Vibratory Mass Patents (Class 73/504.12)
  • Patent number: 10466053
    Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.
    Type: Grant
    Filed: April 4, 2017
    Date of Patent: November 5, 2019
    Assignee: InvenSense, Inc.
    Inventors: Jaakko Ruohio, Luca Coronato, Giacomo Gafforelli
  • Patent number: 10466068
    Abstract: Embodiments of the present disclosure can include a method of operating a vibratory gyroscope, the gyroscope comprising a plurality of excitation and readout electrodes, and defined by a first vibratory mode and a second vibratory mode, and the method comprising: introducing an input signal to a first pair of excitation electrodes; multiplying the input signal by scaling coefficients; applying these scaled input signals to a first pair of excitation electrodes; measuring output signals at the first and second pair of readout electrodes that correspond to the first and second vibratory modes respectively; multiplying the output signals by readout scaling coefficients to form scaled output signals, the sums of which provide first and second vibratory mode readout signals; and adjusting the scaling coefficients to maximize the first and minimize the second vibratory mode readout signals.
    Type: Grant
    Filed: January 22, 2018
    Date of Patent: November 5, 2019
    Assignee: Georgia Tech Research Corporation
    Inventors: Mojtaba Hodjat-Shamami, Farrokh Ayazi
  • Patent number: 10451418
    Abstract: A system and/or method for utilizing quadrature signals, for example in a MEMS gyroscope, to control drive signal characteristics (e.g., amplitude, etc.). As a non-limiting example, a quadrature signal in a MEMS gyroscope may be isolated and/or processed to generate a drive signal that is used to drive a proof mass. Such a quadrature signal may, for example, be obtained passively as part of general Coriolis signal processing. Also for example, such a quadrature signal may be actively created and/or obtained through the use of electrical and/or mechanical features.
    Type: Grant
    Filed: December 9, 2015
    Date of Patent: October 22, 2019
    Assignee: InvenSense, Inc.
    Inventor: Joseph Seeger
  • Patent number: 10436588
    Abstract: A vibrating-mass gyroscope system includes a substantially planar vibrating-mass including opposite first and second surfaces and electrodes that extend longitudinally in a periodic pattern across the first and/or second surfaces. The electrodes include sets of drive and sense electrodes that are capacitively coupled to respective matching sets of drive and sense electrodes associated with a housing and which are separated from and facing the respective first and second surfaces. A gyroscope controller generates a drive signal provided to one of the array of drive electrodes and the substantially matching array of drive electrodes to provide for in-plane periodic oscillatory motion of the vibrating-mass, and generates a force-rebalance signal that is provided to one of the array of sense electrodes and the substantially matching array of sense electrodes to calculate rotation of the vibrating-mass gyroscope system about an input axis.
    Type: Grant
    Filed: June 13, 2017
    Date of Patent: October 8, 2019
    Assignee: Northrop Grumman Systems Corporation
    Inventor: Robert E. Stewart
  • Patent number: 10439579
    Abstract: A continuous or distributed resonator geometry is defined such that the fabrication process used to form a spring mechanism also forms an effective mass of the resonator structure. Proportional design of the spring mechanism and/or mass element geometries in relation to the fabrication process allows for compensation of process-tolerance-induced fabrication variances. As a result, a resonator having increased frequency accuracy is achieved.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: October 8, 2019
    Assignee: Robert Bosch GmbH
    Inventors: Markus Lutz, Aaron Partridge
  • Patent number: 10421659
    Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: September 24, 2019
    Assignee: InvenSense, Inc.
    Inventors: Ilya Gurin, Joseph Seeger, Matthew Thompson
  • Patent number: 10415968
    Abstract: Micromachined inertial devices are presented having multiple linearly-moving masses coupled together by couplers that move in a linear fashion when the coupled masses exhibit anti-phase motion. The couplers move in opposite directions of each other, such that one coupler on one side of the movable masses moves in a first linear direction and another coupler on the opposite side of the movable masses moves in a second linear direction opposite the first linear direction. The couplers ensure proper anti-phase motion of the masses.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: September 17, 2019
    Assignee: Analog Devices, Inc.
