Scanning Or Positioning Arrangements, I.e., Arrangements For Actively Controlling The Movement Or Position Of The Probe (epo) Patents (Class 850/1)
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Patent number: 11961248Abstract: An encoder is disclosed that uses hyperspectral data to produce a unified three-dimensional (ā3Dā) scan that incorporates depth for various points, surfaces, and features within a scene. The encoder may scan a particular point of the scene using frequencies from different electromagnetic spectrum bands, may determine spectral properties of the particular point based on returns measured across a first set of bands, may measure a distance of the particular point using frequencies of another band that does not interfere with the spectral properties at each of the first set of bands, and may encode the spectral properties and the distance of the particular point in a single hyperspectral dataset. The spectral signature encoded within the dataset may be used to classify the particular point or generate a point cloud or other visualization that accurately represents the spectral properties and distances of the scanned points.Type: GrantFiled: May 30, 2023Date of Patent: April 16, 2024Assignee: Illuscio, Inc.Inventor: Robert Monaghan
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Patent number: 11940461Abstract: An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.Type: GrantFiled: April 11, 2023Date of Patent: March 26, 2024Assignee: BRUKER NANO, INC.Inventors: Sergey Osechinskiy, Anthonius Ruiter, Bede Pittenger, Syed-Asif Syed-Amanulla
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Patent number: 11846653Abstract: A scanning probe microscope and method for resonance-enhanced detection using the scanning probe microscope uses a light source that is modulated in a range of frequencies to irradiate an interface between a probe tip of the microscope and a sample with modulated electromagnetic radiation from the light source. The vibrational response of the driven cantilever in response to the modulated electromagnetic radiation at the interface between the probe tip and the sample is then detected. The amplitude of the vibrational response of the cantilever over the entire range of modulation frequencies is measured to derive a photo-induced force microscope (PiFM) value.Type: GrantFiled: December 17, 2020Date of Patent: December 19, 2023Assignee: MOLECULAR VISTA, INC.Inventors: William Morrison, Derek Nowak, Josh Gioja, Sung I. Park, Thomas R. Albrecht
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Patent number: 11835546Abstract: A method of creating and characterizing a representative image or signal transform of the surface of an object from acoustic emissions or ultrasonic signals of a multimode ultrasonic probe tip and transducer integrated into a micro tool, such as a nano indenter or a nano indenter interfaced with a Scanning Probe Microscope (SPM). The representative image or renderings may be utilized to predict mechanical properties or characteristics of the sample, including topography, fracture patterns, indents and artifacts. The tip component is configured to operate at multi-resonant frequencies providing sub-nanometer vertical resolution. The tip component may be quasi- statistically calibrated and deep learning iterative image comparison and characterization may be utilized to derive mechanical properties of a sample.Type: GrantFiled: May 29, 2022Date of Patent: December 5, 2023Assignee: NANOMETRONIX LLCInventor: Antanas Daugela
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Patent number: 11756178Abstract: Disclosed is a system and associated methods for generating a composite image from scans or images that are aligned using invisible fiducials. The invisible fiducial is a transparent substance or a projected specific wavelength that is applied to and changes reflectivity of a surface at the specific wavelength without interfering with a capture of positions or visible color characteristics across the surface. The system performs first and second capture of a scene with the surface, and detects a position of the invisible fiducial in each capture based on values measured across the specific wavelength that satisfy a threshold associated with the invisible fiducial. The system aligns the first capture with the second capture based on the detected positions of the invisible fiducial, and generates a composite image by merging or combining the positions or visible color characteristics from the aligned captures.Type: GrantFiled: September 30, 2022Date of Patent: September 12, 2023Assignee: Illuscio, Inc.Inventors: Mark Weingartner, Robert Monaghan
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Patent number: 11656198Abstract: Provided is a sample support body that includes a substrate, an ionization substrate, a support, and a frame. The ionization substrate has a plurality of measurement regions for dropping a sample on second surface. A plurality of through-holes that open in a first surface and the second surface are formed at least in the measurement regions of the ionization substrate. A conductive layer is provided on peripheral edges of the through-holes at least on the second surface. The frame has a wall provided on peripheral edges of the measurement regions on the second surface to separate the plurality of measurement regions when viewed in the direction in which the substrate and the ionization substrate face each other.Type: GrantFiled: May 5, 2022Date of Patent: May 23, 2023Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Takayuki Ohmura, Masahiro Kotani
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Patent number: 11635449Abstract: An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.Type: GrantFiled: April 18, 2022Date of Patent: April 25, 2023Assignee: BRUKER NANO, INC.Inventors: Sergey Osechinskiy, Anthonius Ruiter, Bede Pittenger, Syed-Asif Syed-Amanulla
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Patent number: 11604210Abstract: A system and method of operating an atomic force microscope (AFM) that includes providing relative scanning motion between a probe of the AFM and a sample in a slow scan direction of a data scan to generate a reference image (plane) of a region of interest. Then, relative scanning motion between the probe and the sample is provided in a fast scan direction of a final data scan to generate a data image. By mapping the data image against the reference image in real-time during the supplying step, the preferred embodiments generate a final drift corrected data image without post-image acquisition processing.Type: GrantFiled: July 8, 2021Date of Patent: March 14, 2023Assignee: Bruker Nano, Inc.Inventors: Vladimir Fonoberov, Jason Osborne, Sean Hand
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Patent number: 11598788Abstract: The present disclosure provides a measuring method for measuring heat distribution of a specific space using an SThM probe, and a method and device for detecting a beam spot of a light source. The method according to an embodiment of the present disclosure is the measuring method for measuring heat distribution of a specific space, the measuring method includes: linearly moving a SThM probe that may measure a temperature change in the specific space; and calculating heat distribution of the specific space using continuous temperature change values obtained from the SThM probe during the moving step. According to the measuring method, and the method and device for detecting a beam spot of a light source, it is possible to map temperature distribution in a small space using a SThM probe and it is possible to accurately detect a beam spot using the temperature distribution.Type: GrantFiled: June 1, 2021Date of Patent: March 7, 2023Assignee: PARK SYSTEMS CORP.Inventors: Sang-il Park, Byoung-Woon Ahn, Ahjin Jo, Soobong Choi
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Patent number: 11536636Abstract: A hardness tester includes an image acquirer (controller) acquiring an image of a surface (surface image) of a sample captured by an image capturer, an identifier (controller) identifying, based on the surface image of the sample, a non-conformity region inside the image that is unsuitable for the hardness test using predetermined conditions, and a test position definer (controller) defining a test position in an area outside the non-conformity region identified by the identifier.Type: GrantFiled: November 17, 2020Date of Patent: December 27, 2022Assignee: MITUTOYO CORPORATIONInventors: Koji Shinza, Fumihiko Koshimizu
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Patent number: 11497455Abstract: A method and system of diagnosing a medical condition of a target area of a patient using a mobile device are provided. One or more magnetic field images of a target area of a patient are received. One or more hyperspectral images of the target area of the patient are received. For each of the one or more magnetic field images and the one or more hyperspectral images, a three-dimensional (3D) position of the mobile device is tracked with respect to the target are of the patient. A 3D image of the target area is generated based on the received one or more magnetic field images, one or more hyperspectral images, and the corresponding tracked 3D position of the phone with respect to each image. A medical condition of the target area is diagnosed or monitored based on the generated 3D image.Type: GrantFiled: September 30, 2019Date of Patent: November 15, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Julian de Hoog, Dwarikanath Mahapatra, Rahil Garnavi, Fatemeh Jalali
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Patent number: 11454647Abstract: A cantilever has a probe at a tip end. An optical system emits laser light to the cantilever and detects the laser light reflected by the cantilever. A measurement unit measures characteristics of a sample based on a displacement of the cantilever obtained by a change in a position of the laser light detected by the optical system. The laser light adjustment unit adjusts, when adjusting the optical axis of the laser light, a spot diameter of the laser light to be larger than the spot diameter when measuring the characteristics of a sample. The imaging unit captures an image of a range including the position of the probe when adjusting the optical axis of the laser light. The display unit displays the captured image.Type: GrantFiled: July 27, 2018Date of Patent: September 27, 2022Assignee: Shimadzu CorporationInventors: Kazuma Watanabe, Keita Fujino, Masato Hirade, Kenji Yamasaki, Hideo Nakajima, Yuichiro Ikeda, Hiroshi Arai
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Patent number: 11391755Abstract: Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.Type: GrantFiled: March 16, 2021Date of Patent: July 19, 2022Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Hiroyoshi Yamamoto, Yoshiteru Shikakura, Kunihito Higa
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Patent number: 11307220Abstract: An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.Type: GrantFiled: April 19, 2021Date of Patent: April 19, 2022Assignee: BRUKER NANOInventors: Sergey Osechinskiy, Anthonius Ruiter, Bede Pittenger, Syed-Asif Syed-Amanulla
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Patent number: 11302437Abstract: An information processing device according to the present technology includes a determination unit that determines importance related to a cell-specific event of a cell, using image data obtained from a time-series imaging process targeting the cell The information processing device also includes a control unit that controls a process regarding a setting for a target of acquisition of image data in the time-series imaging, on the basis of a determination result of the importance.Type: GrantFiled: November 8, 2017Date of Patent: April 12, 2022Assignee: SONY CORPORATIONInventors: Shinji Watanabe, Rei Murata
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Patent number: 11289367Abstract: This document is directed at a method of manufacturing a semiconductor element, the method comprising manipulating a surface of a substrate using an atomic force microscope, the atomic force microscope including a probe, the probe including a cantilever and a probe tip, the substrate including at least one or more device features embedded underneath the surface. The method comprises: imaging the embedded device features, and identifying that a position of the probe tip of the atomic force microscope is aligned with the feature; and displacing the probe tip transverse to the surface for exerting a stress for performing the step of surface manipulation, as for example contact holes. Imaging is performed by applying and obtaining an acoustic signal to and from the substrate via the probe tip, including a first and a second signal component at different frequencies. The imaging and surface manipulation are performed using said same probe and probe tip.Type: GrantFiled: June 28, 2018Date of Patent: March 29, 2022Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Violeta Navarro Paredes, Abbas Mohtashami, Hamed Sadeghian Marnani
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Patent number: 11250559Abstract: An inspection method includes the following steps: identifying a plurality of patterns within an image; and comparing the plurality of patterns with each other for measurement values thereof. The above-mentioned inspection method uses the pattern within the image as a basis for comparison; therefore, measurement values of the plurality of pixels constructing the pattern can be processed with statistical methods and then compared, and the false rate caused by variation of a few pixels is decreased significantly. An inspection system implementing the above-mentioned method is also disclosed.Type: GrantFiled: June 8, 2020Date of Patent: February 15, 2022Assignee: ASML Netherlands B.V.Inventors: Wei Fang, Zhao-Li Zhang, Jack Jau
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Patent number: 11215636Abstract: Various examples are provided related to scanning tunneling thermometers and scanning tunneling microscopy (STM) techniques. In one example, a method includes simultaneously measuring conductance and thermopower of a nanostructure by toggling between: applying a time modulated voltage to a nanostructure disposed on an interconnect structure, the time modulated voltage applied at a probe tip positioned over the nanostructure, while measuring a resulting current at a contact of the interconnect structure; and applying a time modulated temperature signal to the nanostructure at the probe tip, while measuring current through a calibrated thermoresistor in series with the probe tip. In another example, a device includes an interconnect structure with connections to a first reservoir and a second reservoir; and a scanning tunneling probe in contact with a probe reservoir. Electrical measurements are simultaneously obtained for temperature and voltage applied to a nanostructure between the reservoirs.Type: GrantFiled: November 9, 2020Date of Patent: January 4, 2022Assignee: Arizona Board of Regents on Behalf of the University of ArizonaInventors: Abhay Shankar Chinivaranahalli Shastry, Charles Allen Stafford
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Patent number: 11162978Abstract: A method of operating a scanning thermal microscopy probe to model thermal contact resistance at an interface between a sample and a tip of the probe includes providing a sample to be measured; providing a scanning thermal microscopy probe including a tip; contacting the sample to be measured with the tip; and determining, with a model, a thermal conductivity (k) of the sample from a probe current (I) of the scanning thermal microscopy probe.Type: GrantFiled: March 18, 2020Date of Patent: November 2, 2021Assignee: The University of AkronInventors: Jiahua Zhu, Yifan Li
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Patent number: 11150206Abstract: A system and method for evaluating a geological formation including subjecting a source-rock sample from the geological formation to atomic force microscopy (AFM) to determine a thermal property or material property of the source-rock sample. The properties determined may include thermal conductivity or material transition temperature.Type: GrantFiled: September 12, 2019Date of Patent: October 19, 2021Assignee: Saudi Arabian Oil CompanyInventors: Shannon L. Eichmann, Katherine Leigh Hull, Younane N. Abousleiman, David Jacobi
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Patent number: 11035878Abstract: Atomic force microscopy system comprising an atomic force microscopy device and a substrate carrier having a carrier surface carrying a substrate. The substrate has a substrate main surface and a substrate scanning surface opposite the substrate main surface. The atomic force microscopy device comprises a scan head including a probe. The probe comprises a cantilever and a probe tip arranged on the cantilever. The atomic force device further comprises an actuator cooperating with at least one of the scan head or the substrate carrier for moving the probe tip and the substrate carrier relative to each other in one or more directions parallel to the carrier surface for scanning of the substrate scanning surface with the probe tip. A signal application actuator applies, during said scanning, an acoustic input signal to the substrate, said acoustic input signal generating a first displacement field in a first displacement direction only.Type: GrantFiled: December 4, 2018Date of Patent: June 15, 2021Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventors: Laurent Fillinger, Paul Louis Maria Joseph Van Neer, Daniele Piras, Marcus Johannes Van Der Lans, Maarten Hubertus Van Es, Hamed Sadeghian Marnani
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Patent number: 11007615Abstract: A machine tool includes: a tool magazine that stores a plurality of tools; a spindle that holds one of the plurality of tools stored in the tool magazine; a glossiness measurement unit that measures glossiness of a tapered outer surface of a taper shank of each of the plurality of tools; a deterioration determination unit that determines whether or not the tapered outer surface is deteriorated on the basis of the glossiness measured by the glossiness measurement unit; and a notification unit that notifies an operator of deterioration of the tapered outer surface if it is determined by the deterioration determination unit that the tapered outer surface is deteriorated.Type: GrantFiled: December 12, 2019Date of Patent: May 18, 2021Assignee: FANUC CORPORATIONInventor: Gaku Isobe
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Patent number: 10983142Abstract: Methods, devices, and systems for forming atomically precise structures are provided. In some embodiments, the methods, devices, and systems of the present disclosure utilize a scanning tunneling microscope (STM) system to receive a sample having a surface to be patterned. The system positions a conductive tip over a pixel region of the surface. While the conductive tip remains laterally fixed relative to the surface, the system applies a bias voltage between the conductive tip and the surface such that a current between the conductive tip and the surface removes at least one atom from the pixel region. The system stops applying the voltage and current when it senses the removal of the at least one atom. The system then verifies that the at least one atom has been removed from the pixel region.Type: GrantFiled: October 22, 2019Date of Patent: April 20, 2021Assignee: ZYVEX LABS, LLCInventors: John Randall, Ehud Fuchs, James H. G. Owen, Joseph Lake
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Patent number: 10895584Abstract: A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and tType: GrantFiled: September 25, 2018Date of Patent: January 19, 2021Assignee: CONCEPT SCIENTIFIQUE INSTRUMENTSInventor: Louis Pacheco
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Patent number: 10845382Abstract: An apparatus and method of performing sample characterization with an AFM and a pulsed IR laser directed at the tip of a probe of the AFM. The laser pulses are synchronized with the oscillatory drive of the AFM and may only interact with the tip/sample on selected cycles of the oscillation. Peak force tapping mode is preferred for AFM operation. Nano-mechanical and nano-spectroscopic measurements can be made with sub-50 nm, and even sub-20 nm, resolution.Type: GrantFiled: August 22, 2017Date of Patent: November 24, 2020Inventors: Chanmin Su, Martin Wagner, Xiaoji Xu
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Patent number: 10846547Abstract: A data correction method for allowing any observer to satisfactorily perform height correction on an image is provided. Specifically, a data correction method for correcting height of a plurality of pieces of measurement data by using image data acquired by a scanning probe microscope is disclosed. In this data correction method, a computer extracts a reference plane region from the image data, selects three pieces of measurement data, from the pieces of measurement data, at three points in the extracted reference plane region as first to third reference point data, and performs height correction on the other pieces of measurement data on the assumption that the first to third reference point data have the same height.Type: GrantFiled: January 4, 2019Date of Patent: November 24, 2020Assignee: Shimadzu CorporationInventors: Masato Hirade, Kenji Yamasaki
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Patent number: 10830791Abstract: A holding member, a sample container, and a mounting member are used in a scanning probe microscope. The mounting member is made of an elastically deformable material such as a rubber material. The mounting member includes an annular main body. When the mounting member is mounted on the holding member and the sample container, the holding member is inserted into the sample container while the main body of the mounting member is elastically deformed along an outer circumferential surface of the sample container. One end of the mounting member is detached from the outer circumferential surface of the sample container, and brought into close contact with an outer circumferential surface of the holding member. When the holding member and the sample container are relatively moved, the main body of the mounting member is elastically deformed.Type: GrantFiled: March 8, 2019Date of Patent: November 10, 2020Assignee: Shimadzu CorporationInventors: Hiroshi Arai, Akinori Kogure
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Patent number: 10746824Abstract: A magnetic resonance force detection apparatus, comprising: a sample carrier for carrying a sample to be tested; a magnetic field source configured to provide a magnetic field to a sample when it is carried by the sample carrier; a support for supporting either the sample carrier or the magnetic field source; a support-driving-mechanism configured to drive the support such that the sample carrier moves relative to the magnetic field source, such that the magnetic field is configured to cause the spins of one or more nuclei or electrons in the sample to flip, and wherein the flipping of spins exerts a force on the support; and a support-displacement-measuring-sensor configured to measure displacement of the support and generate a signal representative of the displacement of the support.Type: GrantFiled: March 1, 2017Date of Patent: August 18, 2020Assignee: UNIVERSITEIT LEIDENInventors: Arthur den Haan, Jelmer Wagenaar, Tjerk Oosterkamp, Rembrandt Donkersloot
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Patent number: 10749001Abstract: A method of evaluating an insulated-gate semiconductor device having an insulated-gate structure including a channel formation layer made of a wide-bandgap semiconductor and a gate insulating film formed contacting the channel formation layer includes removing the gate insulating film in order to expose a surface of the channel formation layer; taking a phase image of the exposed surface of the channel formation layer using a phase mode of an atomic force microscope; evaluating a surface condition of the exposed surface of the channel formation layer by calculating an evaluation metric from phase shift values in the phase image and by determining whether the evaluation metric satisfies a prescribed condition; and determining that the insulated-gate semiconductor device is acceptable when the evaluation metric satisfied the prescribed condition.Type: GrantFiled: December 4, 2018Date of Patent: August 18, 2020Assignee: FUJI ELECTRIC CO., LTD.Inventors: Takayuki Hirose, Yutaka Terao, Aki Takigawa, Etsuko Tomita
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Patent number: 10705114Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.Type: GrantFiled: July 2, 2019Date of Patent: July 7, 2020Inventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
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Patent number: 10649003Abstract: Disclosed herein are devices, systems and methods for in-line, nanoscale metrology. One system comprises monolithic flexure mechanisms with integrated actuators that allow movement and positioning in two axes, with an extremely high degree of accuracy, of a structure comprising one or more scanning probes. This structure is suspended to prevent any destructive interference from a sample, which can be stationary or moving at a nonzero rate, and rigid or flexible in mechanical behavior. This system can be activated at startup and quickly actuate the structure to approach the surface of the sample. Once the system achieves the desired proximity between the one or more probes and the sample, the system maintains that position of the structure to a high degree of accuracy regardless of any disturbances. This array can be moved at varying speeds laterally to match the velocity of any continually moving substrates, thus enabling scanning of moving substrates.Type: GrantFiled: May 31, 2018Date of Patent: May 12, 2020Assignee: Board of Regents, The University of Texas SystemInventors: Michael A. Cullinan, Liam Glazer Connolly
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Patent number: 10401382Abstract: The superimposition of a periodic potential wave to the tip movement control or the bias supply of an STM, in which a microwave frequency comb is generated in its tunneling junction, may be used to reduce or eliminate artifacts or other noise generated from outside the tunneling junction.Type: GrantFiled: March 22, 2018Date of Patent: September 3, 2019Inventor: Mark J Hagmann
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Patent number: 10338096Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.Type: GrantFiled: October 31, 2017Date of Patent: July 2, 2019Assignee: Oxford Instruments Asylum Research IncInventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
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Patent number: 10254307Abstract: A scanning probe microscope includes: a laser source 61; a photodetector 62; and a Y-drive mechanism 701 provided for at least either the laser source 61 or photodetector 62, for driving the object in a first direction (Y direction) in a plane perpendicular to an optical axis of the object. The Y-drive mechanism 701 includes: a Y-screw shaft 21 extending in the Y direction; a Y-guide shaft 23 extending parallel to the Y-screw shaft; a support member 24 for supporting the object, the support member coupled with the Y-screw shaft 21 via a nut member 211 screwed on the Y-screw shaft 21 as well as coupled with the Y-guide shaft 23 via a slide member 231 mounted on the Y-guide shaft 23 in a slidable manner; and a Y-drive motor 22 for rotating the Y-screw shaft 21.Type: GrantFiled: March 9, 2018Date of Patent: April 9, 2019Assignee: SHIMADZU CORPORATIONInventors: Kanji Kobayashi, Masato Hirade
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Patent number: 10197596Abstract: Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.Type: GrantFiled: November 7, 2017Date of Patent: February 5, 2019Assignee: Bruker Nano, Inc.Inventors: Jian Shi, Yan Hu, Shuiqing Hu, Ji Ma, Chanmin Su
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Patent number: 10041970Abstract: A method for imaging a sample using a high speed dynamic mode atomic force microscope may include scanning a tip of a cantilever probe over a surface of the sample, regulating a vibration amplitude of the tip to remain constant at a set point value (Aset), via a first signal generated in a first feedback controller, measuring a mean tapping deflection of the tip, regulating the mean tapping deflection via a second signal generated in a second feedback controller, tracking and measuring an adjustment to the measured mean tapping deflection during the regulating. The method may further include generating an image topography of the sample based on the first signal, the second signal, and the measured adjustment of the mean tapping deflection of the cantilever probe.Type: GrantFiled: July 14, 2015Date of Patent: August 7, 2018Assignee: RUTGERS, THE STATE UNIVERSITY OF NEW JERSEYInventors: Qingze Zou, Juan Ren, Jiangbo Liu
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Patent number: 10031158Abstract: An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.Type: GrantFiled: December 14, 2016Date of Patent: July 24, 2018Assignee: National Technology & Engineering Solutions of Sandia, LLCInventors: Erica Ann Douglas, Matt Eichenfield, Adam Jones, Ryan Camacho, Michael David Henry, James Kenneth Douglas
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Patent number: 9804193Abstract: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.Type: GrantFiled: November 3, 2015Date of Patent: October 31, 2017Assignee: Oxford Instruments Asylum Research, IncInventors: Aleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
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Patent number: 9666110Abstract: A lighting jig for inspection of a liquid crystal panel, which includes: a base plate; a first supporting plate and a second supporting plate, which are respectively located on and orthogonal to the base plate; and an adsorption platform disposed between the first supporting plate and the second supporting plate and being able to move up and down along a direction orthogonal to the base plate. The adsorption platform has an adsorption surface for adsorbing probes, and the adsorption positions of the probes on the adsorption surface can be adjusted according to distributed locations of circuit test points of various liquid crystal panels to be inspected. The lighting jig provided by embodiments of the present invention can be used for lighting various types of liquid crystal panels, thereby improving the universality and use efficiency of the lighting jig.Type: GrantFiled: November 26, 2012Date of Patent: May 30, 2017Assignee: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Lei Wang, Ziwei Cui, Jing Xue, Hao Wu
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Patent number: 9625491Abstract: A scanning mechanism includes a movable portion to which a scanning target object is attached, and an X-Y actuator to scan the movable portion in an X direction and a Y direction perpendicular to the X direction. The X-Y actuator is symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction.Type: GrantFiled: February 5, 2015Date of Patent: April 18, 2017Assignee: OLYMPUS CORPORATIONInventors: Nobuaki Sakai, Yoshitsugu Uekusa
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Patent number: 9453856Abstract: A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (?/2 [rad]) and provides a combined amount to the phase difference.Type: GrantFiled: October 2, 2015Date of Patent: September 27, 2016Assignee: OLYMPUS CORPORATIONInventor: Nobuaki Sakai
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Patent number: 9347897Abstract: A method comprising characterizing the dimensions of structures on a semiconductor device having dimensions less than approximately 100 nanometers (nm) using one of scanning probe microscopy (SPM) or profilometry.Type: GrantFiled: June 29, 2006Date of Patent: May 24, 2016Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Duncan M Rogers, Vladimir A Ukraintsev
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Patent number: 9316613Abstract: Apparatus comprises a pipet comprising first and second channels separated by a septum and having a tip at which each of the first and second channels is open; an electrolyte solution contained within both the first and second channels of the pipet; a first electrode extending into the electrolyte in the first channel of the pipet; a second electrode extending into the electrolyte in the second channel of the pipet; means for applying a potential difference between the first and second electrodes; means for measuring alternating current components of a current flowing to or from the first electrode; means for applying an oscillatory perturbation to the pipet; and means responsive to the alternating current measured to be flowing to or from the first electrode to adjust a position of the pipet such as to control a separation between the tip of the pipet and a surface of interest.Type: GrantFiled: August 11, 2011Date of Patent: April 19, 2016Assignee: The University of WarwickInventors: Patrick Unwin, Neil Ebejer
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Patent number: 9304144Abstract: A method of actuating a plurality of probes by delivering photothermal energy to the probes so that the probes are heated and deform relative to a sample. The photothermal energy is delivered to the probes by: directing an input beam into an optical device; transforming the input beam with the optical device into a plurality of actuation beamlets which are not parallel with each other; and scanning the actuation beamlets across the probes, optionally via an objective lens. A spacing between the actuation beamlets is different to a spacing between the probes so that only a subset (typically only one) of the actuation beamlets illuminates a probe at any instant. As the actuation beamlets scan across the probes the probes are illuminated in an illumination sequence. The actuation beamlets are controlled so that different amounts of photothermal energy are delivered to at least two of the probes during the illumination sequence.Type: GrantFiled: October 9, 2013Date of Patent: April 5, 2016Assignee: INFINITESIMA LIMITEDInventors: Andrew Humphris, Andrew Neil Farley
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Patent number: 9261418Abstract: Certain implementations of the disclosed technology may include systems, methods, and apparatus for common mode signal cancellation in force change detectors. An example embodiment of the disclosed technology includes a press sensor element configured to reduce or eliminate thermally induced signals. The sensor element includes a piezoelectric layer that includes a first surface in communication with a first layer. The first layer includes a first conductive region. The piezoelectric layer includes a second surface in communication with a second layer. The second layer includes a second conductive region, a third conductive region, and a non-conductive void region separating the second conductive region and the third conductive region.Type: GrantFiled: March 11, 2014Date of Patent: February 16, 2016Assignee: Interlink Electronics, Inc.Inventors: Jeffrey R. Baker, Edwin Keshesh Yousafian, Declan Christopher Flannery
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Patent number: 9255944Abstract: A platinum-platinum silicide modified silicon composite tip apex, and a method for forming the aforesaid tip apex are disclosed, where a metallic precursor solution and a silicon probe are reacted to form a local platinum nano-structure, which could be precisely controlled with local selectivity, and a local platinum silicide layer is formed between the platinum nano-structure and the silicon probe with an atmospheric microwave annealing (a-MWA) process conducted as well, largely enhancing the conductivity of the tip and spatial resolution of the field detection in field sensitive scanning probe microscopy. In addition to exemption from a stray-field effect and thus having better image quality, the platinum silicide-containing probe could more efficiently enhance the interfacial electron transfer efficiency as compared to the probe tip having only a platinum nano-structure, so that the probe could be applicable to a controlled conductive probe having high spatial resolution.Type: GrantFiled: March 23, 2015Date of Patent: February 9, 2016Assignee: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Chun-Ting Lin, Ming-Hua Shiao, Shu-Hung Tung, Mao-Nan Chang
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Patent number: 9110094Abstract: An instrument (and corresponding method) performs AFM techniques to characterize properties of a sample of reservoir rock. The AFM instrument is configured to have a probe with a tip realized from reservoir rock that corresponds to the reservoir rock of the sample. The AFM instrument is operated to derive and store data representing adhesion forces between the tip and the sample at one or more scan locations in the presence of a number of different fluids disposed between the tip and the sample. The AFM instrument is further configured to perform computational operations that process the data representing the adhesion forces for a given scan location in order to characterize at least one property of the rock sample at the given scan location. The properties can include total surface energy of the rock sample as well as wettability of the rock sample.Type: GrantFiled: January 17, 2014Date of Patent: August 18, 2015Assignees: Schlumberger Technology Corporation, Saudi Arabian Oil CompanyInventors: Ahmed Gmira, Wael Abdallah, Mikhail Stukan, Johannes J. M. Buiting
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Patent number: 9091705Abstract: A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop.Type: GrantFiled: May 1, 2013Date of Patent: July 28, 2015Assignee: Boise State UniversityInventor: Byung I. Kim
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Patent number: 9081028Abstract: An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.Type: GrantFiled: March 19, 2013Date of Patent: July 14, 2015Assignee: Bruker Nano, Inc.Inventor: Charles Meyer
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Publication number: 20150150163Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.Type: ApplicationFiled: November 25, 2013Publication date: May 28, 2015Applicant: Oxford Instruments Asylum Research, Inc.Inventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgeson