Abstract: The invention provides for an accelerometer comprising a proof mass within a fixed substrate wherein the proof mass is connected to the substrate by one or more v-beams. Acceleration is determined by measuring the deflection of the v-beam or beams.

Abstract: An integrated inertial sensor and pressure sensor may include a first substrate including a first surface and a second surface; at least one or more conductive layers, formed on the first surface of the first substrate; a movable sensitive element, formed by using a first region of the first substrate; a second substrate and a third substrate, the second substrate being coupled to a surface of the conductive layer, the third substrate being coupled to the second surface of the first substrate in which the movable sensitive element of the inertial sensor is formed, and the third substrate and the second substrate are respectively arranged on opposite sides of the movable sensitive element; and a sensitive film of the pressure sensor, including at least a second region of the first substrate, or including at least one of the conductive layers on the second region of the first substrate.

Abstract: A MEMS sensor capable of sensing acceleration and pressure includes a frame, a proof mass and flexible bridges connected between the frame and the proof mass in such a way that the proof mass is moveably suspended inside the frame. The proof mass is provided with a pressure sensing diaphragm and a sealed chamber corresponding to the diaphragm such that the proof mass is not only served as a moveable sensing element for acceleration measurement but also a pressure sensing element.

Abstract: The technical solution provided can be implemented with the help of two miniature vessels and even one miniature vessel filled with the flowing media. It is based on determining the pressures difference in particular points, wherein the pressures caused by the cross accelerations and other disturbance factors are considered to be equal, and the ones caused by the acceleration determined are considered to be different. The present solution enables one to determine the acceleration with higher accuracy even with big tilting (practically up to 360°) of the platform, in particular, on the body of a moving object, the acceleration whereof is determined.

Abstract: The present invention provides an inertial sensor and a producing method thereof. The inertial sensor measures the acceleration and angular acceleration of a moving object according to the sensed pressure difference (pressure gradient). The inertial sensor comprises a substrate; a circuit disposed on the substrate; a pressure device comprising an annular chamber that has a first end and a second end; a channel having a first end and a second end, with the second end being connected to the second end of the annular chamber; a pressure meter connected respectively to the first end of the annular chamber and the first end of the channel, wherein the pressure meter is electrically connected to the circuit; and a liquid filling the annular chamber. Hence, the present invention provides a highly sensitive planar inertial sensor, which simplifies the structure, makes easy the manufacturing process, and lowers the costs.

Abstract: The present technical solution for determining linear acceleration, the vector whereof is considered to be at a tangent to a trajectory of movement of a moving object, is based on determining new differences of accelerations. It is considered to be the basis for efficient, accurate, with the threshold of sensitivity equal to zero in small-size option solving the tasks of autonomous navigation, piloting, stabilization and etc. Said solution is irrespective of disturbance factors, in particular, cross-axis and centrifugal accelerations, vibrations, temperature and others, and can be used without any gyroscopes.

Abstract: The technical solution provided can be implemented with the help of two miniature vessels and even one miniature vessel filled with the flowing media. It is based on determining the pressures difference in particular points, wherein the pressures caused by the cross accelerations and other disturbance factors are considered to be equal, and the ones caused by the acceleration determined are considered to be different. The present solution enables one to determine the acceleration with higher accuracy even with big tilting (practically up to 360°) of the platform, in particular, on the body of a moving object, the acceleration whereof is determined.

Abstract: The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portion 9 is constituted by four trapezoidal inclined surfaces 13 of a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weight 3 is so constructed as to have an abutting portion including a linear portion 3d which abuts against the inclined surfaces 13 constituting the inner peripheral surface of the support portion 9 when the weight 3 makes a maximum displacement in a direction where a diaphragm portion 11 is located. The abutting portion 3d has a circular outline shape as seen from a side where a weight fixing portion 7 is located.

Abstract: An acceleration sensor includes a substrate (101), a proof mass (110, 210) over the substrate and having first and second attachment regions (113, 114, 213, 214), and an anchor structure (120, 221, 222) coupled to the substrate. The sensor additionally includes a first suspension beam (130, 230) coupling the anchor structure to the first attachment region to suspend the proof mass over the substrate. The sensor further includes a second suspension beam (140, 240) coupling the anchor structure to the second attachment region to suspend the proof mass over the substrate. The first suspension beam has a first radius (311, 321) extending from the anchor structure to the first attachment region, and the second suspension beam has a second radius (312, 322) extending from the anchor structure to the second attachment region where the first radius is greater than the second radius.

Abstract: A micro-miniature switch apparatus (10) includes a substrate (12) having a surface (14) with first and second channels (16, 18) extending from the surface (14) into the substrate (12). The first and second channels (16, 18) are spaced apart from each other, with a channel axis (20) extending longitudinally through the first and second channels (16, 18). A body (68) that is movable relative to the substrate (12) includes two arms (70, 72). Each of the arms (70, 72) extends into one of the first and second channels (16, 18) to support the body (68) for movement relative to the substrate (12) between first and second electrical conditions of the switch apparatus (10).