    Inventors: Igor P. Prikhodko, John A. Geen, Jeffrey A. Gregory
  • Patent number: 10416003
    Abstract: A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f1=fm+?f, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of ?f.
    Type: Grant
    Filed: April 27, 2017
    Date of Patent: September 17, 2019
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Luca Leoncino, Sebastien Hentz, Guillaume Jourdan, Marc Sansa Perna
  • Patent number: 10415994
    Abstract: A self-test method by rotating the proof mass at a high frequency enables testing the functionality of both the drive and sense systems at the same time. In this method, the proof mass is rotated at a drive frequency. An input force which is substantially two times the drive frequency is applied to the actuation structures to rotate the proof mass of the gyroscope around the sensitive axis orthogonal to the drive axis. An output response of the gyroscope at the drive frequency is detected by a circuitry and a self-test response is obtained.
    Type: Grant
    Filed: July 7, 2017
    Date of Patent: September 17, 2019
    Assignee: INVENSENSE, INC.
    Inventors: Ozan Anac, Joseph Seeger
  • Patent number: 10408618
    Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.
    Type: Grant
    Filed: January 26, 2017
    Date of Patent: September 10, 2019
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Satoshi Ohuchi, Hiroyuki Aizawa, Jiro Terada, Takami Ishida, Ichirou Satou, Hideo Ohkoshi, Yohei Ashimori
  • Patent number: 10401172
    Abstract: An angular velocity acquisition device includes a movable body, a drive electrode to which a drive voltage is applied to vibrate the movable body in a first direction, at least one stopper that stops the movable body at a predetermined position, a hold electrode which receives a hold voltage to hold the movable body at the predetermined position, a detection unit that detects a predetermined physical quantity depending on an amplitude of the vibration of the movable body in a second direction based on a Coriolis force acting on the movable body that vibrates in the first direction, and an angular velocity calculation unit that calculates an angular velocity of the movable body based on the predetermined physical quantity detected by the detection unit.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: September 3, 2019
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Haruka Yamamoto, Yasushi Tomizawa, Tamio Ikehashi
  • Patent number: 10401394
    Abstract: A voltage sensor includes an oscillator that has a circular or roughly circular shape and is supported by a mechanical support member, a fixed electrode that has a predetermined gap between the oscillator and the fixed electrode, and a drive electrode that is placed at a position different from the fixed electrode across the oscillator, and to which an AC drive voltage is applied to make the oscillator oscillate. In the voltage sensor, an electrostatic attractive force acts on the oscillator by applying a voltage to the fixed electrode, and a resonance frequency of the oscillator changes.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: September 3, 2019
    Assignees: YAZAKI CORPORATION, TOYOTA SCHOOL FOUNDATION
    Inventors: Hiroki Ishihara, Makoto Ishii, Minoru Sasaki
  • Patent number: 10393526
    Abstract: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: August 27, 2019
    Assignee: mCube, Inc.
    Inventors: Ali J. Rastegar, Sanjay Bhandari
  • Patent number: 10393769
    Abstract: A microelectromechanical device comprising a mass, an electromechanical transducer configured to convert, after damping the mass during a first damping period, displacement of the mass in the first and second directions into corresponding first and second electrical signals during corresponding first and second conversion time periods, a derivative unit configured to generate first and second control signals indicative of the velocity of the mass in the first and second direction, and a controller for providing the first and second control signals to respective first and second one or more electrodes of the electromechanical transducer for simultaneously damping the mass in the first and second directions with a first and second damping forces corresponding to the first and second velocity during the damping time period.
    Type: Grant
    Filed: March 8, 2017
    Date of Patent: August 27, 2019
    Assignee: NXP USA, Inc.
