Applications Of Scanning-probe Techniques Other Than Spm (epo) Patents (Class 850/62)
  • Patent number: 8950011
    Abstract: A mechanism is provided for sequencing a biopolymer. The biopolymer is traversed from a first medium to a second medium. The biopolymer includes bases. As the biopolymer traverses from the first medium to the second medium, different forces are measured corresponding to each of the bases. The bases are distinguished from one another according to the different measured forces which are measured for each of the bases.
    Type: Grant
    Filed: May 22, 2013
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Venkat K. Balagurusamy, Stanislav Polonsky
  • Patent number: 8950010
    Abstract: The piezoelectric response of a sample (3) is measured by applying a scanning probe microscope, whose probe (2) is in contact with the sample (3). The probe is mounted to a cantilever (1) and an actuator (5) is driven by a feedback loop (7, 11, 12, 4) to oscillate at a resonance frequency f. An AC voltage with principally the same frequency f but with a phase (with respect to the oscillation) and/or amplitude varying periodically with a frequency fmod is applied to the probe for generating a piezoelectric response of the sample (3). A lock-in detector (20) measures the spectral components at the frequency fmod of the control signals (K, f) of the feedback loop. These components describe the piezoelectric response and can be recorded as output signals of the device. The method allows a reliable operation of the detector oscillator resonator (1) at its resonance frequency and provides a high sensitivity.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: February 3, 2015
    Assignee: Specs Zürich GmbH
    Inventor: Jörg Rychen
  • Patent number: 8941057
    Abstract: The invention provides a probe and a method of obtaining a three-dimensional compositional map of one or more targets in a biological sample, or a portion thereof, comprising: (a) milling a surface layer of a biological sample with a focused ion beam, thereby creating a newly exposed surface layer of the biological sample; (b) imaging the newly exposed surface layer of the biological sample; (c) identifying the chemical composition of the newly exposed surface layer of the biological sample, or a portion thereof, with a mass spectrometer; and (d) repeating (a) to (c) until a three-dimensional compositional map of one or more targets in the biological sample, or portion thereof, is obtained. Uses of the three-dimensional map obtained from the inventive method are further provided.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: January 27, 2015
    Assignee: The United States of America, as represented by the Secretary, Department of Health and Human Services
    Inventor: Sriram Subramaniam
  • Publication number: 20150007371
    Abstract: A device is presented having reversibly changeable and optically readable optical properties. The device comprises a substrate having an electrically conductive surface and carrying a redox-active layer structure. The redox-active layer structure may be a monolayer or a multi-layer structure and is configured to have at least one predetermined electronic property including at least one of electrodensity and oxidation state. The electronic property of the layer structure defines an optical property of the structure thereby determining an optical response of the structure to certain incident light. This at least one electronic property is changeable by subjecting the redox-active layer structure to an electric field or to a redox-active material. The device thus enables effecting a change in said electronic property that results in a detectable change in the optical response of the layer structure.
    Type: Application
    Filed: September 17, 2014
    Publication date: January 1, 2015
    Inventors: Milko E. VAN DER BOOM, Atindra D. SHUKLA, David ROSENBLATT, Tarkeshwar GUPTA
  • Patent number: 8914910
    Abstract: The arrangement for calibrating probes comprises a source (10) of coherent photon radiation and at least one optically based strain sensor (12a) for measuring an amount of strain (?). The at least one optically based strain sensor is optically coupled to said source of coherent photon radiation. The arrangement further comprises at least one calibration lever (14) having a surface for placement of a tip (21) of a probe (2) to be calibrated, and that is mechanically coupled to the at least one optically based strain sensor for converting a force (F) exerted by said tip at said surface into an amount of strain in the optically based strain sensor. The arrangement further comprises at least one probe holder (24) for holding the probe (2) to be calibrated, the at least one probe holder having a controllable position in at least a direction (y) transverse to the surface of the calibration lever (14).
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: December 16, 2014
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventor: Hamed Sadeghian Marnani
  • Patent number: 8893311
    Abstract: A three-dimensional imaging and manipulation tool is provided. Techniques for creating a three-dimensional imaging and manipulation tool include combining high-resolution capability of a probe with three-dimensional imaging capability of a heater sensor. Also, techniques for positioning a nano-manipulation device relative to a surface are provided. The techniques include using a heater sensor for non-contact imaging, linking the heater sensor to the nano-manipulation device, and positioning the nano-manipulation relative device to a surface.
    Type: Grant
    Filed: January 7, 2009
    Date of Patent: November 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Rachel Cannara, Bernd W. Gotsmann, Abu Sebastian
  • Publication number: 20140338076
    Abstract: Embodiments of the present invention provide apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.
    Type: Application
    Filed: July 29, 2014
    Publication date: November 13, 2014
    Applicant: NaugaNeedles, LLC
    Inventor: Mehdi M. Yazdanpanah
  • Patent number: 8859279
    Abstract: A cell detachment method for detaching only a desired cell from a plurality of cells cultured on a substrate under predetermined culture environment conditions by using a scanning probe microscope having a probe, comprising: observing the plural cells; specifying the cell to be detached; moving the probe onto the specified cell; and pressing the prove against the specified cell with a predetermined force so as to detach the cell from the substrate.
    Type: Grant
    Filed: June 7, 2007
    Date of Patent: October 14, 2014
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Amiko Nihei, Masatsugu Shigeno, Yoshiharu Shirakawabe, Akira Inoue, Osamu Matsuzawa, Naoya Watanabe
  • Publication number: 20140283230
    Abstract: According to an embodiment, a microprobe includes a base and a lever. The base includes a first electrode provided on a surface thereof. The lever is supported by the base and includes a second electrode and a third electrode. The second electrode is connected between the first electrode and the third electrode. The third electrode is formed to project from the second electrode in a first direction in a main surface of the lever. A width of the third electrode in a second direction perpendicular to the first direction in the main surface defines a width of an electrical contact area when a scanning operation is performed by use of the third electrode in a third direction perpendicular to the main surface.
    Type: Application
    Filed: February 27, 2014
    Publication date: September 18, 2014
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yongfang Li, Yasushi Tomizawa
  • Publication number: 20140196180
    Abstract: A device is presented having reversibly changeable and optically readable optical properties. The device comprises a substrate having an electrically conductive surface and carrying a redox-active layer structure. The redox-active layer structure may be a monolayer or a multi-layer structure and is configured to have at least one predetermined electronic property including at least one of electrodensity and oxidation state. The electronic property of the layer structure defines an optical property of the structure thereby determining an optical response of the structure to certain incident light. This at least one electronic property is changeable by subjecting the redox-active layer structure to an electric field or to a redox-active material. The device thus enables effecting a change in said electronic property that results in a detectable change in the optical response of the layer structure.
    Type: Application
    Filed: January 16, 2014
    Publication date: July 10, 2014
    Applicant: YEDA RESEARCH & DEVELOPMENT COMPANY LTD.
    Inventors: Milko E. VAN DER BOOM, Atindra D. Shukla, David Rosenblatt, Tarkeshwar Gupta
  • Patent number: 8756711
    Abstract: The present invention relates to a method for classifying a tissue biopsy sample obtained from a tumor, comprising determining a plurality of stiffness values for said sample by measuring a plurality of points on the sample with a spatial resolution of at least 100 ?m and assigning the sample to a probability of malignancy. A sample showing a unimodal stiffness distribution is assigned to a high probability of being non-malignant, and a sample showing an at least bimodal stiffness distribution is assigned to a high probability of being malignant, wherein said stiffness distribution is characterized by a first peak exhibiting an at least two-fold higher stiffness value than a second peak. The present invention further relates to a system for classifying a tumor tissue biopsy sample.
    Type: Grant
    Filed: December 12, 2011
    Date of Patent: June 17, 2014
    Assignee: Universitat Basel
    Inventors: Marija Plodinec, Roderick Lim, Marko Loparic
  • Patent number: 8739311
    Abstract: A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical detection of the force gradient between the interaction of the optically driven molecular dipole/multipole and its mirror image in a Platinum coated scanning probe tip. The method is extendable to obtain nanoscale spectroscopic information ranging from infrared to UV and RF.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: May 27, 2014
    Inventors: H. Kumar Wickramasinghe, Indrajith Rajapaksa
  • Patent number: 8689361
    Abstract: A probe for atomic force microscopy may be provided by depositing a thin film onto a wafer substrate and etching the substrate to leave the thin film behind in the form of a handle, a cantilever, and a probe tip in the cantilever. In some embodiments, a thin film substrate for the probe may be accomplished by forming the probe mold on a first wafer, bonding a second wafer onto the first wafer, and patterning out the second wafer to define the substrate for the probe on the first wafer. The thin film may be deposited onto the exposed portions of the first wafer. Thereafter, portions of the first and second wafers may be removed to leave behind the probe.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: April 1, 2014
    Assignee: Oicmicro, LLC
    Inventor: Salleh Ismail
  • Patent number: 8621661
    Abstract: Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector.
    Type: Grant
    Filed: January 10, 2011
    Date of Patent: December 31, 2013
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Seung Hoon Nahm, Hoon Sik Jang, Sang Gu Jeon, Min Seok Kim
  • Patent number: 8607622
    Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
    Type: Grant
    Filed: July 18, 2011
    Date of Patent: December 17, 2013
    Assignee: Anasys Instruments Corporation
    Inventors: Alexandre Dazzi, Rui Prazeres, Kevin Kjoller, Michael Reading
  • Patent number: 8434159
    Abstract: Provided are an AFM measuring method and a system thereof. The tip of a cantilever is provided to a plurality of points on a substrate, to which incident light is radiated from a light source. Scattered light is generated between the tip of the cantilever and the substrate by the incident light and the intensity of the scattered light is measured. The measured intensity of the scattered light is input to a data processing unit so as to find a point where the intensity of the incident is highest. The tip of the cantilever is moved to the point where the intensity of the incident light is highest.
    Type: Grant
    Filed: April 5, 2010
    Date of Patent: April 30, 2013
    Assignee: Nanofocus, Inc.
    Inventors: Jae Wan Hong, Won Young Song
  • Patent number: 8402819
    Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
    Type: Grant
    Filed: December 5, 2008
    Date of Patent: March 26, 2013
    Assignee: Anasys Instruments, Inc.
    Inventors: A. Dazzi Dazzi, Clotilde Policar, Kevin Kjoller, Michael Reading, Konstantin Vodopyanov, Craig Prater
  • Patent number: 8347411
    Abstract: The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: January 1, 2013
    Assignee: Specs Zürich GmbH
    Inventors: Dominik Ziegler, Andreas Christian Stemmer, Jorg Rychen
  • Patent number: 8327460
    Abstract: The present invention allows simple and sensitive detection of microimpurities, microdefects, and corrosion starting points which may be present in a material. A probe microscope has a function to sense ions diffused from a specimen in a liquid. A probe is caused to scan over a predetermined range on a specimen. Then, the probe is fixed to a particular position in a liquid so as to set the distance between the specimen and the probe to a given value at which the microstructure of the specimen surface cannot be observed. Thereafter, one of the current between the probe and a counter electrode and the potential between the probe and a reference electrode is controlled, and the other of the current and potential which varies in accordance with the control is measured. Thus, ions diffused from the specimen are sensed.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: December 4, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Kyoko Honbo, Katsumi Mabuchi, Motoko Harada
  • Patent number: 8322220
    Abstract: A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.
    Type: Grant
    Filed: May 12, 2008
    Date of Patent: December 4, 2012
    Assignee: Veeco Instruments Inc.
    Inventors: Craig Prater, Chanmin Su
  • Publication number: 20120255073
    Abstract: A scanning probe lithography (SPL) apparatus, an SPL method, and a material having a surface thickness patterned according to the SPL method. The apparatus includes: two or more probes with respective shapes, where the respective shapes are different and the respective shapes form, in operation, different patterns in a thickness of a surface of a material processed with the apparatus.
    Type: Application
    Filed: October 13, 2010
    Publication date: October 4, 2012
    Inventors: Michel Despont, Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll, David Santos Pires, Peter Vettiger
  • Patent number: 8276211
    Abstract: The invention provides methods of using positionally controlled molecular tools in an inert environment (such as ultra high vacuum) to fabricate complex atomically precise structures, including diamond, graphite, nanotubes, fullerenes, additional sets of the selfsame molecular tools, and others. Molecular tools have atomically precise tooltips which interact directly with a workpiece to add, remove, and modify specific atoms and groups of atoms, and have handles by which they can be held and positioned; tools can be recharged after use. Specific tooltips are brought into contact with and bond to specific feedstock molecules distributed on a presentation surface, and then transfer said feedstock molecules to specific atomic sites on a workpiece using mechanosynthetic chemical reactions. Specific sites on a workpiece can be made chemically reactive, facilitating the transfer of specific groups to them.
    Type: Grant
    Filed: July 21, 2011
    Date of Patent: September 25, 2012
    Inventors: Robert A. Freitas, Jr., Ralph C. Merkle
  • Patent number: 8245316
    Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: August 14, 2012
    Assignee: Specs Zürich GmbH
    Inventor: Jörg Rychen
  • Patent number: 8196458
    Abstract: A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.
    Type: Grant
    Filed: March 23, 2010
    Date of Patent: June 12, 2012
    Assignee: Asylum Research Corporation
    Inventors: Flavio Alejandro Bonilla, Roger Proksch, Jason Cleveland, Tim Sauter
  • Patent number: 8178836
    Abstract: A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample.
    Type: Grant
    Filed: June 3, 2010
    Date of Patent: May 15, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tatsuaki Ishijima, Katsuhiro Sasada, Ritsuo Fukaya
  • Patent number: 8171568
    Abstract: The invention provides methods of using positionally controlled molecular tools in an inert environment (such as ultra high vacuum) to fabricate complex atomically precise structures, including diamond, graphite, nanotubes, fullerenes, additional sets of the selfsame molecular tools, and others. Molecular tools have atomically precise tooltips which interact directly with a workpiece to add, remove, and modify specific atoms and groups of atoms, and have handles by which they can be held and positioned; tools can be recharged after use. Specific tooltips are brought into contact with and bond to specific feedstock molecules distributed on a presentation surface, and then transfer said feedstock molecules to specific atomic sites on a workpiece using mechanosynthetic chemical reactions. Specific sites on a workpiece can be made chemically reactive, facilitating the transfer of specific groups to them.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: May 1, 2012
    Inventors: Robert A. Freitas, Ralph C. Merkle
  • Patent number: 8161805
    Abstract: A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.
    Type: Grant
    Filed: March 4, 2009
    Date of Patent: April 24, 2012
    Assignee: Bruker Nano, Inc.
    Inventors: Chanmin Su, Nghi Phan, Craig Prater
  • Patent number: 8028343
    Abstract: A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.
    Type: Grant
    Filed: January 29, 2009
    Date of Patent: September 27, 2011
    Assignee: Nanonmechanics, Inc.
    Inventors: Warren C. Oliver, John Swindernan, Jennifer Hay, Karmit Parks
  • Patent number: 8001830
    Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.
    Type: Grant
    Filed: May 15, 2007
    Date of Patent: August 23, 2011
    Assignee: Anasys Instruments, Inc.
    Inventors: Alexandre Dazzi, Rui Prazeres, Kevin Kjoller, Michael Reading
  • Patent number: 7997123
    Abstract: A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the microchannel to receive material therefrom. The microchannel is communicated to a reservoir that supplies material to the microchannel. One or more reservoir-fed cantilevers may be formed on a semiconductor chip substrate. A sealing layer preferably is disposed on one of the first and second thin films and overlies outermost edges of the first and second thin films to seal the outermost edges against material leakage. Each cantilever includes an actuator, such as for example a piezoelectric actuator, to impart bending motion thereto. The microtip includes a pointed pyramidal or conical shaped microtip body and an annular shell spaced about the pointed microtip body to define a material-dispensing annulus thereabout.
    Type: Grant
    Filed: June 19, 2007
    Date of Patent: August 16, 2011
    Assignee: Northwestern University
    Inventors: Horacio D. Espinosa, Nicolaie A. Moldovan, Keun-Ho Kim
  • Publication number: 20110185458
    Abstract: Force, pressure, or stiffness measurement or calibration can be provided, such as by using a graphene or other sheet membrane, which can provide a specified number of monolayers suspended over a substantially circular well. In an example, the apparatus can include a substrate, including a substantially circular well. A deformable sheet membrane can be suspended over the well. The membrane can be configured to include a specified integer number of one or more monolayers. A storage medium can comprise accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure.
    Type: Application
    Filed: August 6, 2009
    Publication date: July 28, 2011
    Applicant: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
    Inventors: Jeffrey William Kysar, James C. Hone, Changgu Lee, Xiaoding Wei
  • Patent number: 7977636
    Abstract: A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: July 12, 2011
    Assignee: Anasys Instruments, Inc.
    Inventor: Markus B. Raschke
  • Patent number: 7958564
    Abstract: A scanning measurement instrument is capable of simultaneously achieving both higher accuracy and higher speed in autonomous scanning measurement. The instrument includes a path information holding unit for holding information about the path of the center position of a tip of a scanning probe at past tip center positions with respect to the current tip center position during autonomous scanning measurement performed with the scanning probe; a path reference direction setting unit for setting an approximate straight line direction of the path as a path reference direction; a traveling direction setting unit for setting the path reference direction as a traveling direction; a movement control unit for controlling a moving unit such that the scanning probe is moved in the traveling direction; and a normal direction setting unit for setting the normal direction of a measurement surface according to the traveling direction.
    Type: Grant
    Filed: February 19, 2009
    Date of Patent: June 7, 2011
    Assignee: Mitutoyo Corporation
    Inventors: Takashi Noda, Hiroshi Kamitani, Naoya Kikuchi
  • Patent number: 7958566
    Abstract: Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: June 7, 2011
    Assignee: Korea Institute of Machinery & Materials
    Inventors: Hak-Joo Lee, Seung Min Hyun, Jae Hyun Kim, Jung Yup Kim, Seung Woo Han, Jung Min Park, Byung Ik Choi
  • Publication number: 20110078834
    Abstract: The present invention provides a microcantilever capable of independently measuring and/or controlling the electrical potential and/or temperature of a surface with nanometer scale position resolution. The present invention also provides methods of manipulating, imaging, and/or mapping a surface or the properties of a surface with a microcantilever. The microcantilevers of the present invention are also capable of independently measuring and/or controlling the electrical potential and/or temperature of a gas or liquid. The devices and methods of the present invention are useful for applications including gas, liquid, and surface sensing, micro- and nano-fabrication, imaging and mapping of surface contours or surface properties.
    Type: Application
    Filed: January 30, 2009
    Publication date: March 31, 2011
    Applicant: The Board of Trustees of the University of Illinois
    Inventor: William P. King
  • Publication number: 20110014378
    Abstract: Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.
    Type: Application
    Filed: July 16, 2010
    Publication date: January 20, 2011
    Inventors: John Edward BUSSAN, Sergey V. Rozhok, Vadim Val-Khvalabov, Joseph S. Fragala, Jason R. Haaheim, Michael R. Nelson, Edward R. Solheim, Javad M. Vakil
  • Publication number: 20100330345
    Abstract: The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” Capillary transport of molecules from the SPM tip to the solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the fabrication of a variety of microscale and nanoscale devices. The invention also provides substrates patterned by DPN, including submicrometer combinatorial arrays, and kits, devices and software for performing DPN. The invention further provides a method of performing AFM imaging in air.
    Type: Application
    Filed: October 31, 2007
    Publication date: December 30, 2010
    Inventors: Chad A MIRKIN, Richard Piner, Seunghun Hong
  • Patent number: 7854016
    Abstract: A process manufactures a probe intended to interact with a storage medium of a probe-storage system, wherein a sacrificial layer is deposited on top of a substrate; a hole is formed in the sacrificial layer; a mold layer is deposited; the mold layer is etched via the technique for forming spacers so as to form a mold region delimiting an opening having an area decreasing towards the substrate. Then a stack of conductive layers is deposited on top of the sacrificial layer, the stack is etched so as to form a suspended structure, formed by a pair of supporting arms arranged to form a V, and an interaction tip projecting monolithically from the supporting arms. Then a stiffening structure is formed, of insulating material, and the suspended structure is fixed to a supporting wafer. The substrate, the sacrificial layer, and, last, the mold region are then removed.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: December 14, 2010
    Assignee: STMicroelectronics S.r.l.
    Inventor: Agostino Pirovano
  • Patent number: 7849516
    Abstract: A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex, and an actuator for lateral positioning of the tip; the actuator comprising a thermally switchable element and a heating element for heating the thermally switchable element; and heating the heating element to a given temperature so as to locally soften a portion of the substrate and applying a force to the softened portion of the substrate through the tip so as to create one or more indentation marks in the softened portion of the substrate.
    Type: Grant
    Filed: August 7, 2008
    Date of Patent: December 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: Gerd Binnig, Evangelos Elefheriou, Mark Lantz
  • Patent number: 7804067
    Abstract: When a characterization of a tip of a diamond stylus for working is needed, the tip of the diamond stylus for working used is observed by a high resolution scanning electron microscope of a high acceleration voltage under a steam atmosphere. When the tip of the diamond stylus for working is worn or when a shape of the tip of the stylus needs to be changed, the tip of the diamond stylus for working is worked by selectively irradiating an electron beam only to a necessary region by increasing an amount of steam and an amount of a current of the electron beam. When a working chip is strongly adhered to the diamond stylus for working and needs to be removed, the electron beam is selectively irradiated only to the working chip adhered to the tip of the diamond stylus for working to be removed under a xenon fluoride atmosphere.
    Type: Grant
    Filed: December 6, 2007
    Date of Patent: September 28, 2010
    Assignee: SII NanoTechnology Inc.
    Inventor: Osamu Takaoka
  • Publication number: 20100239775
    Abstract: In the present invention, it has been discovered that Scanning Tunneling Microscopy is a useful tool for imaging a surface on a nanometer scale and/or fabricating on a nano-sized scale by transferring a particle (e.g., protein) from one location to another. This is accomplished by a method of transferring a material from a first location to a second location comprising the steps of providing a stylus, applying a bias to the stylus, providing a surface, and changing the bias of the stylus such that the material is transferred from the first location to the second location.
    Type: Application
    Filed: May 28, 2008
    Publication date: September 23, 2010
    Inventors: Chunqing Zhou, Sharon G. Roscoe
  • Patent number: 7784107
    Abstract: An system for the measurement, analysis, and imaging of objects and surfaces in a variety of sizes is provided. In the most general terms, the invention relates to a device capable of measuring an object using a combination of low-resolution optical, high-resolution optical, SPM/AFM and/or material analysis techniques. The data gathered at various resolutions is correlated to absolute locations on the object's surface, allowing selected regions of the object's surface to be analyzed to any desired degree of precision (down to atomic scale). In a specific embodiment of the present invention, a system for collecting measurement data regarding an object of interest is disclosed. The system includes a sample stage adapted to hold the object of interest. The system further includes an optical lens assembly disposed above the sample stage. The optical lens assembly is configured to capture an optical image of the object of interest.
    Type: Grant
    Filed: June 1, 2007
    Date of Patent: August 24, 2010
    Inventor: Victor B. Kley
  • Patent number: 7745782
    Abstract: A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: June 29, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Tatsuaki Ishijima, Katsuhiro Sasada, Ritsuo Fukaya
  • Patent number: 7735358
    Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.
    Type: Grant
    Filed: June 15, 2007
    Date of Patent: June 15, 2010
    Assignee: Insitutec, Inc.
    Inventors: Marcin B. Bauza, Shane C. Woody, Stuart T. Smith
  • Publication number: 20100100991
    Abstract: A device to detect polarization of a ferroelectric material comprises a probe tip, a charge amplifier electrically connected with the probe tip to convert a charge coupled to the probe tip from the ferroelectric material into an output voltage. The ferroelectric material is oscillated at a reference signal so that a charge is coupled to the probe tip and converted to an output voltage by the charge amplifier. A lock-in amplifier that receives the reference voltage and applies the reference voltage to the output voltage to extract a signal output representing the polarization.
    Type: Application
    Filed: October 20, 2008
    Publication date: April 22, 2010
    Applicant: NANOCHIP, INC.
    Inventors: Byong M. Kim, Robert N. Stark, Quan Tran, Wade Hassler, Qing Ma, Donald E. Adams, Yevgeny V. Anoikin
  • Patent number: 7638767
    Abstract: There is provided an electron microscope which can clearly detect a microscopic unevenness in a sample. According to a scanning electron microscope, when luminance signals from one pair of backscattered electron detectors are given by L and R, and when a luminance signal from a scattered electron detector is given by S, an adjustment value Lc of L and an adjustment value Rc of R are calculated by using primary homogeneous expressions of L, R, and S.
    Type: Grant
    Filed: January 19, 2007
    Date of Patent: December 29, 2009
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kohei Yamaguchi, Kenji Obara
  • Publication number: 20090313731
    Abstract: A molecular manipulator includes a light-sensitive molecule, including a double bond, which changes a cis-trans configuration of the double bond in response to illumination by light of a selected wavelength, and a probe, for example, a probe of a scanned-proximity probe microscope, to which the light-sensitive molecule is attached. A method of making the molecular manipulator includes covalently bonding the light-sensitive molecule to the probe. A method of moving a nanostructure includes controllably grasping, moving, and releasing the nanostructure with the molecular manipulator.
    Type: Application
    Filed: August 20, 2009
    Publication date: December 17, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ali Afzali-Ardakani, Praveen Chaudhari
  • Publication number: 20090307809
    Abstract: The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.
    Type: Application
    Filed: July 14, 2006
    Publication date: December 10, 2009
    Applicant: Nanonis GMBH
    Inventors: Dominik Ziegler, Andreas Christian Stemmer, Jorg Rychen
  • Patent number: 7559261
    Abstract: A device for measuring a molecule, wherein a gel substrate material (200) comprises a gel (220) containing a solvent in the network structure thereof and a molecular chain (210), and a cantilever (100) is bound with the molecular chain (210) by a covalent bonding or a physical bonding and pulls up the molecular chain (210) through the above bonding, and wherein the force loaded when the cantilever (100) pull up the molecular chain (210) is measured and the interaction between polymer chains acting between the gel (200) and the molecular chain (210) is detected. The above device can be used for measuring the interaction between molecules, and in particular, can construct an experiment system for measuring the non-covalent bonding interaction between polymer chains at a molecular level.
    Type: Grant
    Filed: September 7, 2005
    Date of Patent: July 14, 2009
    Assignee: National University Corporation Hakkaido University
    Inventors: Takaharu Okajima, Hiroshi Tokumoto
  • Patent number: RE43900
    Abstract: The invention describes a procedure for the examination of objects by the means of ultrasound waves whereby a volume-of-interest is scanned by a 3D-ultrasound-probe by moving a transmitter/receiver beam in a scan plane within selectable limits. This B-mode scan plane is also simultaneously moved in a direction across to this scan plane. The transmitting of sound pulses and acquiring the echo-signals is done more or less continuously during the movement in B-plane and across to it The echo-signals are stored in a volume memory on addresses which correspond to the spatial position of the echo-generating structure inside the object. These stored data-sets are evaluated by a 3D-processor and are represented on at least one display unit by different algorithms with selectable parameters. Important is that the acquisition and the representation is done continuously.
    Type: Grant
    Filed: August 20, 2002
    Date of Patent: January 1, 2013
    Assignee: GE Medical Systems Kretztechnik GmbH & Co. OHG
    Inventors: Franz Wiesauer, Erwin Fosodeder, Arthur Gritzky