Abstract: A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phases. The pumping arrangement comprises a first pump for extracting gas from the tank, and a second pump for extracting liquid from the tank. In order to minimize any pressure fluctuations transmitted from the vacuum system back to the fluid within the tool, a pressure control system maintains a substantially constant pressure in the tank by regulating the amounts of liquid and gas within the tank.

Abstract: A lithographic system includes an immersion type lithographic apparatus, which includes a support constructed and arranged to support a substrate, a projection system constructed and arranged to project a patterned beam of radiation onto a target portion of the substrate, a liquid confinement structure configured to at least partially fill a space between the projection system and at least one of the substrate and support with an immersion liquid, a liquid supply system arranged to provide the immersion liquid to the liquid confinement structure, and a cleaning liquid supply system arranged to provide a cleaning liquid to a surface of the lithographic apparatus that comes into contact with the immersion liquid. The system includes a switch to provide the cleaning liquid directly to the liquid confinement structure and to provide the immersion liquid indirectly to the liquid confinement structure via a liquid purification system.

Abstract: A method for recovering methane gas from a landfill involves the use of a main absorber, a flash system, an optional ancillary absorber and an optional polishing absorber. The recovered gas is maintained at a temperature that enhances a solvent's ability to absorb carbon dioxide from the recovered gas. While the main absorber uses the solvent for absorbing most of the carbon dioxide from the recovered gas, the flash system removes much of the carbon dioxide from the solvent exiting the main absorber. In some examples, at least portion of the flash system operates at subatmospheric pressure to create a vacuum that draws in a generally inert stripper gas (e.g., air, nitrogen, etc.) at atmospheric pressure. The stripper gas helps remove carbon dioxide from the solvent in the flash system.

Abstract: In a method for cooling liquid, when a liquid containing a volatile component and a surfactant is supplied to an atmosphere having a pressure which is lower than or equal to the saturated vapor pressure of the volatile component so that at least a portion of the volatile component is vaporized, whereby the liquid is cooled, a gas other than the volatile component is introduced into the atmosphere having the pressure so that the gas contacts the liquid.

Abstract: A method for reducing one or more additives in a gaseous hydrocarbon stream (40) such as natural gas, comprising the steps of: (a) admixing an initial hydrocarbon feed stream (10) with one or more additives (20) to provide a multiphase hydrocarbon stream (30); (b) passing the multiphase hydrocarbon stream (30) from a first location (A) to a second location (B2); (c) at the second location (B2), passing the multiphase hydrocarbon stream (30) through a separator (22) to provide one or more liquid streams (50) comprising the majority of the one or more additives, and a gaseous hydrocarbon stream (40) comprising the remainder of the one or more additives; and (d) washing the gaseous hydrocarbon stream (40) in a decontamination unit (24) with a washing stream (60), wherein the washing stream (60) comprises distilled water, to provide an additive-enriched stream (70) and an additive-reduced hydrocarbon stream (80).

Abstract: Systems and methods are presented for the purification of a biogas. The systems comprise: a gas processor for reducing CO2, volatile organic compounds, and H2S in the biogas, the gas processor comprising a scrubber tank and a scrubber liquid; and a scrubber liquid processor in fluid connection with the gas processor for reducing the amount of absorbed gas in the scrubber liquid. The scrubber liquid processor comprises a stripper tank, and is configured to reduce or eliminate airflow through the stripper tank.

Abstract: A system and method for separating a fluid mixture is provided which employ vacuum distillation apparatus, and optionally, gas-handling apparatus operable to introduce a gas into the liquid mixture prior to being dispersed within the vacuum distillation apparatus. The liquid mixture is dispersed within the vacuum distillation apparatus as micro-sized droplets. When used, the gas that has been introduced into the liquid mixture is rapidly liberated from the micro-sized droplets thereby causing the droplets to break into still smaller droplets thereby maximizing the vaporization of the more volatile components in the liquid mixture.

Abstract: A method for reducing one or more additives in a gaseous hydrocarbon stream (40) such as natural gas, comprising the steps of: (a) admixing an initial hydrocarbon feed stream (10) with one or more additives (20) to provide a multiphase hydrocarbon stream (30); (b) passing the multiphase hydrocarbon stream (30) from a first location (A) to a second location (B2); (c) at the second location (B2), passing the multiphase hydrocarbon stream (30) through a separator (22) to provide one or more liquid streams (50) comprising the majority of the one or more additives, and a gaseous hydrocarbon stream (40) comprising the remainder of the one or more additives; and (d) washing the gaseous hydrocarbon stream (40) in a decontamination unit (24) with a washing stream (60), wherein the washing stream (60) comprises distilled water, to provide an additive-enriched stream (70) and an additive-reduced hydrocarbon stream (80).

