Abstract: A physical quantity sensor includes a substrate; a movable body that is displaceable about a support axis according to a physical quantity and includes an opening; a support that is provided on the substrate and is located in the opening, and the support includes a first fixed plate and a second fixed plate that are fixed to the substrate and provided so as to sandwich the support axis in plan view; a first beam and a second beam that each connect the first fixed plate with the second fixed plate and are spaced apart from each other; a third beam extending in a direction of the support axis and connecting the first beam with the movable body; and a fourth beam extending in a direction of the support axis and connecting the second beam with the movable body.

Abstract: A physical quantity sensor includes a substrate; a movable body that is displaceable about a support axis according to a physical quantity and includes an opening; a support that is provided on the substrate and is located in the opening, and the support includes a first fixed plate and a second fixed plate that are fixed to the substrate and provided so as to sandwich the support axis in plan view; a first beam and a second beam that each connect the first fixed plate with the second fixed plate and are spaced apart from each other; a third beam extending in a direction of the support axis and connecting the first beam with the movable body; and a fourth beam extending in a direction of the support axis and connecting the second beam with the movable body.

Abstract: A vibrator-mounted holder is attached to a casing of a vibration generator which moves a vibrator to generate a vibration when used. The vibrator-mounted holder includes a vibrator, a vibrator retention unit retaining the vibrator, a fixing unit fixed to a casing, and an arm. The vibrator includes a magnet having a plate shape parallel to a horizontal surface and a yoke arranged on the magnet. The arm connects the fixing unit to the vibrator retention unit, and supports the vibrator retention unit in a manner that the vibrator retention unit is displaceable with respect to the fixing unit. The yoke has a projecting portion which is projected downward and fixed to the vibrator retention unit. The arm is connected to a portion, at which the projecting portion is arranged, within the vibrator retention units.

Abstract: A sensor device includes a mounting board having a first rigid board on which an angular velocity sensor is mounted and a third rigid board on which an angular velocity sensor is mounted, and a pedestal for fixing the mounting board. Further, the pedestal includes a base section having a first fixation surface along an x axis and a y axis, and projecting sections disposed on the base section, and having a second fixation surface along the x axis and a z axis, and a third fixation surface along the y axis and the z axis, each of the rigid boards is supported by at least two of the first fixation surface, the second fixation surface, and the third fixation surface, and the angular velocity sensors have respective detection axes intersecting with each other.

Abstract: A sensor device includes a mounting board having a first rigid board on which an angular velocity sensor is mounted and a third rigid board on which an angular velocity sensor is mounted, and a pedestal for fixing the mounting board. Further, the pedestal includes a base section having a first fixation surface along an x axis and a y axis, and projecting sections disposed on the base section, and having a second fixation surface along the x axis and a z axis, and a third fixation surface along the y axis and the z axis, each of the rigid boards is supported by at least two of the first fixation surface, the second fixation surface, and the third fixation surface, and the angular velocity sensors have respective detection axes intersecting with each other.

Abstract: The invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of compensating the effect of the thermo-mechanical stress by incorporating and adjusting elastic elements that are used to couple a moveable proof mass to anchors. The proof mass responds to acceleration by displacing and tilting with respect to a moveable mass rotational axis. The thermo-mechanical stress is accumulated in the structure during the courses of manufacturing, packaging and assembly or over the structure's lifetime. The stress causes a displacement on the proof mass. A plurality of elastic elements is coupled to support the proof mass. Geometry and configuration of these elastic elements are adjusted to reduce the displacement caused by the thermo-mechanical stress.

Abstract: An inertial sensor includes a substrate, a mass element, and a detecting device for detecting a movement of the mass element relative to the substrate, the mass element being coupled to the substrate with the aid of a spring device, wherein the spring device has a T-shaped cross-sectional profile. A method for manufacturing an inertial sensor is also disclosed.

Abstract: An accelerometer for sensing acceleration along a sensing axis, includes a flexure member (having a pendulum member pivotably connected to a support member via a hinge arrangement), a housing, and at least one mounting structure configured for clamping the support member to the housing in load bearing contact while concurrently allowing for differential movement between the support member and the housing. Also disclosed are a corresponding housing member for use with a flexure member of an accelerometer, and a flexure member for use with a housing of an accelerometer.

