Abstract: A state determination device that determines an operation state of an injection molding machine stores respective specification data of a reference injection molding machine and an injection molding machine that is different from the reference injection molding machine, and acquires data related to the injection molding machine. Then, the state determination device converts the acquired data into yardstick data by a conversion formula set for every type of data, by using the stored specification data of the reference injection molding machine and the stored specification data of the injection molding machine and performs machine learning using the yardstick data obtained through the conversion so as to generate a learning model.

Abstract: Apparatus and associated methods relate to sensing pressure and mitigating the error introduced by the thermoelectric effect. A pressure sensing device includes a pressure sensor, a temperature sensor, and an error correction device. The pressure sensor produces a voltage output proportional to a sensed pressure. The temperature sensor measures a first temperature at a first location and a second temperature at a second location to produce a temperature difference signal. The error correction device modifies the pressure output proportionally to the temperature difference signal to produce a temperature adjusted pressure output which compensates for error introduced from the temperature difference.

Abstract: A waste management system comprises a waste bin storing waste, wherein the waste bin comprises a smart waste bin sensor device installed on the waste bin of a waste bin owner. The smart waste bin sensor device comprises a set of sensors that sends and receives signals through a wireless network to a cloud server. The set of sensors implements, operates, detects, measures, and monitors environmental conditions inside or outside the waste bin. A waste and litter sensor detects, measures, and monitors a waste type, a waste volume, a litter type, a litter level, a biohazardous waste type, and a biohazardous waste level. A pathogen biosensor detects, measures, and monitors a pathogen type and a biosafety level. The pathogen biosensor comprises a sterilizer to kill pathogens. A waste bin mobile application and a waste collection facility application functionality enable a user to monitor waste in the waste bin.

Abstract: A method may include obtaining gas well data regarding various gas wells. The method may further include determining various well potential values for the gas wells based on the gas well data and a predetermined production period. The method may further include determining, based on the well potential values, a reservoir pressure criterion, and a water risk criterion, an available supply rate for a respective gas well among the gas wells. The method may further apply wells congestion cycling coupled to producing reservoirs to allow for uniform depletion across gas wells. The method may further include determining a production scenario based on the available supply rate and a supply target. The method may further include transmitting a command that implements a gas supply adjustment at a gas plant based on the production scenario.

Abstract: An example of a concentric probe includes an outer shroud having a bore that extends through the outer shroud, an inner shroud located within the outer shroud and having a bore that extends through the inner shroud, the inner shroud joined to the outer shroud via brazing, an annulus defined by a space between the inner shroud and a wall of the bore of the outer shroud, a plenum defined by a space between the inner shroud and the wall of the bore of the outer shroud, the plenum being in fluid communication with the annulus, and a transducer disposed within inner shroud.

Abstract: A gas meter is configured for diagnostics using differential pressure (DP) measurements. The configurations include executable instructions to actively manage the DP sensor. These instructions active the DP sensor only during stable flow and, where applicable, for a defined test time period. This feature manages power consumption to maintain battery life with acceptable standards or regulations.

Abstract: The present invention discloses a residual pressure measurement system for a MEMS pressure sensor with an F-P cavity and method thereof, the measurement system includes a low-coherence light source, a 3 dB coupler, a MEMS pressure sensor, an air pressure chamber, a thermostat, a pressure control system, a cavity length demodulator, an acquisition card and a computer. The measurement method comprises: performing cavity length measurement by using the reflecting light by the pressure control system at two temperatures, respectively, so as to calibrate the MEMS pressure sensor and establish a relationship between the absolute phase of a monochromatic frequency and the external pressure; performing linear fitting to the two measurement data to obtain all the external pressure when the cavity length of two measurement data are equal to each other, and substituting the theoretical equation for calculation to obtain the residual pressure under the flat condition of the diaphragm.