Abstract: The gaseous effluent to be treated is contacted in C1 with an absorbent solution selected for its property of forming two separable phases when it has absorbed an amount of acid compounds and when it is heated. The absorbent solution laden with acid compounds is then heated in E1 and E3 so as to separate two fractions in BS1: a first absorbent solution fraction depleted in acid compounds and a second absorbent solution fraction enriched in acid compounds. The second fraction is regenerated in C2 so as to release part of the acid compounds, and the first absorbent solution fraction and the regenerated absorbent solution are recycled as absorbent solution. According to the invention, an absorbent solution portion circulating in C1 is cooled in E2 in order to prevent demixing of the solution in column C1.

Abstract: Solvent absorption processes for separating components of an impure feed gas are disclosed. The processes involve two stages of gas-liquid contacting, namely a first, absorption stage and a second, stripping stage. In the case of a carbon dioxide (CO2)-containing methane gas as an impure feed gas, contacting, in the stripping stage, the solvent effluent from the absorption stage with a recycled vapor fraction of the solvent effluent from the stripping stage can improve the recovery and purity of not only the methane (and/or other light hydrocarbons in the impure feed gas), but also that of the CO2 contaminant gas.

Abstract: A method for removing SOx (x=2 and/or 3) from gas using a solution having polyethylene glycol as the main ingredient. First, SOx in the gas is absorbed by the solution of polyethylene glycol. Second, the solution of polyethylene glycol which has absorbed SOx is regenerated by one or more of the heating, vacuum, ultrasonic, microwave or radiation methods, thereby releasing the by-products of sulfur dioxide and sulfur trioxide. The regenerated solution of polyethylene glycol is recycled. When the water content of the regenerated solution of polyethylene glycol is high enough to affect the desulfurization, it needs to be removed. Removal methods include heating and rectification, absorption using a water absorbent, or a combination of these methods. The polyethylene glycol solution is recycled after dehydration.

Abstract: Carbon dioxide contained within exhaust gas is combined with bivalent metal ions such as calcium ions or the like in concentrated salt water to form precipitated calcium carbonate and then can be expelled out. Such an environmental friendly design is realized by a bottle upside down device with a bottle neck exit on a bottom. A piston inside the device can be elevated to a top portion to produce a near vacuum air pressure inside the device. All the brine, exhaust gas, and oxygen, ozone drawn together into the device can be accelerated to form, at least, precipitated calcium carbonate to reduce carbon dioxide contained within the exhaust gas. Chemical reaction is accelerated by a high voltage discharger below the piston and by flashing a portion of water to atomize the brine. A heater can heat up the near vacuum device to accelerate chemical reaction.

Abstract: A plant includes a vacuum stripper (118) that receives a lean hydrogen sulfide-containing physical solvent (32) and in which substantially hydrogen sulfide-free stripping gas (51,52) is provided by at least one of a high-pressure flash vessel (110) and a medium pressure flash vessel (112). Contemplated configurations advantageously extend the range of use for physical solvents to treat sour gas comprising carbon dioxide and hydrogen sulfide, and can be used to meet most pipeline specification of 4 ppm hydrogen sulfide.

Abstract: A degassing and water removal apparatus is used in combination with the testing or replacement of dielectric oil in an RF transmitter. The apparatus comprises at least one ultrasound transducer in vibrational communication with a bulk oil sample held in a tank having a reduced internal air pressure. The tank has fluid connections to the RF transmitter through which oil from the transmitter is drained to the tank and through which the ambient air pressure in the transmitter is reduced. A fluid pump is used to pump the oil from the tank back to the RF transmitter. In a method of using such an apparatus, the RF transmitter is held at reduced internal pressure during the return of oil thereto, so that the oil does not dissolve gases in the atmosphere internal to the RF transmitter.

Abstract: A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phases. The pumping arrangement comprises a first pump for extracting gas from the tank, and a second pump for extracting liquid from the tank. In order to minimize any pressure fluctuations transmitted from the vacuum system back to the fluid within the tool, a pressure control system maintains a substantially constant pressure in the tank by regulating the amounts of liquid and gas within the tank.

Abstract: A device for dehumidifying room air has a chamber consisting of at least one first cavity (1) and at least one second cavity (2). The cavities are separated by at least one water-permeable and/or water-vapor-permeable structure (3), these structures (3) lying in each case in the direction of the fluid streams flowing through the cavities (1, 2) of the chamber. In this case, a first air stream (11, 12) which is to be dehumidified flows through the first cavity (1). The second cavity (2), with its second air stream (13, 14), at least partly absorbs the moisture extracted from the first stream.

