Abstract: A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

Abstract: An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.

Abstract: MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

Abstract: A micromechanical assembly having a holder, a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame and which is joined to the holder via at least one frame spring, a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the two mirror springs and being adjustable about a mirror axis of rotation in relation to the drive frame, and the mirror element being suspended from the drive frame asymmetrically relative to the mirror axis of rotation. A method for manufacturing a micromechanical assembly is also described. A method for operating a micromechanical assembly is also described.

Abstract: An electronic device includes a first member including a reference potential terminal; a second member placed on a first surface of the first member and having conductivity; and a functional element accommodated in a cavity surrounded by the first member and the second member, wherein the second member and the reference potential terminal are electrically connected via a contact portion.

Abstract: A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

Abstract: An angular velocity sensor includes a sensor element having a shape defined in an XYZ space, and can detect an angular velocity about a Z axis. The sensor element includes a support body extending in a direction of an X axis, an arm connected with the support body, and a weight connected with the arm. The arm has a first end connected with the support body and a second end connected with the weight. The arm has substantially a J-shape including a first arm portion extending in a direction of a Y axis from the first end to a first corner, a second arm portion extending in the direction of the X axis from the first corner to a second corner, and a third arm portion extending in the direction of the Y axis from the second corner to the second end. The length of the arm in the direction of the X axis is larger than the length of the weight in the direction of the X axis. This angular velocity sensor can improve the sensibility to angular velocity about the Z axis.

Abstract: An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.

Abstract: A micromechanical sensor is provided which includes a substrate having a main plane of extension and a rocker structure which is connected to the substrate via a torsion means. The torsion means extends primarily along a torsion axis, and the torsion axis is situated essentially in parallel to the main plane of extension of the substrate. The rocker structure is pivotable about the torsion axis from a neutral position into a deflected position, and the rocker structure has a mass distribution which is asymmetrical with respect to the torsion axis. The mass distribution is designed in such a way that a torsional motion of the rocker structure about the torsion axis is effected as a function of an inertial force which is oriented along a Z direction which is essentially perpendicular to the main plane of extension of the substrate.

Abstract: A Micro-Electro-Mechanical System (MEMS) accelerometer employing a rotor and stator that are both released from a substrate. In embodiments, the rotor and stator are each of continuous a metal thin film. A stress gradient in the film is manifested in capacitive members of the rotor and stator as a substantially equal deflection such that a relative displacement between the rotor and stator associated with an acceleration in the z-axis is substantially independent of the stress gradient. In embodiments, the stator comprises comb fingers cantilevered from a first anchor point while the rotor comprises comb fingers coupled to a proof mass by torsion springs affixed to the substrate at second anchor points proximate to the first anchor point.

Abstract: A physical quantity sensor includes: a sensor element which detects predetermined physical quantity; a driving circuit which generates a driving signal of the sensor element; and an AGC circuit which controls the driving signal at a constant level according to a reference voltage, based on an output signal of the sensor element, in which the reference voltage is variable.

Abstract: A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.

Abstract: A technique is provided for determining a force/acceleration acting on a proof mass of a bistable device. According to an aspect of the invention, the location of a boundary of one of the stable configurations of the device is monitored. The monitored location is compared to a predetermined location of the same boundary, said predetermined location corresponding to a condition in which the force/acceleration is absent, to detect a deviation of said location. The deviation is indicative of the force/acceleration and can be used to determine the force/acceleration. According to another aspect of the invention, the resonance frequency of the proof mass' oscillation in one of the stable regions is monitored, and compared to a predetermined resonance frequency the proof mass' oscillation in the same region corresponding to a condition in which the force/acceleration is absent, to determine a deviation of the resonance frequency due to the presence of force/acceleration.

Abstract: An acceleration sensor includes a circuit board with a recess that exposes a spring structure. The spring structure is formed from a material of the circuit board exposed by the recess and includes a vibrating element that is held in a resilient manner via at least one spring element. The sensor further includes a reference element connected rigidly to the circuit board and arranged at a distance from and opposite the vibrating element, an electrical circuit arranged on the vibrating element at a distance from the reference element, and at least one detection element. The circuit is configured to evaluate a signal that is configured to be influenced by a change in distance between the reference element and the at least one detection element in order to sense an acceleration of the acceleration sensor.