    Inventors: Olivier Bernal, Lavinia Elena Ciotirca, Thierry Dominique Yves Cassagnes, Jerome Romain Enjalbert, Helene Catherine Louise Tap
  • Patent number: 10382687
    Abstract: At a processor of a camera-equipped electronic device, a first data set generated at a sensor incorporated within a camera module is obtained, and a second data set generated at one or more sensors external to the camera module is obtained. Based on the first set and second data sets, a first set of control signals is transmitted to the camera module. At a disturbance rejection controller integrated within the camera module, a second set of control signals is generated, based on the first set of control signals and on a third set of data obtained from the sensor incorporated within the camera module. The second set of control signals is transmitted to an actuator, which causes a displacement of a camera lens.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: August 13, 2019
    Assignee: Apple Inc.
    Inventors: Parin Patel, Santiago Alban, Andrew Kenneth John McMahon
  • Patent number: 10365102
    Abstract: A compact Inertial Wave Angle Gyroscope (IWAG) is disclosed without zero rate drift due to residual asymmetry comprises antisymmetric velocity feedback of sufficient magnitude to produce a continual self-precession of its vibration pattern to overcome any rate threshold and average the effects of its residual asymmetry on zero rate drift to zero over each revolution of the precession pattern in the case. The inertial rotation input is determined from the measured total precession rate by removing the computed self-precession rate.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: July 30, 2019
    Assignee: Inertialwave
    Inventor: Anthony Dorian Challoner
  • Patent number: 10365103
    Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: July 30, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Jaakko Ruohio, Anssi Blomqvist
  • Patent number: 10359284
    Abstract: A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: July 23, 2019
    Assignee: InvenSense, Inc.
    Inventors: Luca Coronato, Giacomo Gafforelli, Jaakko Ruohio
  • Patent number: 10352960
    Abstract: A MEMS accelerometer incorporating a metrology element to directly measure minute changes in measurement baseline. In particular, the MEMS accelerometer incorporates a metrology bar (MB). Embodiments also relate to stress isolation into the sensor design to isolate the sensitive areas of the chip (i.e., the metrology baseline and the proof mass mounting points) from outside stress.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: July 16, 2019
    Assignee: Garmin International, Inc.
    Inventors: Kirill V. Shcheglov, Yingxiang Cheng, Nolan F. Maggipinto
  • Patent number: 10345105
    Abstract: A gyroscope includes: a support frame; a circular oscillator; a flexible support structure supporting by suspension the circular oscillator to the support frame; a drive mechanism configured to induce the circular oscillator into a two-dimensional driving oscillation; a plurality of movable sections disposed at a perimeter of the circular oscillator; a plurality of digital proximity switches, each disposed near a respective movable section and around the perimeter of the circular oscillator; and a processor. The two-dimensional driving oscillation is modified responsive to an angular rotation of the support frame and the circular oscillator. The processor is operable to determine the position of each movable section, to determine the plurality of variable oscillation parameters for each oscillation of the modified drive oscillation and to determine the angular rotation of the support frame and the circular oscillator via a parametric system identification method.
    Type: Grant
    Filed: May 31, 2017
    Date of Patent: July 9, 2019
    Assignee: The United States of America as represented by Secretary of the Navy
    Inventor: Andrew B. Sabater
  • Patent number: 10340818
    Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: July 2, 2019
    Assignees: National University Corporation Shizuoka University, OMRON Corporation, KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO
    Inventors: Masato Suzuki, Akito Mori, Gen Hashiguchi, Tatsuhiko Sugiyama, Hiroshi Imamoto, Masatoshi Oba, Hiroyuki Mitsuya, Hisayuki Ashizawa, Kazunori Ishibashi
  • Patent number: 10330472
    Abstract: According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: June 25, 2019
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yasushi Tomizawa, Haruka Yamamoto, Tamio Ikehashi
  • Patent number: 10330471
    Abstract: The present invention is related to a triaxial micro-electromechanical gyroscope, comprising: a ring-shaped detection capacitor located at the center; two sets of driving capacitors located at outer sides of the ring-shaped detection capacitor and symmetrically distributed at two sides of an origin along a y-axis; two sets of second detection capacitors located at the outer sides of the ring-shaped detection capacitor respectively and symmetrically distributed at the two sides of the origin along an x-axis; and a linkage part connected with movable polar plates of the driving capacitors, movable polar plates of the second detection capacitors, and an outer edge of ring-shaped upper polar plates of the ring-shaped detection capacitor, respectively. The triaxial micro-electromechanical gyroscope provided by the present invention adopts a single structure design, and integrates capacitive electrostatic driving and differential capacitive detection.
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: June 25, 2019
    Assignee: Goertek, Inc.
    Inventor: Tingkai Zhang
  • Patent number: 10330476
    Abstract: An angular rate sensor includes four Coriolis masses, configured such that the Coriolis masses move along perpendicular drive and sense axes, and a lever mechanism having first and second sets of levers. The first set of levers is coupled outside a boundary of the Coriolis masses, and the second set of levers is coupled within a boundary of the first set of levers and between the Coriolis masses. The second set of levers is configured to produce an anti-phase drive mode motion of the Coriolis masses along the drive axis. The first set of levers is configured to allow an anti-phase sense mode motion of the Coriolis masses along the sense axis responsive to the angular rate sensor rotating around an input axis that is perpendicular to the drive and sense axes. The first and second sets of levers are configured to constrain an in-phase motion of the Coriolis masses.
    Type: Grant
    Filed: July 12, 2017
    Date of Patent: June 25, 2019
    Assignee: NXP USA, Inc.
    Inventor: Peng Shao
  • Patent number: 10317210
    Abstract: According to one aspect, embodiments herein provide a gyroscope comprising an axially symmetric structure, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of the axially symmetric structure, wherein the plurality of transducers is configured to drive the axially symmetric structure in at least a first vibratory mode and a second vibratory mode, and wherein the gyroscope is implemented on a hexagonal crystal-based substrate.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: June 11, 2019
    Assignees: THE CHARLES STARK DRAPER LABORATORY, INC., The United States of America, as represented by the Secretary of the Navy
    Inventors: Francis J. Kub, Karl D. Hobart, Eugene Imhoff, Rachael Myers-Ward, Eugene H. Cook, Marc S. Weinberg, Jonathan J. Bernstein
  • Patent number: 10302432
    Abstract: A circuit comprising a microelectromechanical (MEMS) gyroscope and a gain circuit coupled with the MEMS gyroscope. The gain circuit is configured to receive a digitized drive signal based at least in part on a digitized drive voltage amplitude of the MEMS gyroscope. The gain circuit is also configured to determine a percentage change in quality factor of the MEMS gyroscope based at least in part on the digitized drive signal and a stored trim value of the MEMS gyroscope. The gain circuit is also configured to compensate for an effect of a change in the quality factor of the MEMS gyroscope based at least in part on the percentage change in quality factor.
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: May 28, 2019
    Assignee: InvenSense, Inc.
    Inventor: Kevin Hughes
  • Patent number: 10284142
    Abstract: A microelectromechanical device structure comprises a supporting structure wafer. A cavity electrode is formed within a cavity in the supporting structure wafer. The cavity electrode forms a protruding structure from a base of the cavity towards the functional layer, and the cavity electrode is connected to a defined electrical potential. The cavity electrode comprises a silicon column within the cavity in the supporting structure wafer, which is partially or entirely surrounded by a cavity. One or more cavity electrodes may be utilized for adjusting a frequency of an oscillation occurring within the functional layer.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: May 7, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Marcus Rinkiö
  • Patent number: 10260901
    Abstract: A method for optimizing the switch-on time of a Coriolis gyroscope (1) having a mass system (100) which can be excited to an excitation oscillation of the Coriolis gyroscope (1) parallel to a first axis (x), wherein a deflection of the mass system on account of a Coriolis force along a second axis (y) which is provided perpendicular to the first axis (x) can be verified using an output signal from the Coriolis gyroscope, comprises determining the amplitude (A) of the excitation oscillation of the Coriolis gyroscope at a defined time, determining the output signal (S) from the Coriolis gyroscope at the defined time, and generating a normalized output signal (S0) from the Coriolis gyroscope by multiplying the determined output signal (S) by the quotient of the amplitude (A0) of the excitation oscillation of the Coriolis gyroscope in the steady state and the determined amplitude (A).
