Abstract: A Six-Degree-of-Freedom Parallel-Manipulator having three inextensible limbs for manipulating a platform is described in which the three inextensible limbs are attached via universal joints to the platform at non-collinear points. Each of the inextensible limbs is also attached via universal joints to a two-degree-of-freedom parallel driver such as a five-bar lineage, a pantograph, or a bidirectional linear stepper motor. The drivers move the lower ends of the limbs parallel to a fixed base and thereby provide manipulation of the platform. The actuators are mounted on the fixed base without using any power transmission devices such as gears or belts.

Abstract: Two classes of systems for force-reflecting control that enable high force-reflection gain are presented: position-error-based force reflection and low-pass-filtered force reflection, both combined with shared compliance control. In the position-error-based class, the position error between the commanded and the actual position of a compliantly controlled robot is used to provide force reflection. In the low-pass-filtered force reflection class, the low-pass-filtered output of the compliance control is used to provide force reflection. The increase in force reflection gain can be more than 10-fold as compared to a conventional high-bandwidth pure force reflection system, when high compliance values are used for the compliance control.

Abstract: A robot control system for sequentially controlling a set of industrial robots for coordinated cooperative operation in accordance with a single general control program. The robot control system comprises a single storage unit storing a single general control program comprising motion instructions for the set of industrial robots, a single reading/compiling unit for separately reading the motion instructions from the storage unit and extracting the motion instructions for each industrial robot, and a plurality of driving units respectively driving the corresponding industrial robots in accordance with the motion instructions. The single general control program facilitates sequentially coordinating motion instructions for controlling the set of industrial robots so that the industrial robots will not interfere each other during the cooperative operation, finding errors in the instructions, and modifying the general control program to cope with changes in the process controlled by the robot control system.

Abstract: A robot wrist with two articulation axes has a first body which is carried at the distal end of the robot arm, a second body which is supported by the first body for rotation about a first axis which intersects the longitudinal axis of the robot arm at right angles, and a third body which is supported by the second body for rotation about a second axis which intersects the first axis at right angles. The second and third bodies are rotated by two electric motors which are mounted on the first body and the second body respectively, with the interposition of "Harmonic Drive" reduction units of the type in which the output rotor is supported for rotation by a load-bearing element which forms part of the reduction unit.

Abstract: An actuator is comprised of a plurality of three-dimensionally arranged containers each of which is constructed into deformable configuration and each of which is set to accommodate therein an amount of expandable fluid in response to the increase of the temperature, a heat supply device for supplying the heat to the fluid in each of the containers, a cooling device for cooling the fluid in each of the containers and a control device for controlling the heat supply device and the cooling device.

Abstract: Transferring device for a semiconductor wafer or like part includes a rotatable carrying arm rotatably for carrying a semiconductor wafer or part from its initial position and through a first angle. The rotatable carrying arm has a holding portion for a wafer or part, and a cam follower portion. A motor rotates the rotatable carrying arm through an angle slightly greater than the first angle slightly past a desired position for the wafer. Then, an eccentric cam returns the carrying arm through a second, incremental angle, for bringing the carrying arm, and, hence, the wafer held thereby, to the desired position.

Abstract: A control system for a multi-motor system such as a space telerobot having a remote computational node and a local computational node inter-connected with one another by a high speed data link is described. A Universal Computer Control System (UCCS) for the telerobot motors is located at each node. Each node is provided with a multibus computer system which is characterized by a plurality of processors with all processors being connected to a common bus leading to a command processor. The command processor controls joint hardware and/or software for a plurality of direct current torque motors of the type used in telerobot joints and telerobot hand-held controllers. The motors are connected to the joint processor cards and respond to digital control signals from the joint command processor and a joint motor control card.

Abstract: In a robot arm for use in converting rotary motion of a rotatable axle located within a main post into linear motion of a chuck arm, a first arm unit is fixed to the rotatable axle while a first gear is fixed to the main post so that the first gear is rotated relative to the first arm unit with rotation of the rotatable axle. Rotation of the first arm unit is transmitted through a first power transmission element to a second gear which is rotatably supported on a first fixed axle. A second arm unit is fixed to the second gear while a third gear is fixed to the first fixed axle so that the third gear is rotated relative to the second arm unit. Relative rotation of the third gear is transmitted via a second power transmission element to a fourth gear fixed to the chuck arm.

Abstract: A six degree of freedom grabbing apparatus (20) allows normally open jaws (22) to be positioned in a desired location and orientation relative to a work platform (19), whereupon a single control locks the grabbing apparatus is the desired location and orientation. The jaws (22) are secured to the end of an arm (24). The arm (24) is attached to a shoulder joint (26). The shoulder joint allows the arm to rotate (37) and pitch (38). The shoulder joint is secured to a base unit (28), which base unit is slidably and pivotally connected to the work platform (19, 80), allowing the base unit (and hence the shoulder joint and arm) to move in the same plane, e.g., the x and y directions, as the work platform, and further allowing the base unit, shoulder joint and arm to yaw (39) relative to a given position on the platform. Six degrees of freedom are provided by the apparatus; jaw closing/opening; pitching, rotating, yawing, moving in the x direction, and moving in the y direction.

Abstract: An apparatus for providing a reciprocating motion. The apparatus has a housing block that contains two movable arms in spaced apart relationship to one another. The movable arms are each controlled by independently attached fluid driven actuator cylinders that are mounted externally of the housing block. Tools for the altering of a workpiece may be attached to one or both ends of the movable arms. An embodiment utilizes a rack and pinion gear arrangement to immobilize any imbalance in forces that may exist when the movable arms are biased against a workpiece.

Abstract: An apparatus for providing a reciprocating motion. The apparatus has a housing block that contains two movable arms in spaced apart relationship to one another. The movable arms each contain a rack gear connected to a common pinion gear. One movable arm is driven by a fluid actuated cylinder. The driven movable arm then produces an equal and opposite motion in the other arm because of the interconnection of the pinion gear. Tools for altering of a workpiece may be attached to one or both ends of the movable arms. An embodiment utilizes the rotation of the pinion gear shaft to cause a translation of the entire apparatus away from a workpiece.

Abstract: A machine tool head comprises a fork fitted to a support having a plurality of degrees of freedom, and a tool unit hinged to the fork. The tool unit contains equipment designed to control a tool carrier so that it can traverse along an axis, and equipment designed to perform controlled tool rotation around that axis. The tool carrier is in the form of a shaft which is mounted on a bushing to which a crown gear is connected. The crown gear engages a first pinion which meshes with a second pinion that is connected to a gear motor. The gear motor and the first and second pinions are mounted as a unit on a hinge to the structure which supports the bushing and a biasing mechanism is provided for urgening the first pinion into meshing engagement with the crown gear.

Abstract: An industrial robot has respective actuators mounted within the main body for moving the upper arm, the forearm, and the wrist via respective gear trains, thereby providing light-weight joint sections and eliminating the need for external cables swinging along with the arms. The upper arm, forearm, elbow, and wrist units are made in modular form for easy replacement and substitution of different length arm units.

Abstract: A drive arm is guided in a play-free and low-friction manner in a guide slot in a driven arm. The guide slot has two side edges which are arranged in displaced relationship with each other. Arranged on the driven arm are two rolling members, wherein a respective rolling member is associated with each side edge. At least one of the side edges is in the form of a spring bar portion so that the two rolling members roll against their side edges under a spring biasing effect.

Abstract: A digital control for a multiaxis robot includes position, velocity and torque controls that drive a motor voltage control loop. Pulse width modulated control signals operate power switches in a power bridge to control the current to each robot joint motor. A single resistor is connected in the bridge circuit to supply motor current feedback needed for control loop operation.

Abstract: A sample transfer device (110) for manipulating a sample in a sealed vacuum chamber comprises a tubular housing (112) made from magnetically permeable material. The housing has one end (114) closed and another attached to the vacuum chamber. Located inside the housing is a shaft (116) which is connected to a sample holder. One end of this shaft is connected to a hollow body (140) which is made from a magnetically-permeable and air-tight material. This hollow body (140) forms a sealed cavity which contains an inner permanent magnet (142). The magnet (142) is held in place by two cup-shaped members (152 and 154) and two aluminum blocks (156 and 158). The inner magnet (142) interacts with an outer permanent magnet (166) which slides over the surface of cylindrical housing (112) and moves, through magnetic force, the inner magnet and hence the shaft (116) and the sample holder with the sample in the axial direction of the housing, i.e., into a required position in the vacuum chamber.