Abstract: An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.

Abstract: A method for producing microelectromechanical structures in a substrate includes: arranging at least one metal-plated layer on a main surface of the substrate in a structure pattern; leaving substrate webs open beneath a structure pattern region by introducing first trenches into the substrate perpendicular to a surface normal of the main surface in a region surrounding the structure pattern; coating the walls of the first trenches perpendicular to the surface normal of the main surface with a passivation layer; and introducing cavity structures into the substrate at the base of the first trenches in a region beneath the structure pattern region.

Abstract: An omni-directional mechanical acceleration sensor is disclosed for use in applications including, but not limited to, vehicular seat belt systems, aircraft safety harness systems and initiation of airbag safety systems. The mechanical acceleration sensor incorporates at least two masses which, upon an acceleration event occurring, will cause a lever, to pivot thereby releasing the lever from engagement with an actuating means which would then initiate the applicable safety system.

Abstract: A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

Abstract: An acceleration sensor includes a weight; a base portion, a beam; and a piezo resistance element. The weight is arranged to displace upon receiving acceleration. The base portion is disposed around the weight apart from the weight. The beam has one end portion connected to the weight and the other end portion connected to the base portion. The beam also has a thick layer portion and a thin layer portion having a thickness smaller than that of the thick layer portion. The piezo resistance element is disposed over the thick layer portion and the thin layer portion.

Abstract: A seat belt retractor (10) has an actuator (14) for unlocking and locking the seat belt retractor (10) An inertial sensor (18) detects changes in vehicle acceleration and interacts with the actuator (14) to lock and unlock the seat belt retractor (10). The inertial sensor (18) has one inertial sensor mass, each mass (26, 27, 29, 30, 32, 33) has a wide portion (70) and a narrow portion (72). Preferably each inertial sensor mass (26, 27, 29, 30, 32, 33) has a high density body (31) embedded in the wide portion (70) of the elastomeric material (34). The inertial sensor mass (26, 27, 29, 36, 32, 33) has a greater density than the elastomeric material (34) Moreover, the elastomeric material (34) at least partially surrounds an exterior circumferential surface (38) of the inertial sensor mass (26, 27, 29, 30, 32, 33).

Abstract: A seismic sensor includes a frame, a pendulum pivotably mounted to the frame, a mechanism for sensing angular position of the pendulum, and a monolithic flat spring oriented between the frame and the pendulum for balancing the pendulum at an equilibrium position. The monolithic flat spring includes: (i) an operating region for providing a restoring force to the pendulum proportional to an angular displacement of the pendulum; and (ii) a suspension region for transmitting a force to a portion of the operating region and applying a negligible bending moment to the portion of the operating region.

Abstract: Microelectromechanical system (MEMS) integrated micro devices and acceleration sensor devices formed of first and second silicon wafers that are permanently joined together in a composite silicon wafer having an array of first complete stand-alone three-dimensional micromechanical device features formed in the first silicon wafer, an array of second complete stand-alone three-dimensional micromechanical device features formed in the second silicon wafer, and one or more composite three-dimensional micromechanical device features formed of first partial three-dimensional micromechanical device features formed in the first silicon wafer that are permanently joined to cooperating second partial three-dimensional micromechanical device features formed in the second silicon wafer.

Abstract: A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element.

Abstract: A suspension mass is mounted for swinging movement relative to, and extends between, a pair of fixed posts spaced apart from each other on an annular support mounted in a portable electronic device. The mass is connected to the posts through a pair of breakable links.

Abstract: A semiconductor torsional micro-electromechanical (MEM) switch is described having a conductive movable control electrode; an insulated semiconductor torsion beam attached to the movable control electrode, the insulated torsion beam and the movable control electrode being parallel to each other; and a movable contact attached to the insulated torsion beam, wherein the combination of the insulated torsion beam and the control electrode is perpendicular to the movable contact. The torsional MEM switch is characterized by having its control electrodes substantially perpendicular to the switching electrodes. The MEM switch may also include multiple controls to activate the device to form a single-pole, single-throw switch or a multiple-pole, multiple-throw switch. The method of fabricating the torsional MEM switch is fully compatible with the CMOS manufacturing process.

Abstract: A system that senses proximity includes a magnet producing a magnetic field and a sensor having a switch. The switch includes a cantilever supported by a supporting structure. The cantilever has a magnetic material and a longitudinal axis. The magnetic material makes the cantilever sensitive to the magnetic field, such that the cantilever is configured to move between first and second states. The switch also includes contacts supported by the support structure. The switch can be configured as a reed switch. When the magnet moves relative to the sensor, the cantilever interacts with a respective one of the contacts based on the position of the magnet during movement.

Abstract: A micromechanical component comprises a frame layer and an oscillating body which, with the aid of a suspension means, is supported in an opening penetrating the frame layer, in such a way that the oscillating body is adapted to be pivoted about an axis of oscillation vertically to the frame layer plane. At least one oscillating-body lateral surface, which extends substantially at right angles to the frame layer plane, is arranged in relation to at least one inner lateral surface of the opening in such a way that a capacitance formed therebetween is varied by an oscillation of the oscillating body in such a way that an oscillation of the oscillating body about the axis of oscillation can be generated by periodically varying a voltage applied between the frame layer and the oscillating body.

Abstract: The invention creates a micromechanical component, in particular an acceleration sensor, having a flexible spring device (F1, F2, F3) for the spring mounting of a mass (3) over a substrate (4), the flexible spring device (F1, F2, F3) being on the one hand connected with the mass (3) and being on the other hand anchored in the substrate (4).

Abstract: A vehicle rollover sensor 10 is provided, including a movable member free 12 free to rotate about a single axis 14. The movable member 12 includes an inertial mass 18. A magnet 22 is mounted to the movable member 12. The vehicle rollover sensor 10 further includes a magnetoresistive sensor 24 capable of sensing changes in the magnetic field due to changes in the orientation of the moveable member 12.

Abstract: A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes.

Abstract: A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes. In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration may be used. Each substrate includes three accelerometers that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes of the accelerometers of the first substrate are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes.

Abstract: A temperature compensated oscillating accelerometer with force multiplier includes a support substrate; a tuning fork suspended above the substrate; a primary anchor device connected between the tuning fork and substrate; a proof mass having an input axis; a force multiplier interconnected between the proof mass and the tuning fork; and a force multiplier anchor connected to the substrate and disposed at approximately the same area along the input axis as the primary anchor for offsetting the opposing effects of thermal expansion and stiffness in response to variations in temperature.

Abstract: A drive line vibration sensor includes a housing having a strain gage attached to the drive line component, and an actuator disposed within the housing. In operation, the actuator exerts a force upon the strain gage proportional to acceleration experienced by the actuator. As the actuator is preferably a sphere manufactured of a low friction material, the friction between the actuator, strain gage, and the housing are minimized to improve the vibration sensor sensitivity. In another embodiment, the actuator is a pendulum attached to the housing by a pivot point having low friction bearings to reduce the effect of radial acceleration upon the measurement of longitudinal acceleration. A recording device is preferably in communication with the controller to record the pressure applied to the strain gage to provide an inexpensive diagnostic and maintenance system which can record the overall operation of a drive line under actual operational conditions.

Abstract: A vehicle sensor for a retractor for a vehicle safety restraint has a sensor mass in the form of an upturned hollow cup, formed in a single piece by injection molding or die casting, resting on an upstanding post. It may be of metal or high-density plastic material. Preferably a profiled pad is fixed or mounded on the underside of the lever or on the upper surface of the cup. In this way the arrangement causes the lever to lift through substantially the same angle whichever the direction of acceleration activating the sensor. This sensor is an improvement over known sensors because it is simpler and cheaper to manufacture, easier to calibrate relatively accurately, and does not exhibit right/left dependency.

Abstract: A low thermal strain flexure support for a micromechanical device includes a substrate; a micromechanical device having a rotational axis and a longitudinal axis; an anchor structure disposed on the substrate proximate the longitudinal axis of the micromechanical device; first and second support members extending outwardly oppositely from the anchor structure; and first and second flexures extending inwardly in the direction of the axis of rotation of the micromechanical device from the first and second support members, respectively, to the micromechanical device for suspending the micromechanical device from the substrate.