    Type: Grant
    Filed: January 27, 2015
    Date of Patent: April 16, 2019
    Assignee: NORTHROP GRUMMAN LITEF GmbH
    Inventor: Wolfram Geiger
  • Patent number: 10261105
    Abstract: A microelectromechanical system (MEMS) accelerometer is described. The MEMS accelerometer is arranged to limit distortions in the detection signal caused by displacement of the anchor(s) connecting the MEMS accelerometer to the underlying substrate. The MEMS accelerometer may include masses arranged to move in opposite directions in response to an acceleration of the MEMS accelerometer, and to move in the same direction in response to displacement of the anchor(s). The masses may, for example, be hingedly coupled to a beam in a teeter-totter configuration. Motion of the masses in response to acceleration and anchor displacement may be detected using capacitive sensors.
    Type: Grant
    Filed: February 7, 2018
    Date of Patent: April 16, 2019
    Assignee: Analog Devices, Inc.
    Inventor: William A. Clark
  • Patent number: 10254304
    Abstract: A physical sensor comprising a substrate, a movable mass, said mass being able to be moved by an external force, a first optical resonator, a light wave guide for measurement and a light wave guide for detection, a rigid plate which are able to modify the optical resonance frequency of said optical resonator by moving closer and away the same, a lever arm rotatably hinged to the substrate by a pivot connection and the mass being movably integral with the transmitting means, the rigid plate being disposed relative to the mass and to the pivot connection such that the lever arm transmits to the rigid plate, in an amplified manner, the displacement of the mass.
    Type: Grant
    Filed: September 23, 2016
    Date of Patent: April 9, 2019
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Laurent Duraffourg
  • Patent number: 10247600
    Abstract: Systems and techniques are described for matching the resonance frequencies of multiple resonators. In some embodiments, a resonator generates an output signal reflecting the resonator's response to an input drive signal and an input noise signal. The output signal is then compared to the noise signal to derive a signal representative of the resonance frequency of the resonator. Comparing that signal to the output signal of a second resonator gives an indication of whether there is a difference between the resonance frequencies of the two resonators. If there is, one or both of the resonators may be adjusted. In this manner, the resonance frequencies of resonators may be matched during normal operation of the resonators.
    Type: Grant
    Filed: November 10, 2016
    Date of Patent: April 2, 2019
    Assignee: Analog Devices, Inc.
    Inventors: Youn-Jae Kook, Jose Barreiro Silva, Jianrong Chen, Ronald A. Kapusta, Jr.
  • Patent number: 10240925
    Abstract: A gyroscope includes a vibratory structure, and a control mechanism including at least a first electrode, and at least a second electrode adjacent the first electrode, wherein the vibratory structure is separated from the control mechanism by a gap, wherein to drive a vibration in the vibratory structure, the control mechanism is configured to apply an alternating electrical voltage between the first electrode and the second electrode, and wherein to sense motion in the vibratory structure, the control mechanism is configured to apply a direct current voltage bias between the first electrode and the second electrode.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: March 26, 2019
    Assignee: HRL Laboratories, LLC
    Inventors: Raviv Perahia, Jonathan Lake, Richard J. Joyce, Logan D. Sorenson
  • Patent number: 10215772
    Abstract: A micromechanical structure for an acceleration sensor, including a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor, spring elements that are fastened on the seismic mass and on at least one fastening element, a rotational motion of the seismic mass being generatable by way of the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: February 26, 2019
    Assignee: ROBERT BOSCH GMBH
    Inventor: Johannes Classen
  • Patent number: 10209070
    Abstract: A microelectromechanical system (MEMS) gyroscope device includes a substrate having a surface parallel to a plane; first and second proof masses driven to slide back and forth past one another in a first directional axis of the plane, where the first and second proof masses respectively have a first and second recess in a respective side closest to the other proof mass; a pivot structure coupled to the first proof mass within the first recess and to the second proof mass within the second recess; an anchor between the first and second recesses and coupled to a mid-point of the pivot structure; and third and fourth proof masses driven to move toward and away from one another in a second directional axis of the plane that is perpendicular to the first directional axis; where the proof masses move in response to angular velocity in one or more directional axes.
    Type: Grant
    Filed: June 3, 2016
    Date of Patent: February 19, 2019
    Assignee: NXP USA, Inc.
    Inventor: Aaron A. Geisberger
  • Patent number: 10209270
    Abstract: An inertial sensor includes a substantially planar, rotationally symmetric proof mass, a capacitive pick-off circuit connected to the proof mass, an electrical drive circuit connected to the four pairs of electrodes. The drive circuit is arranged to apply first in-phase and anti-phase pulse width modulation (PWM) drive signals with a first frequency to the first and third electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals and to apply second in-phase and anti-phase PWM drive signals with a second frequency, different to the first frequency, to the second and fourth electrode pairs, such that one electrode in each pair is provided with in-phase PWM drive signals and the other electrode in each pair is provided with anti-phase PWM drive signals.
    Type: Grant
    Filed: February 6, 2017
    Date of Patent: February 19, 2019
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventor: Alan Richard Malvern
  • Patent number: 10191079
    Abstract: A dual-mode actuation and sensing circuit actuates both modes of an axisymmetric gyroscope and senses both outputs thereof. The sum of the two outputs provides a self-sustaining closed-loop oscillation signal, while the difference of the two mode outputs is used for extracting differential rate information while rejecting the common-mode bias terms of the gyroscope to provide online bias calibration. The proposed system and method facilitates scale factor calibration of an axisymmetric gyroscope. Furthermore, the difference output of the dual-mode gyroscope can provide a mode-split indicator signal which can be used to automatically match the gyroscope modes.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: January 29, 2019
    Assignee: GEORGIA TECH RESEARCH CORPORATION
    Inventors: Arashk Norouz Pour Shirazi, Farrokh Ayazi
  • Patent number: 10180323
    Abstract: A toroidal ring gyroscope with a robust outer perimeter anchor and a distributed suspension system. The vibrational energy in the design is concentrated towards the innermost ring, and the device is anchored at the outer perimeter. The distributed support structure prevents vibrational motion propagating to the outer anchor, which helps trap the vibrational energy within the gyroscope and provides a Q-factor of >100,000 at a compact size of 1760 ?m. Due to the parametric pumping effect, energy added to each mode is proportional to the existing amplitude of the respective mode. As a result, errors associated with finding the orientation of the standing wave and x-y drive gain drift are bypassed. The toroidal ring gyroscope can be fabricated using any standard silicon on insulator process. Due to the high Q-factor and robust support structure, the device can potentially be instrumented in high-g environments that require high angular rate sensitivity.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: January 15, 2019
    Assignee: The Regents of the University of California
    Inventors: Doruk Senkal, Andrei M. Shkel
  • Patent number: 10166977
    Abstract: One aspect of the present invention increases or reduces an amplitude or amplitudes of a steering angle sensor output signal and/or a motor rotational angle signal, and outputs a motor instruction signal based on a substitute signal for a torque sensor output signal that is calculated based on at least one of the steering angle sensor output signal and the motor rotational angle signal that is subjected to the adjustment of the amplitude thereof, and the other of the steering angle sensor output signal and the motor rotational angle signal, when an abnormality is detected in the torque sensor output signal.
    Type: Grant
    Filed: August 6, 2015
    Date of Patent: January 1, 2019
    Assignee: HITACHI AUTOMOTIVE SYSTEMS, LTD.
