Expansible Chamber Patents (Class 73/863.84)
  • Patent number: 11613863
    Abstract: A device for simulating injections of liquid chemical/cementitious substances into soils, comprising a first observation chamber which delimits an injectable space adapted to accommodate a soil sample, a second observation chamber which delimits a perforation space adapted to accommodate at least one stretch of an injection device, with longitudinal extension along a longitudinal axis of the second observation chamber, wherein the first observation chamber and the second observation chamber are directly bordering to each other in an interface area, a retaining partition wall which can be inserted in the interface area so as to separate the injectable space from the perforation space and extracted so as to put the perforation space into communication with the injectable space, as well as first transparent portions formed in a first containment wall of the first observation chamber for viewing in real time a propagation of the chemical substance injected into the soil sample by means of the injection device.
    Type: Grant
    Filed: February 12, 2019
    Date of Patent: March 28, 2023
    Assignees: UNIVERSITÁ DEGLI STUDI DI MILANO-BICOCCA, SIREG GEOTECH S.R.L., STUDIO ING. ANDREA PETTINAROLI S.R.L.
    Inventors: Riccardo Castellanza, Stefania Zenoni, Gabriele Balconi, Andrea Maria Romildo Pettinaroli
  • Patent number: 10591499
    Abstract: The disclosure concerns a method for operating an automated analyzer, including transporting a liquid containing a plurality of particles into a chamber, such as a reactor chamber and/or measuring cell chamber of the analyzer, introducing a gas or gas mixture, for example, air into the chamber, such as through the liquid present in the chamber so that the particles in the liquid are stirred up, and subsequently draining at least part of the liquid from the chamber through a fluid line ending in the chamber and an open valve arranged in the fluid line.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: March 17, 2020
    Assignee: Endress+Hauser Conducta GmbH+Co. KG
    Inventors: Michael Littmann, Ulrich Rottensteiner
  • Patent number: 10073013
    Abstract: A modular sample conditioning system formed for in-situ sampling installation, referenced herein as “source mounted”. The present invention relates to a docking platform or substrate configured to receive multiple, diverse sampling components in various flow configurations, coupled with a unique housing/enclosure formed to engage the docking platform so as to further strengthen and stabilize the mount, the enclosure also formed to engage one or more of the mounted sampling components, so as to provide access outside of the enclosure for visibility and/or manual access of same, providing an easily installed and maintained, user-accessible, on-site modular sampling conditioning/monitoring system.
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: September 11, 2018
    Assignee: Mayeaux Holding, LLC
    Inventor: Valmond Joseph St Amant, III
  • Patent number: 9116143
    Abstract: A system for measuring or monitoring the quality of a liquid medium, has first and second sample-takeoff points in the liquid medium and a hydraulic circuit in which the samples taken off from said first and second sample-takeoff points circulate. The hydraulic circuit is mounted between the two sample-takeoff points and comprises two centrifugal impeller pumps, a measuring chamber situated between the two pumps, and a purge device mounted at a high point on the hydraulic circuit between one of the pumps and the measuring chamber. The whole of the hydraulic circuit is preferably totally immersed in the liquid medium.
    Type: Grant
    Filed: May 5, 2011
    Date of Patent: August 25, 2015
    Assignee: Institut Francais De Recherche Pour L'Exploitation De La Mer—IFREMER
    Inventors: Paul Jegou, David Le Piver, Christian Podeur, Patrice Woerther
  • Patent number: 8957778
    Abstract: The present invention uses a wireless memory/communication device at least on the one or more sample storage devices, preferably on both the one or more sample storage devices and the sampling holder, optionally the port on the equipment as well. Data such as that relating to the vessel, the location of the port on the vessel, the device, its manufacture date or lot number, the date of the installation, sterilization and/or taking of a sample along with the person who installed the device and/or took the sample can be read and preferably added to the wireless device when a read/write type of device as these events occur through a scanner/reader/writer device (fixed or hand held). The sample storage device in the laboratory can also then be read and recorded to track the sample storage device's life.