Abstract: A temperature-pressure integrated sensor, includes the following sequentially connected components: an electrical connecting member, a pressure sensor element, and a basal body assembly. A flexible modulation circuit board is provided between the pressure sensor element and the electrical connecting member. The pressure sensor element is directly connected to the flexible modulation circuit board. The flexible modulation circuit board is connected to a conductive extension portion. The conductive extension portion extends from a top end of the pressure sensor element to a bottom end surface of the basal body assembly. A bottom end of the conductive extension portion is provided with a temperature sensor element. The flexible modulation circuit board is coupled to the pressure sensor element and the temperature sensor element, such that the flexible modulation circuit processes and converts both a pressure signal and a temperature signal, and a temperature-pressure integrated sensor is acquired.

Abstract: An acceleration detecting device includes a power source, an acceleration sensor, an acquiring section, a rotation period calculating section, and an acquisition period setting section. The acceleration sensor is configured to detect a centrifugal acceleration generated by rotation of a wheel assembly. The acquiring section is configured to acquire a detection value from the acceleration sensor with a predetermined acquisition period, thereby acquiring the detection value from the acceleration sensor each time the wheel assembly rotates a constant angle. The rotation period calculating section is configured to calculate a rotation period of the wheel assembly. The acquisition period setting section sets the acquisition period. The acquisition period setting section is configured to increase a number of times the detection value is acquired from the acceleration sensor per rotation of the wheel assembly as the rotation period calculated by the rotation period calculating section becomes longer.

Abstract: Described herein is a technique capable of substantially cancelling out a machine difference of a pressure control valve. According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a sensor detecting a valve opening degree; a first control circuit outputting a valve opening degree control signal based on a valve opening degree value detected by the sensor and a deviation between a pressure of the process chamber and a target vacuum pressure value; a second control circuit outputting an electropneumatic control signal based on the valve opening degree control signal; and a span adjustment circuit adjusting the first or second control circuit so that an upper limit value of the valve opening degree is set to a predetermined full opening degree less than a physically defined full opening degree.

Abstract: A physical quantity measuring device includes a sensor module; a joint attached with the sensor module; a connector configured to be connected to a first or a second cylindrical case and the joint; a circuit substrate attached with an electronic circuit configured to receive a signal detected by the sensor module; and a holder holding the circuit substrate. The holder can be housed in the first cylindrical case in a first posture where a first end is engaged with a first connector and a second end is in contact with a first cover, or in a second cylindrical case in a second posture where the first end is engaged with a second cover and the second end is in contact with a second connector. The holder has an engaging projection engageable with a first engagement groove provided to the first connector and a second engagement groove provided to the second cover.

Abstract: The present invention discloses an integrated force sensor, characterized in comprising: a substrate, flexible through-cavities formed on the substrate, and a flexible skin covering the flexible through-cavities, wherein a lug boss is formed on the substrate; the flexible through-cavities are divided into two segments under the action of the lug boss, one end of the flexible through-cavities is connected with a pressure sensor used to measure the internal pressure of the flexible through-cavities, and the other end of the flexible through-cavities is communicated with outside air. In the invention, the force to be measured changes the gas pressure by changing the shape of an object and detects the magnitude of the force to be measured by detecting the gas pressure. Besides, the overloaded pressure can be released through the pressure release mechanism, without affecting the safety of the film of the pressure sensor or resulting in permanent damage to film.

Abstract: An electronic device is provided. The electronic device includes a housing, a touch display, a pressure sensing circuit, a fingerprint sensor, a processor, and a memory. The memory is configured to store fingerprint data associated with a plurality of reference fingerprints. The processor is configured to, when pressure is applied by the finger in the fingerprint sensing area, receive first data associated with the pressure from the pressure sensing circuit and receive second data associated with the fingerprint of the finger from the fingerprint sensor, identify a selected function corresponding to the second data based on comparing result of the second data and the reference fingerprint data, and execute the selected function.

Abstract: A sensor module has a first sensor element and a second sensor element. The first sensor element and the second sensor element are accommodated in a common housing of the sensor module. The sensor module includes a conductor structure that comprises an electrode structure and a separate connection structure. The connection structure is connected in an electrically conductive manner to the first sensor element and the electrode structure is allocated to the second sensor element.

Abstract: An array substrate, a touch display panel, and a touch display device are provided. The array substrate includes a plurality of pressure sensors. Each pressure sensor includes a first input terminal electrically connected to a first power input terminal, and a second input terminal electrically connected to a second power input terminal. The array substrate also includes a first connection line between the first input terminal of each pressure sensor and the first power input terminal. The first connection line has a first line resistance. In addition, the array substrate includes a second connection line between the second input terminal of each pressure sensor and the second power input terminal. The second connection line has a second line resistance. Further, the array substrate includes a ratio of a resistance of each pressure sensor to a sum of the corresponding first line resistance and second line resistance is the same.

Abstract: An electronic device may be provided with environmental sensors. Environmental sensors may include one or more environmental sensor components and one or more acoustic components. Acoustic components may include a speaker or a microphone. Environmental sensor components may include a temperature sensor, a pressure sensor, a humidity sensor, a gas sensor, or other sensors or combinations of sensors for sensing attributes of the environment surrounding the device. The environmental sensor may have an enclosure with an opening. The enclosure may be formed from a rigid support structure and a portion of a printed circuit. The opening may be formed in the rigid support structure or the printed circuit. The opening in the enclosure for the environmental sensor may be aligned with an opening in an outer structural member for the device. The outer structural member may be a housing structure or a cover layer for a device display.

Abstract: The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

Abstract: An electronic device may be provided with environmental sensors. Environmental sensors may include one or more environmental sensor components and one or more acoustic components. Acoustic components may include a speaker or a microphone. Environmental sensor components may include a temperature sensor, a pressure sensor, a humidity sensor, a gas sensor, or other sensors or combinations of sensors for sensing attributes of the environment surrounding the device. The environmental sensor may have an enclosure with an opening. The enclosure may be formed from a rigid support structure and a portion of a printed circuit. The opening may be formed in the rigid support structure or the printed circuit. The opening in the enclosure for the environmental sensor may be aligned with an opening in an outer structural member for the device. The outer structural member may be a housing structure or a cover layer for a device display.

Abstract: A test method and test apparatus is provided that employs a microfluidic device to characterize properties of a fluid. The microfluidic device has a first inlet port, an outlet port, and a microchannel as part of a fluid path between the first inlet port and the outlet port. While generating a flow of the fluid through the microchannel of the microfluidic device, fluid pressure at the first inlet port of the microfluidic device is measured and recorded in conjunction with varying the controlled temperature of the microchannel of the microfluidic device to characterize the properties of the fluid that flows through the microchannel of the microfluidic device. The properties of the fluid can relate to the clathrate hydrate formation condition of the fluid at the pressure of the flow through the microchannel of the microfluidic device.

Abstract: An electronic device may be provided with environmental sensors. Environmental sensors may include one or more environmental sensor components and one or more acoustic components. Acoustic components may include a speaker or a microphone. Environmental sensor components may include a temperature sensor, a pressure sensor, a humidity sensor, a gas sensor, or other sensors or combinations of sensors for sensing attributes of the environment surrounding the device. The environmental sensor may have an enclosure with an opening. The enclosure may be formed from a rigid support structure and a portion of a printed circuit. The opening may be formed in the rigid support structure or the printed circuit. The opening in the enclosure for the environmental sensor may be aligned with an opening in an outer structural member for the device. The outer structural member may be a housing structure or a cover layer for a device display.