Abstract: A method includes associating a spatially separate audio sensor and/or a vibration sensor with an audio processing system having one or more audio sensor(s) associated therewith. The spatially separate audio sensor is on a remote location distinct from that of the one or more audio sensor(s). The method also includes capturing information uniquely associated with an external environment of the audio processing system through the spatially separate audio sensor and/or the vibration sensor and the one or more audio sensor(s), and adapting an audio output of the audio processing system based on the captured information uniquely associated with the external environment thereof.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: A rotational rate sensor is provided having a substrate and having a seismic mass that is movable relative to the substrate, the seismic mass being capable of being excited by a drive unit to a working oscillation relative to the substrate, and a Coriolis deflection of the seismic mass perpendicular to the working oscillation being capable of being detected, the rotational rate sensor having an interface for sending out a sensor signal as a function of the Coriolis deflection, the drive unit being configured for the modification of a frequency and/or of an amplitude of the working oscillation when a control signal is present at the interface.

Abstract: A resonant accelerometer (24) includes a single anchor (28) fixed to a substrate (32). A proof mass (34) is positioned above a surface (30) of the substrate (32) and is positioned symmetrically about the anchor (28). The proof mass (34) has a central opening (38). Each of a number of suspension beams (42, 44, 46, 48) resides in the central opening (38) and has one end (50) affixed to the anchor (28) and another end (52) attached to an inner peripheral wall (40) of the proof mass (34). A resonant frequency of the beams (42, 44) in a direction (64) aligned with a common axis (58) of the beams (42, 44) changes according to acceleration in the direction (64). A resonant frequency of the beams (46, 48) in a direction (66) aligned with a common axis (62) of the beams (46, 48) changes according to acceleration in the direction (66).

Abstract: The present invention provides an electro-static floating type gyro device comprising: a gyro mechanism having a gyro rotor and plural adjacent pairs of electro static support electrodes for supporting said gyro rotor; a posture control circuit for generating complementary posture control voltages for controlling a posture of the gyro rotor, wherein the complementary posture control voltages applied to the adjacent pairs of electro static support electrodes are alternated in time.

Abstract: Systems and methods for two degree of freedom dithering for micro-electromechanical system (MEMS) sensor calibration are provided. In one embodiment, a method for a device comprises forming a MEMS sensor layer, the MEMS sensor layer comprising a MEMS sensor and an in-plane rotator to rotate the MEMS sensor in the plane of the MEMS sensor layer. Further, the method comprises forming a first and second rotor layer and bonding the first rotor layer to a top surface and the second rotor layer to the bottom surface of the MEMS sensor layer, such that a first and second rotor portion of the first and second rotor layers connect to the MEMS sensor. Also, the method comprises separating the first and second rotor portions from the first and second rotor layers, wherein the first and second rotor portions and the MEMS sensor rotate about an in-plane axis of the MEMS sensor layer.

Abstract: An inertial force sensor is composed of a plurality of arms and an oscillator having a base for linking the arms, in which a trimming slit is formed on a part of the arm except for a ridge portion, thus controlling damage to a tuning fork arm to be caused by the trimming.

Abstract: A motion sensor includes a base, a first capacitance electrode, and a second capacitance electrode. The first capacitance electrode is received within the base and includes first capacitance electrode sheets. The second capacitance electrode is received within the base and aligned with the first capacitance electrode to form a capacitance, and includes second capacitance electrode sheets facing and being aligned with the middle group of the first capacitance electrode sheets. The capacitance is changed when the second capacitance electrode sheets stray from the corresponding first capacitance electrode sheets.

Abstract: Microelectromechanical system (MEMS) devices and methods with controlled die bonding areas. An example device includes a MEMS die having a glass layer and a protective package. The glass layer includes a side facing the protective package with at least one mesa protruding from a recessed portion of the glass layer. The at least one mesa is attached to the protective package. An example method includes creating at least one mesa on a glass layer of a MEMS die and attaching the at least one mesa to a protective package.

Abstract: A monolithic guiding blade for a mobile proof mass in a monolithic electromechanical system micro-machined in a plate having thickness H and defining plane O,x,y, the system including a base and a measurement cell including the proof mass connected to the base by the guiding blade and capable of translation displacement along axis Oy, the blade extending along axis Ox and connected to a fixed portion of the base, the blade limiting movement of the proof mass along axis Ox, comprising: a first hinge section shaped as a parallelepiped having thickness h long axis Oz, length I1 along axis Ox and width L along axis Oy; a central section essentially shaped as a parallelepiped having thickness h long axis Oz, length It along axis Ox and width Lt along axis Oy; and a second hinge section essentially in the shape of a parallelepiped having thickness h long axis Oz, length I2 along axis Ox and width L along axis Oy.