    Type: Grant
    Filed: July 18, 2008
    Date of Patent: February 17, 2015
    Assignee: EMD Millipore Corporation
    Inventors: George Adams, John Dana Hubbard, Aaron Burke, Anthony DiLeo
  • Patent number: 8539988
    Abstract: The device for the transfer of a medium comprises a magazine having two main faces (17) of which one is adapted to cooperate with a container and a lateral face (18) extending between said main faces (17) as well as at least one sliding valve (3) housed in a cavity of said magazine (2) and in which there is formed a transfer duct (59) for said medium which issues on said face (17) adapted to cooperate with said container, said valve (3) having a closed position in which it sealingly isolates said duct (59) from said container and an open position in which said duct (59) is placed in communication with said container; said valve (3) comprising a valve member (40), an isolation sleeve (41) surrounding at least partially said valve member (40) as well as spring means (58) adapted to be compressed by said valve member (40) when said valve (3) is in its open position.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: September 24, 2013
    Assignee: EMD Millipore Corporation
    Inventor: Pierre Guedon
  • Patent number: 8215391
    Abstract: A coiled tubing deployed fluid sampler (50) for collecting a single phase fluid sample from a well. The fluid sampler (50) is actuated to establish fluid communication between an interior (56) and an exterior of the fluid sampler (50) such that a fluid sample is obtained from the well in a chamber (92) of the fluid sampler (50). The fluid pressure in the coiled tubing string is then increased, which pressurizes the fluid sample in the chamber (92). Thereafter, the coiled tubing and the fluid sampler (50) are retrieved to the surface with the pressurized fluid sample remaining above its saturation pressure during collection and retrieval to the surface.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: July 10, 2012
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Cyrus A. Irani, Gian Franco Callarotti
  • Patent number: 8215390
    Abstract: A coiled tubing deployed fluid sampler (50) for collecting a single phase fluid sample from a well. The fluid sampler (50) is actuated to establish fluid communication between an interior (56) and an exterior of the fluid sampler (50) such that a fluid sample is obtained from the well in a chamber (92) of the fluid sampler (50). The fluid pressure in the coiled tubing string is then increased, which pressurizes the fluid sample in the chamber (92). Thereafter, the coiled tubing and the fluid sampler (50) are retrieved to the surface with the pressurized fluid sample remaining above its saturation pressure during collection and retrieval to the surface.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: July 10, 2012
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Cyrus A. Irani, Gian Franco Callarotti
  • Patent number: 8192689
    Abstract: The invention relates to a device for taking out and analyzing a sample from a polymerization reactor comprising one or more sample conduits (2), for taking a sample out of said reactor and for conducting said sample to one or more sample flash tanks (3), whereby said conduits each are in communication with said reactor (19) and each are provided with at least two sampling valves (4, 5); comprising one or more sample flash tanks (3), for separating said solid particles and evaporated gas, whereby said sample flash tanks are connected to said conduits (2) and provided with means for analyzing said evaporated gas (7), and comprising one or more sample receivers (6), for purifying said solid particles, whereby said receivers are connected to said sample flash tanks (3) and provided with means (8) for analyzing said solid particles. The invention further relates to a method for improving a polymerization reaction in a polymerization reactor.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: June 5, 2012
    Assignee: Total Petrochemicals Research Feluy
    Inventor: Hugo Vandaele
  • Patent number: 8146660
    Abstract: A coiled tubing deployed fluid sampler (50) for collecting a single phase fluid sample from a well. The fluid sampler (50) is actuated to establish fluid communication between an interior (56) and an exterior of the fluid sampler (50) such that a fluid sample is obtained from the well in a chamber (92) of the fluid sampler (50). The fluid pressure in the coiled tubing string is then increased, which pressurizes the fluid sample in the chamber (92). Thereafter, the coiled tubing and the fluid sampler (50) are retrieved to the surface with the pressurized fluid sample remaining above its saturation pressure during collection and retrieval to the surface.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: April 3, 2012
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Cyrus A. Irani, Gian Franco Callarotti
  • Patent number: 8117924
    Abstract: The present invention relates to apparatus, systems and methods for performing in situ measurements, and, more particularly, to apparatus, systems and methods that can isolate a sample from a bulk fluid to measure characteristics of same without unwanted effects of perturbation in the bulk fluid.
    Type: Grant
    Filed: April 23, 2007
    Date of Patent: February 21, 2012
    Assignee: Bayer Healthcare LLC
    Inventor: Klaus Michael Joeris
  • Patent number: 8056400
    Abstract: A method and system for particle entrained fluid sampling, capable of sampling a high pressure and/or high flow rate fluid flow system using a pressure intensifier for applying pressure or suction to the fluid sample in the fluid sampling system operatively connected to a sample extractor and a sample analysis device. The pressure intensifier for applying pressure or suction is adjustable to provide control over the sample flow in the fluid sampling system. The fluid sampling system of the present invention may be particularly applicable to monitoring the condition of hydraulic and lubrication systems.
    Type: Grant
    Filed: September 8, 2008
    Date of Patent: November 15, 2011
    Assignee: United States of America as represented by the Secretary of the Navy
    Inventors: John F. Reintjes, John E. Tucker, Lawrence L. Tankersley, Paul L. Howard
  • Patent number: 7967067
    Abstract: A coiled tubing deployed fluid sampler (50) for collecting a single phase fluid sample from a well. The fluid sampler (50) is actuated to establish fluid communication between an interior (56) and an exterior of the fluid sampler (50) such that a fluid sample is obtained from the well in a chamber (92) of the fluid sampler (50). The fluid pressure in the coiled tubing string is then increased, which pressurizes the fluid sample in the chamber (92). Thereafter, the coiled tubing and the fluid sampler (50) are retrieved to the surface with the pressurized fluid sample remaining above its saturation pressure during collection and retrieval to the surface.
    Type: Grant
    Filed: November 13, 2008
    Date of Patent: June 28, 2011
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Cyrus A. Irani, Gian Franco Callarotti
  • Patent number: 7481125
    Abstract: A sample pump system for metering the amount of sample taken from a pressurized fluid process such as a natural gas pipeline or the like, the sample pump system designed for immersion, directly or indirectly, into the pressurized fluid stream so that the sampling is taken at the prevailing pressure and temperature of the fluid stream. A spot sample cylinder device is further provided which employs a method of collection wherein the initial cylinder volume of the collection vessel or sampling cylinder is zero. The spot sample cylinder is inserted into the pressurized gas (or fluid) source, said sample cylinder employing a piston or moveable end configured such that purging of the cylinder sample cavity is not required, since the sample cavity volume is essentially eliminated prior to sampling by the location of the piston within the cavity, the cavity expanding upon sampling via piston movement within the cavity.
    Type: Grant
    Filed: June 13, 2005
    Date of Patent: January 27, 2009
    Inventor: Donald P. Mayeaux
  • Patent number: 7464614
    Abstract: An offline solid phase microextraction (SPME) sampling apparatus for enabling SPME samples to be taken a number of times from a previously collected fluid sample (e.g. sample atmosphere) stored in a fused silica lined bottle which keeps volatile organics in the fluid sample stable for weeks at a time. The offline SPME sampling apparatus has a hollow body surrounding a sampling chamber, with multiple ports through which a portion of a previously collected fluid sample may be (a) released into the sampling chamber, (b) SPME sampled to collect analytes for subsequent GC analysis, and (c) flushed/purged using a fluidically connected vacuum source and purging fluid source to prepare the sampling chamber for additional SPME samplings of the same original fluid sample, such as may have been collected in situ from a headspace.
    Type: Grant
    Filed: May 18, 2006
    Date of Patent: December 16, 2008
    Assignee: Lawrence Livermore National Security, LLC
    Inventor: Chris A. Harvey
  • Patent number: 7437958
    Abstract: The present invention provides a device for obtaining a sample of fluid from a process conduit. The device includes a tubular core that has a passageway extending therethrough. The tubular core has ends that are attachable to spaced-apart portions of a conduit. A tubular sleeve surrounds the tubular core such that the tubular core extends lengthwise through the tubular sleeve. The tubular sleeve has a boss formed thereon that has a bore extending therethrough. The bore fluidly communicates with the tubular core. A syringe is mountable to the boss and the syringe has a needle. The needle is dimensioned to extend through the bore to puncture the core and to project into the passageway inside the core.
    Type: Grant
    Filed: February 21, 2006
    Date of Patent: October 21, 2008
    Assignee: American Sterilizer Company
    Inventors: Pramod K. Sharma, Susan G. Quick, Karl F. Ludwig, II
  • Patent number: 7071000
    Abstract: A method for sampling reaction products includes delivering a reactant through a sampling probe to contact a substance deposited on a substrate and reacting the reactant to form a reaction product. At least a portion of the reaction product is withdrawn through the sampling probe and analyzed. The sampling probe is contacted with the substrate during at least a portion of the delivering, reacting and withdrawing steps.
    Type: Grant
    Filed: December 30, 2002
    Date of Patent: July 4, 2006
    Assignee: Symyx Technologies, Inc.
    Inventors: Youqi Wang, Peijun Cong, Tony N. Wheeler, Lynn Thomas Van Erden, H. Sam Bergh
  • Patent number: 6948391
    Abstract: A probe with an integral filtered vent and sampling port has a hollow shaft configured as a drill bit which in use passes through the lid of a drum containing waste products within a liner. The hollow shaft has a penetrating tip and at lest two radial bores, one of which is positioned to open to the space within the liner and the other of which is positioned to open to the space above the liner and between the liner and drum lid. The shaft has a head with a pocket which contains a filter element, the head also having a radial sampling port with a septa seal. In order to sample head space gases, a hypodermic needle is pushed through the septa seal into the longitudinal bore of the hollow shaft, and then withdrawn, allowing the septa seal to close behind the needle. The probe is especially useful for sampling nuclear waste stored within drums having liners.
    Type: Grant
    Filed: March 21, 2003
    Date of Patent: September 27, 2005
    Assignee: Nuclear Filter Technology
    Inventors: Gilbert Brassell, Terry J. Wickland, Darold M. Popish
  • Patent number: 6899315
    Abstract: A valve for connecting a fluid sampling device to a fluid source is provided that includes a body adapted to be secured to the fluid source and a valve member moveably disposed within the body. The body includes a coupling interface configured to sealingly mate with the sampling device. The valve member is actuated by the sampling device during attachment of the sampling device to the valve body. The sampling device actuated valve member is moveable between a first position in which a flow path between the fluid source and the sampling device is closed and a second position in which the flow path between the fluid source and the sampling device is open. When the fluid flow path is open, the sampling device can withdraw a fluid sample for inspection and return the fluid sample to the fluid source without exposing the fluid to the surrounding environment.
    Type: Grant
    Filed: July 22, 2002
    Date of Patent: May 31, 2005
    Assignee: Eaton Corporation
    Inventors: Randolph L. Maiville, William T. Flynn
  • Patent number: 6864091
    Abstract: A sampling probe for delivering a reactant to a substance deposited on a substrate to form a reaction product and for transporting the reaction product to a product analyzer for analysis. The probe includes a tip positionable over the substance on the substrate. The probe has a recess in the tip sized and shaped for receiving at least a portion of the reaction product. The probe has a product sampling passage extending from the recess adapted for connection to the product analyzer for transporting the portion of the reaction product to the product analyzer. Further, a reactant delivery passage extends to an outlet at the recess for delivering reactant to the substance on the substrate to form the reaction product.
    Type: Grant
    Filed: August 31, 2000
    Date of Patent: March 8, 2005
    Assignee: Symyx Technologies, Inc.
    Inventors: Youqi Wang, Peijun Cong, Tony N. Wheeler, Lynn Thomas Van Erden, H. Sam Bergh
  • Patent number: 6820507
    Abstract: A method and apparatus for extracting a representative sample of water, oil and sediment from a container. The apparatus is a container closure having a tube extending therethrough, such that fluids can be extracted from any closed container through the tube when closed by the closure. The tube has a first end and a second end. The first end is open to the flow of fluids and the second end is closed. Several radial inlet ports are position at spaced intervals along the tube between the closure and the second end of the tube. Fluids from the container enter the tube at several levels through different ones of the inlet ports, thereby providing a more representative sample.
    Type: Grant
    Filed: December 16, 2002
    Date of Patent: November 23, 2004
    Inventor: Norman Eugene Seatter
  • Patent number: 6793819
    Abstract: An airtight sampling apparatus for effectively and accurately sampling a waste solution including volatile organic compounds (VOC's) from a main waste solution conduit having a first pressure P1, is provided.
    Type: Grant
    Filed: January 24, 2002
    Date of Patent: September 21, 2004
    Assignee: Xerox Corporation
    Inventors: Thomas B. Glenwright, Warren R. Smith, Brian L. Spencer, James F. Graf, Jr.
  • Publication number: 20030188588
    Abstract: A sampling apparatus is characterized by a sampler operable to obtain samples of liquid product from a body of product in a vessel. The sampler includes a plunger having a sample receiving recess and a connecting device couples the sampler to the vessel at an aperture to the vessel. The sampler is attached to the connecting device and the connecting device is moveable between a first position placing the sampler into, and a second position taking the sampler out of, communication with the aperture. With the connecting device in the first position, the plunger is reciprocated to extend the plunger and its recess through the connecting device and vessel aperture into product in the vessel to receive a product sample in the recess. The plunger is then retracted from the vessel and through the connecting device to deliver the product sample to a collection point.
    Type: Application
    Filed: April 8, 2002
    Publication date: October 9, 2003
    Inventor: Ben E. Jaeger
  • Publication number: 20030140715
    Abstract: A method of reducing engine cold start up emissions and an apparatus for isolating a fuel sample for testing purposes. According to the methodology the driveability index of the fuel is sensed utilizing an onboard sensor and the sensed fuel driveability index is inputted to the engine controller for utilization by the engine controller in determining the fueling algorithm for minimizing emissions during the next cold start up of the engine. The sensor determines the driveability index by evaluating a fuel sample collected onboard during the previous running cycle of the engine. The fuel sample is pumped from the vehicle fuel tank to an onboard collection point by the vehicle fuel pump during the previous running cycle of the engine. The fuel sampling apparatus includes a sample cup, a cylinder having a bore and an inlet port for connection to the fuel pump and a piston rod defining an axial passage having an inlet port and a discharge port.
    Type: Application
    Filed: January 31, 2002
    Publication date: July 31, 2003
    Inventors: David Howard Burke, Michael Joseph Niemiec, Charles Robert Harrington, David K. Lambert
  • Patent number: 6564657
    Abstract: A sampling device provides accurately repeatable samples for determination of consistency. A chamber is placed into the process line, and a piston in the chamber can be moved rearwardly to withdraw a quantity of process into the chamber. A sample container in communication with the chamber is also filled. The piston is moved forwardly to urge the process back into the process line, while the sample container remains full of process. The sample container has a known volume, and the piston in its forward position closes the sample container so the sample therein is limited to the known volume. The sample is transferred to a filter, and clean water assures that all solids are transferred to the filter.
    Type: Grant
    Filed: May 30, 1996
    Date of Patent: May 20, 2003
    Inventors: Markku Mustonen, Ted Quincy Cobb, Jr.
  • Patent number: 6539312
    Abstract: A sample probe 18 for a gas sampling system obtains a highly accurate hydrocarbon gas sample from a pipeline, particularly when ambient conditions are below the hydrocarbon dew point. A compartment 20 houses a heater 44 and a pump 30, with the pump being mounted on an upper body 50 of probe 18 by suitable nuts 56, 58. A lower probe section 48 having coarse threads 76 is mounted within pipeline 10 and has a diameter D1 of at least greater than 80% of the diameter D of internally threaded opening 14 of pipeline 10. Probe 18 has large diameter upper body 50 externally threaded for mounting compartment 20 thereon. Probe 18 is preferably formed of an anodized aluminum material having a high thermal conductivity in excess of 80 BTU/Ft Hr/Ft2/° F.
    Type: Grant
    Filed: September 13, 2001
    Date of Patent: March 25, 2003
    Assignee: PGI International, Inc.
    Inventors: Spencer M. Nimberger, Kevin J. Cessac
  • Patent number: 6520343
    Abstract: The present invention relates to a filtering device for preventing passing and blocking of unwanted particles in a suspension, which filtering device comprises an inlet and an outlet and a defined space between the inlet and the outlet, wherein the device comprises a filter means arranged in the outlet, that the filter means is arranged with openings, that the size of the openings permit particles of a size smaller than the openings to pass through, and at least one nozzle connected to a pressurised liquid source, capable of delivering a liquid jet, and arranged adjacent said outlet, wherein the said at least one nozzle is arranged such and directed such that particles that engage said filter means are removed therefrom by the liquid jet.
    Type: Grant
    Filed: December 22, 2000
    Date of Patent: February 18, 2003
    Assignee: Fibertracker AB
    Inventors: Håkan Karlsson, Per-Ivar Fransson
  • Patent number: 6397689
    Abstract: A sampling probe for withdrawing and filtering a portion of material from a vessel having an inner chamber containing the material and a port for receiving a probe. The sampling probe comprises a casing having a sample inlet, a pumping chamber having a pump for drawing a portion of the material into the pumping chamber through the sample inlet, and a filter chamber downstream of the pumping chamber. The filter chamber includes a filter which divides the filter chamber into a retentate portion and a filtrate portion, wherein at least part of the withdrawn material passes through the filter into the filtrate portion.
    Type: Grant
    Filed: March 10, 1999
    Date of Patent: June 4, 2002
    Assignee: YSI Incorporated
    Inventor: Donald R. Moles
  • Patent number: 6390127
    Abstract: A multi-port injection/selection valve utilizes a ferrule cluster to connect tubes or capillaries to a common port in the valve. The use of micro ferrule clusters, as opposed to conventional connectors such as nuts and/or bolts, permits the capillary ends to be positioned in extremely close proximity to the valve rotor and to each other, thus minimizing the volume between two capillaries when they are in brought into fluid communication with each other.
    Type: Grant
    Filed: July 30, 2001
    Date of Patent: May 21, 2002
    Assignee: Upchurch Scientific, Inc.
    Inventor: Hans Gunther Schick
  • Patent number: 6284547
    Abstract: The invention relates to a process for the on-line analysis of a reactive gas mixture, in particular of a gas mixture comprising ketene and/or diketene and/or acetic anhydride and/or acetic acid, which gas mixture is situated in a vessel, which comprises expanding a portion of the gas mixture instantaneously into a sampling line via a probe which is integrated into the vessel and which has an orifice whose clear cross sectional area is less than or equal to 1 mm2 and feeding it to a mass-spectrometric analysis.
    Type: Grant
    Filed: April 27, 2000
    Date of Patent: September 4, 2001
    Assignee: Axiva GmbH
    Inventor: Thomas Schäfer
  • Patent number: 6269704
    Abstract: A liquid sampling device (10) comprising a housing (12) defining a confined volume (90) and fitted with an inlet port (22) and an outlet port (18) and a drawing member (30) formed with a conduit (38) and being displaceable between a flow position in which the conduit communicates between the inlet port and the outlet port, and a drawing position in which communication between the inlet port and the outlet port is interfered and wherein upon displacing the drawing member (3) into the drawing position, liquid is drawn into the confined volume (10) via the outlet port (18).
    Type: Grant
    Filed: November 6, 2000
    Date of Patent: August 7, 2001
    Assignee: Elcam Plastic Cooperative Agricultural Association Ltd.
    Inventors: David Ziv, Tomer Gil
  • Patent number: 6267015
    Abstract: An apparatus and method for sampling gases at elevated temperatures which is amenable to analysis in a manufacturing environment is described. In particular the method and apparatus can be used to determine accurate compositions of gas mixtures contained in blisters of elastomeric products. The device comprises a syringe 15,15a and a heated block 12,12a for receiving and holding syringe 15,15a, and for preheating or maintaining the temperature of syringe 15,15a. A thermostat may be associated with heating block 12,12a for controlling its temperature close to the temperature of a product from which a gas sample is taken.
    Type: Grant
    Filed: December 17, 1999
    Date of Patent: July 31, 2001
    Assignee: The Goodyear Tire & Rubber Company
    Inventor: Joseph Alan Incavo
  • Patent number: 6177279
    Abstract: A process for extracting inorganic ionic contaminants from a front surface of a silicon wafer for chemical analysis. The wafer is placed in a container upon a support which holds the wafer in a generally level orientation and isolates the wafer to inhibit air circulation over the front surface. Air circulation can introduce contaminants to the extraction fluid, causing a false measurement of contaminants on the wafer. A layer of extraction fluid is deposited upon only the front surface of the wafer and held for a period of time so that contaminants on the front surface are extracted into the layer of fluid. A portion of the layer of fluid is collected by a sampling device for subsequent analysis.
    Type: Grant
    Filed: November 12, 1998
    Date of Patent: January 23, 2001
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Peng Sun, Marty Adams