Capacitive Patents (Class 73/724)
  • Patent number: 10401248
    Abstract: A pressure sensor chip according to the present invention includes a non-bonding region that is provided in a stopper member and connected to a periphery of a pressure introduction hole. A plurality of protrusions are discretely formed on at least one of a first surface and a second surface that face each other in the non-bonding region. Passages between the protrusions serve as channels between the periphery of the pressure introduction hole and a peripheral edge of the non-bonding region. Accordingly, stress concentration does not occur at a diaphragm edge and the expected withstand pressure can be obtained.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: September 3, 2019
    Assignee: AZBIL CORPORATION
    Inventors: Tomohisa Tokuda, Yoshiyuki Ishikura
  • Patent number: 10393523
    Abstract: A physical quantity sensor includes a detection unit outputting a detection signal corresponding to a vibration of a vibrating element in an angular velocity sensor, and a self-diagnostic unit self-diagnosing a detection environment of an acceleration sensor and the angular velocity sensor on a basis of the detection signal outputted by the detection unit.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: August 27, 2019
    Assignee: DENSO CORPORATION
    Inventors: Kiyomasa Sugimoto, Naoki Yoshida, Minekazu Sakai, Nobuaki Kuzuya
  • Patent number: 10369567
    Abstract: A microfluidic chip comprising a microchannel fillable with a liquid, the microchannel comprises a pair of electrodes, and a liquid flow path defined between the electrodes, wherein each of the electrodes extends along the flow path and parallel to a direction of a liquid filling the microchannel, in operation, and an electrical circuitry connected to each of the electrodes and configured to continuously measure, via the electrodes, a capacitance of the electrodes being wet by a liquid continuously filling the flow path, as a function of time, in operation.
    Type: Grant
    Filed: November 4, 2015
    Date of Patent: August 6, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Emmanuel Delamarche, Yuksel Temiz
  • Patent number: 10352803
    Abstract: A pressure sensor chip according to the present invention includes an annular diaphragm that surrounds a periphery of a low-differential-pressure diaphragm (1) as a high-differential-pressure diaphragm (2). A measurement pressure (Pa) for one surface of the low-differential-pressure diaphragm (1) is transmitted to one surface of the high-differential-pressure diaphragm (2) along a branched path, and a measurement pressure (Pb) for the other surface of the low-differential-pressure diaphragm (1) is transmitted to the other surface of the high-differential-pressure diaphragm (2) along a branched path. Thus, multiple differential-pressure measurement ranges can be provided.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: July 16, 2019
    Assignee: AZBIL CORPORATION
    Inventor: Tomohisa Tokuda
  • Patent number: 10352802
    Abstract: A pressure sensor chip according to the present invention includes two static-pressure diaphragms (2, 3) formed by dividing an annular diaphragm arranged so as to surround a differential-pressure diaphragm (1). A reference pressure is applied to one surface of one static-pressure diaphragm (2), and a measurement pressure (Pa) for one surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (2) along a branched path. A reference pressure is applied to one surface of the other static-pressure diaphragm (3), and a measurement pressure (Pb) for the other surface of the differential-pressure diaphragm (1) is transmitted to the other surface of the static-pressure diaphragm (3) along a branched path. Accordingly, multiple differential-pressure measurement ranges can be provided.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: July 16, 2019
    Assignee: AZBIL CORPORATION
    Inventor: Tomohisa Tokuda
  • Patent number: 10309810
    Abstract: In order to solve a problem occurring in a capacitance type pressure sensor adapted to measure absolute pressure, and thereby reduce error, a pressure type flowmeter includes a fluid resistance part in a flow path through which fluid flows and measures a flow rate by detecting the upstream and downstream pressures of the fluid resistance part. Respective pressure sensors for detecting the upstream and downstream pressures are configured to be gauge pressure sensors. Each of the gauge pressure sensors is a capacitance type pressure sensor adapted to measure gauge pressure by detecting a change in the capacitance between a diaphragm displaceable by pressure and a fixed electrode and has a main body part that supports the fixed electrode and the diaphragm and forms a space between them. Further, the internal space is adapted to communicatively connect to the outside through a communicative connection part.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: June 4, 2019
    Assignee: HORIBA STEC, Co., Ltd.