Abstract: A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.

Abstract: The present invention relates to an inertial measurement device secured to a structure of a vehicle for which it is desired to measure speeds and/or accelerations, the device comprising at least one piece of moving equipment in rotation about a stationary axis of rotation Y relative to the structure, said moving equipment including at least two measurement means having respective sensitivity axes X? and Z? that are mutually orthogonal and that lie in a plane perpendicular to the stationary axis of rotation Y, a motor for driving the moving equipment in rotation, means for determining the angular position of the moving equipment, means for responding to the angular position of the moving equipment to determine the projection of the measurements taken in the rotary frame of reference axes X? and Z? by the said at least two measurement means onto a vehicle frame of reference X and Z.

Abstract: An out-of-plane comb-drive accelerometer. An example accelerometer linearizes a response. An example accelerometer includes one or more stators having a plurality of tines having a surface parallel to a surface of substrate. The tine surface is at a first distance from the surface of the substrate. A proof mass includes one or more rotors that include a plurality of rotor tines attached to an edge of the proof mass. The rotor tines are interleaved with corresponding ones of the stator tines. The rotor tines include a surface parallel to a surface of the substrate. The rotor tine surface is at a second distance from the surface of the substrate. The first distance and second distance are unequal by a threshold amount. Motion of the rotor relative to the stator in an out-of-plane direction provides a linear change in a capacitive value measured across the rotor and the stator.

Abstract: A method for position and/or speed control of a linear drive utilizing a converter having a control unit and being coupled to a motor of the linear drive. The method includes determining, in a sensor-free manner, a motor position, generating a motor position signal, generating an acceleration signal utilizing an MEMS accelerometer provided in the control unit and arranged on a moving part of the linear drive, mathematically converting the motor position signal and the acceleration signal to a speed signal, and utilizing the speed signal to control the linear drive.

Abstract: A sensor system, in particular an acceleration sensor system, includes a sensor element and a cover element, at least one side of the sensor element having a covering provided by the cover element, and the cover element being at least partially designed as an infrared-protection element.

Abstract: Disclosed are moveable microstructures comprising in-plane capacitive microaccelerometers, with submicro-gravity resolution (<200 ng/?Hz) and very high sensitivity (>17 pF/g). The microstructures are fabricated in thick (>100 ?m) silicon-on-insulator (SOI) substrates or silicon substrates using a two-mask fully-dry release process that provides large seismic mass (>10 milli-g), reduced capacitive gaps, and reduced in-plane stiffness. Fabricated devices may be interfaced to a high resolution switched-capacitor CMOS IC that eliminates the need for area-consuming reference capacitors. The measured sensitivity is 83 mV/mg (17 pF/g) and the output noise floor is ?91 dBm/Hz at 10 Hz (corresponding to an acceleration resolution of 170 ng/?Hz). The IC consumes 6 mW power and measures 0.65 mm2 core area.

Abstract: Microelectromechanical system (MEMS) devices and methods with controlled die bonding areas. An example device includes a MEMS die having a glass layer and a protective package. The glass layer includes a side facing the protective package with at least one mesa protruding from a recessed portion of the glass layer. The at least one mesa is attached to the protective package. An example method includes creating at least one mesa on a glass layer of a MEMS die and attaching the at least one mesa to a protective package.

Abstract: In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the electrical charge accumulated on a drive capacitor and comparing the measured electrical charge to a nominal electrical charge to determine the displacement of the movable shuttle.

Abstract: A hang-timer device is disclosed that is capable of issuing recording instructions to a recording device, such as a digital camera. The hang-timer can measure a static acceleration profile of a wearer of the hang-timer, and based on this static acceleration profile it can issue recording instructions to a recording device. For example, if the static acceleration profile changes from about 1 g to about 0 g, the hang-timer can issue instructions for the recording device to record; additionally, if the profile changes from about 0 g to about 1 g, it can issue instructions to stop recording. Moreover, the hang-timer can issue instructions for the recording device to record some period of time before a hang-time event and some period of time after a hang-time event. Various other such variations on the general notion described above are also disclosed.