Abstract: A sensor assembly is configured to be securely connected to a portion of an engine, for example, of a vehicle. The sensor assembly may include a main body, a connector shroud extending from the main body, a port extending from the main body, a deflectable locking member extending from the main body, and a radial tab extending from the main body. The connector shroud is configured to receive an electrical connector that electrically connects the sensor assembly to an engine control unit. The port is configured to be inserted into an opening formed in the portion of the engine. The deflectable locking member and the radial tab cooperate to securely connect the sensor assembly to the portion of the engine, such as through rotation of the sensor assembly in relation to the engine.

Abstract: A tunable pressure transducer assembly that comprises a sensing element disposed within a housing, wherein the sensing element is adapted to output a signal substantially indicative of an applied pressure, and a filter assembly also disposed within the housing. In one example embodiment, a method includes receiving, at a filter assembly having a tube, a cap and a cavity defined by a housing, a pressure, wherein the cap is positioned to set a predetermined volume of the cavity and the tube is associated with an application of the pressure to the cavity, wherein the pressure includes a static pressure component and a dynamic pressure component; filtering, by the tube and the cavity, at least a portion of the dynamic pressure component of the pressure to obtain a filtered pressure; outputting, from the filter assembly, the filtered pressure; and wherein the filtered pressure is used to determine the static pressure component of the pressure.

Abstract: Composition(s) and atomic layer deposition (ALD) process(es) for the formation of a silicon oxide containing film at one or more deposition temperature of about 500° C. is disclosed. In one aspect, the composition and process use one or more silicon precursors selected from compounds having the following formulae I, II, described and combinations thereof R1R2mSi(NR3R4)nXp; and??I. R1R2mSi(OR3)n(OR4)qXp.

Abstract: An air pump includes an air pump body for pumping air, and a high pressure gauge and a low pressure gauge mounted in the air pump body for measuring and indicating the air pumped by the air pump body.

Abstract: The invention concerns a pressure sensor including means of sensing pressure and converting pressure into an electrical signal able to be transmitted by an electrical circuit to an control interface circuit of an indicator device, wherein said sensing and conversion means include: a closed volume and a liquid contained in the closed volume, said liquid being electrically conductive and capable of moving inside said closed volume, at least one sensing member arranged inside the closed volume in a given position in said volume, said sensing member including at least one pair of electrodes and cooperating with the liquid when said liquid moves in the closed volume, so that said electrical circuit is closed when the liquid passes said sensing member. The pressure sensor is intended to be integrated in a pressure measuring device, particularly a timepiece.

Abstract: A method for operating a dialysis cassette including a flexible membrane that covers a pump chamber includes allowing a source of fluid to fluidly communicate with the pump chamber of the dialysis cassette, filling the pump chamber with the fluid from the source, mechanically extending the flexible membrane into the pump chamber with a piston head to expel the fluid from the pump chamber through a flow path, and directly sensing a pressure of the fluid flowing through the flow path at a location of the dialysis cassette adjacent to the pump chamber and using the sensed pressure to perform a test prior to delivering fluid to a patient.

Abstract: A tube-equipped, flanged, pressure transfer structure comprises a flange for connecting to a counterflange; a tube, which is secured to the flange; a hydraulic path, which extends from a first opening in a front end surface of the tube facing away from the flange to a second opening in the rear end surface of the flange facing away from the tube; and an isolating diaphragm, which covers the first opening and is connected pressure-tightly with the front end surface of the tube along a peripheral edge, wherein the hydraulic path is filled or fillable with a pressure transfer liquid, in order to transfer a pressure presiding at the isolating diaphragm to the second opening, wherein the tube has a front section having the end surface and a first diameter and an intermediate section with a second diameter, which is less than the first diameter, and wherein the front section is shorter than the intermediate section.

Abstract: A conduit pressure sensor system and a process for non-intrusively determining the pressure within a conduit. In one example, the sensor system has a base section having an external surface and an internal region in fluid connection with the conduit. A strain sensor and a temperature sensor are positioned adjacent to the external surface of the base section.

Abstract: A system for controlling the position of a diaphragm in a diaphragm-containing pressure pod, is provided. The system can include a peristaltic pump, a pressure pod having a flow-through fluid side and a gas side that are separated by a diaphragm, and a pressure sensor operatively connected to the gas side. The pressure sensor is configured to sense pulses of pressure resulting from movement of the diaphragm and caused by the action of the peristaltic pump. A gas source and a valve can be in fluid communication with the gas side of the pressure pod and can be configured to provide gas to, or vent gas from, the gas side. A controller receives pressure signals from the pressure sensor and controls the valve in response, and in so doing, controls the position of the diaphragm. Methods for positioning the diaphragm are also included.

Abstract: A sensor including a buffer material layer configured to at least partially deflect when a force or pressure is imparted on the buffer material layer; and an electroactive polymer (EAP) cartridge in operative contact with the buffer material layer, wherein the EAP cartridge is configured to generate an output signal that corresponds to an amount of strain imparted on the EAP cartridge. The EAP cartridge may be used in a variety of sensing applications including as a pressure sensor integrated into a fluid connector. One aspect of the invention provides for selection of a buffer material layer based upon a desired pressure range.

Abstract: A sensor assembly includes a rectangular-shaped pressure sensor element and an electronic circuitry coupled to receive a signal from the pressure sensor element. An open-ended fluid-tight passageway of the sensor assembly conveys fluid from a portal opening of the sensor assembly to a surface of the rectangular-shaped pressure sensor element. The sensor assembly further includes a closed-ended fluid-tight passageway, at least a portion of which is fabricated from metal. The closed-ended fluid tight passageway extends from at least from the portal opening of the sensor assembly to the electronic circuitry on at least a portion of a path adjacent to the rectangular-shaped ceramic pressure sensor element. The sensor assembly includes a temperature sensor element disposed in an end of the closed-ended fluid-tight passageway. Conductive links disposed in the closed-ended fluid tight passageway electrically couple the temperature sensor element to the electronic circuitry.

Abstract: A pressure sensor is provided which is suitable as an airbag sensor of a vehicle. The pressure sensor includes a pressure chamber having a small opening and a large opening, a pressure sensor element having a pressure receiving surface, and a diaphragm. The diaphragm is designed to seal the large opening. The pressure sensor element is designed to seal the small opening at least using the pressure receiving surface.

Abstract: Flexible force/pressure sensors for producing electrical output signals proportional to forces or pressures exerted on the sensor include a thin, elastically deformable foam pad laminated between a pair of electrically conducive fabric sheets. A piezocapacitive embodiment of the sensor utilizes an elastically deformable perforated open-cell polyurethane foam pad preferably saturated with glycerin to increase the capacitance of the sensor. The piezocapacitive sensor section is preferably stacked onto a piezoresistive section having a second open-cell foam pad containing piezoresistive carbon particles to form a hybrid piezocapacitive/piezoresistive sensor. A third, “leaky dielectric” embodiment of a sensor includes a single open-cell foam pad which contains both a dielectric liquid and conductive particles. A low frequency such as d.c.

Abstract: A device for measuring a pressure and a temperature of a fluid medium flowing in a duct, the device including a pressure sensor element; a temperature sensor having a temperature sensor element; a housing that has a connecting piece, the connecting piece being insertable into the duct in an insertion direction, the connecting piece having an interior chamber, the interior chamber having an opening through which the interior chamber may be exposed to the fluid medium; and a carrier substrate, the pressure sensor element being connected electrically and mechanically to the carrier substrate.

Abstract: A sensor module comprises a housing in which a first displacement sensor and a first pressure sensor are arranged. The sensor module can have a second displacement sensor and a second pressure sensor. The module is being provided to monitor a coupling of a motor vehicle, for example a dual coupling of a lorry.

