferential segments; and at least one support supporting the resonator, wherein a width, in a radial direction, of each of the concentric circumferential segments is varied depending on a distance from the at least one support to the each of the concentric circumferential segments. The apparatus may further comprise radial segments connecting between the concentric circumferential segments. The concentric circumferential segments may have a ring shape.
    Type: Grant
    Filed: April 19, 2019
    Date of Patent: July 13, 2021
    Assignee: HRL Laboratories, LLC
    Inventors: Lian X. Huang, Hung Nguyen, Raviv Perahia, Logan D. Sorenson, Patrick J. Webb, David T. Chang
  • Patent number: 11054260
    Abstract: A vibration type angular velocity sensor includes a substrate having a surface; a plurality of fixation parts, a plurality of weights, two linear drive beams, a plurality of supporting members, a drive part and a detection part. The two linear drive beams are disposed on opposite sides of the weights in one direction so as to be connected to each other through the weights. The supporting members join the fixation parts to the drive beams. The drive part drives the drive beams to vibrate. The detection part generates an electric output according to displacement of the weights caused by an angular velocity applied thereto while the drive beams are being driven to vibrate. The fixation parts are disposed between the two linear drive beams.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: July 6, 2021
    Assignee: DENSO CORPORATION
    Inventor: Tomoya Jomori
  • Patent number: 11015933
    Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: May 25, 2021
    Assignee: STMicroelectronics S.r.l.
    Inventors: Gabriele Gattere, Luca Giuseppe Falorni, Carlo Valzasina
  • Patent number: 11009351
    Abstract: A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view. The vibrator device being configured to reduce a mounting stress applied to a vibrator element and to reduce frequency variation of the vibrator element due to the mounting stress, in a case of mounting on a package after adjusting a frequency of the vibrator element.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: May 18, 2021
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Masashi Shimura, Atsushi Matsuo, Shinya Aoki, Shiro Murakami, Ryuta Nishizawa
  • Patent number: 11003250
    Abstract: An electronic device includes a top panel configured to have an operation surface; a detection circuit configured to detect a position of an operation input on the operation surface; a vibrating circuit configured to be attached to the top panel to generate vibration on the operation surface; a control circuit configured to drive the vibrating circuit by a driving signal for generating natural vibration of an ultrasonic wave band on the operation surface, in which the driving of the vibrating circuit is performed such that an intensity of the natural vibration changes in accordance with the position of the operation input to the operation surface and a temporal change degree of the position; and a damping member configured to abut against a position that corresponds to a node of a standing wave generated by the natural vibration on a surface opposite to the operation surface of the top panel.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: May 11, 2021
    Assignee: FUJITSU LIMITED
    Inventors: Akinori Miyamoto, Kiyoshi Taninaka, Yuichi Kamata, Yasuhiro Endo
  • Patent number: 11005422
    Abstract: An oscillator includes a resonator, sustaining circuit and detector circuit. The sustaining circuit receives a sense signal indicative of mechanically resonant motion of the resonator generates an amplified output signal in response. The detector circuit asserts, at a predetermined phase of the amplified output signal, one or more control signals that enable an offset-reducing operation with respect to the sustaining amplifier circuit.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: May 11, 2021
    Assignee: SiTime Corporation
    Inventors: Aaron Partridge, Sassan Tabatabaei, Lijun Chen, Kamran Souri
  • Patent number: 11002543
    Abstract: A MEMS gyroscope can include a supporting structure and a mobile mass elastically suspended from the supporting structure in a driving direction and in a sensing direction, mutually perpendicular. A driving structure is coupled to the mobile mass for controlling a driving movement of the mobile mass in the driving direction at a driving frequency. A driving-frequency tuning electrode, distinct from the driving structure, faces the mobile mass. A driving-frequency tuner electrically coupled to the driving-frequency tuning electrode for supplying a tuning voltage to the driving-frequency tuning electrode.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: May 11, 2021
    Assignee: STMICROELECTRONICS S.R.L.
    Inventor: Daniele Prati
  • Patent number: 10996056
    Abstract: A sensor structure and a method for operating a vibrating sensor of angular velocity comprising a rotor mass and two linearly moving masses is disclosed. The sensor structure and method comprises a rotor mass, two linearly moving masses, and two T-shaped levers each coupled with the two linearly moving masses and to the rotor mass. The T-shaped levers enable the rotor mass and the two linearly moving masses to be excited into an anti-phase primary mode, where the direction of angular momentum of the rotor mass is opposite to the direction of angular momenta of the linearly moving masses. Angular momenta of the rotor mass and the linearly moving masses cancel each other to a high extent, so that the total sum of angular momentum of the structure is very small. Nominal frequency of the anti-phase primary mode is distinctively low as compared to nominal frequencies of other possible primary modes, such as a parallel phase primary mode.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: May 4, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Yoshitaka Kato