Abstract: A resonant accelerometer (24) includes a single anchor (28) fixed to a substrate (32). A proof mass (34) is positioned above a surface (30) of the substrate (32) and is positioned symmetrically about the anchor (28). The proof mass (34) has a central opening (38). Each of a number of suspension beams (42, 44, 46, 48) resides in the central opening (38) and has one end (50) affixed to the anchor (28) and another end (52) attached to an inner peripheral wall (40) of the proof mass (34). A resonant frequency of the beams (42, 44) in a direction (64) aligned with a common axis (58) of the beams (42, 44) changes according to acceleration in the direction (64). A resonant frequency of the beams (46, 48) in a direction (66) aligned with a common axis (62) of the beams (46, 48) changes according to acceleration in the direction (66).

Abstract: Electromechanical systems utilizing suspended conducting nanometer-scale beams are provided and may be used in applications, such as, motors, generators, pumps, fans, compressors, propulsion systems, transmitters, receivers, heat engines, heat pumps, magnetic field sensors, kinetic energy storage devices and accelerometers. Such nanometer-scale beams may be provided as, for example, single molecules, single crystal filaments, or nanotubes. When suspended by both ends, these nanometer-scale beams may be caused to rotate about their line of suspension, similar to the motion of a jumprope (or a rotating whip), via electromagnetic or electrostatic forces. This motion may be used, for example, to accelerate molecules of a working substance in a preferred direction, generate electricity from the motion of a working substance molecules, or generate electromagnetic signals. Means of transmitting and controlling currents through these beams are also described.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: A micoroelectromechanical system (MEMS) includes a housing defining an enclosed cavity, stator tines extending from the housing into the cavity, a MEMS device located within the cavity, the MEMS device including a proof mass and rotor tines extending from the proof mass, each rotor tine being positioned at a capacitive distance from a corresponding stator tine. The rotor tines include a first section extending a first distance from an insulating layer of the rotor tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section. The stator tines include a first section extending a first distance from an insulating layer of the stator tines and a second section extending a second distance from the insulating layer in an opposite direction from the first section, the stator tine first distance being greater than the rotor tine first distance.

Abstract: An accelerometer that lies generally in a plane, for detecting acceleration along an input axis. There is a substrate, a generally planar Servo Member (SM) flexibly coupled to the substrate such that it is capable of oscillatory motion about a servo axis that lies in the plane, a generally planar Torque Summing Member (TSM) coplanar with and flexibly coupled to the SM such that the TSM is capable of rotary motion relative to the SM about an output axis that is in the plane and orthogonal to the servo axis, wherein the TSM is mass-imbalanced relative to the output axis, and a generally planar rotor coplanar with and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is orthogonal to the plane of the members. There are drives for oscillating the rotor about the rotor axis and for oscillating the SM about the servo axis. Output sensors detect oscillation of the rotor about the rotor axis and of the SM about the servo axis.

Abstract: An accelerometer that lies generally in a plane, for detecting acceleration along an input axis. There is a substrate, a generally planar Servo Member (SM) flexibly coupled to the substrate such that it is capable of oscillatory motion about a servo axis that lies in the plane, a generally planar Torque Summing Member (TSM) coplanar with and flexibly coupled to the SM such that the TSM is capable of rotary motion relative to the SM about an output axis that is in the plane and orthogonal to the servo axis, wherein the TSM is mass-imbalanced relative to the output axis, and a generally planar rotor coplanar with and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is orthogonal to the plane of the members. There are drives for oscillating the rotor about the rotor axis and for oscillating the SM about the servo axis. Output sensors detect oscillation of the rotor about the rotor axis and of the SM about the servo axis.

Abstract: An inertial measurement unit is provided. The inertial measurement unit comprises two rotational axes, wherein a first of the two rotational axes is aligned nominally along a thrust axis and a second of the two rotational axes is aligned substantially perpendicular to a plane formed by a local gravity vector and a thrust vector, and one or more sensors which rotate about the second rotational axis.

Abstract: The invention relates to measuring devices used in measuring angular velocity, and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensor of angular velocity according to the present invention seismic masses (1), (2), (36), (37) are connected to support areas by means of springs or by means of springs and stiff auxiliary structures, which give the masses (1), (2), (36), (37) a degree of freedom in relation to an axis of rotation perpendicular to the plane of the wafer formed by the masses, and in relation to at least one axis of rotation parallel to the plane of the wafer. The structure of the sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in compact oscillating micro-mechanical sensors of angular velocity.