Abstract: An internal pressure inspection apparatus for a sealed container having a can lid that is attached to any of an upper end and a lower end of a can trunk, and that is deformed by an internal pressure of the container. A laser sensor adapted to measure a distance from the can lid by irradiating the can lid is situated parallel to the can lid while being allowed to move relatively with the can lid. The inspection apparatus integrates relative displacement values between a reference point closer to a center of the can lid than a seamed portion and other points closer to a center of the can lid than the reference point, and acceptability of the internal pressure is judged based on the value of integration.

Abstract: A pressure sensor is disclosed for measuring the pressure of a fluid, the pressure sensor comprising an atmospheric pressure sensing element, a fluid pressure sensing element, a processing unit, and a switch. The atmospheric pressure sensing element measures atmospheric pressure and the fluid pressure sensing element measures relative pressure of the fluid with respect to the atmospheric pressure. The switch is electrically coupled to the processing unit and comprises a first state and a second state, wherein: when the switch is set to the first state, the processing unit determines the absolute pressure of the fluid, and the processing unit generates an output corresponding to the absolute pressure of the fluid; and when the switch is set to the second state, the processing unit determines the relative pressure of the fluid, and the processing unit generates an output corresponding to the relative of the fluid.

Abstract: A method for detecting a property of an extracorporeal line set in an apparatus for extracorporeal blood treatment. The extracorporeal line set is arranged to be connected to a patient. The method includes: measuring a first pressure in a flow path, measuring a second pressure in the flow path, comparing the first and second pressures, and determining a detected extracorporeal line set property based on the pressure comparison.

Abstract: A method includes monitoring a pressure of a gasification system after gasifier shutdown via a pressure sensor, wherein the gasification system includes a gas treatment system and a gasifier configured to output syngas to the gas treatment system during gasification. In addition, the method includes depressurizing the gasification system after gasifier shutdown by opening a flare valve to release gas from the gasifier and the gas treatment system to an atmosphere. The method also includes pressurizing the gasification system after gasifier shutdown, when the monitored pressure reaches a lower pressure threshold, by establishing multiple purge flows of inert gas into the gasification system to remove residual gas from the gasification system. The multiple purge flows are established at different times and at different locations within the gasification system relative to each other.

Abstract: The present invention provides an apparatus for mapping pipeline for use in a fluid pipeline, comprising: a pressure gauge that measures the pressure of the fluid in the fluid pipeline; a gyroscope that measures the angular velocity of the apparatus for mapping pipeline in the fluid pipeline; a processing module that collects and converts the pressure of the fluid and the angular velocity to a pressure data and an angular velocity data, respectively; and a data output module that outputs the pressure data and the angular velocity data. The present invention also provides a method for mapping pipeline and a system using the same that obtain the spatial layout of the fluid pipeline by analyzing the pressure data and the angular velocity data.

Abstract: In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side wherein the medium to be measured is introduced, and the other face is a capacitor chamber side wherein a capacitor portion is formed, where, in the sensor diaphragm, the rigidity is lower towards a center portion from a peripheral edge portion that is a boundary of diaphragm securing portions on the capacitor chamber side.

Abstract: An enclosed, flat covered leadless pressure sensor assembly suitable for extreme environment operation including dynamic, ultra-high temperature heating, light and heat flash, and high-speed, flow-related environments. The pressure sensor assembly comprises a substrate comprising a micromachined sensing diaphragm defined on a first side. A cover is attached to the first side of the substrate such that it covers at least the sensing diaphragm. The top surface of the cover is substantially flat, thereby promoting uniformity in the distribution of stress and thermal effects across a top surface of the cover.

Abstract: The invention relates to a pressure sensor (6). This pressure sensor (6) comprises a flexible membrane (11) cooperating with a transmission device (10) that enables a value representing the pressure to be supplied on the basis of the deformation of the membrane (11). The membrane (11) is made from an at least partially amorphous material in order to optimise the dimensions of the sensor (6).

Abstract: In one embodiment, a pressure sensor assembly includes an accelerometer configured to produce a first current upon movement of the accelerometer, a capacitor configured to receive the first current thereby charging the capacitor, a gate element operably connected to the capacitor and configured to discharge a second current from the capacitor upon the capacitor attaining a threshold voltage, a pressure sensor configured to receive the discharged current to produce a first signal corresponding to at least one pressure reading of the pressure sensor, and a transmitter operably connected to the pressure sensor and configured to transmit a second signal based upon the first signal to an external device configured to store data corresponding to the second signal.

Abstract: A system for providing a solvent or reagent to a liquid chromatography system comprises: a valve comprising a common port and a plurality of other ports, configurable such that the common port may be fluidically coupled to any one of the other ports; a pump fluidically coupled to the common port of the valve; a plug configured to block flow through a first one of said other ports of the valve; a container containing the solvent or reagent, said container fluidically coupled to a second one of said other ports of the valve; a fluid tubing line having a known resistance to fluid flow fluidically coupled to a third one of said other ports of the valve; and a pressure gauge configured to measure fluid pressure within the pump, wherein the solvent or reagent is provided to the liquid chromatography system by a fourth one of the other ports.

Abstract: An object of the present invention is to enhance the reliability of an MEMS sensor formed on a semiconductor integrated circuit device. To achieve this object, a semiconductor device of the present invention comprises: a semiconductor integrated circuit device; a lower passivation film of silicon nitride, etc. . . . formed on the semiconductor integrated circuit device and having high moisture resistance and high chemical resistance; a MEMS portion formed on the lower passivation film and including a cavity 12; and an upper passivation film 11 formed on the top surface of the MEMS portion such that the MEMS portion is hermetically sealed by the upper and lower passivation films.

Abstract: A method for detecting occupant position change on a support surface includes establishing a rate of change of pressure in a head end test zone and in a foot end test zone, comparing the head end rate to at least one head end rate limit, comparing the foot end rate to at least one foot end rate limit, and inferring, in response to the comparing steps, whether or not occupant migration has occurred. An associated occupant support includes a frame and a mattress. The mattress includes head and foot zones each having at least one pressurizable bladder. The support also includes a controller adapted to compare a head end rate of pressure change to a head end rate limit, to compare a foot end rate of pressure change to a foot end rate limit, and to infer, in response to the comparing steps, whether or not occupant migration has occurred.

Abstract: A pressure sensor for measuring gage pressure in relatively high temperature environments is provided. The sensor includes a housing that is configured to couple to a source of pressurized fluid and has an inner surface that defines a inner volume. A pressure sensitive device is coupled to the sensor housing and is configured define a reference chamber in at least a portion of the inner volume. The reference chamber is fluidly isolated from the source of pressurized fluid. An atmospheric reference port is formed in the sensor housing and is in fluid communication with the reference chamber for maintaining the reference chamber at ambient atmospheric pressure. A porous metallic plug is disposed within the atmospheric reference pressure port.

Abstract: A device for determining a physical value of a liquid flowing in a pipe, without contact with said liquid, said device comprising: a sensor (3) for said physical value; a connector (2) to insert into said pipe and comprising: an internal passage (13) extending between two apertures (11, 12), a flexible membrane (6) for a pressure sensor, forming a wall of said internal passage (13); and means (27, 62) for fastening said sensor (3) onto said connector (2); characterized in that said sensor is a temperature sensor (3) fastened to said connector (2) with the sensitive part of said sensor (3) turned towards said membrane (6).

Abstract: A MEMS sensor capable of sensing acceleration and pressure includes a frame, a proof mass and flexible bridges connected between the frame and the proof mass in such a way that the proof mass is moveably suspended inside the frame. The proof mass is provided with a pressure sensing diaphragm and a sealed chamber corresponding to the diaphragm such that the proof mass is not only served as a moveable sensing element for acceleration measurement but also a pressure sensing element.