Abstract: A digital position and velocity feedback system is provided for a multiaxis robot control and it employs an LSI chip to process incremental position signals for position change and velocity computations. At low speeds, velocity is computed from the reciprocal of elasped time. At higher speeds, velocity is computed from the rate at which incremental position signals are generated.

Abstract: Circuitry is provided for applying a pulse width modulation (PWM) scheme to a brushless DC motor that operates as a robot axis drive. A pulse width modulation (PWM) scheme provides for digital implementation of robot control commands. For this purpose, it provides time stabilized current sampling synchronized to the sampling frequency of the position and velocity loops in the robot control. The brushless drive application circuitry provides for application of the PWM control outputs to commutate the motor energization from winding pair to winding pair.

Abstract: A digital robot control is provided with position/velocity and torque control loops with microprocessor servo controllers in each. The position/velocity servo controller includes two microprocessors that operate as a servo engine in providing position/velocity control for six robot axes. One microprocessor operates as a manager to perform data processing and coordination tasks supportive to position/velocity control. The other microprocessor performs position and velocity servo calculation tasks and operates as a slave processor to the position/velocity control manager. The programming for the position/velocity control sends manager position and other commands and position and velocity feedback from other control levels to the position/velocity calculator and sends torque commands received from the calculator to the next lower control level. The calculator employs position/velocity control algorithms in making torque command calculations.

Abstract: An apparatus by which a sensor holder of a surface testing apparatus can be moved along a preselected path of movement over the surface to be examined. The apparatus has a guide rail establishing the path of movement, which can emulate the contour of the surface and on which the sensor holder is supported.

Abstract: Automated manufacturing equipment (10) such as robot arms for performing a manufacturing operation on a work piece (12) have a relatively stationary host machine (14) with central programmable logic means (16) which receive various parametric inputs (26) and thereby control movement and operation of a machine element (18) suspended at the end of an articulated arm (20) for positioning with respect to the work piece in response to the control signals. A small programmable logic controller (30) disposed for movement with the machine element receives inputs and performs local AND/OR logic on a number of input signals from transducers (28) measuring various parameters associated with movable machine elements. The local I/O device then performs selective AND/OR ladder logic functions on the transducer output signals and outputs a single resultant signal as a function thereof in real-time to the central logic means.

Abstract: An object transport apparatus (10) is provided for the purpose of transporting an object (19), usually a semiconductor wafer, to various points within a planar circular zone (Z). The transport apparatus (10) includes a motive power subassembly (12) for generating rotational motion and delivering it to an arm subassembly (14) rotating about an elbow axis (20) and, through an eccentric drive subassembly (110) to a hand subassembly (16) adapted to support to wafer (19). The hand subassembly (16) rotates about a wrist axis (21) which is parallel to but displaced from the elbow axis (20) in an independent fashion from the rotation of the arm subassembly (14). The eccentric drive subassembly (110) incorporates complimentary pairs of cam drivers (111, 112) connected by cam linkages (120, 122) to deliver rotational motion from the elbow axis (20) to the wrist axis (21).

Abstract: The present invention relates to a control system for a servomechanism device such as robot, and more particularly to a position correcting control system for a servomechanism device which is well suited to perform high-precision positioning or high-perfomance operations on the basis of a sensor feedback control system such as force detection feedback control.

Abstract: A sample transfer device (10) for manipulating a sample (S) in a pair of sealed vacuum chambers (18, 102) comprises a tubular housing (12) made from a magnetically permeable material. The housing has one closed end (14) and another flanged open end (16) for attachment to the vacuum chamber. Located inside the housing is shaft (40) of a square cross section. One end of the shaft is rotatingly connected to an inner permanent magnet (66) which can rotate with respect to the shaft but moves axially together therewith. The other end of the shaft protrudes from the housing into the vacuum chamber (110). The shaft is supported inside the housing by a bevel gear (32) which rotates in a bearing (20) in the housing. The bevel gear (32) has a square opening (38) which guides the above-mentioned square shaft during its axial movements. The gear (32) engages another gear (98) which is attached to an output shaft of a rotary drive unit (80) having its drive element outside the housing.

Abstract: A first rotatable arm and a second arm rotatably are connected together at a forward end of the first rotatable arm. A hollow hole portion is formed at a rear end portion of the second arm and has a hollow projecting shaft provided at one side coaxial with it. A supporting plate and a second shaft are provided at the forward end of the first arm for rotatably supporting the hollow projecting shaft and the hollow hole portion, respectively, the supporting plate and the second shaft being separated so as to be on opposite sides of the hole portion. A rotary shaft rotatably is supported by the hollow projecting shaft at a center of the latter and a motor is provided in a position separated from the rotary shaft and connected to it. A decelerator is provided between the rotary shaft and the second arm within the hollow hole portion.

Abstract: A digital linear actuator includes a plurality of digital actuator cells each connected to the next in sequential fashion. Each of the digital actuator cells contracts or expands a predetermined amount along an expansion/contraction axis when it is actuated by a corresponding digital signal. Each digital actuator cell includes an inner portion containing a medium which expands or contracts in response to a digital signal. The inner portion is disposed within an outer portion that contracts in the direction of the axis in response to expansion of the inner portion, and expands in the direction of the axis in response to contraction of the inner portion. The device is useful in simulating the behavior of a muscle in a prosthetic device. Several embodiments of the invention are disclosed in which an arm can be extended to and retracted from a snake-like configuration. Another embodiment of the invention is disclosed which effectively simulates a shoulder and arm mechanism.

Abstract: A joint mechanism in which a plurality of joints are connected in series and each of the joints may be folded. A chain-like connection of intermediate links (L.sub.1, . . . ) through universal joints (U.sub.1, . . . ) enables the intermediate links (L.sub.1, . . . ) to be folded in any direction, and an arrangement of ball joints (B.sub.1, . . . ) and sliding joints (S.sub.1, . . . ) at the connections of the intermediate links (L.sub.1, . . . ) does not cause any twisting force to be applied to the intermediate links when folded. The joint mechanism shows a soft resiliency and performs an accurate positioning of the distal end of the joint.

Abstract: A joint mechanism for a manipulator movable in the manner similar to human shoulder and elbow joints is disclosed. The joint mechanism comprises three actuators mounted on a shoulder frame, a first gear assembly for moving the shoulder frame back and forth when the first actuator is driven, a second gear assembly for moving the upper and lower arms clockwise or counterclockwise when the second actuator is driven, and a third gear assembly for moving only the lower arm back and forth or up and down when the third actuator is driven. Further, a balance weight and its gear assembly are attached and driven by the third actuator to keep weight balance of the moved lower arm. A fourth actuator and its gear assembly are disclosed for further moving the shoulder frame right and left.

Abstract: A robot comprises a plurality of arms connected in series and articulated with one another so as to cooperatively move along a horizontal plane. A plurality of drive units are connected to rotate one arm relative to another around respective vertical axes. Each drive unit has an outer cylindrical frame from which one arm horizontally extends, and an inner cylindrical bracket from which another arm horizontally extends, the inner cylindrical bracket being coaxially disposed within and rotatable relative to the outer cylindrical frame. A drive motor is fixedly mounted within the inner cylindrical bracket and has a rotatable output shaft extending along the vertical axis. A reduction gear unit is interconnected between the drive motor output shaft and the inside of the outer cylindrical frame and transmits the rotational movement of the output shaft to the inner cylindrical bracket at a reduced rate so that the inner cylindrical bracket rotates around the vertical axis relative to the outer cylindrical frame.

Abstract: An improved device for offering high speed transfer of articles between first, second and third stations. The device includes a pair of gripping devices each of which is movable along a first path with the first gripping device being operative to pick up an article at the first station and deposit it at the second station. The other gripping means is effective to grip the article at the second station and move it to the third station for release.

Abstract: The invention relates to an industrial robot of the kind comprising a body and an arm system pivotally journalled thereon. In order to achieve an improved and extended working range in a vertical space underneath or above the robot, the arm system is supported in the body via a substantially fork-shaped bearing bracket. Linear actuators intended for the operation of the arms are pivotally journalled in the bearing bracket so that, when the arm system assumes its neutral position, the actuators will be oriented primarily transversely to the longitudinal axis of a body and substantially parallel with the first arm pivotally journalled in the bearing bracket. Both actuators are disposed between the body and the first arm in all positions of the arm system.

Abstract: A machine (1) (53) (75) for effecting the transfer of objects in the space between positions having predetermined co-ordinates, in which said objects are supported by a head (25) integral with a pinion (20) (60) mounted rotatable on a slide (12a) (59) sliding in a direction perpendicular to the axis of said pinion (20) (60); the pinion (20) (60) meshing by opposing means with teeth (21) (64, 65) (76, 77) extending along said slide (12a) (59) and axially moving under the bias of driving apparatus (41, 42) (68, 69).

Abstract: A compact industrial robot for mounting on a lathe includes a traveling body transported along an axis (Z axis) parallel to the axis of a spindle provided on a lathe, a column provided on the traveling body for extending and retracting in a vertical direction (Y axis), a first rotating mechanism provided on the column for rotation about an axis (C axis) parallel to the spindle axis, and a second rotating mechanism provided on the rotary shaft of the first rotating mechanism and having a hand. The hand, having a double-hand configuration, is swung by the first rotating mechanism in a plane orthogonal to the spindle axis, and is swiveled by the second rotating mechanism about the longitudinal axis (.alpha. axis) of the second rotating mechanism.

Abstract: A method and apparatus are provided for controlling interpolated linear motion of a tool centerpoint associated with a function element carried by a machine. The motion is defined by input signals representing locations relative to an input coordinate system and path velocities therebetween. The machine includes at least one member rotating about an axis which is subject to movement at a velocity greater than the path velocity. Control is effected by producing projected velocity signals for the machine axes for each interpolative iteration and reducing the iterative path velocity in response to detecting a projected axis velocity in excess of an associated axis velocity limit. The control is applicable to machines incorporating a structure in which members must instantaneously change position to maintain the tool centerpoint on the path.

Abstract: A flexible workpiece transporter is provided with a guide roller adapted to move laterally with the flexible workpiece transporter to thereby inhibit chafing of the guide roller as a result of the lateral movement of the transporter relative to the guide roller. Chafing of the guide roller can be further inhibited by providing the guide roller with ends which are tapered so as to contact a relatively smooth upper surface of the transporter rather than a pair of relatively sharp longitudinal edges thereof.

Abstract: A multi-articulated arm mechanism including a first shaft rotatably mounted on a first base plate; a first arm mounted pivotally only in a plane extending through and parallel with the first shaft; a first positioning mechanism for determining the angle of the first arm with the first shaft; a second arm attached to the first arm and pivotable only in the first plane; a second positioning mechanism for determining the angle of the second arm with the first arm; a slide arm connecting a third fulcrum point on a second base plate located remote from the first plane to a second fixed fulcrum point on the second arm; and a third positioning mechanism for determining the length of the slide arm.

Abstract: A mechanism for driving a robot hand mounted on a robot arm includes a pair of planetary gear assemblies coupled to motors for swinging the robot hand about a first shaft and for rotating the robot hand about a second shaft through transmission systems. During swinging motion of the robot hand about the first shaft, rotative power from the motor which causes such rotation is transmitted by the planetary gear assemblies to the second shaft also, so that rotation of the robot hand resulting from the swinging motion of the robot hand can be cancelled out.

Abstract: The disclosed mechanism includes multiple links having adjustable-length drive units connected in series and operated coordinately. The illustrative form of adjustable-length drive unit has oppositely extending elements oppositely threaded in a body that is secured to a mount, the oppositely extending elements being keyed to each other for conjoint rotation that allows extension and contraction of the drive unit. In one form, successive drive units of successive links produce tilting of articulated links in respective planes perpendicular to each other.

Abstract: The invention relates to a mechanical arm having four degrees of freedom (or possibilities of motion) and actuated by two electric motors, each motor of these alternately controls the movements corresponding to at least two degrees of freedom. The result is an arm having a mixed control for movement in series and in parallel in which the motions controlled by the same motor are carried out in different instants of time, whereas the motions controlled by different motors can be performed simultaneously.