Abstract: The invention relates to an inertial sensor arrangement (2), in particular for installation in a motor vehicle, having a sensor module (8) which is fitted to a carrier (6) and comprises a micromechanically produced inertial sensor and an evaluation circuit. The invention provides for the sensor module (8) to be connected to the carrier (6) by means of an elastic coupling element (14).

Abstract: A resonant structure for a micromechanical device includes a beam and at least one mass attached to the beam. The resonant structure is arranged to have a predominantly rotational excitation mode and an excitation plane in which motion of the excited resonant structure predominantly takes place, the at least one mass including a geometry such that none of the principal axes of the rotational inertia tensor of the resonant structure are normal to the excitation plane.

Abstract: An acceleration sensor comprises a vibrating element 2 formed by arranging conductor films 26 and 29 on outer main surfaces of piezoelectric substrates 21 and 22 in a rectangular parallelepiped shape, and first supporting members 3a and 3b for holding a part of the vibrating element 2, the first supporting members 3a and 3b being composed of an elastic body, and a bending point of the vibrating element being positioned within a supporting region 91 held between the first supporting members 3a and 3b. This causes a region, which is distorted, in each of the piezoelectric substrates 21 and 22 to be enlarged. Therefore, the amount of charges to be generated is increased so that an output voltage is increased, which allows acceleration detection sensitivity to be further enhanced.

Abstract: A micromachine includes a movable section formed of a conductor and a support section formed of a conductor, wherein the movable section and the support section are separated from each other, an insulating layer is provided on the conductor, a conductive layer is provided on the insulating layer, and the conductive layer is formed so as to straddle the movable section and the support section.

Abstract: An automatic activation device for a parachute. The device comprises pressure input means for inputting a pressure value. The device is provided for operating in selectable working configurations according to which a reference pressure is determined either on the basis of the input pressure value or on the basis of a QNH value. Preferably the device can also operate in another selectable working configuration, where a preset time and a reference fall down speed are use.

Abstract: A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching arm assembly. The other arm of each latching arm assembly is carried by, and radially extends from the mass to oppose a respective first arm. A shock event will cause the mass to move in a certain direction to an extent where one or more of the arm assemblies will latch. The latching may be determined by an electrical circuit connected to contact pads on the central post and on the anchor members.

Abstract: Accelerometer micromachined in a plane plate comprising a base, and at least one measurement cell including a moveable seismic mass connected to the base and capable of moving translationally along the sensitive y axis of the accelerometer under the effect of an acceleration ? along this y axis, a resonator cell that comprises a resonator that can vibrate and be subjected to a tensile or compressive force depending on the direction of the acceleration ? and is placed symmetrically with respect to an axis of symmetry S of the structure, this axis S being parallel to the y axis and passing through the center of gravity of the seismic mass, the measurement cell furthermore including amplification means for amplifying the acceleration force, which means comprise at least one anchoring foot for anchoring to the base, two rigid terminations of the resonator cell and two pairs of micromachined arms symmetrical with respect to the axis S, each pair comprising a first arm connecting a termination to the seismic mass,

Abstract: An accelerometer includes a pair of conductive plates fixedly mounted on a substrate surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield mounted on the substrate surface. The structure includes two regions of differing total moments disposed above a respective conductive plate and separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate, each region having a substantially planar outer surface and an inner surface having a first corrugation formed thereon. For each of the two regions, an inner gap exists between the first corrugation and an opposing conductive plate, and an outer gap exists between the substantially planar outer surface and the opposing conductive plate, the outer gap being larger than the inner gap. The at least one protective shield is placed apart from either of the conductive plates.

Abstract: A system for characterizing rheological properties of granular material. A cylindrical measurement cup containing granular material is subject to a uniform vibration induced by a vibration exciter at a user-determined frequency. At the same time, a rotation or an oscillation of a rotating vane tool is performed within the powder and a response measured. Baffles are affixed to the inner wall of the measurement cup to prevent slippage of the granular material during measurement. An energy imparted to the system from the vibration exciter can be measured by an accelerometer coupled to the measurement cup. When sufficient vibrational energy is supplied to the system, a powder contained therein achieves a particle “temperature” sufficient such that the powder behaves as an ergodic system.