Applications Of Scanning-probe Techniques Other Than Spm (epo) Patents (Class 850/62)
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Patent number: 11989114Abstract: Systems and methods for validating an inspection software are provided. A dataset which defines properties for a three-dimensional component having at least one known defect is obtained. The three-dimensional component is inspected with the inspection software using the dataset to obtain inspection results for the three-dimensional component. The inspection results are compared to reference results for the three-dimensional component. When the inspection results correspond to the reference results within a predetermined threshold, a signal indicative of validation of the inspection software is issued.Type: GrantFiled: August 2, 2019Date of Patent: May 21, 2024Assignee: PRATT & WHITNEY CANADA CORP.Inventors: Mario Blais, Clement Drouin Laberge
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Patent number: 11718014Abstract: An imprint apparatus that forms a curable composition on a substrate using a mold includes a first measurement unit configured to measure a height distribution of the substrate at a contact position where the mold and the curable composition are brought into contact with each other. The first measurement unit measures a height of the substrate by bringing a probe into contact with a surface of the substrate, the probe having a contact surface area smaller than a contact surface area of the mold.Type: GrantFiled: April 1, 2020Date of Patent: August 8, 2023Assignee: Canon Kabushiki KaishaInventor: Tadashi Hattori
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Patent number: 11638839Abstract: A device and a method for measuring proton beam source position and beamline center are disclosed. The device includes N quadrupole magnets, a laser, a target and a scintillation screen; the target and the scintillation screen are arranged in front of and behind the N-quadrupole lens, respectively; the N-quadrupole lens can be converted to a M-quadrupole lens; the position of proton beam after being focused by the N- or M-quadrupole lens on the scintillation screen is measured; according to the amplification factor and the proton beam position, the offset of the proton beam source from the beamline center, as well as the position of the beamline center on the scintillation screen are calculated; the disclosure can accurately determine the position of the beamline center and the proton beam source by the use of N quadrupole magnets, combined with a scintillation screen.Type: GrantFiled: November 4, 2020Date of Patent: May 2, 2023Assignee: Peking UniversityInventors: Jungao Zhu, Xueqing Yan, Chen Lin
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Patent number: 8950011Abstract: A mechanism is provided for sequencing a biopolymer. The biopolymer is traversed from a first medium to a second medium. The biopolymer includes bases. As the biopolymer traverses from the first medium to the second medium, different forces are measured corresponding to each of the bases. The bases are distinguished from one another according to the different measured forces which are measured for each of the bases.Type: GrantFiled: May 22, 2013Date of Patent: February 3, 2015Assignee: International Business Machines CorporationInventors: Venkat K. Balagurusamy, Stanislav Polonsky
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Patent number: 8950010Abstract: The piezoelectric response of a sample (3) is measured by applying a scanning probe microscope, whose probe (2) is in contact with the sample (3). The probe is mounted to a cantilever (1) and an actuator (5) is driven by a feedback loop (7, 11, 12, 4) to oscillate at a resonance frequency f. An AC voltage with principally the same frequency f but with a phase (with respect to the oscillation) and/or amplitude varying periodically with a frequency fmod is applied to the probe for generating a piezoelectric response of the sample (3). A lock-in detector (20) measures the spectral components at the frequency fmod of the control signals (K, f) of the feedback loop. These components describe the piezoelectric response and can be recorded as output signals of the device. The method allows a reliable operation of the detector oscillator resonator (1) at its resonance frequency and provides a high sensitivity.Type: GrantFiled: August 27, 2008Date of Patent: February 3, 2015Assignee: Specs Zürich GmbHInventor: Jörg Rychen
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Patent number: 8941057Abstract: The invention provides a probe and a method of obtaining a three-dimensional compositional map of one or more targets in a biological sample, or a portion thereof, comprising: (a) milling a surface layer of a biological sample with a focused ion beam, thereby creating a newly exposed surface layer of the biological sample; (b) imaging the newly exposed surface layer of the biological sample; (c) identifying the chemical composition of the newly exposed surface layer of the biological sample, or a portion thereof, with a mass spectrometer; and (d) repeating (a) to (c) until a three-dimensional compositional map of one or more targets in the biological sample, or portion thereof, is obtained. Uses of the three-dimensional map obtained from the inventive method are further provided.Type: GrantFiled: September 4, 2008Date of Patent: January 27, 2015Assignee: The United States of America, as represented by the Secretary, Department of Health and Human ServicesInventor: Sriram Subramaniam
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Publication number: 20150007371Abstract: A device is presented having reversibly changeable and optically readable optical properties. The device comprises a substrate having an electrically conductive surface and carrying a redox-active layer structure. The redox-active layer structure may be a monolayer or a multi-layer structure and is configured to have at least one predetermined electronic property including at least one of electrodensity and oxidation state. The electronic property of the layer structure defines an optical property of the structure thereby determining an optical response of the structure to certain incident light. This at least one electronic property is changeable by subjecting the redox-active layer structure to an electric field or to a redox-active material. The device thus enables effecting a change in said electronic property that results in a detectable change in the optical response of the layer structure.Type: ApplicationFiled: September 17, 2014Publication date: January 1, 2015Inventors: Milko E. VAN DER BOOM, Atindra D. SHUKLA, David ROSENBLATT, Tarkeshwar GUPTA
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Patent number: 8914910Abstract: The arrangement for calibrating probes comprises a source (10) of coherent photon radiation and at least one optically based strain sensor (12a) for measuring an amount of strain (?). The at least one optically based strain sensor is optically coupled to said source of coherent photon radiation. The arrangement further comprises at least one calibration lever (14) having a surface for placement of a tip (21) of a probe (2) to be calibrated, and that is mechanically coupled to the at least one optically based strain sensor for converting a force (F) exerted by said tip at said surface into an amount of strain in the optically based strain sensor. The arrangement further comprises at least one probe holder (24) for holding the probe (2) to be calibrated, the at least one probe holder having a controllable position in at least a direction (y) transverse to the surface of the calibration lever (14).Type: GrantFiled: December 21, 2012Date of Patent: December 16, 2014Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventor: Hamed Sadeghian Marnani
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Patent number: 8893311Abstract: A three-dimensional imaging and manipulation tool is provided. Techniques for creating a three-dimensional imaging and manipulation tool include combining high-resolution capability of a probe with three-dimensional imaging capability of a heater sensor. Also, techniques for positioning a nano-manipulation device relative to a surface are provided. The techniques include using a heater sensor for non-contact imaging, linking the heater sensor to the nano-manipulation device, and positioning the nano-manipulation relative device to a surface.Type: GrantFiled: January 7, 2009Date of Patent: November 18, 2014Assignee: International Business Machines CorporationInventors: Rachel Cannara, Bernd W. Gotsmann, Abu Sebastian
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Publication number: 20140338076Abstract: Embodiments of the present invention provide apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.Type: ApplicationFiled: July 29, 2014Publication date: November 13, 2014Applicant: NaugaNeedles, LLCInventor: Mehdi M. Yazdanpanah
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Patent number: 8859279Abstract: A cell detachment method for detaching only a desired cell from a plurality of cells cultured on a substrate under predetermined culture environment conditions by using a scanning probe microscope having a probe, comprising: observing the plural cells; specifying the cell to be detached; moving the probe onto the specified cell; and pressing the prove against the specified cell with a predetermined force so as to detach the cell from the substrate.Type: GrantFiled: June 7, 2007Date of Patent: October 14, 2014Assignee: Hitachi High-Tech Science CorporationInventors: Amiko Nihei, Masatsugu Shigeno, Yoshiharu Shirakawabe, Akira Inoue, Osamu Matsuzawa, Naoya Watanabe
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Publication number: 20140283230Abstract: According to an embodiment, a microprobe includes a base and a lever. The base includes a first electrode provided on a surface thereof. The lever is supported by the base and includes a second electrode and a third electrode. The second electrode is connected between the first electrode and the third electrode. The third electrode is formed to project from the second electrode in a first direction in a main surface of the lever. A width of the third electrode in a second direction perpendicular to the first direction in the main surface defines a width of an electrical contact area when a scanning operation is performed by use of the third electrode in a third direction perpendicular to the main surface.Type: ApplicationFiled: February 27, 2014Publication date: September 18, 2014Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Yongfang Li, Yasushi Tomizawa
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Publication number: 20140196180Abstract: A device is presented having reversibly changeable and optically readable optical properties. The device comprises a substrate having an electrically conductive surface and carrying a redox-active layer structure. The redox-active layer structure may be a monolayer or a multi-layer structure and is configured to have at least one predetermined electronic property including at least one of electrodensity and oxidation state. The electronic property of the layer structure defines an optical property of the structure thereby determining an optical response of the structure to certain incident light. This at least one electronic property is changeable by subjecting the redox-active layer structure to an electric field or to a redox-active material. The device thus enables effecting a change in said electronic property that results in a detectable change in the optical response of the layer structure.Type: ApplicationFiled: January 16, 2014Publication date: July 10, 2014Applicant: YEDA RESEARCH & DEVELOPMENT COMPANY LTD.Inventors: Milko E. VAN DER BOOM, Atindra D. Shukla, David Rosenblatt, Tarkeshwar Gupta
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Patent number: 8756711Abstract: The present invention relates to a method for classifying a tissue biopsy sample obtained from a tumor, comprising determining a plurality of stiffness values for said sample by measuring a plurality of points on the sample with a spatial resolution of at least 100 ?m and assigning the sample to a probability of malignancy. A sample showing a unimodal stiffness distribution is assigned to a high probability of being non-malignant, and a sample showing an at least bimodal stiffness distribution is assigned to a high probability of being malignant, wherein said stiffness distribution is characterized by a first peak exhibiting an at least two-fold higher stiffness value than a second peak. The present invention further relates to a system for classifying a tumor tissue biopsy sample.Type: GrantFiled: December 12, 2011Date of Patent: June 17, 2014Assignee: Universitat BaselInventors: Marija Plodinec, Roderick Lim, Marko Loparic
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Patent number: 8739311Abstract: A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical detection of the force gradient between the interaction of the optically driven molecular dipole/multipole and its mirror image in a Platinum coated scanning probe tip. The method is extendable to obtain nanoscale spectroscopic information ranging from infrared to UV and RF.Type: GrantFiled: August 11, 2011Date of Patent: May 27, 2014Inventors: H. Kumar Wickramasinghe, Indrajith Rajapaksa
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Patent number: 8689361Abstract: A probe for atomic force microscopy may be provided by depositing a thin film onto a wafer substrate and etching the substrate to leave the thin film behind in the form of a handle, a cantilever, and a probe tip in the cantilever. In some embodiments, a thin film substrate for the probe may be accomplished by forming the probe mold on a first wafer, bonding a second wafer onto the first wafer, and patterning out the second wafer to define the substrate for the probe on the first wafer. The thin film may be deposited onto the exposed portions of the first wafer. Thereafter, portions of the first and second wafers may be removed to leave behind the probe.Type: GrantFiled: February 5, 2013Date of Patent: April 1, 2014Assignee: Oicmicro, LLCInventor: Salleh Ismail
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Patent number: 8621661Abstract: Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector.Type: GrantFiled: January 10, 2011Date of Patent: December 31, 2013Assignee: Korea Research Institute of Standards and ScienceInventors: Seung Hoon Nahm, Hoon Sik Jang, Sang Gu Jeon, Min Seok Kim
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Patent number: 8607622Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.Type: GrantFiled: July 18, 2011Date of Patent: December 17, 2013Assignee: Anasys Instruments CorporationInventors: Alexandre Dazzi, Rui Prazeres, Kevin Kjoller, Michael Reading
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Patent number: 8434159Abstract: Provided are an AFM measuring method and a system thereof. The tip of a cantilever is provided to a plurality of points on a substrate, to which incident light is radiated from a light source. Scattered light is generated between the tip of the cantilever and the substrate by the incident light and the intensity of the scattered light is measured. The measured intensity of the scattered light is input to a data processing unit so as to find a point where the intensity of the incident is highest. The tip of the cantilever is moved to the point where the intensity of the incident light is highest.Type: GrantFiled: April 5, 2010Date of Patent: April 30, 2013Assignee: Nanofocus, Inc.Inventors: Jae Wan Hong, Won Young Song
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Patent number: 8402819Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.Type: GrantFiled: December 5, 2008Date of Patent: March 26, 2013Assignee: Anasys Instruments, Inc.Inventors: A. Dazzi Dazzi, Clotilde Policar, Kevin Kjoller, Michael Reading, Konstantin Vodopyanov, Craig Prater
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Patent number: 8347411Abstract: The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.Type: GrantFiled: July 14, 2006Date of Patent: January 1, 2013Assignee: Specs Zürich GmbHInventors: Dominik Ziegler, Andreas Christian Stemmer, Jorg Rychen
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Patent number: 8322220Abstract: A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.Type: GrantFiled: May 12, 2008Date of Patent: December 4, 2012Assignee: Veeco Instruments Inc.Inventors: Craig Prater, Chanmin Su
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Patent number: 8327460Abstract: The present invention allows simple and sensitive detection of microimpurities, microdefects, and corrosion starting points which may be present in a material. A probe microscope has a function to sense ions diffused from a specimen in a liquid. A probe is caused to scan over a predetermined range on a specimen. Then, the probe is fixed to a particular position in a liquid so as to set the distance between the specimen and the probe to a given value at which the microstructure of the specimen surface cannot be observed. Thereafter, one of the current between the probe and a counter electrode and the potential between the probe and a reference electrode is controlled, and the other of the current and potential which varies in accordance with the control is measured. Thus, ions diffused from the specimen are sensed.Type: GrantFiled: April 7, 2010Date of Patent: December 4, 2012Assignee: Hitachi, Ltd.Inventors: Kyoko Honbo, Katsumi Mabuchi, Motoko Harada
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Publication number: 20120255073Abstract: A scanning probe lithography (SPL) apparatus, an SPL method, and a material having a surface thickness patterned according to the SPL method. The apparatus includes: two or more probes with respective shapes, where the respective shapes are different and the respective shapes form, in operation, different patterns in a thickness of a surface of a material processed with the apparatus.Type: ApplicationFiled: October 13, 2010Publication date: October 4, 2012Inventors: Michel Despont, Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll, David Santos Pires, Peter Vettiger
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Patent number: 8276211Abstract: The invention provides methods of using positionally controlled molecular tools in an inert environment (such as ultra high vacuum) to fabricate complex atomically precise structures, including diamond, graphite, nanotubes, fullerenes, additional sets of the selfsame molecular tools, and others. Molecular tools have atomically precise tooltips which interact directly with a workpiece to add, remove, and modify specific atoms and groups of atoms, and have handles by which they can be held and positioned; tools can be recharged after use. Specific tooltips are brought into contact with and bond to specific feedstock molecules distributed on a presentation surface, and then transfer said feedstock molecules to specific atomic sites on a workpiece using mechanosynthetic chemical reactions. Specific sites on a workpiece can be made chemically reactive, facilitating the transfer of specific groups to them.Type: GrantFiled: July 21, 2011Date of Patent: September 25, 2012Inventors: Robert A. Freitas, Jr., Ralph C. Merkle
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Patent number: 8245316Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.Type: GrantFiled: December 15, 2006Date of Patent: August 14, 2012Assignee: Specs Zürich GmbHInventor: Jörg Rychen
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Patent number: 8196458Abstract: A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.Type: GrantFiled: March 23, 2010Date of Patent: June 12, 2012Assignee: Asylum Research CorporationInventors: Flavio Alejandro Bonilla, Roger Proksch, Jason Cleveland, Tim Sauter
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Patent number: 8178836Abstract: A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample.Type: GrantFiled: June 3, 2010Date of Patent: May 15, 2012Assignee: Hitachi High-Technologies CorporationInventors: Tatsuaki Ishijima, Katsuhiro Sasada, Ritsuo Fukaya
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Patent number: 8171568Abstract: The invention provides methods of using positionally controlled molecular tools in an inert environment (such as ultra high vacuum) to fabricate complex atomically precise structures, including diamond, graphite, nanotubes, fullerenes, additional sets of the selfsame molecular tools, and others. Molecular tools have atomically precise tooltips which interact directly with a workpiece to add, remove, and modify specific atoms and groups of atoms, and have handles by which they can be held and positioned; tools can be recharged after use. Specific tooltips are brought into contact with and bond to specific feedstock molecules distributed on a presentation surface, and then transfer said feedstock molecules to specific atomic sites on a workpiece using mechanosynthetic chemical reactions. Specific sites on a workpiece can be made chemically reactive, facilitating the transfer of specific groups to them.Type: GrantFiled: September 4, 2008Date of Patent: May 1, 2012Inventors: Robert A. Freitas, Ralph C. Merkle
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Patent number: 8161805Abstract: A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.Type: GrantFiled: March 4, 2009Date of Patent: April 24, 2012Assignee: Bruker Nano, Inc.Inventors: Chanmin Su, Nghi Phan, Craig Prater
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Patent number: 8028343Abstract: A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.Type: GrantFiled: January 29, 2009Date of Patent: September 27, 2011Assignee: Nanonmechanics, Inc.Inventors: Warren C. Oliver, John Swindernan, Jennifer Hay, Karmit Parks
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Patent number: 8001830Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.Type: GrantFiled: May 15, 2007Date of Patent: August 23, 2011Assignee: Anasys Instruments, Inc.Inventors: Alexandre Dazzi, Rui Prazeres, Kevin Kjoller, Michael Reading
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Patent number: 7997123Abstract: A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the microchannel to receive material therefrom. The microchannel is communicated to a reservoir that supplies material to the microchannel. One or more reservoir-fed cantilevers may be formed on a semiconductor chip substrate. A sealing layer preferably is disposed on one of the first and second thin films and overlies outermost edges of the first and second thin films to seal the outermost edges against material leakage. Each cantilever includes an actuator, such as for example a piezoelectric actuator, to impart bending motion thereto. The microtip includes a pointed pyramidal or conical shaped microtip body and an annular shell spaced about the pointed microtip body to define a material-dispensing annulus thereabout.Type: GrantFiled: June 19, 2007Date of Patent: August 16, 2011Assignee: Northwestern UniversityInventors: Horacio D. Espinosa, Nicolaie A. Moldovan, Keun-Ho Kim
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Publication number: 20110185458Abstract: Force, pressure, or stiffness measurement or calibration can be provided, such as by using a graphene or other sheet membrane, which can provide a specified number of monolayers suspended over a substantially circular well. In an example, the apparatus can include a substrate, including a substantially circular well. A deformable sheet membrane can be suspended over the well. The membrane can be configured to include a specified integer number of one or more monolayers. A storage medium can comprise accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure.Type: ApplicationFiled: August 6, 2009Publication date: July 28, 2011Applicant: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORKInventors: Jeffrey William Kysar, James C. Hone, Changgu Lee, Xiaoding Wei
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Patent number: 7977636Abstract: A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.Type: GrantFiled: August 12, 2008Date of Patent: July 12, 2011Assignee: Anasys Instruments, Inc.Inventor: Markus B. Raschke
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Patent number: 7958564Abstract: A scanning measurement instrument is capable of simultaneously achieving both higher accuracy and higher speed in autonomous scanning measurement. The instrument includes a path information holding unit for holding information about the path of the center position of a tip of a scanning probe at past tip center positions with respect to the current tip center position during autonomous scanning measurement performed with the scanning probe; a path reference direction setting unit for setting an approximate straight line direction of the path as a path reference direction; a traveling direction setting unit for setting the path reference direction as a traveling direction; a movement control unit for controlling a moving unit such that the scanning probe is moved in the traveling direction; and a normal direction setting unit for setting the normal direction of a measurement surface according to the traveling direction.Type: GrantFiled: February 19, 2009Date of Patent: June 7, 2011Assignee: Mitutoyo CorporationInventors: Takashi Noda, Hiroshi Kamitani, Naoya Kikuchi
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Patent number: 7958566Abstract: Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.Type: GrantFiled: December 20, 2007Date of Patent: June 7, 2011Assignee: Korea Institute of Machinery & MaterialsInventors: Hak-Joo Lee, Seung Min Hyun, Jae Hyun Kim, Jung Yup Kim, Seung Woo Han, Jung Min Park, Byung Ik Choi
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Publication number: 20110078834Abstract: The present invention provides a microcantilever capable of independently measuring and/or controlling the electrical potential and/or temperature of a surface with nanometer scale position resolution. The present invention also provides methods of manipulating, imaging, and/or mapping a surface or the properties of a surface with a microcantilever. The microcantilevers of the present invention are also capable of independently measuring and/or controlling the electrical potential and/or temperature of a gas or liquid. The devices and methods of the present invention are useful for applications including gas, liquid, and surface sensing, micro- and nano-fabrication, imaging and mapping of surface contours or surface properties.Type: ApplicationFiled: January 30, 2009Publication date: March 31, 2011Applicant: The Board of Trustees of the University of IllinoisInventor: William P. King
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Publication number: 20110014378Abstract: Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.Type: ApplicationFiled: July 16, 2010Publication date: January 20, 2011Inventors: John Edward BUSSAN, Sergey V. Rozhok, Vadim Val-Khvalabov, Joseph S. Fragala, Jason R. Haaheim, Michael R. Nelson, Edward R. Solheim, Javad M. Vakil
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Publication number: 20100330345Abstract: The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” Capillary transport of molecules from the SPM tip to the solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the fabrication of a variety of microscale and nanoscale devices. The invention also provides substrates patterned by DPN, including submicrometer combinatorial arrays, and kits, devices and software for performing DPN. The invention further provides a method of performing AFM imaging in air.Type: ApplicationFiled: October 31, 2007Publication date: December 30, 2010Inventors: Chad A MIRKIN, Richard Piner, Seunghun Hong
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Patent number: 7854016Abstract: A process manufactures a probe intended to interact with a storage medium of a probe-storage system, wherein a sacrificial layer is deposited on top of a substrate; a hole is formed in the sacrificial layer; a mold layer is deposited; the mold layer is etched via the technique for forming spacers so as to form a mold region delimiting an opening having an area decreasing towards the substrate. Then a stack of conductive layers is deposited on top of the sacrificial layer, the stack is etched so as to form a suspended structure, formed by a pair of supporting arms arranged to form a V, and an interaction tip projecting monolithically from the supporting arms. Then a stiffening structure is formed, of insulating material, and the suspended structure is fixed to a supporting wafer. The substrate, the sacrificial layer, and, last, the mold region are then removed.Type: GrantFiled: December 18, 2007Date of Patent: December 14, 2010Assignee: STMicroelectronics S.r.l.Inventor: Agostino Pirovano
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Patent number: 7849516Abstract: A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex, and an actuator for lateral positioning of the tip; the actuator comprising a thermally switchable element and a heating element for heating the thermally switchable element; and heating the heating element to a given temperature so as to locally soften a portion of the substrate and applying a force to the softened portion of the substrate through the tip so as to create one or more indentation marks in the softened portion of the substrate.Type: GrantFiled: August 7, 2008Date of Patent: December 7, 2010Assignee: International Business Machines CorporationInventors: Gerd Binnig, Evangelos Elefheriou, Mark Lantz
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Patent number: 7804067Abstract: When a characterization of a tip of a diamond stylus for working is needed, the tip of the diamond stylus for working used is observed by a high resolution scanning electron microscope of a high acceleration voltage under a steam atmosphere. When the tip of the diamond stylus for working is worn or when a shape of the tip of the stylus needs to be changed, the tip of the diamond stylus for working is worked by selectively irradiating an electron beam only to a necessary region by increasing an amount of steam and an amount of a current of the electron beam. When a working chip is strongly adhered to the diamond stylus for working and needs to be removed, the electron beam is selectively irradiated only to the working chip adhered to the tip of the diamond stylus for working to be removed under a xenon fluoride atmosphere.Type: GrantFiled: December 6, 2007Date of Patent: September 28, 2010Assignee: SII NanoTechnology Inc.Inventor: Osamu Takaoka
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Publication number: 20100239775Abstract: In the present invention, it has been discovered that Scanning Tunneling Microscopy is a useful tool for imaging a surface on a nanometer scale and/or fabricating on a nano-sized scale by transferring a particle (e.g., protein) from one location to another. This is accomplished by a method of transferring a material from a first location to a second location comprising the steps of providing a stylus, applying a bias to the stylus, providing a surface, and changing the bias of the stylus such that the material is transferred from the first location to the second location.Type: ApplicationFiled: May 28, 2008Publication date: September 23, 2010Inventors: Chunqing Zhou, Sharon G. Roscoe
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Patent number: 7784107Abstract: An system for the measurement, analysis, and imaging of objects and surfaces in a variety of sizes is provided. In the most general terms, the invention relates to a device capable of measuring an object using a combination of low-resolution optical, high-resolution optical, SPM/AFM and/or material analysis techniques. The data gathered at various resolutions is correlated to absolute locations on the object's surface, allowing selected regions of the object's surface to be analyzed to any desired degree of precision (down to atomic scale). In a specific embodiment of the present invention, a system for collecting measurement data regarding an object of interest is disclosed. The system includes a sample stage adapted to hold the object of interest. The system further includes an optical lens assembly disposed above the sample stage. The optical lens assembly is configured to capture an optical image of the object of interest.Type: GrantFiled: June 1, 2007Date of Patent: August 24, 2010Inventor: Victor B. Kley
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Patent number: 7745782Abstract: A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample.Type: GrantFiled: February 27, 2008Date of Patent: June 29, 2010Assignee: Hitachi High-Technologies CorporationInventors: Tatsuaki Ishijima, Katsuhiro Sasada, Ritsuo Fukaya
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Patent number: 7735358Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.Type: GrantFiled: June 15, 2007Date of Patent: June 15, 2010Assignee: Insitutec, Inc.Inventors: Marcin B. Bauza, Shane C. Woody, Stuart T. Smith
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Publication number: 20100100991Abstract: A device to detect polarization of a ferroelectric material comprises a probe tip, a charge amplifier electrically connected with the probe tip to convert a charge coupled to the probe tip from the ferroelectric material into an output voltage. The ferroelectric material is oscillated at a reference signal so that a charge is coupled to the probe tip and converted to an output voltage by the charge amplifier. A lock-in amplifier that receives the reference voltage and applies the reference voltage to the output voltage to extract a signal output representing the polarization.Type: ApplicationFiled: October 20, 2008Publication date: April 22, 2010Applicant: NANOCHIP, INC.Inventors: Byong M. Kim, Robert N. Stark, Quan Tran, Wade Hassler, Qing Ma, Donald E. Adams, Yevgeny V. Anoikin
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Patent number: 7638767Abstract: There is provided an electron microscope which can clearly detect a microscopic unevenness in a sample. According to a scanning electron microscope, when luminance signals from one pair of backscattered electron detectors are given by L and R, and when a luminance signal from a scattered electron detector is given by S, an adjustment value Lc of L and an adjustment value Rc of R are calculated by using primary homogeneous expressions of L, R, and S.Type: GrantFiled: January 19, 2007Date of Patent: December 29, 2009Assignee: Hitachi High-Technologies CorporationInventors: Kohei Yamaguchi, Kenji Obara
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Patent number: RE43900Abstract: The invention describes a procedure for the examination of objects by the means of ultrasound waves whereby a volume-of-interest is scanned by a 3D-ultrasound-probe by moving a transmitter/receiver beam in a scan plane within selectable limits. This B-mode scan plane is also simultaneously moved in a direction across to this scan plane. The transmitting of sound pulses and acquiring the echo-signals is done more or less continuously during the movement in B-plane and across to it The echo-signals are stored in a volume memory on addresses which correspond to the spatial position of the echo-generating structure inside the object. These stored data-sets are evaluated by a 3D-processor and are represented on at least one display unit by different algorithms with selectable parameters. Important is that the acquisition and the representation is done continuously.Type: GrantFiled: August 20, 2002Date of Patent: January 1, 2013Assignee: GE Medical Systems Kretztechnik GmbH & Co. OHGInventors: Franz Wiesauer, Erwin Fosodeder, Arthur Gritzky