Abstract: A device and method for generating micro bubbles in a liquid. The method includes the steps of: providing a flow-through channel containing at least two local constrictions of flow therein; passing the liquid at a velocity of at least at least 12 m/sec through a first local constriction of flow to create a first hydrodynamic cavitation field downstream from the first local constriction of flow; introducing a gas into the liquid in the first local constriction of flow, thereby creating gas-filled cavitation bubbles; collapsing the gas-filled cavitation bubbles formed in the first hydrodynamic cavitation field to dissolve the gas into the liquid, thereby forming a gas-saturated liquid; passing the gas-saturated liquid through a second local constriction of flow to create a second hydrodynamic cavitation field downstream from the second local constriction of flow; and extracting the dissolved gas from the gas-saturated liquid, thereby generating micro bubbles in the liquid.

Abstract: A multi-phase separation system utilized to remove contaminants from fluids includes a pre-filtering module for filtering a contaminated fluid to provide a filtered contaminated fluid. A condenser module receives the filtered contaminated fluid and a contaminated gas phase for condensing the contaminated gas phase to a contaminated liquid. A phase reaction chamber converts the filtered contaminated fluid to a contaminated mist wherein the mist is subjected to a low energy, high vacuum environment for providing a first change of phase by separating into a contaminated gas phase and a liquid mist phase. The contaminated gas phase is carried out of the phase reaction chamber by a carrier air. A vacuum pump provides the low energy, high vacuum environment in the phase reaction chamber and delivers the contaminated gas phase to the condenser module for condensation providing a second change of phase.

Abstract: An improved apparatus and method for use with a natural gas dehydrator. The apparatus and method of the invention provide for recirculation of gaseous or combustible materials so that they are not released into the atmosphere and to provide fuel for the process. Likewise, liquid hydrocarbons are collected. Various components, including separators, an absorber, wet glycol, dry glycol, an effluent condenser, heat exchangers, and a reboiler are utilized in accordance with the present invention.

Abstract: A method and apparatus is provided for separating the liquid and non-liquid components of a foamy mixture. The apparatus comprises a filter through which the liquid portion of the foam can pass and through which the gaseous or air component cannot pass, unless a pressure differential across the filter exceeds the bubble point of the filter. Foam is supplied to a first side of the filter. The liquid component of the foam is removed from the second side of the filter, and the gaseous component of the foam from the first side of the filter. A pressure differential is established between the two sides of the filter to cause the liquid component of the foam to pass through the filter; but the pressure differential across the filter is prevented from exceeding the bubble point of the filter to prevent the gaseous component of the foam from passing through the filter.

Abstract: Degassing is accomplished by driving a gas-containing solution to a subatmospheric pressure approximately equal to the solution vapor pressure, and maintaining the subatmospheric pressure notwithstanding evolution of gas from the solution. This may be accomplished using a vacuum tower arrangment whereby a column of the gas-containing liquid is drawn to the maximum physically attainable height. So long as the vacuum is coupled to the liquid column above this height (generally on the order of 34 feet, depending on the ambient temperature and the composition of the liquid), the liquid will not be drawn into the vacuum, which creates a non-equilibrium region of extremely low pressure above the liquid that liberates dissolved gases. Moreover, liquid introduced into the low-pressure region above the column will fall onto the column without entering the vacuum system.

Abstract: When a vapor-phase mixture is brought in contact with a liquid absorbent kept at a temperature above the condensation temperature of the vapor-phase mixture, the vapor-phase mixture becomes concentrated for those components which are absorbed by the absorbent in small or negligible amounts. In the method according to the invention, the regeneration of the absorbent essentially utilizes the heat of absorption of the absorbed components. The actual absorption process can be isothermal or adiabatic or a combination of these. The method is particularly suited to the separation of vapor-phase mixtures of minimum boiling point azeotropes.

Abstract: The present invention provides methods for making gases generated in the treatment of hydrogen chloride wastes harmless by neutralization and dissolving, and an apparatus thereof, and a suction-type solution filter container to be used, and providing to shape useful materials or components, such as activated carbon with excellent adsorbability, from the post-treated residues of the wastes. Hydrogen chloride wastes are put in the sealed container 1 and heated at 400.degree. C. or less without oxygen or with air-blocked condition; the gases from the wastes, such as chlorine or hydrogen chloride, are sucked to extract from the container; the extracted gases are introduced into the suction-type solution filter container with liquid filtration agents to pass therethrough; chlorine is removed and reduced in volume from the wastes in the sealed container.