    Inventors: Takehisa Hataita, Hideaki Miyamoto
  • Patent number: 10254186
    Abstract: A bottom surface of a sensor chip (or a lower surface of a first retaining member) that introduces the pressure of a measured fluid is joined to a bottom surface of a sensor chamber (or to an inner wall surface of a base body) to allow an enclosing chamber (formed by a pressure receiving chamber and a pressure guiding passage) between a pressure receiving diaphragm and the bottom surface of the sensor chip to communicate with a pressure guiding hole in the first retaining member. The sensor chamber is made open to the atmosphere. Thus, a wire bonding portion of a sensor diaphragm from which wires extend is positioned outside the enclosing chamber, and electrode pins and an enclosed liquid in the enclosing chamber are separated from each other.
    Type: Grant
    Filed: December 1, 2016
    Date of Patent: April 9, 2019
    Assignee: AZBIL CORPORATION
    Inventors: Ayumi Tsushima, Yoshiyuki Ishikura, Hirofumi Tojo, Tatsuo Tanaka, Rina Ogasawara
  • Patent number: 10257615
    Abstract: Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: April 9, 2019
    Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
    Inventor: Loic Joet
  • Patent number: 10180370
    Abstract: A pressure sensor has a substrate and a transistor structure. The substrate has a cavity formed in the substrate. The transistor structure is arranged above the cavity. The transistor structure has a flexible heterostructure and at least one source contact, drain contact, and gate contact each connected to the heterostructure in an electrically conductive manner. The heterostructure is configured to assume a position corresponding to a pressure ratio between a first pressure in the cavity and a second pressure on a side of the heterostructure opposite the cavity. The transistor structure is configured to provide an electrical signal corresponding to the position.
    Type: Grant
    Filed: February 2, 2015
    Date of Patent: January 15, 2019
    Assignee: Robert Bosch GmbH
    Inventors: Walter Daves, Michael Badeja
  • Patent number: 9989431
    Abstract: A pressure sensor comprises a deformable measuring diaphragm, and a mating body connected in a pressure-tight manner and forms a measuring chamber in which a reference pressure is present. A pressure can be applied to an outside of the measuring diaphragm. The pressure sensor has a capacitive transducer having at least one mating body electrode and at least one diaphragm electrode. Above a pressure limit value for the pressure, at least one central surface section of the measuring diaphragm rests against the mating body with a contact surface area, the size of which is dependent on the pressure. The pressure sensor also has a resistive transducer for converting a pressure-dependent deformation of the measuring diaphragm, when pressed in a range of values above the pressure limit value, into an electrical signal using an electrical resistance which is dependent on the contact surface area of the measuring diaphragm on the mating body.
    Type: Grant
    Filed: November 14, 2014
    Date of Patent: June 5, 2018
    Assignee: ENDRESS + HAUSER GMBH + CO. KG
    Inventors: Andreas Rossberg, Olaf Textor, Elmar Wosnitza
  • Patent number: 9945746
    Abstract: According to an embodiment, a method of sensing motion includes receiving a first signal from a first pressure sensor and a second signal from a second pressure sensor, comparing the first signal and the second signal, and characterizing a motion based on the comparing.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: April 17, 2018
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Andreas Wiesbauer, Christian Mandl, Andreas Kopetz, Roland Helm
  • Patent number: 9897503
    Abstract: Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: February 20, 2018
    Assignee: HORIBA STEC, CO., LTD.
    Inventors: Sotaro Kishida, Takehisa Hataita, Akira Kuwahara
  • Patent number: 9835511
    Abstract: A method for forming a pressure sensor includes forming a base of a sapphire material, the base including a cavity formed therein; forming a sapphire membrane on top of the base and over the cavity; forming a lower electrode on top of the membrane; forming a piezoelectric material layer on an upper surface of the lower electrode, the piezoelectric material layer being formed of aluminum nitride (AIN); and forming at least one upper electrode on an upper surface of the piezoelectric material layer.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: December 5, 2017
    Assignee: ROSEMOUNT AEROSPACE INC.
