Scanning Thermal Microscopy [sthm] Or Apparatus Therefor, E.g., Sthm Probes (epo) Patents (Class 850/50)
  • Patent number: 8997259
    Abstract: An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
    Type: Grant
    Filed: November 12, 2012
    Date of Patent: March 31, 2015
    Assignee: Bruker Nano, Inc.
    Inventors: Chanmin Su, Paul Silva, Lin Huang, Bede Pittenger, Shuiqing Hu
  • Patent number: 8955161
    Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ?, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: February 10, 2015
    Assignee: Bruker Nano, Inc.
    Inventor: Gregory O. Andreev
  • Patent number: 8914911
    Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: December 16, 2014
    Assignees: The Board of Trustees of the University of Illinois, Anasys Instruments
    Inventors: William P. King, Craig Prater, Byeonghee Lee, Doug Gotthard
  • Patent number: 8881311
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: November 4, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
  • Patent number: 8719960
    Abstract: The present invention provides a microcantilever capable of independently measuring and/or controlling the electrical potential and/or temperature of a surface with nanometer scale position resolution. The present invention also provides methods of manipulating, imaging, and/or mapping a surface or the properties of a surface with a microcantilever. The microcantilevers of the present invention are also capable of independently measuring and/or controlling the electrical potential and/or temperature of a gas or liquid. The devices and methods of the present invention are useful for applications including gas, liquid, and surface sensing, micro- and nano-fabrication, imaging and mapping of surface contours or surface properties.
    Type: Grant
    Filed: January 30, 2009
    Date of Patent: May 6, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventor: William P. King
  • Patent number: 8677809
    Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.
    Type: Grant
    Filed: October 21, 2010
    Date of Patent: March 25, 2014
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM, Inc
    Inventors: Roger Proksch, Anil Gannepalli
  • Publication number: 20130340127
    Abstract: Advantageous systems, methods, and computer-readable media for temperature measurement of a sample, using new temperature measurement and mapping techniques, are provided. The technique employs a temperature sensitive electron signal in a scanning electron microscope (SEM) and provides both high spatial resolution and non-contact temperature measurement capabilities no existing technique can adequately combine. This technique thus adds a new capability—temperature measurement and mapping—to the collection of existing SEM capabilities.
    Type: Application
    Filed: June 18, 2013
    Publication date: December 19, 2013
    Inventors: XIAOWEI WU, ROBERT HULL
  • Patent number: 8595861
    Abstract: A thermal probe includes a support element, a conductive pattern and a tip. The conductive pattern is disposed at the support element and has plural bending portions. The tip has a base and a pinpoint. The base has a first surface and a second surface which is opposite to the first surface. The pinpoint is disposed at the first surface. The second surface is connected with the conductive pattern. The bending portions are contacted with the first surface. The tip of the thermal probe is replaceable, and the user can choose the optimum combination of the tip, conductive pattern and support element according to their needs.
    Type: Grant
    Filed: May 18, 2012
    Date of Patent: November 26, 2013
    Assignee: National Cheng Kung University
    Inventors: Bernard HaoChih Liu, Fang-Yi Liao, Jian-Hong Chen
  • Patent number: 8533861
    Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: September 10, 2013
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: William P. King, Craig Prater, Byeonghee Lee
  • Patent number: 8484759
    Abstract: An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: July 9, 2013
    Assignee: UT-Battelle, LLC
    Inventors: Stephen Jesse, Sergei V. Kalinin, Maxim P. Nikiforov
  • Patent number: 8448261
    Abstract: A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.
    Type: Grant
    Filed: March 17, 2010
    Date of Patent: May 21, 2013
    Assignees: University of Tennessee Research Foundation, UT-Battelle, LLC
    Inventors: Ali Passian, Thomas George Thundat, Laurene Tetard
  • Patent number: 8397555
    Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: March 19, 2013
    Assignee: Applied NanoStructures, Inc.
    Inventor: Ami Chand
  • Patent number: 8384020
    Abstract: A system and method for sub-micron analysis of a chemical composition of a specimen are described. The method includes providing a specimen for evaluation and a thermal desorption probe, thermally desorbing an analyte from a target site of said specimen using the thermally active tip to form a gaseous analyte, ionizing the gaseous analyte to form an ionized analyte, and analyzing a chemical composition of the ionized analyte. The thermally desorbing step can include heating said thermally active tip to above 200° C., and positioning the target site and the thermally active tip such that the heating step forms the gaseous analyte. The thermal desorption probe can include a thermally active tip extending from a cantilever body and an apex of the thermally active tip can have a radius of 250 nm or less.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: February 26, 2013
    Assignees: UT-Battelle, LLC, University of Tennessee Research Foundation
    Inventors: Stephen Jesse, Gary J. Van Berkel, Olga S. Ovchinnikova
  • Publication number: 20130019352
    Abstract: A thermal probe includes a support element, a conductive pattern and a tip. The conductive pattern is disposed at the support element and has plural bending portions. The tip has a base and a pinpoint. The base has a first surface and a second surface which is opposite to the first surface. The pinpoint is disposed at the first surface. The second surface is connected with the conductive pattern. The bending portions are contacted with the first surface. The tip of the thermal probe is replaceable, and the user can choose the optimum combination of the tip, conductive pattern and support element according to their needs.
    Type: Application
    Filed: May 18, 2012
    Publication date: January 17, 2013
    Inventors: Bernard HaoChih LIU, Fang-Yi LIAO, Jian-Hong CHEN
  • Publication number: 20130019353
    Abstract: A thermal probe includes a support element, a conductive pattern and a tip. The support element has a slit or a through hole and has a first surface and a second surface which is opposite to the first surface. The conductive pattern is disposed at the first surface. The tip has a base and a pinpoint. The pinpoint is disposed at the base and passes through the slit or the through hole and highlights from the first surface. The base is connected with the second surface. The tip of the thermal probe of the invention can be replaced, and user can choose the best combination of the tip, conductive pattern and support element according to their needs.
    Type: Application
    Filed: July 10, 2012
    Publication date: January 17, 2013
    Inventors: Bernard HaoChih LIU, Fang-Yi Liao, Jian-Hong Chen
  • Patent number: 8214915
    Abstract: Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
    Type: Grant
    Filed: June 3, 2009
    Date of Patent: July 3, 2012
    Assignee: SII NanoTechnology Inc.
    Inventors: Masatsugu Shigeno, Kazutoshi Watanabe, Masato Iyoki, Naoya Watanabe
  • Patent number: 7977636
    Abstract: A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: July 12, 2011
    Assignee: Anasys Instruments, Inc.
    Inventor: Markus B. Raschke
  • Patent number: 7958565
    Abstract: A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: June 7, 2011
    Assignee: National University Corporation Kanazawa University
    Inventors: Toshio Ando, Takayuki Uchihashi, Noriyuki Kodera, Hayato Yamashita
  • Patent number: 7769201
    Abstract: A method, apparatus, and computer program product provides automated analysis of thermal imaging data for multi-layer materials based upon a theoretical model of a multi-layer material system, which is solved numerically. The computer-implemented method effectively processes the volume heating effect for thermal barrier coatings (TBCs), since quantitative evaluation of TBC thickness and conductivity is particularly important. TBC thickness is a processing parameter and required to be monitored. TBC conductivity is a measure of TBC quality because it is directly related with TBC density/porosity, microcracking and interface cracks. Because this method is an imaging technology, it can be used for fast and 100% area inspection of larger TBC surfaces, such as combustor liners.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: August 3, 2010
    Assignee: UChicago Argonne, LLC
    Inventor: Jiangang Sun
  • Patent number: 7748260
    Abstract: A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.
    Type: Grant
    Filed: July 12, 2006
    Date of Patent: July 6, 2010
    Assignee: Veeco Instruments Inc.
    Inventors: Chanmin Su, Robert C. Daniels, Craig Prater