Abstract: A robot system includes a support assembly and a robot arm. The robot arm includes a platform and a carriage movable back and forth along the platform. A shuttle is movable back and forth along the carriage. A first belt and pulley system is provided for moving the carriage back and forth along the platform and a second belt and pulley system is provided for moving the shuttle back and forth along the carriage. Each belt and pulley system includes a belt and a first pulley. The diameter of the pulley on the first belt and pulley system is one half the diameter of the pulley on the second belt and pulley system. The first pulley on the first belt and pulley system and the first pulley on the second belt and pulley system are fixedly coupled relative to each other so that rotational movement of one of the first pulleys will cause the same amount of rotational movement of the other one of said first pulleys.

Abstract: A robot system has an enhanced cooling efficiency of the interior of a robot controller thereof. A robot mechanical unit has a base with an internal vacant space. The robot controller is arranged in close contact with the base of the robot mechanical unit, and a radiating fin of a servoamplifier arranged within the robot controller projects into the vacant space within the base. Most heat within such a robot controller is generated by the servoamplifier. The radiating fin dissipates the heat generated by the servoamplifier into the vacant space within the base of the robot mechanical unit. The base has a large surface area, which makes it possible to efficiently dissipate heat within it for cooling of the same. This improves the cooling efficiency of the interior of the robot controller.

Abstract: A first motor is fitted to a threaded shaft onto which first and second nuts are screwed, a first holder to which a second motor for rotating the first nut is fixed is fitted to the shaft, the first holder is provided with a first bracket to which one ends of first and second connecting rods are rotatably connected, a second bracket is rotatably connected to ends of the first and second connecting rods opposite to the end where the first bracket is installed so that the first and second connecting rods are put in parallel positions, a second holder is secured to the second nut, the first holder and the second holder engage with a guide rail installed in parallel with the first shaft so as to be moved along the guide rail when the first shaft rotates, the second holder is provided with a third bracket, one end of a third connecting rod is rotatably connected to the third bracket, and central part of the second connecting rod is rotatably connected to an end of the third connecting rod opposite to the end where

Abstract: A pellet conveying device used with a bonding machine for, for example, semiconductor devices, including a conveying arm that has a collet for holding pellets. The conveying arm can move vertically and pivot horizontally by two different driving sources so that the collet can be moved between predetermined two positions such as a pellet pick-up position and a pellet releasing position.

Abstract: In an article transporting system, a first linear moving arm and a second linear moving arm are juxtaposed to each other so as to be moved linearly while keeping a parallel positional relationship with each other. First end portions of the linear moving arms are coupled to an article transporting unit through first and second links. A linear drive mechanism is provided for linearly moving the article transporting unit in a direction perpendicular to the moving direction of the linear moving arms by the linear movement of the first and second linear moving arms. The first and second linear moving arms are synchronously linearly moved in opposite directions to each other. In this case, to avoid an unstable posture of the article transporting unit during the movement, a posture maintaining device is provided between one of the first and second linear moving arms and the article transporting unit.

Abstract: For primary use in a storage and retrieval subsystem in a data processing system, a robotic transfer system acts to transfer selected electronic magnetic storage cartridges between their storage and transducing positions, typically between vertically stacked concentric tape storage holders and a selected tape drive. The robotic transfer system for handling tape cartridges includes two hands, each mounted on a separate vertical axis disposed at opposite ends of a balanced rotating horizontal axis, such that no tape cartridge is ever more than 90.degree. away from the nearest hand. The use of two hands also provides a redundant data retrieval capability without concentrating the weight of two hands at a single end of a revolving horizontal arm, thus reducing the moments generated by angular movement and providing for faster tape access time and greater long-term system reliability.

Abstract: The invention provides an improved contamination inspecting device which can carry out continuous, automatic inspection of portable articles both large and small regardless of their shape. The device incorporates a conveying means for carrying the articles through the inspection position wherein the speed of the conveying means is varied based on the background radioactivity detected by the plane scintillator, a plane scintillator for detecting radiation from both the background environment and the articles to be inspected, a five-axes gate-type underriding mechanism which incorporates a robot arm so as to enable the plane scintillator to travel along the surfaces of each article, and control means for controlling the speed of the conveying means based on the background radioactivity detected by the plane scintillator and for controlling the five-axis robot based on the shape of the articles to be inspected.

Abstract: A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.

Abstract: The polishing machine of the present invention is capable of moving a work away from a center roller and a guide roller without reference to other members. In the polishing machine, a circular polishing plate is capable of revolving so as to polish works. A center roller is capable of revolving. Guide rollers are arranged around the center roller and capable of revolving, wherein each work is rotatably held between each guide roller and the center roller. An arm shaft is provided in the vicinity of the polishing plate and capable of moving in the longitudinal direction. A work head is provided to the arm shaft and capable of holding and releasing the work. A driving mechanism moves the arm shaft so as to move the work head between a discharge position and a specified position. A releasing mechanism slightly moves the arm shaft in the longitudinal direction so as to slightly move the work away from the center roller and the guide roller.

Abstract: A device for facilitating the grinding of the working rolls of a planetary rolling mill in which working rolls are mounted together with intermediate rolls in cages which rotate about a support body, a rolling mill having an upper planet roll and a lower planet roll. In order to provide a low cost and economically operating roll grinding device, allowing simple, fast and precise grinding of the working rolls with reduced mill down time, a planet roll (1) is associated with a manipulating device (2) which is moveable in at least three planes or axes of movement and with which the working rolls (3) can be removed individually from the planet roll (1) and fed to a grinding device (5) as well as returned into the planet roll (1).

Abstract: A robotic substrate manipulator constructed for substrate handling during thin film deposition in the vacuum of outer space. The robotic substrate manipulator includes a cassette holding a plurality of substrates preferably including six cassettes in a carousel. A circular cylinder encloses the carousel with an access door at a location accessible by a manipulator arm assembly. Substrates are retained within the cassette via a passive retention system. This manipulator arm assembly includes an arm with a gripper at one end. The gripper includes a pair of opposed fingers normally urged closed by at least one finger spring that may be opened by a solenoid. The manipulator arm assembly includes a vertical driver and a horizontal rotary driver permitting motion of substrates from the cassette to a processing station. Position gauges on both the vertical motion driver and the horizontal rotary motion driver permit feedback regarding the manipulator arm assembly position.

Abstract: In a robot for conveying a workpiece or the like 21 in vacuum chambers (16, 24); a conveyance robot for use in a high vacuum, in which magnetic floatation and magnetic drive are applied to a rectilinear movement axis (R-axis) (1, 20) for conveying the workpiece 21, a magnetic seal 9 for shutting off a vacuum side A from an atmospheric air side B is applied to a rotation axis (.theta.-axis) 25 for rotating the R-axis (1, 20), and a vacuum bellows 14 for shutting off the vacuum side A from the atmospheric air side B is applied to a vertical movement axis (Z-axis) 17 for vertically moving the R-axis (1, 20) and the .theta.-axis 25, whereby sliding or rolling is avoided in the vacuum.

Abstract: A technique of this invention discloses an orthogonal two-axis moving apparatus basically adapted to move in horizontal and vertical directions. In one embodiment the apparatus includes a vertical block, a horizontal moving member movably supported on the vertical block, and a driving mechanism for moving the horizontal moving member, a driving pulley, a driven pulley, and a belt for transmitting a driving force.

Abstract: A portable console includes a universal positioning arm for holding a surgical instrument such as an endoscope during a surgical procedure. Coarse adjustment of instrument elevation above an operating table is provided by a reversible drive motor which extends and retracts an upright support shaft from which the instrument is supported. Coarse adjustment of instrument X-Y position within the sterile zone above an operating table is provided by an articulate arm which is rotatably coupled to the upright support shaft. Fine adjustment of instrument position across the sterile zone is provided by a reversible drive motor which extends and retracts the instrument along the longitudinal axis of the support arm. Fine adjustment of instrument elevation is provided by a reversible drive motor which lifts and lowers the distal end of the support arm. The insertion orientation of the instrument is adjustable by a rotatable coupling.

Abstract: The present invention relates to a device 32 for taking out a grown monocrystal rod 22 from monocrystal pulling up devices 10 to 14 and conveying them to a predetermined position. An object is to simplify the overall structure, which includes a plurality of monocrystal pulling up devices 10 to 14, and reducing the overall cost. A rail 31 is disposed along the monocrystal pulling up devices 10 to 14 and travelling portions 33 and 34 travel along the rail 31. The upper end portion of an upper cylinder 36 is fixed to the travelling portions 33 and 34, the upper portion of an elevational shaft 37 is inserted into the upper cylinder 36, the lower portion of the elevational shaft 37 is inserted into a lower cylinder 39 and a plate 44 is able to approach and move away from the lower cylinder 39. A plate 45 is able to rotate around a shaft 46 with respect to the position of the plate 44. Futhermore, the plate 45 has a receiving finger 53A and a holding finger 54A.

Abstract: Apparatus (10) for handling devices for testing under varying temperature conditions is disclosed including a mechanical arm (32) pivotally mounted by a bearing (34) to a control portion (16) which is variably vertically positionable relative to a platform portion (14). An insert arm (38) is rotatably mounted within the mechanical arm (32) to reciprocally and rotatably mount a thermal socket (90) for mating with a contactor (126). The socket (90) is mounted to a vacuum cup (48) to allow position alignment as alignment pins (132) are initially slideably received in alignment notches (124) and when no vacuum is applied and is fixed in the aligned position after the application of vacuum. Thermal tubes (74) of probes (50) are reciprocal with the thermal socket (90) to provide thermally conditioned gas/air to the thermal socket (90). The thermal socket (90) provides a swirling action to the thermally conditioned gas/air to exit 360.degree.

Abstract: For automating the placement or removal of printing plates on plate cylinders (16, 17) of rotary printing machines, particularly web printing machines, an application head (11) is secured to a multiple linked roboter arm (2), slidable vertically along a guide post (1). The roboter arm can be pivoted about the axis of the guide post, moved vertically thereabout, and includes a plurality of joints (3, 4, 5, 6) which connect roboter arm link elements (7, 8, 9, 10). The positioning head (11) is located at the roboter arm element (10) most remote from the guide post. The guide post is positioned between the axes of rotation of printing cylinders of adjacent printing stations, axially removed from the path of the web between the printing stations, so that interference with the web is effectively avoided.

Abstract: A transfer robot for removing molded pieces provides a telescoping robot arm having a pneumatically activated gripping device mounted to a remote end. The robot arm comprises two tubes mounted coaxially inside a housing. The first tube is driven outwardly of the housing by a rodless cylinder drive; the second tube is mounted coaxially to the inside of the first tube and is itself driven by a rack and pinion arrangement which doubles the projecting speed of the second tube with respect to the projecting speed of the first tube. The robot arm is movably mounted to a cantilever rack which is itself rotatably mounted to a supporting stand.

Abstract: Apparatus for inserting a semiconductor wafer in a slot of a holding post including a wafer support member or paddle for supporting the wafer and inserting it into a slot and rotation device for rotating the support member by the angle necessary to cause edges of the wafer to be received at the centers of the slots.

Abstract: In a horizontal revolute robot, an upper end of a ball screw (21) of a direct-acting actuator (100) is rotatably supported by a top plate of a column (10), and the lower end thereof is coupled to a drive unit (40) disposed on a base plate of the column. A first link (220) is pivotally coupled to a coupling member (210) of a manipulator (200) fixed to a slider (30) of the actuator, and a second link (240) is pivotally coupled to the first link. The ball screw is rotated by the drive unit to move the manipulator along the ball screw in unison with the slider, and servomotors (230, 250) of the manipulator are driven to turn both the links within a horizontal plane, so that a wrist portion of the robot is positioned in a robot installation space for robot operation. Since no base is required to turnably support the actuator, the robot is small-sized, light in weight, and low-priced. Since the lower movement limit position of the manipulator is low, the range of action of the robot is wide.

Abstract: A direct-acting actuator for an industrial robot has an elongate ball screw or feed screw which is attached or detached quickly and safely in a narrow working space. In attaching the ball screw, upper and lower end portions of the ball screw, diagonally inserted in the inside space of a column (10), are respectively fitted into holes (12a, 33a) of a column top plate (12) and a plate member (33) of a slider (30) through a passage (12b), formed in the top plate and opening in a slider-side end face of the same plate, and a passage (33b), formed in the plate member and opening in the distal end face of the same member. Then, the lower end of the ball screw is coupled to a reduction gear (52), and a bearing unit (22) mounted on the upper end of the ball screw and a ball nut (34) threadedly engaged with the ball screw are respectively fitted into the holes (12a, 32a) so that the bearing unit and the ball nut are fixed to the top plate and the plate member, respectively.

Abstract: A transfer robot comprises a carriage mounted headstock assembly, a main support disk mounted to the rotatable spindle of a headstock, an extention slide mounted to the support disk for motion transverse to the spindle, and a carrying fixture mounted to the outer end of the slide and having adjustable sets of spaced apart gripping arms for gripping and carrying a cylindrical tire carcass. A counterweight on the disk offsets the outboard weight of the extended slide and carrying fixture, and a carcass carried thereon, on the headstock spindle and its bearings. The robot is powered by programmable devices which sequence its operation to grasp and carry a carcass by its bead areas from a carcass supply station, in an arc, into alignment with the axis of a tire building drum, then the carcass is moved axially of that drum and located around it, after which the gripping arms release and retract, and the fixture is moved to a parked position.

Abstract: An orthogonal two-axis moving apparatus includes a first guide member which extends along one direction and is attached to a stationary position, a slide block which is slidably supported on the first guide member and is movable in the one direction, and a second guide member which extends along the other direction perpendicular to the one direction and is supported by the slide block to be movable in the other direction. First and second rollers are pivotally supported on two ends of the first guide member, a third roller is pivotally supported on one end of the second guide member, and intermediate rollers are pivotally supported on four corner portions of the slide block. A coupling belt is provided and has two ends of which are fixed to the other end of the second guide member and which is looped in a cross shape on the first to third rollers and the four intermediate rollers.

Abstract: A multi-cylinder and short lead screw driven travel arm or machinery movement unit achieving infinitely variable travel through the design limits of travel imposed thereon. In one working configuration using 1", 2", 4" and 8" travel pneumatic cylinders and a 1" travel screw together yield a sixteen inch travel range with an infinite range of fully programmable settings through selected activation of cylinders along with the selected vernier setting of the 1" threaded travel screw. The travel range of settings may be increased even further by adding additional travel cylinders and increased length travel guide structure adequate for such increased travel range of settings, for example, addition of a 5" travel cylinder extends the range of settings to a maximum of twenty one inches.

Abstract: A robot program checking method for editing a robot program accurately and rapidly. When types of a controller and a robot body to which an edit program is to be applied are specified after the edit program is created, a format table indicative of a format suitable for the controller and movable range data for an operating section of the robot body are transferred from a floppy disk to a working memory together with the edit program. If the edit program which is read out one block by one block is not stated in accordance with a predetermined format, or if a position data contained in the edit program and indicative of a target moving position of the operating section of the robot body falls outside the movable range, an error message indicative of a block number and a reason for the error are printed out. With reference to the error message, an operator corrects the edit program.

Abstract: An apparatus for processing cylindrical and belt-like substrates includes: a support structure having two opposing faces and defining a central horizontal axis, each face of the support structure supporting a planetary array of substrates about the central horizontal axis to define two opposing planetary arrays of substrates, each substrate in each planetary array defining an offset horizontal axis radially spaced from and parallel to the central horizontal axis of the support structure; an array of processing modules each housing a processing chamber for receiving therein the opposing planetary arrays of substrates, each chamber defining a central horizontal axis aligned with the central horizontal axis of the support structure when the support structure is received within the chamber, and each chamber including an opening between opposing chamber sections, the opening being in a plane parallel to the central horizontal axis of the chamber; and a transport vehicle for transporting the support structure to ea

Abstract: A hollow synthetic resin product manufacturing apparatus with an extruder having an extruding head for extruding a parison and a mold formed of lower and upper molding portions respectively having grooves, a cutter for cutting the parison extruded from the extruding head into a specified length, a robot having a hand for holding the parison at one point of the parison, and a control unit for moving the hand holding the above portion of the parison so that the parison be accommodated in the groove of the lower molding portion.

Abstract: A horizontal/vertical conversion transporting apparatus, wherein a mechanism for variably changing a distance between upper and lower boat hands for clamping an article therebetween is mounted on a conversion arm, the conversion arm is vertically movable along a support arm, and at the same time, the conversion arm is rotatable within the plane of vertical movement.

Abstract: A portal system is described which consists of two translational axes and two rotary axes which are so arranged and controlled that every point within a cubic working space can be computed and reached. As a result of this special kinematic construction the total complexity for the frame and also the mechanical complexity and cost are substnatially reduced in comparison to customery portal systems.

Abstract: An automatic cop replacing apparatus for a shuttle-type loom with which a cop contained in the shuttle is automatically replaced, including tying the threads together of the old and new cops, and requiring no operator intervention. The apparatus includes a hand for gripping the cop. A rotary arm plate on which the hand is mounted, a drive device for rotating the rotary arm plate and for straightly moving the rotary arm plate in the axial direction, and a drive shaft for moving the rotary arm plate to an exchange position for the cop. A thread tying device holds and ties together the treads of the old and new cops.

Abstract: An industrial robot includes a base body, a hand, first and second horizontal arms rotatably coupled to each other, and a lift shaft provided between the base body and the first horizontal arm. The robot also includes drivers provided on the base body for driving the first and second horizontal arms and the hand, respectively, and transmission mechanisms provided in the base body and the first and second horizontal arms for transmitting the output power of the drivers to each of the first and second horizontal arms and the hand.

Abstract: In a material transfer device, an articulated arm assembly extends and retracts in a "froglike" motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction to align the object with the intended destination. A greater degree of axial mobility may be provided, for example by a rotating lift screw. A vacuum chamber may be provided, with the arm assembly moving the object between locations in the chamber.

Abstract: A robot system in which a force (torque) exerted on an end effector disposed at an end of a robot to hold an object is sensed to achieve a positioning control. The robot system includes a unit to sense an inertial force exerted on the end effector and the sensed result is fed back so as to remove the influence of the inertia force, thereby effecting an accurate positioning control.

Abstract: There is disclosed a robot used in a clean room and adapted to transport a wafer cassette containing semiconductor wafers. The robot includes: a guide rail disposed in the clean room; a robot body slidably connected to the guide rail for movement along the guide rail; and a first drive mechanism for driving the robot body along the guide rail. The robot body includes: a clamping hand for releasably clamping the wafer cassette; an arm assembly, extending between the guide rail and the clamping hand, for controlling the position of the clamping hand; and a wrist assembly, interposed between the arm assembly and the clamping hand, for adjusting the orientation of the clamping hand.

Abstract: A direct-drive-type multi-articulated robot comprising: a stationary support shaft (14), a cylindrical rotary casing (16) surrounding the stationary support shaft (14), a first robot arm (18) joined to the upper end (16a) of the rotary casing (16), a second robot arm (20) pivotally joined to the extremity of the first robot arm (18), a direct-drive motor (M.theta.) interposed between the lower end of the rotary casing (16) and the lower end of the stationary support shaft (14) to drive the rotary casing (16) and the first robot arm (18) together for turning motion, a brake gear (24) interposed between the upper end (14a) of the stationary support shaft (14) and the first robot arm (18) to arrest the turning motion of the first robot arm (18), and an encoder (26) for detecting turning motion, interposed between the upper end (14a) of the stationary support shaft (14) and the first robot arm (18).

Abstract: A robot arm in which a hand or end effector placed at the end of, and pivotally joined to first and second pivotally coupled arms is caused to experience linear, straight line motion in response to a single rotary actuator at the far end of the further most arm. A series of belts and pulleys of different sizes coordinate the motion of the two arms and the hand in order to produce straight line or radial motion in response to a single rotary actuator. The robot arm has particular application in semiconductor wafer handling systems in such capacity as transferring wafers between storage cassettes and test platforms and in this application is married to Z and .theta. motion drives.

Abstract: A manipulator drive mechanism employing splined shafts in both a vertical and a horizontal axes. The horizontal splined shaft is rotatably driven by a rack assembly and a pinion gear rotatably fixed with respect to the horizontal splined shaft and which is also slidable along the horizontal splined shaft.

Abstract: A robotic materials handling system for storing and handling box-like articles such as videocassettes includes a storage area containing a plurality of columns of storage bins, a vertical support shaft located adjacent the storage area and a manipulator assembly carried on the shaft. The manipulator assembly includes a plurality of gripper mechanisms which may be positioned adjacent desired storage bins. The system includes computer control circuitry for controlling the operation of the manipulator assembly and gripper mechanism to transport articles between desired locations.

Abstract: A portal system is described which consists of two translational axes and two rotary axes which are so arranged and controlled that every point within a cubic working space can be computed and reached. As a result of this special kinematic construction the total complexity for the frame and also the mechanical complexity and cost are substantially reduced in comparison to customary portal systems.

Abstract: A robotic manipulator for supporting a tool or workpiece, the manipulator including at least one rotary linear actuator adapted to be supported by a base and providing for controlled movement of a manipulator link with two degrees of freedom. The robotic manipulator includes a link assembly having one end spherically joined to a movable member for supporting the movable member, the movable member being adapted to support a tool or workpiece. The link assembly is articulated, and the opposite end of the link assembly is supported by a rotary linear actuator for linear movement in a direction transverse to a longitudinal axis of the opposite end of the link assembly and for rotational movement about the axis defined by that linear movement.

Abstract: A manipulator for vacuum applications, e.g., for positioning of a specimen at a required point in a vacuum chamber (20) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures, comprises an adjustable angular connector (12) which is formed by two skewed rings (32) and (36) which slide one over another. When the rings rotate, the end of drive shaft (72) describes a planetary path along a circle. The drive shaft (72) has one end connected to a rotary drive mechanism (14) and another end to a driven shaft (92) through a universal joint (90). The lower end of the driven shaft is installed in a rotating manner in a slide (87). The slide (87) is guided in one direction along another slide (84) which in turn is guided in a direction perpendicular to the first one along a rigid frame (80). Planetary motion of driven shaft (92) causes linear motions of the slides (84, 87) in mutually perpendicular directions.

Abstract: An overload detection mechanism for a robot is disclosed, wherein first and second members are relatively urged together by an urging means to urge the axis of the second member toward the Z axis of the first member. The second member is guided in any movements departing from coaxial alignment, and the first member is supported near the end of a robot arm. A tool mount or workpiece mount is connected to the second member. An electrical device is mounted on one of the members, and a device actuator on the other of the members, with the reaction means acting between the members to relatively move the members upon tilting from an X-Y plane normal to the Z axis, or axial thrust applied by the tool mount to the second member. In this manner, an overload of a tool in the tool mount establishes relative movement between the first and second members, so that the electrical device is actuated to change an electrical condition thereof and can be connected to stop movement of the robot.

Abstract: A shaft supporting mechanism of an industrial robot in which an arm is supported by a freely extendable support shaft inside a hollow post and a working plane of a working arm is variably set is provided, with plural sets of linear support guides in opposed relation about a drive mechanism of the support shaft. As a result, the support shaft is held in the post stably and balanced in the vertical direction even if an external force attempting to tilt the support shaft is applied during up-and-down movement of the support shaft or operation of the working arm.

Abstract: A polar-coordinate manipulator for vacuum application, e.g., for positioning of a specimen (S) between several operating positions in a vacuum chamber (16) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures. The device comprises a circular stationary support (12) attached to the flange of vacuum chamber (16). A square-shaped rotary table (22) is rotatingly supported by a circular support (22) and in turn slidingly supports a sliding block (44). The sliding block can be shifted by a micrometer (50) radially with respect to the axis of rotation of the turntable. The sliding block supports a moveable plate (72) which can be shifted along the above-mentioned axis of rotation and carries a rigidly attached rod (92) which penetrates into the vacuum chamber and supports the sample to be treated. The manipulator can position the sample at a target point in a polar coordinate system.

Abstract: A wafer transfer mechanism used for transferring wafers between cassettes and a boat uses sensors to detect and to measure any offset of the actual center of each wafer being transferred with respect to the expected or precalibrated center of that wafer. An appropriate adjustment is made to effectively eliminate such offset so that each wafer can be transferred throughout the system without any edge contact between a wafer and the boat or the cassette. The system also includes a boat exchange unit having a rotatable turntable which is used in association with two boats. The boat exchange unit permits a continuous mode operation in which one boat can be undergoing a loading or unloading of wafers at one station on the turntable while another boat is at or is moving to or from a heating chamber loading or unloading station on the turntable.

Abstract: A manipulator device is described in which a pair of holding members mounted on extensible arms, are rotatable through 360.degree. about an axis parallel to the plane in which they lie and perpendicular to the axis of the arms, and in which the arms are actuated by motor means interconnected together in such a way as to link the holding members for simultaneous displacement in a symmetrical manner.

Abstract: A pick-and-put tool, new-nut hopper and pin-insertion/torque tool for completing the installation of the new split-pin assembly in a lower guide tube under water after the old split-pin assembly has been severed into fragments. One fragment, located in the upper counterbore of the LGT, includes a portion of the old nut and the portion of the pin on which it is threaded. The pick-and-put tool includes a clamp and hydraulic cylinders for moving the clamp between a home position and an advanced position and for pivoting the clamp in each position. There is also a cylinder for raising or lowering the clamp in each position. The pick-and-put tool has stops which stop the movement of the clamp precisely in the home position or the advanced position and in their pivoted positions. The pick-and-put tool is mounted in the pool such that it can properly align with both the LGT and hopper. The clamp is first moved from the home position to the advanced position.

Abstract: A method of positioning a planar multi-joint industrial robot in which errors due to manufacturing tolerances and errors in the manufacture of the robot are prevented from affecting the accuracy of the movements of the robot in actual use. The coordinate system of a measuring plate is first made to agree with one axis of the coordinate system of the robot by teaching, and the coordinates of four points on the measuring plate are taught to the robot. The actual arm lengths of two arms of the robot are obtained, and an angle of one of the arms relative to an extension of the other arm on the basis of the four coordinates is determined. Dimensions of the robot to the actual arm lengths and this angle are then corrected, and two reference points of the object are taught to the robot to obtain an inclination between the coordinate systems of the object and the robot. The coordinate system of the robot is corrected with the inclination to thereby obtain the position of the object.

Abstract: A pipe handling machine having vertical tracks mounted on a rotatable base. A carriage is mounted on the vertical tracks for vertical movement. A multisection telescoping boom is mounted on the carriage, and a pipe-engaging head is mounted on the end of the boom. The base may be carried on a movable trolley, which engages a set of tracks. The tracks run across the rig floor, from well center to a setback area. A second set of tracks may run across the rig floor, transverse to the first set.

Abstract: An industrial robot having a gimbal-ring type suspension incorporating two axes renders therewith a translatorily movable arm swingable. According to the invention, the translatory movement is achieved in that the gimbal-ring type suspension, which can be swung with the aid of two motors, carries a part in the form of a box-like structure in which a platform provided with a rack can be slidably moved on guides, the platform being driven to translatory motion by a pinion. The platform carries a fourth, a fifth and a sixth motor, of which the fourth motor is able to rotate the arm about its longitudinal axis while the fifth and sixth motor drive their respective drive shafts for swinging the tool holder and rotating the same.