    Inventors: Weibin Zhang, Anita Fink, Kimiko Childress, Odd Harald Steen Eriksen
  • Patent number: 9766146
    Abstract: Systems and methods for an internally switched multiple range transducer are provided. In one embodiment, a method comprises receiving, at a first sensor, a pressure, wherein the first sensor is associated with a first pressure range; measuring, at the first sensor, the pressure to generate a first pressure signal; in response to determining that the first pressure signal is not associated with the first pressure range, activating a second sensor, wherein the second sensor is associated with a second pressure range that is different from the first pressure range; and measuring, at the second sensor, the pressure to generate a second pressure signal.
    Type: Grant
    Filed: February 16, 2016
    Date of Patent: September 19, 2017
    Assignee: Kulite Semiconductor Products, Inc.
    Inventors: Anthony D. Kurtz, Louis DeRosa
  • Patent number: 9683908
    Abstract: A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude.
    Type: Grant
    Filed: February 28, 2015
    Date of Patent: June 20, 2017
    Assignee: FERRAN TECHNOLOGY, INC.
    Inventors: David J. Ferran, Robert J. Ferran
  • Patent number: 9658123
    Abstract: The present invention relates to an all-optical pressure sensor comprising a waveguide accommodating a distributed Bragg reflector. Pressure sensing can then be provided by utilizing effective index modulation of the waveguide and detection of a wavelength shift of light reflected from the Bragg reflector. Sound sensing may also be provided thereby having an all-optical microphone. One embodiment of the invention relates to an optical pressure sensor comprising at least one outer membrane and a waveguide, the waveguide comprising at least one core for confining and guiding light, at least one distributed Bragg reflector located in said at least one core, and at least one inner deflecting element forming at least a part of the core, wherein the pressure sensor is configured such that the geometry and/or dimension of the at least one core is changed when the at least one outer membrane is submitted to pressure.
    Type: Grant
    Filed: June 4, 2014
    Date of Patent: May 23, 2017
    Assignee: Technical University of Denmark
    Inventors: Kasper Reck, Christian Østergaard, Ole Hansen, Erik Vilain Thomsen
  • Patent number: 9588614
    Abstract: A touch-sensitive position sensor is disclosed. The sensor comprises an array of first electrodes and an array of second electrodes arranged in a pattern to provide a sensing surface, wherein at least some of the first electrodes and the second electrodes are arranged to follow paths which are non-linear within the sensing surface such that there are ends of the first electrodes and ends of the second electrodes which meet a common edge of the sensing surface. A controller is coupled to respective ones of the first electrodes and the second electrodes and arranged to determine a reported position for an object adjacent the sensing surface by measuring changes in an electrical parameter e.g. capacitance or resistance, associated with the first electrodes and the second electrodes which is caused by the presence of the object.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: March 7, 2017
    Assignee: TouchNext Limited
    Inventors: Stephen William Roberts, Peter Timothy Sleeman, Christopher Kyle Ard
  • Patent number: 9459169
    Abstract: A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: October 4, 2016
    Assignee: ENDRESS + HAUSER GMBH + CO. KG
    Inventors: Peter Selders, Andreas Rossberg, Elke Schmidt, Andrea Berlinger
  • Patent number: 9436224
    Abstract: The present invention relates to a display device including a panel which includes a plurality of electrodes which are arranged in parallel to each other, and a bending sensing unit that senses a bending of the panel by using a change in a capacitance between at least two electrodes among the plurality of electrodes.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: September 6, 2016
    Assignee: LG Display Co., Ltd.
    Inventor: IlDoo Jeong
  • Patent number: 9360312
    Abstract: A MEMS element includes a substrate which includes a flexible portion, a fixation electrode which is provided on a principal surface of the substrate, and a movable electrode which includes a movable portion which is separated from the fixation electrode, overlaps with at least a portion of the fixation electrode in a plan view of the principal surface, and is driven in a direction intersecting the principal surface, and a fixation end connected to the principal surface. The fixation electrode and the movable electrode is disposed to correspond to the flexible portion.
    Type: Grant
    Filed: December 5, 2013
    Date of Patent: June 7, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Yusuke Matsuzawa, Yuji Chino
  • Patent number: 9360387
    Abstract: A pressure sensor chip is provided with first and second retaining members. The peripheral edge portions of the first and second retaining members are bonded to face one face and another face of a diaphragm, respectively. An inner edge of the peripheral edge portion of the first retaining member is positioned further to the outside than an inner edge of the peripheral edge portion of the second retaining member.
    Type: Grant
    Filed: October 14, 2013
    Date of Patent: June 7, 2016
    Assignee: AZBIL CORPORATION
    Inventors: Tomohisa Tokuda, Yuuki Seto
  • Patent number: 9326728
    Abstract: Electronic devices, apparatus, systems, and methods of operating and constructing the devices, apparatus, and/or systems include a wireless sensor configured to measure strain of hardware implanted in a subject. In various embodiments, temporal measurement of the hardware strain includes monitoring changes of the resonant frequency of the sensor. The sensor can be realized as an inductively powered device that operates as an all-on-chip resonator, where the components of the sensor are biocompatible. Additional apparatus, systems, and methods are disclosed.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: May 3, 2016
    Assignee: INNOVATIVE IN VIVO SENSING, LLC
    Inventors: Hilmi Volkan Demir, Christian Matthew Puttlitz, Rohat Melik
  • Patent number: 9310269
    Abstract: In an embodiment, an apparatus may include a sense element that may measure a property such as, for example, pressure. The sense element may produce an output based on the measured property. Circuitry associated with the sense element may store a voltage that represents the output produced by the sense element. The circuitry may include, for example, a capacitor which may store the voltage. The stored voltage may include one or more parasitic components such as, for example, an offset voltage and/or voltage associated with current leakage. The circuitry may adjust the stored voltage to compensate for the parasitic components. The adjustment may occur over a series of phases of operation of the circuitry.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: April 12, 2016
    Assignee: Sensata Technologies, Inc.
    Inventors: Eric Visser, Keith Kawate
  • Patent number: 9274016
    Abstract: A pressure sensor chip includes a sensor diaphragm, and first and second retaining members. The first and second retaining members face and are bonded to peripheral edge portions of a first face and another face of the sensor diaphragm, and have pressure guiding holes that guide measurement pressures to the sensor diaphragm. The first retaining member has, in an interior thereof, a non-bonded region that is continuous with a peripheral portion of the pressure guiding hole. The non-bonded region in the interior of the first retaining member is provided at a portion of a plane that is parallel to a pressure bearing surface of the sensor diaphragm. The second retaining member is provided with a recessed portion that prevents excessive dislocation of the sensor diaphragm when an excessively large pressure is applied to the sensor diaphragm.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: March 1, 2016
    Assignee: AZBIL CORPORATION
    Inventors: Tomohisa Tokuda, Yuuki Seto
  • Patent number: 9187315
    Abstract: A method for manufacturing a semiconductor device includes: simultaneously forming first and second well regions on a semiconductor substrate, wherein the second well region becomes a fixed electrode; simultaneously forming a first gate insulating film on the first well region and a fixed electrode protective film on the second well region; simultaneously forming a floating gate electrode on the first gate insulating film and a sacrificial film on the fixed electrode protective film; simultaneously forming a second gate insulating film on the floating gate electrode and a movable electrode protective film on the sacrificial film; simultaneously forming a gate electrode on the second gate insulating film and a movable electrode on the movable electrode protective film; removing the sacrificial film to form a void by; and vacuum-sealing the void to form a vacuum chamber.
    Type: Grant
    Filed: August 1, 2014
    Date of Patent: November 17, 2015
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Kimitoshi Sato
  • Patent number: 9146170
    Abstract: An overmolded pressure sensor package is provided. The pressure sensor die (Pcell) is capped so that the Pcell has enhanced rigidity to withstand stress effects produced by the molding encapsulant. The Pcell cap includes a hole located away from the Pcell diaphragm, so that external gas pressure can be experienced by the Pcell, while at the same time directing moisture away from the diaphragm. Gel does not need to be used, and instead a soft film can be deposited on the Pcell to protect the Pcell diaphragm from excess moisture, if needed. The Pcell cap can take the form of, for example, a dummy silicon wafer or a functional ASIC.
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: September 29, 2015
    Assignee: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Jian Wen, William G. McDonald
  • Patent number: 9133018
    Abstract: A sensing device comprises a substrate having an upper surface, a sensor member, at least an external conductive wire, and a standing-ring member. The sensor member, the external conductive wire and the stand-ring member are on the upper surface. The sensor member is located at the central area on the upper surface, and the standing-ring member surrounds the sensor member. The standing-ring member and the sensor member are electrically connected through the at least an external conductive wire.
    Type: Grant
    Filed: October 2, 2009
    Date of Patent: September 15, 2015
    Assignee: Industrial Technology Research Institute
    Inventors: Lung-Tai Chen, Yu-Wen Hsu, Sheah Chen, Jing-Yuan Lin, Li-Chi Pan, Tzong-Che Ho
  • Patent number: 9126824
    Abstract: According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to a surface of the substrate, and a second layer formed on the first layer and configured to close the through holes.
    Type: Grant
    Filed: August 8, 2013
    Date of Patent: September 8, 2015
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Tomohiro Saito
  • Patent number: 9117933
    Abstract: A capacitive pressure sensing semiconductor device is provided, which has pressure resistance against pressure applied by a pressing member and can detect the pressure surely and efficiently. The pressure sensing semiconductor device includes a pressure detecting part, which detects pressure as a change in capacitance, and a package that receives the pressure detecting part within. The pressure detecting part includes a first electrode and a second electrode disposed to oppose the first electrode, with a determined distance therebetween. Capacitance is formed between the first electrode and the second electrode, and changes according to a change in said distance caused by pressure transmitted to the first electrode by a pressing member. The package also includes a pressure transmitting member that transmits, to the first electrode of the pressure detecting part, the pressure applied by the pressing member.
    Type: Grant
    Filed: August 18, 2014
    Date of Patent: August 25, 2015
    Assignee: Wacom Co., Ltd.
    Inventors: Toshihiko Horie, Hidetaka Takiguchi
  • Patent number: 9116063
    Abstract: A sensor unit may include a ceramic member including a first face and a second face opposite to each other with a predetermined interval, a sensor part mounted on the first face, a plurality of metal pins fixed to the second face, a plurality of internal wirings passing through the ceramic member, each of the plurality of internal wirings connecting the sensor part with one of the plurality of metal pins, and a metal member formed on a circumferential end of the second face and joined with a housing by welding.
    Type: Grant
    Filed: June 25, 2012
    Date of Patent: August 25, 2015
    Assignee: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Hideki Fujiwara, Akihiro Ooshima, Tomotaka Morikawa
  • Patent number: 9068899
    Abstract: The present invention relates to a pressure sensor, which may include a first electrode plate, a second electrode plate, a third electrode plate, a fourth electrode plate and a fifth electrode plate, which are successively laminated on a substrate, wherein the first electrode plate, the third electrode plate and the fourth electrode plate are fixed to the substrate, the first electrode plate and the second electrode plate are disposed opposite to each other and have a gap formed therebetween, the second electrode plate is suspended over the first electrode plate to constitute a first capacitor; the second electrode plate and the third electrode plate are disposed opposite to each other and have a gap formed therebetween, to constitute a second capacitor; and the fifth electrode plate is suspended over the fourth electrode plate to constitute a third capacitor, and can move along a direction perpendicular to the substrate.
    Type: Grant
    Filed: May 30, 2013
    Date of Patent: June 30, 2015
    Assignee: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) LTD.
    Inventors: Zhiwei Wang, Jianhong Mao, Lei Zhang, Deming Tang
  • Publication number: 20150135844
    Abstract: An assembly, comprising two ceramic bodies, which are connected by means of a joint, which contains an active hard solder, or braze, wherein the active hard solder, or braze, has a continuous core volume, which is spaced from the ceramic bodies, in each case, by at least 1 ?m, especially at least 2 ?m, and wherein the joint has bounding layers, which border on the ceramic body. The the core volume, which includes at least 50% of the volume of the joint, is free of crystalline phases of size greater than 6 ?m, especially greater than 4 ?m, preferably greater than 2 ?m.
    Type: Application
    Filed: June 7, 2013
    Publication date: May 21, 2015
    Inventors: Nils Ponath, Andreas Rossberg, Elke Schmidt
  • Publication number: 20150122040
    Abstract: A pressure measuring device, comprising: a pressure measuring cell having a measuring membrane, at least one platform and a pressure chamber formed therebetween. An electrical transducer for transducing a deflection of the measuring membrane into a pressure dependent, primary signal; a cylindrical housing having a measuring cell chamber, in which the pressure measuring cell is arranged, and an end face pressure receipt opening in communication with the pressure duct; and an electronic circuit in the housing for operating the electrical transducer, and for processing the primary signal, and for outputting a measurement signal. The cylinder axis of the pressure measuring cell forms with the cylinder axis of the housing an angle, which amounts to not less than 80°, and which is especially preferably a right angle.
    Type: Application
    Filed: March 19, 2013
    Publication date: May 7, 2015
    Inventors: Ulfert Drewes, Nils Ponath, Michael Hugel, Thomas Uehlin
  • Publication number: 20150122041
    Abstract: A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.
    Type: Application
    Filed: November 6, 2014
    Publication date: May 7, 2015
    Inventors: Chung-Hsien LIN, Rene HUMMEL, Ulrich BARTSCH, Marion HERMERSDORF, Tsung Lin TANG, Wang Shen SU, Chia Min LIN
  • Patent number: 9016133
    Abstract: Various embodiments relate to a pressure sensor and related methods of manufacturing and use. A pressure sensor may include an electrical contact included in a flexible membrane that deflects in response to a measured ambient pressure. The electrical contact may be separated from a signal path through a cavity formed using a sacrificial layer and PVD plugs. At one or more defined touch-point pressure thresholds, the membrane of the pressure sensor may deflect so that the state of contact between an electrical contact and one or more sections of a signal path may change. In some embodiments, the change of state may cause the pressure sensor to trigger an alarm in the electrical circuit. Various embodiments also enable the operation of the electrical circuit for testing and calibration through the use of one or more actuation electrode layers.
    Type: Grant
    Filed: January 5, 2011
    Date of Patent: April 28, 2015
    Assignee: NXP, B.V.
    Inventors: William Frederick Adrianus Besling, Peter Gerard Steeneken, Olaf Wunnicke
  • Publication number: 20150101415
    Abstract: A measuring arrangement with a ceramic measuring cell and a metal process connection for connecting the measuring cell to a measuring environment, with the measuring cell being fastened in the process connection without gaskets and in a diffusion-resistant fashion, with the measuring cell being fastened at a ceramic ring, which is arranged at a metal ring for fastening in the process connection.
    Type: Application
    Filed: June 26, 2014
    Publication date: April 16, 2015
    Inventor: Thomas Kopp
  • Patent number: 8997575
    Abstract: A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the CDG. The presence of the natural frequency signals superimposed on the pressure signal is determined by sensing variations in the output of a sensor at or near the known natural frequency of the diaphragm and filtering that known low frequency from the output. The filtered signal is used in a feedback circuit to impose electrostatic forces on the diaphragm. The imposed electrostatic forces oppose the motion created by the external vibration to suppress the effects of the vibration on the pressure measured by the CDG.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: April 7, 2015
    Assignee: Reno Technologies, Inc.
    Inventor: Robert J. Ferran
  • Patent number: 8997576
    Abstract: A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude.
    Type: Grant
    Filed: January 14, 2014
    Date of Patent: April 7, 2015
    Assignee: Reno Technologies, Inc.
    Inventors: David J. Ferran, Robert J. Ferran
  • Patent number: 9000779
    Abstract: A method of correcting the gain of a capacitive member having electrodes that are movable relative to each other including the steps of successively applying to one of the electrodes, reduced bias voltages having opposite signs and a common value below a threshold for which a remanent field generated by said reduced bias voltages can be measured, making corresponding measurements of the output signals from the capacitive member; taking an average, and correcting the gain of the capacitive member as a function of the measured output signal.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: April 7, 2015
    Assignee: Sagem Defense Securite
    Inventors: Jean-Michel Caron, Vincent Ragot
  • Patent number: 8984952
    Abstract: Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor may include: a tubular probe body; a capacitive sensor disposed at the distal end of the probe body; a lead electrically coupled to the sensor extending along an interior space of the probe body; and at least one support formed of a material having a relatively low dielectric constant disposed within the probe body to support the lead and space the lead away from an inner wall of the probe body. This may help to minimize shunt capacitance and changes in shunt capacitance due to radial movement of the lead. In other embodiments, a pressure sensor may include a channel formed in a wall of the probe body, a temperature sensor disposed at a distal end of the probe body, and a temperature sensor lead disposed in the channel and connected to the temperature sensor.
    Type: Grant
    Filed: September 7, 2012
    Date of Patent: March 24, 2015
    Assignee: Dynisco Instruments LLC
    Inventors: Leo E. Barron, John A. Czazasty, Francis A. Galler
  • Publication number: 20150068314
    Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.
    Type: Application
    Filed: February 24, 2014
    Publication date: March 12, 2015
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Naofumi NAKAMURA, Kei MASUNISHI, Yumi HAYASHI, Yusaku ASANO, Tamio IKEHASHI, Jun DEGUCHI, Daiki ONO
  • Patent number: 8975714
    Abstract: A capacitive pressure sensor includes: a semiconductor substrate having a reference pressure chamber formed therein; a diaphragm which is formed in a front surface of the semiconductor substrate and has a ring-like peripheral through hole penetrating between the front surface of the semiconductor substrate and the reference pressure chamber and defining an upper electrode and a plurality of central through holes; a peripheral insulating layer which fills the peripheral through hole and electrically isolates the upper electrode from other portions of the semiconductor substrate; and a central insulating layer which fills the central through holes.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: March 10, 2015
    Assignee: Rohm Co., Ltd.
    Inventor: Goro Nakatani
  • Patent number: 8966990
    Abstract: A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and rotor plates and the coupler configured to displace the rotor plates relative to the stator plates providing a variable capacitance dependent on the displacement of the rotor plate.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: March 3, 2015
    Assignee: Purdue Research Foundation
    Inventor: Jason Vaughn Clark
  • Patent number: 8966989
    Abstract: A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.
    Type: Grant
    Filed: June 22, 2010
    Date of Patent: March 3, 2015
    Assignee: Endress + Hauser GmbH + Co. KG
    Inventors: Ulfert Drewes, Thomas Uehlin, Elke Schmidt, Andreas Rossberg
  • Patent number: 8965725
    Abstract: In order to mitigate the negative effects of a change in atmospheric pressure, an improved capacitance diaphragm gauge (CDG) sensor incorporates an independent ambient atmospheric pressure sensor near the CDG sensor body. The ambient atmospheric sensor is located outside the CDG sensor body to sense the ambient atmospheric pressure surrounding the CDG sensor body. The ambient atmospheric sensor provides an output that represents the ambient atmospheric pressure. A sensor output processing circuit receives the output of the ambient atmospheric sensor as well as the output of the CDG sensor. The processing circuit utilizes the output from the ambient atmospheric pressure sensor to fine tune the CDG measurement of pressure by executing an in situ, real time, automatic calibration adjustment of the CDG.
    Type: Grant
    Filed: December 31, 2013
    Date of Patent: February 24, 2015
    Assignee: Reno Technologies, Inc.
    Inventors: David J. Ferran, Robert J. Ferran
  • Publication number: 20150040674
    Abstract: An electrostatic capacitive pressure sensor includes: a housing having an inlet portion for a fluid; a sensor chip that detects, as a change in electrostatic capacitance, a change in a diaphragm that flexes upon receipt of a pressure of the fluid, which has entered through the inlet portion; and a baffle that prevents deposition, onto the diaphragm, of a contaminating substance included in the fluid, provided within a flow path of the fluid that is subject to measurement between the inlet portion and the diaphragm. The baffle has a cylindrical structure that is closed on one end, disposed with the direction that is perpendicular to a pressure-bearing surface of the diaphragm as the axial direction. A plurality of flow paths, in which the fluid passes between the inner peripheral surface and the outer peripheral surface of the cylindrical structure, is provided in multiple layers in the axial direction.
    Type: Application
    Filed: August 7, 2014
    Publication date: February 12, 2015
    Applicant: Azbil Corporation
    Inventors: Takuya ISHIHARA, Hidenobu TOCHIGI, Yasuhide YOSHIKAWA, Masashi SEKINE
  • Patent number: 8950265
    Abstract: A sensor including a buffer material layer configured to at least partially deflect when a force or pressure is imparted on the buffer material layer; and an electroactive polymer (EAP) cartridge in operative contact with the buffer material layer, wherein the EAP cartridge is configured to generate an output signal that corresponds to an amount of strain imparted on the EAP cartridge. The EAP cartridge may be used in a variety of sensing applications including as a pressure sensor integrated into a fluid connector. One aspect of the invention provides for selection of a buffer material layer based upon a desired pressure range.
    Type: Grant
    Filed: December 26, 2012
    Date of Patent: February 10, 2015
    Assignee: Parker-Hannifin Corporation
    Inventors: Jason T. Dunn, Shawn D. Ellis, Roger W. Briese, Tad N. Orstad, Todd D. Lambert, John E. Page, Mario A. Calvo, Timothy Skwiot
  • Patent number: 8943895
    Abstract: Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a pressure deflectable diaphragm end formed of a first material with a first coefficient of thermal expansion, and a relatively non-deformable component formed of a second material having a second coefficient of thermal expansion. The pressure deflectable diaphragm end and the non-deformable component form a first and a second portion of a capacitor. An intermediate component separates, or is disposed between, the pressure deflectable diaphragm end and the relatively non-deformable component. The intermediate component is formed of a material with a coefficient of thermal expansion that is less than the first coefficient of thermal expansion which may help minimize changes in span with temperature. In other embodiments, a pressure sensor includes an intermediate circuit located between a distal end of the pressure sensor and a remotely located circuit enclosure including a main circuit.
    Type: Grant
    Filed: September 7, 2012
    Date of Patent: February 3, 2015
    Assignee: Dynisco Instruments LLC
    Inventors: Leo E. Barron, John A. Czazasty
  • Publication number: 20150000417
    Abstract: A process fluid pressure measurement probe includes a pressure sensor formed of a single-crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid. The pressure sensor has an electrical characteristic that varies with process fluid pressure. A feedthrough is formed of a single-crystal material and has a plurality of conductors extending from a first end to a second end. The feedthrough is mounted to a second metallic process fluid barrier and is spaced from, but electrically coupled to, the pressure sensor. The pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 1, 2015
    Inventors: Robert C. Hedtke, Fred C. Sittler
  • Publication number: 20140352446
    Abstract: A microelectromechanical pressure sensor structure that comprises a planar base and side walls and a diaphragm plate. The side walls extend circumferentially away from the planar base to a top surface of the side walls. The planar base, the side walls and the diaphragm plate are attached to each other to form a hermetically closed gap in a reference pressure, and a top edge of the inner surfaces of the side walls forms a periphery of a diaphragm. The diaphragm plate comprises one or more planar material layers of which a first planar material layer spans over the periphery of the diaphragm. The top surface of the side walls comprises at least one isolation area that is not covered by the first planar material layer.
    Type: Application
    Filed: June 2, 2014
    Publication date: December 4, 2014
    Applicant: MURATA MANUFACTURING CO., LTD.
    Inventor: Heikki KUISMA