    Inventors: Mitsuo Sasaki, Takumi Hisazumi
  • Patent number: 10156443
    Abstract: An electronic device includes: a base; a support unit that includes first and second attaching portions disposed to be separated from each other in a first direction via a middle portion having a conductive pattern formed from a conductive member and is attached to the base in the first and second attaching portions; and a functional element that is supported by the support unit. The conductive pattern includes a broad width portion having a width W1 in a second direction orthogonal to the first direction and a narrow width portion having a width W2 narrower than the width W1 in a plan view.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: December 18, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Norifumi Shimizu, Takayuki Kikuchi
  • Patent number: 10132877
    Abstract: A micro-electromechanical apparatus may include a substrate, a first frame, a plurality of first anchors, a region and a plurality of pivot elements. The plurality of first anchors and the region is disposed on the substrate. The region is surrounded by the plurality of first anchors. Each of the pivot elements includes a pivot end and a rotary end. Each of the pivot ends is connected to a corresponding first anchor and each of the rotary ends is connected to the first frame such that the first frame is able to rotate with respect to an axis passing the region. The micro-electromechanical apparatus having the pivot elements and the region is adapted for detecting multi-degree physical quantities such as angular velocities in at least two axes, angular velocities and accelerations, angular velocities and Earth's magnetic field.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: November 20, 2018
    Assignee: Industrial Technology Research Institute
    Inventors: Chung-Yuan Su, Chao-Ta Huang, Sheng-Ren Chiu
  • Patent number: 10126129
    Abstract: A MEMS device includes a movable mass having a central region overlying a sense electrode and an opening in which a suspension structure and spring system are located. The suspension structure includes an anchor coupled to a substrate and rigid links extending from opposing sides of the anchor. The spring system includes a first and second spring heads coupled to each of the rigid links. A first drive spring is coupled to the first spring head and to the movable mass, and a second drive spring is coupled to the second spring head and to the movable mass. The movable mass is resiliently suspended above the surface of the substrate via the suspension structure and the spring system. The spring system enables drive motion of the movable mass in the drive direction and sense motion of the movable mass in a sense direction perpendicular to the surface of the substrate.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: November 13, 2018
    Assignee: NXP USA, Inc.
    Inventor: Michael Naumann
  • Patent number: 10119823
    Abstract: An angular velocity sensor includes a substrate; a plurality of mass units which is disposed above the substrate; respective coupling units which couple the respective mass units (a first mass unit and a third mass unit, the third mass unit and a second mass unit, the second mass unit and a fourth mass unit, and a fourth mass unit and the first mass unit) adjacent to each other, among the plurality of mass units; and respective drive units which are disposed above the substrate and are connected to the respective coupling units, and the respective drive units drive the respective mass units (the first mass unit and the third mass unit, the third mass unit and the second mass unit, the second mass unit and the fourth mass unit, and the fourth mass unit and the first mass unit) adjacent to each other through the respective coupling units.
    Type: Grant
    Filed: April 17, 2015
    Date of Patent: November 6, 2018
    Assignee: Seiko Epson Corporation
    Inventor: Teruo Takizawa
  • Patent number: 10107626
    Abstract: According to one embodiment, a method of acquiring rotational information of a gyro sensor includes sensing a predetermined physical quantity which depends upon an amplitude of a vibration in a second direction, the vibration in the second direction being based on Coriolis force that is applied to a movable body which is vibrating in a first direction, calculating rotational information of the movable body based on the sensed predetermined physical quantity, and stopping a vibration in the first direction of the movable body after the predetermined physical quantity is sensed.
    Type: Grant
    Filed: September 9, 2015
    Date of Patent: October 23, 2018
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Tamio Ikehashi
  • Patent number: 10082394
    Abstract: A MEMS BAW vibratory planar gyroscope having an in-plane electrode configuration for mode-alignment by utilizing alignment electrodes that have a height less than a full height of the gyroscope resonant body. Such alignment electrodes apply a force component that affects modes with both in-plane and out-of-plane movements. The gyroscope includes a resonant body having a height and a perimeter surface and electrodes disposed adjacent the exterior perimeter surface of the resonant body. At least one of the electrodes is an alignment electrode and has a height less than the height of the resonant body.
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: September 25, 2018
    Assignee: PANASONIC CORPORATION
    Inventors: Amir Rahafrooz, Diego Emilio Serrano, Ijaz Jafri
  • Patent number: 10072930
    Abstract: A vibrator of an angular velocity sensor includes detection beam portions extending from a central base portion in a cross shape, and drive beam portions between and connected to two adjacent detection beam portions. Each of the detection beam portions includes a base-end detection beam connected to the central base portion, and a left detection beam and a right detection beam. The left detection beam is connected to one of the drive beam portions that is located on the left of the corresponding one of the detection beam portions, and the right detection beam is connected to one of the drive beam portions that is located on the right of the corresponding one of the detection beam portions. The drive beam portions are driven to vibrate in a direction toward the central base portion and a direction away from the central base portion so that each two facing ones of the drive beam portions are in the same phase and each two adjacent ones of the drive beam portions are in the opposite phases.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: September 11, 2018
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Kosuke Watanabe
  • Patent number: 10066941
    Abstract: Disclosed is a three-axis micro gyroscope having a ring spring. The three-axis micro gyroscope of the present invention comprises: a main spring part; a driving part; an x mass part; an y mass part; a z mass part; and a sensing part. The x mass part moves in the y axis direction depending on the contraction and expansion of the main spring part. The y mass part moves in the x axis direction depending on the contraction and expansion of the main spring part. The z mass part comprises an x vibration mass means and an y vibration mass means. The sensing part senses vibration shaking of the x mass part, the y mass part and the z mass part. The three-axis micro gyroscope of the present invention is capable of effective measurement of rotational movements for all three of the x, y and z axes.
    Type: Grant
    Filed: May 27, 2014
    Date of Patent: September 4, 2018
    Assignee: TLI INC.
    Inventor: Sung Wook Kim
  • Patent number: 10060757
    Abstract: This document provides apparatus and methods for cancelation of quadrature error from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus can include a drive charge-to-voltage (C2V) converter configured to provide drive information of a proof mass of a MEMS gyroscope, a sense C2V converter configured to provide sense information of the proof mass, a phase-shift module configured to provide phase shift information of the drive information, a drive demodulator configured to receive the drive information and the phase shift information and to provide demodulated drive information, a sense demodulator configured to receive the sense information and the phase shift information and to provide demodulated sense information, and wherein the quadrature correction apparatus is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information.
    Type: Grant
    Filed: April 5, 2013
    Date of Patent: August 28, 2018
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Ion Opris, Hai Tao, Shungneng Lee
  • Patent number: 10048491
    Abstract: A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: August 14, 2018
    Assignee: STMicroelectronics S.r.l.
    Inventors: Massimiliano Merli, Roberto Carminati, Marco Rossi
  • Patent number: 10040681
    Abstract: A micro electro-mechanical (MEMS) device assembly is provided. The MEMS device assembly includes a first substrate that has a plurality of electronic devices, a plurality of first bonding regions, and a plurality of second bonding regions. The MEMS device assembly also includes a second substrate that is bonded to the first substrate at the plurality of first bonding regions. A third substrate having a recessed region and a plurality of standoff structures is disposed over the second substrate and bonded to the first substrate at the plurality of second bonding regions. The plurality of first bonding regions provide a conductive path between the first substrate and the second substrate and the plurality of the second bonding regions provide a conductive path between the first substrate and the third substrate.
    Type: Grant
    Filed: August 20, 2010
    Date of Patent: August 7, 2018
    Assignee: Miradia Inc.
    Inventors: Hua-Shu Wu, Yu-Hao Chien, Shih-Yung Chung, Li-Tien Tseng, Yu-Te Yeh
  • Patent number: 10036652
    Abstract: A method for self-compensation of the bias draft of the quadrature signal of a gyroscope. The method is a combination of a variety of sub-methods, which can include quadrature compensation, can be used to achieve the highest possible stability. The calibration methods include a temperature self-sensing algorithm utilizing the drive-mode resonance frequency for calibration of thermal drift in the mechanical parameters of the system, a sideband-ratio approach for direct detection of mechanical drive-mode amplitude, modifying the AC and DC components of the amplitude gain control (AGC) for improved stability, and an approach for compensation of thermal drift in the sense-mode pick off system by utilizing mechanical quadrature. By using some or all of the four methods of calibration above, the highest level of long term in-run bias stability can be achieved.
    Type: Grant
    Filed: February 24, 2015
    Date of Patent: July 31, 2018
    Assignee: The Regents of the University of California
    Inventors: Sergey A. Zotov, Brenton R. Simon, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel