Scanning-probe Techniques Or Apparatus Not Otherwise Provided For (epo) Patents (Class 850/63)
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Patent number: 11735404Abstract: The invention relates to a method, a device and a system for the treatment of biological frozen samples using plasma focused ion beams (FIB). The samples can then be used for mass spectrometry (MS), genomics, such as gene sequencing analysis or next generation sequencing (NGS) analysis, and proteomics. The present invention particularly relates to a method of treatment of at least one biological sample. This method is particularly used for high performance microscopy, proteomics analytics, sequencing, such as NGS etc. According to the present invention the method comprises the steps of providing at least one biological sample in frozen form. The milling treats at least one part of the sample by a plasma ion beam comprising at least one of an O+ and/or a Xe+ plasma.Type: GrantFiled: September 10, 2020Date of Patent: August 22, 2023Assignee: FEI CompanyInventors: Alex De Marco, Sergey Gorelick, Chad Rue, Joseph Christian, Kenny Mani, Steven Randolph, Matthias Langhorst
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Patent number: 11686720Abstract: The invention relates to a method for classifying a tissue sample obtained from mammary carcinoma. The method comprises determining a stiffness value for each of a plurality of points on said tissue sample, resulting in a stiffness distribution, and assigning said sample to a breast cancer subtype and nodal status based on said stiffness distribution.Type: GrantFiled: October 24, 2016Date of Patent: June 27, 2023Assignee: UNIVERSITAT BASELInventors: Marija Plodinec, Ellen Obermann, Philipp Oertle, Christian Räz
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Patent number: 11413698Abstract: A system and method for monitoring and controlling build quality during electron beam manufacturing of a build part. The system may include at least one electron beam source to direct at least one electron beam onto a plurality of deposited layers of metallic powder to form a melt pool, a detector to detect in real-time backscattered energy ejected from the melt pool and indicative of a defect in the build part and generate a detection signal representative of the defect. A controller receives and analyzes the detection signal and generates a corrective signal for control of at least one of the actuator and the at least one electron beam source to direct the at least one electron beam onto the plurality of deposited layers of metallic powder to sequentially consolidate patterned portions of the plurality of deposited metallic powder layers to adaptively form the three-dimensional build part.Type: GrantFiled: March 13, 2018Date of Patent: August 16, 2022Assignee: GENERAL ELECTRIC COMPANYInventors: Vladimir Anatolievich Lobastov, Vincent Scott Smentkowski, John Scott Price, Vance Scott Robinson
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Patent number: 9606048Abstract: The present invention relates to a method for measuring the weight of a passivation coating composition on a moving substrate with minimal interruption. The method of present invention is especially useful for effective quality control in an industrial setting.Type: GrantFiled: June 30, 2014Date of Patent: March 28, 2017Assignee: Momentive Performance Materials Inc.Inventors: Vikram Kumar, Lesley Hwang, Kujtim Bizati
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Patent number: 9455120Abstract: A particle beam device and method for processing and/or for analyzing a sample are provided. A sample carrier is arranged at a first position, in which a sample surface is oriented parallel to a first beam axis of a first particle beam column. The sample carrier is rotatable from the first position into a second position, in which the sample surface is oriented perpendicular to a second beam axis of a second particle beam column. The first and second beam axes intersect at a coincidence point. In the first position a distance between the coincidence point and the first particle beam column is greater than a distance between the sample surface and the first particle beam column. In the second position a distance between the coincidence point and the second particle beam column is greater than a distance between the sample surface and the second particle beam column.Type: GrantFiled: January 6, 2012Date of Patent: September 27, 2016Assignee: Carl Zeiss Microscopy GmbHInventor: Andreas Schertel
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Patent number: 9275832Abstract: A particle beam device and method for processing and/or for analyzing a sample are provided. A sample carrier is arranged at a first position, in which a sample surface is oriented parallel to a first beam axis of a first particle beam column. The sample carrier is rotatable from the first position into a second position, in which the sample surface is oriented perpendicular to a second beam axis of a second particle beam column. The first and second beam axes intersect at a coincidence point. In the first position a distance between the coincidence point and the first particle beam column is greater than a distance between the sample surface and the first particle beam column. In the second position a distance between the coincidence point and the second particle beam column is greater than a distance between the sample surface and the second particle beam column.Type: GrantFiled: January 6, 2012Date of Patent: March 1, 2016Assignee: Carl Zeiss Microscopy GmbHInventor: Andreas Schertel
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Patent number: 8978161Abstract: A mechanism is provided for sequencing a biopolymer. The biopolymer is traversed from a first medium to a second medium. The biopolymer includes bases. As the biopolymer traverses from the first medium to the second medium, different forces are measured corresponding to each of the bases. The bases are distinguished from one another according to the different measured forces which are measured for each of the bases.Type: GrantFiled: June 11, 2013Date of Patent: March 10, 2015Assignee: International Business Machines CorporationInventors: Venkat K. Balagurusamy, Stanislav Polonsky
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Patent number: 8950011Abstract: A mechanism is provided for sequencing a biopolymer. The biopolymer is traversed from a first medium to a second medium. The biopolymer includes bases. As the biopolymer traverses from the first medium to the second medium, different forces are measured corresponding to each of the bases. The bases are distinguished from one another according to the different measured forces which are measured for each of the bases.Type: GrantFiled: May 22, 2013Date of Patent: February 3, 2015Assignee: International Business Machines CorporationInventors: Venkat K. Balagurusamy, Stanislav Polonsky
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Patent number: 8914910Abstract: The arrangement for calibrating probes comprises a source (10) of coherent photon radiation and at least one optically based strain sensor (12a) for measuring an amount of strain (?). The at least one optically based strain sensor is optically coupled to said source of coherent photon radiation. The arrangement further comprises at least one calibration lever (14) having a surface for placement of a tip (21) of a probe (2) to be calibrated, and that is mechanically coupled to the at least one optically based strain sensor for converting a force (F) exerted by said tip at said surface into an amount of strain in the optically based strain sensor. The arrangement further comprises at least one probe holder (24) for holding the probe (2) to be calibrated, the at least one probe holder having a controllable position in at least a direction (y) transverse to the surface of the calibration lever (14).Type: GrantFiled: December 21, 2012Date of Patent: December 16, 2014Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNOInventor: Hamed Sadeghian Marnani
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Patent number: 8914911Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.Type: GrantFiled: March 14, 2013Date of Patent: December 16, 2014Assignees: The Board of Trustees of the University of Illinois, Anasys InstrumentsInventors: William P. King, Craig Prater, Byeonghee Lee, Doug Gotthard
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Patent number: 8893311Abstract: A three-dimensional imaging and manipulation tool is provided. Techniques for creating a three-dimensional imaging and manipulation tool include combining high-resolution capability of a probe with three-dimensional imaging capability of a heater sensor. Also, techniques for positioning a nano-manipulation device relative to a surface are provided. The techniques include using a heater sensor for non-contact imaging, linking the heater sensor to the nano-manipulation device, and positioning the nano-manipulation relative device to a surface.Type: GrantFiled: January 7, 2009Date of Patent: November 18, 2014Assignee: International Business Machines CorporationInventors: Rachel Cannara, Bernd W. Gotsmann, Abu Sebastian
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Patent number: 8850611Abstract: A method and system for performing simultaneous topographic and elemental chemical and magnetic contrast analysis in a scanning, tunneling microscope. The method and system also includes nanofabricated coaxial multilayer tips with a nanoscale conducting apex and a programmable in-situ nanomanipulator to fabricate these tips and also to rotate tips controllably.Type: GrantFiled: March 8, 2013Date of Patent: September 30, 2014Assignee: UChicago Argonne, LLCInventors: Volker Rose, Curt A. Preissner, Saw-Wai Hla, Kangkang Wang, Daniel Rosenmann
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Patent number: 8789211Abstract: A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.Type: GrantFiled: May 20, 2013Date of Patent: July 22, 2014Assignees: UT-Battelle, LLC, University of Tennessee Research FoundationInventors: Ali Passian, Thomas George Thundat, Laurene Tetard
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Patent number: 8782811Abstract: A cleaning station for thoroughly cleaning the AFM component surfaces that are exposed to fluid during imaging of a sample supported in a fluid medium is disclosed. The cleaning station is designed to selectively expose the AFM component surfaces to cleansing agents, such as soap/detergent and water, plasma cleaning, etc., and cleaning tools, such as brushes, while protecting fluid sensitive components from exposure to the cleansing agents. The preferred embodiments are particularly beneficial for scanners in which the fluid sensitive components (actuator, sensor, connector, etc.) are integrated in the same device to which the cantilever holder is attached.Type: GrantFiled: April 27, 2012Date of Patent: July 15, 2014Assignee: Bruker Nano, Inc.Inventors: Johannes H. Kindt, Daniel Lyons, Charles Meyer, Russ Mead
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Patent number: 8756711Abstract: The present invention relates to a method for classifying a tissue biopsy sample obtained from a tumor, comprising determining a plurality of stiffness values for said sample by measuring a plurality of points on the sample with a spatial resolution of at least 100 ?m and assigning the sample to a probability of malignancy. A sample showing a unimodal stiffness distribution is assigned to a high probability of being non-malignant, and a sample showing an at least bimodal stiffness distribution is assigned to a high probability of being malignant, wherein said stiffness distribution is characterized by a first peak exhibiting an at least two-fold higher stiffness value than a second peak. The present invention further relates to a system for classifying a tumor tissue biopsy sample.Type: GrantFiled: December 12, 2011Date of Patent: June 17, 2014Assignee: Universitat BaselInventors: Marija Plodinec, Roderick Lim, Marko Loparic
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Patent number: 8677809Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.Type: GrantFiled: October 21, 2010Date of Patent: March 25, 2014Assignees: Oxford Instruments PLC, Oxford Instruments AFM, IncInventors: Roger Proksch, Anil Gannepalli
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Patent number: 8646111Abstract: A novel way for constructing and operating scanning probe microscopes to dynamically measure material properties of samples, mainly their surface hardness, by separating the functions of actuation, indentation and sensing into separate dynamic components. The amplitude and phase shift of higher modes occurring at periodic indentations with the sample are characteristic values for different sample materials. A separate sensor cantilever, connected to the indentation probe tip, has the advantage of a high mechanical amplification of a desired higher mode while suppressing the actuation signal itself. The operational range of the sensor can be extended just by switching the actuation signal to another submultiple of the sensor cantilever's resonance frequency and/or by using more than one sensor cantilever for each indentation tip.Type: GrantFiled: February 13, 2007Date of Patent: February 4, 2014Assignee: The Regents of the University of CaliforniaInventors: Kimberly L. Turner, Benedikt Zeyen
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Patent number: 8533861Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.Type: GrantFiled: November 23, 2011Date of Patent: September 10, 2013Assignee: The Board of Trustees of the University of IllinoisInventors: William P. King, Craig Prater, Byeonghee Lee
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Patent number: 8519330Abstract: Systems and methods are described for laser ablation of an analyte from a specimen and capturing of the analyte in a dispensed solvent to form a testing solution. A solvent dispensing and extraction system can form a liquid microjunction with the specimen. The solvent dispensing and extraction system can include a surface sampling probe. The laser beam can be directed through the surface sampling probe. The surface sampling probe can also serve as an atomic force microscopy probe. The surface sampling probe can form a seal with the specimen. The testing solution including the analyte can then be analyzed using an analytical instrument or undergo further processing.Type: GrantFiled: June 3, 2011Date of Patent: August 27, 2013Assignees: UT-Battelle, LLC, University of Tennessee Research FoundationInventors: Gary J. Van Berkel, Vilmos Kertesz, Olga S. Ovchinnikova
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Patent number: 8434159Abstract: Provided are an AFM measuring method and a system thereof. The tip of a cantilever is provided to a plurality of points on a substrate, to which incident light is radiated from a light source. Scattered light is generated between the tip of the cantilever and the substrate by the incident light and the intensity of the scattered light is measured. The measured intensity of the scattered light is input to a data processing unit so as to find a point where the intensity of the incident is highest. The tip of the cantilever is moved to the point where the intensity of the incident light is highest.Type: GrantFiled: April 5, 2010Date of Patent: April 30, 2013Assignee: Nanofocus, Inc.Inventors: Jae Wan Hong, Won Young Song
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Patent number: 8322220Abstract: A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.Type: GrantFiled: May 12, 2008Date of Patent: December 4, 2012Assignee: Veeco Instruments Inc.Inventors: Craig Prater, Chanmin Su
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Publication number: 20120297510Abstract: A cleaning station for thoroughly cleaning the AFM component surfaces that are exposed to fluid during imaging of a sample supported in a fluid medium is disclosed. The cleaning station is designed to selectively expose the AFM component surfaces to cleansing agents, such as soap/detergent and water, plasma cleaning, etc., and cleaning tools, such as brushes, while protecting fluid sensitive components from exposure to the cleansing agents. The preferred embodiments are particularly beneficial for scanners in which the fluid sensitive components (actuator, sensor, connector, etc.) are integrated in the same device to which the cantilever holder is attached.Type: ApplicationFiled: April 27, 2012Publication date: November 22, 2012Applicant: BRUKER NANO INC.Inventors: Johannes H. Kindt, Daniel Lyons, Charles Meyer, Russ Mead
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Patent number: 8288740Abstract: A method for making a specimen assembly for atom probe analysis in an energetic-beam instrument includes milling a post near a region of interest in a sample in the energetic-beam instrument, so that the post has a free end. The probe tip of a nano-manipulator probe shaft is attached to the free end of the post and the post is cut free from the sample to form a rough specimen, so that the region of interest in the rough specimen is exposed at approximately the location where the post is cut from the sample. A specimen assembly form is provided having an open area inside its perimeter. The probe shaft bearing the specimen is joined to the specimen assembly form, so that the region of interest in the rough specimen is located in the open area. Thereafter, the probe shaft can be cut off outside the perimeter of the specimen assembly form, and the specimen conveniently held and sharpened for atom probe analysis. Specimen assembly forms made by the method are also disclosed.Type: GrantFiled: June 27, 2008Date of Patent: October 16, 2012Assignee: Omniprobe, Inc.Inventor: Gonzalo Amador
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Patent number: 8191168Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface.Type: GrantFiled: November 4, 2008Date of Patent: May 29, 2012Assignee: SII NanoTechnology Inc.Inventors: Xin Man, Kouji Iwasaki, Tatsuya Asahata
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Patent number: 8185968Abstract: A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.Type: GrantFiled: February 10, 2011Date of Patent: May 22, 2012Assignee: Hitachi High-Technologies CorporationInventors: Tsuneo Nakagomi, Norimitsu Matsusita
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Patent number: 8181267Abstract: To provide a scanning probe microscope wherein the scanning means is not damaged by fluids, the scanning probe microscope 30 comprises a cantilever support part 2 for supporting a cantilever 1; displacement measurement parts 3, 4, 5 and 6 for measuring the displacement of the cantilever 1; a specimen container 11 comprising sidewalls 19 and bottom surface 18 and containing a fluid 10 and a specimen S; a carrying stage 40 on which the specimen container 11 is placed; and a scanning means 7 for moving and scanning the carrying stage 40. While the cantilever 1 is immersed in the fluid 10 that is contained in the specimen container 11, the carrying stage 40 is moved, and the displacement of the cantilever 1 is measured. The scanning probe microscope 30 further comprises a ring-shaped protective mat 50 that is capable of absorbing the fluid 10. A mounting mechanism 43 is formed on the outer peripheral surface of the carrying stage 40 for removably attaching the protective mat 50 by its inner peripheral area.Type: GrantFiled: March 28, 2011Date of Patent: May 15, 2012Assignee: Shimadzu CorporationInventors: Kanji Kobayashi, Hideo Nakajima
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Patent number: 8161805Abstract: A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.Type: GrantFiled: March 4, 2009Date of Patent: April 24, 2012Assignee: Bruker Nano, Inc.Inventors: Chanmin Su, Nghi Phan, Craig Prater
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Patent number: 8156568Abstract: This invention addresses a contact mode hybrid scanning system (HSS), which can be used for measuring topography. The system consists of a cantilever or a cantilever array, a scanning stage, a light source, and instrumentation to synchronize and control the individual components. Detection of the cantilever's movement is achieved by directly measuring the change in disposition of the cantilever including its height, rotation at one or more points on the cantilever thereby providing a partial three-dimensional reconstruction without the need for actuating the cantilever. This is achieved by employing a displacement meter such as a triangulation meter or a confocal meter.Type: GrantFiled: April 16, 2008Date of Patent: April 10, 2012Assignee: Picocal, Inc.Inventors: Angelo Gaitas, Yogesh B. Gianchandani
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Patent number: 8109135Abstract: A cantilever assembly (1) comprises a cantilever (10) having a cantilever tip (11). The cantilever is mounted to a rigid support (12,120,121) and is provided on its back side with an area (110) of a high reflectance material having a boundary (111) sloping towards the support (12). The extensions (c, ?c) of the area (110) and of the boundary (111) towards the support fulfil the condition c/?c?1 wherein c denotes the extension of the area (110) of the high reflectance material in the direction towards the support (12), and ?c denotes the extension of the sloped boundary (111) of the area (110) of the high reflectance material in the direction towards the support (12).Type: GrantFiled: November 4, 2004Date of Patent: February 7, 2012Assignee: Nano World AGInventors: Hans J. Hug, Bart Hoogenboom, Sascha Martin, Jinling Yang
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Patent number: 8028567Abstract: AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.Type: GrantFiled: June 20, 2008Date of Patent: October 4, 2011Assignees: AOI Electronics Co., Ltd., SII Nano Technology Inc.Inventors: Tatsuya Kobayashi, Masato Suzuki, Masatoshi Yasutake, Takeshi Umemoto
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Patent number: 8028343Abstract: A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.Type: GrantFiled: January 29, 2009Date of Patent: September 27, 2011Assignee: Nanonmechanics, Inc.Inventors: Warren C. Oliver, John Swindernan, Jennifer Hay, Karmit Parks
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Publication number: 20110208032Abstract: Provided are a detection device and a detection method that are based on a novel principle and able to detect blood vessels and other various targets with high sensitivity and accuracy. A detection device includes: m electrodes that generate at least around one straight line m rotationally symmetric electric charges (m is an even number that is greater than or equal to 4) whose total amount of charge is substantially 0; and at least one electric field detection element that detects an electric field on the straight line. The m electric charges are a quadrupole, a planar hexapole, a planar octupole, a three-dimensional octupole and the like. In order to make the quadrupole, four electrodes (11 to 14) are disposed at the vertexes of a square. At the center of these electrodes (11 to 14), a detection electrode (20) is disposed. The detection device is used in making up a vein sensing device and the like.Type: ApplicationFiled: September 2, 2008Publication date: August 25, 2011Inventors: Kiyoaki Takiguchi, Takayuki Wada, Hidenori Koyano
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Patent number: 7997123Abstract: A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the microchannel to receive material therefrom. The microchannel is communicated to a reservoir that supplies material to the microchannel. One or more reservoir-fed cantilevers may be formed on a semiconductor chip substrate. A sealing layer preferably is disposed on one of the first and second thin films and overlies outermost edges of the first and second thin films to seal the outermost edges against material leakage. Each cantilever includes an actuator, such as for example a piezoelectric actuator, to impart bending motion thereto. The microtip includes a pointed pyramidal or conical shaped microtip body and an annular shell spaced about the pointed microtip body to define a material-dispensing annulus thereabout.Type: GrantFiled: June 19, 2007Date of Patent: August 16, 2011Assignee: Northwestern UniversityInventors: Horacio D. Espinosa, Nicolaie A. Moldovan, Keun-Ho Kim
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Publication number: 20110099673Abstract: It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is radiated from a bottom surface of the sample substrate onto the sample through the opening.Type: ApplicationFiled: June 27, 2008Publication date: April 28, 2011Applicants: NIPPON TELEGRAPH AND TELEPHONE CORPORATION, ISIS INNOVATION LIMITEDInventors: Nahoko Kasai, Yuichi Harada, Chandra Sekar Ramanujan
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Patent number: 7926328Abstract: There is provided a sample manipulating apparatus which is an apparatus for manipulating a sample mounted on a substrate surface, in which at least position data and shape data are acquired by observing the sample. Thereafter, tweezers are positioned by moving means such that the sample is positioned between an observing probe and a grasping probe based on the two set of data. After positioning, a height of the tweezers is set to a position of being remote from the substrate surface by a constant distance by moving means while monitoring a result of measurement by displacement measuring means. Thereafter, the grasping probe is moved to a side of the observing probe while monitoring the result of measurement by the displacement measuring means at the set height and the sample is grasped while detecting a grasping start point.Type: GrantFiled: May 29, 2008Date of Patent: April 19, 2011Assignee: SII Nano Technology Inc.Inventors: Masatoshi Yasutake, Takeshi Umemoto, Masafumi Watanabe
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Patent number: 7900506Abstract: The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures.Type: GrantFiled: December 14, 2007Date of Patent: March 8, 2011Assignee: Insitutec, Inc.Inventors: Shane C. Woody, Marcin B. Bauza, Stuart T. Smith
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Patent number: 7849516Abstract: A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex, and an actuator for lateral positioning of the tip; the actuator comprising a thermally switchable element and a heating element for heating the thermally switchable element; and heating the heating element to a given temperature so as to locally soften a portion of the substrate and applying a force to the softened portion of the substrate through the tip so as to create one or more indentation marks in the softened portion of the substrate.Type: GrantFiled: August 7, 2008Date of Patent: December 7, 2010Assignee: International Business Machines CorporationInventors: Gerd Binnig, Evangelos Elefheriou, Mark Lantz
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Publication number: 20100263098Abstract: The invention relates to a method for the combined analysis of a sample with objects to be analysed, in particular a sample with biological objects, in which measurement results for one or more of the objects to be analysed in the sample are obtained by analysing the one or more objects to be analysed by an imaging method of measurement, probe-microscopic measurement results are obtained for the one or more objects to be analysed by analysing the one or more objects to be analysed by a probe-microscopic method of measurement, and the measurement results and the probe-microscopic measurement results are assigned to one another, after optional prior intermediate processing. Furthermore, the invention relates to an apparatus for carrying out combined analysis of a sample with objects to be investigated, in particular a sample with biological objects.Type: ApplicationFiled: July 24, 2008Publication date: October 14, 2010Inventors: Torsten Müller, Kathryn Anne Poole, Detlef Knebel, Torsten Jähnke
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Patent number: 7793356Abstract: A signal coupling system interposed between a scanning probe and a measurement instrument provides signal communication between the scanning probe and the measurement instrument. The signal coupling system has a pre-stressed shape when the scanning probe is in a neutral position. The pre-stressed shape is designated to provide a characteristic impedance of the signal coupling system that varies linearly as a function of displacement of the scanning probe from the neutral position when the scanning probe is displaced, relative to the neutral position, over a designated range of displacements.Type: GrantFiled: September 11, 2008Date of Patent: September 7, 2010Assignee: Agilent Technologies, Inc.Inventors: Hassan Tanbakuchi, Matthew Richter, Michael Whitener
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Patent number: 7784107Abstract: An system for the measurement, analysis, and imaging of objects and surfaces in a variety of sizes is provided. In the most general terms, the invention relates to a device capable of measuring an object using a combination of low-resolution optical, high-resolution optical, SPM/AFM and/or material analysis techniques. The data gathered at various resolutions is correlated to absolute locations on the object's surface, allowing selected regions of the object's surface to be analyzed to any desired degree of precision (down to atomic scale). In a specific embodiment of the present invention, a system for collecting measurement data regarding an object of interest is disclosed. The system includes a sample stage adapted to hold the object of interest. The system further includes an optical lens assembly disposed above the sample stage. The optical lens assembly is configured to capture an optical image of the object of interest.Type: GrantFiled: June 1, 2007Date of Patent: August 24, 2010Inventor: Victor B. Kley
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Patent number: 7772552Abstract: In an atom probe or other mass spectrometer wherein a specimen is subjected to ionizing pulses (voltage pulses, thermal pulses, etc.) which induce field evaporation of ions from the specimen, the evaporated ions are then subjected to corrective pulses which are synchronized with the ionizing pulses. These corrective pulses have a magnitude and timing sufficient to reduce the velocity distribution of the evaporated ions, thereby resulting in increased mass resolution for the atom probe/mass spectrometer. In a preferred arrangement, ionizing pulses are supplied to the specimen from a first counter electrode adjacent the specimen. The corrective pulses are then supplied from a second counter electrode which is coupled to the first via a passive or active network, with the network controlling the form (timing, amplitude, and shape) of the corrective pulses.Type: GrantFiled: June 17, 2005Date of Patent: August 10, 2010Assignee: Cameca Instruments, Inc.Inventors: Tye Gribb, Jesse D. Olson, Daniel Lenz, Joseph H. Bunton
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Patent number: 7761255Abstract: The invention is an apparatus and method including hardware and software, which allows collecting and analyzing data to obtain information about mechanical properties of soft materials in a much faster way. The apparatus can be used as a stand-alone device or an add-on to the existing AFM device. The apparatus allows collecting dynamical measurements using a set of multiple frequencies of interest at once, in one measurement instead of sequential, one frequency in a time, measurements.Type: GrantFiled: March 2, 2007Date of Patent: July 20, 2010Assignee: Clarkson UniversityInventor: Igor Sokolov
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Patent number: 7735358Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.Type: GrantFiled: June 15, 2007Date of Patent: June 15, 2010Assignee: Insitutec, Inc.Inventors: Marcin B. Bauza, Shane C. Woody, Stuart T. Smith
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Patent number: 7721347Abstract: A method and device are provided for determining, without contact, the physical and electrical properties of nanotube materials. The device includes a scanning probe configured to generate a signal of certain frequency onto the nanotube material and measure a reflected signal from the nanotube material, and a processor coupled to the scanning probe and configured to determine the physical and electrical properties of the nanotube material from the measured reflected signal. The method includes positioning a scanning probe relative to the nanotube material, generating a signal of certain frequency onto the nanotube material, and measuring a reflected signal from the nanotube material.Type: GrantFiled: May 22, 2008Date of Patent: May 18, 2010Assignee: RF Nano CorporationInventor: Peter J. Burke
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Patent number: 7718962Abstract: The present invention is directed to a defect imaging device that has an energy beam that is directed at a device under test. The energy beam creates positrons deep within the material of the device under test. When the positrons combine with electrons in the material they produce a pair of annihilation photons. The annihilation photons are detected. The Doppler broadening of the annihilation photons is used to determine if a defect is present in the material. Three dimensional images of the device under test are created by directing the energy beam at different portions of the device under test.Type: GrantFiled: May 29, 2007Date of Patent: May 18, 2010Assignee: Idaho State University and the Board of EducaInventors: Alan W. Hunt, J. Frank Harmon, Douglas P. Wells
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Patent number: 7663102Abstract: The present invention relates to charged particle beam devices. The devices comprise an emitter for emitting charged particles; an aperture arrangement with at least two apertures for separating the emitted charged particles into at least two independent charged particle beams; and an objective lens for focusing the at least two independent charged particle beams, whereby the independent charged particle beams are focused onto the same location within the focal plane.Type: GrantFiled: February 17, 2005Date of Patent: February 16, 2010Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventor: Juergen Frosien
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Patent number: 7655923Abstract: A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.Type: GrantFiled: November 9, 2004Date of Patent: February 2, 2010Assignees: National University Corporation Nara Institute of Science and Technology, Jeol, Ltd.Inventors: Hiroshi Daimon, Hiroyuki Matsuda, Makoto Kato, Masato Kudo
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Patent number: 7657947Abstract: A method for exciting free torsional vibrations a spring cantilever, which is clamped in on one side and has a longitudinal extension, of an atomic force microscope (AFM) is disclosed. The invention provides by the one-sidedly clamped-in spring cantilever being placed at a distance over a surface between which and the spring cantilever there is an acoustic coupling medium, by the surface being set into oscillations which are oriented laterally to the surface and are polarized linearly along an oscillation direction, and by the polarization axis given by the oscillation direction being oriented perpendicular to the longitudinal extension of the spring cantilever.Type: GrantFiled: May 7, 2004Date of Patent: February 2, 2010Assignee: Fraunhofer-Gesellschaft zur FörderungInventors: Michael Reinstädtler, Volker Scherer, Walter Arnold
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Patent number: RE43117Abstract: The invention is an apparatus and method including hardware and software, which allows collecting and analyzing data to obtain information about mechanical properties of soft materials in a much faster way. The apparatus can be used as a stand-alone deice or an add-on to the existing AFM device. The apparatus allows collecting dynamical measurements using a set of multiple frequencies of interest at once, in one measurement instead of sequential, one frequency in a time; measurements.Type: GrantFiled: May 9, 2011Date of Patent: January 17, 2012Assignee: Clarkson UniversityInventor: Igor Sokolov
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Patent number: RE43900Abstract: The invention describes a procedure for the examination of objects by the means of ultrasound waves whereby a volume-of-interest is scanned by a 3D-ultrasound-probe by moving a transmitter/receiver beam in a scan plane within selectable limits. This B-mode scan plane is also simultaneously moved in a direction across to this scan plane. The transmitting of sound pulses and acquiring the echo-signals is done more or less continuously during the movement in B-plane and across to it The echo-signals are stored in a volume memory on addresses which correspond to the spatial position of the echo-generating structure inside the object. These stored data-sets are evaluated by a 3D-processor and are represented on at least one display unit by different algorithms with selectable parameters. Important is that the acquisition and the representation is done continuously.Type: GrantFiled: August 20, 2002Date of Patent: January 1, 2013Assignee: GE Medical Systems Kretztechnik GmbH & Co. OHGInventors: Franz Wiesauer, Erwin Fosodeder, Arthur Gritzky