Abstract: A system for the storage and delivery of a sorbable fluid, comprising a storage and dispensing vessel containing a sorbent material having sorptive affinity for the sorbable fluid, and from which the fluid is desorbable by pressure-mediated and/or thermally-mediated desorption, wherein the sorbent material is functionally enhanced by a reagent which alters the binding energy of the fluid to the sorbent. In a preferred aspect, the system is arranged for storage and delivery of B.sub.2 H.sub.6, in which the sorbent material has sorptive affinity for B.sub.2 H.sub.6 and is effective when B.sub.2 H.sub.6 is contacted with the sorbent to convert B.sub.2 H.sub.6 to a sorbed .BH.sub.3 form, which is desorbable by pressure-mediated desorption and/or thermally-mediated desorption to release B.sub.2 H.sub.6 from the sorbent, and means for selectively discharging desorbed B.sub.2 H.sub.

Abstract: A system for the storage and on-demand dispensing of a fluid that is sorbable on a physical sorbent and that subsequent to sorption is desorbable from the sorbent by pressure-mediated desorption and/or thermally-mediated desorption. The system includes a storage and dispensing vessel containing the physical sorbent, and a desorbed gas retention structure, e.g., a storage vessel, or an extended length of gas flow conduit, for holding fluid that is desorbed from the physical sorbent and flowed to the retention structure for subsequent discharge. A pump is operatively coupled in gas flow communication with the storage and dispensing vessel, and selectively operable to effect desorption of fluid in the storage and dispensing vessel, and transfer of desorbed fluid to the retention structure for holding therein.

Abstract: A fill system and methodology for the manufacture of fluid storage and dispensing vessels containing sorbent material for holding a sorbable fluid, for on-demand dispensing of the fluid in the use of the vessel. The fill system and methodology are directed to minimizing the processing time required to dissipate the heat of sorption incident to the loading of the sorbable fluid onto the sorbent material, so that thermal equilibration time in the manufacture of the vessels is substantially reduced in relation to the use of only ambient convective air cooling for dissipation of the heat of sorption from the fluid-filled vessel.

Abstract: The invention comprises a PSA gas prepurifier for the removal of contaminants present in a feed gas stream. The prepurifier of the invention has a bed of adsorbent material which comprises at least two discrete layers of adsorbents, at least one of the adsorbents being comparatively strong and at least another of the adsorbents being comparatively weak.

Abstract: A system for the storage and on-demand dispensing of a fluid that is sorbable on a physical sorbent and that subsequent to sorption is desorbable from the sorbent by pressure-mediated desorption and/or thermally-mediated desorption.

Abstract: A process system with an integrated gas storage and delivery unit comprising an adsorption-desorption apparatus, for storage and dispensing of a gas wherein the gas is dispensed by pressure differential desorption of the sorbate gas from the sorbent material. A motive fluid driver, e.g., a pump, blower, compressor, eductor, or the like, is arranged for flowing the dispensed gas to a gas-utilizing unit, such as an ion-implant unit, wastewater treatment unit, gas-liquid contacting chamber, chemical vapor deposition reactor, gas laser assembly, etc.

Abstract: An adsorption-desorption apparatus, for storage and dispensing of a sorbable gas, wherein a carbon physical sorbent medium bearing the adsorbed gas to be selectively dispensed is delivered by pressure differential desorption and/or thermal desorption of the sorbate gas from the sorbent material. The carbon sorbent material preferably comprises a material which is characterized by a Sorbent Working Capacity, measured for arsine at 40 Torr and at 650 Torr, of at least 100 grams arsine per liter of bed of the sorbent material, e.g., a carbon sorbent material having the adsorption isotherm characteristic of curve A in FIG. 1 herein.

Abstract: A stocker for accommodating, storing or transporting articles in clean, contamination-free conditions for either a long time or temporarily. The stocker has a particle collector provided in a part thereof. The particle collector includes an irradiation source such as ultraviolet light source, and a photoelectron emitting material that emits photoelectrons on irradiation with irradiation energy from the irradiation source. The particle collector further includes an electric field forming electrode, and a charged particle collecting material. The space where the particle collector is provided is preferably partitioned from the other space of the stocker by an irradiation energy screening material.

Abstract: A process for removal and recovery of arsenic from a gas comprising contacting a supported sorbent with an arsenic-containing gas, adsorbing the arsenic with the supported sorbent, desorbing the arsenic from the supported sorbent, and collecting the desorbed arsenic.

Abstract: A process for inerting an interior of a container, the process comprising:(a) introducing an inert fluid rich stream into the interior of the container, the concentration of inert fluid in the inert fluid rich stream inert fluid being greater than the inert fluid concentration in the interior of the container;(b) increasing the concentration of inert fluid in the inert fluid rich stream during its introduction into the interior of the container; and(c) withdrawing or purging a waste gas stream containing at least one impurity and inert fluid from the interior of the container.

Abstract: An integrated process for treating a vent gas stream containing halogenated organic compounds to produce a clean vent gas with vacuum swing adsorption of the halogenated organic compounds and the recycle of a gaseous stream from the halogenated organic compound recovery section. A liquid sponge oil containing halogenated organic compounds is contacted and admixed with the evacuated effluent from the adsorption zone to prevent the accumulation of normally gaseous hydrocarbonaceous compounds.

Abstract: The present invention is directed to a process for separating nitrogen from gas mixtures containing nitrogen and less strongly adsorbed components such as oxygen, hydrogen, argon or helium by use of an at least binary exchanged X-zeolite having lithium and a divalent cation selected from the group consisting of barium, cobalt, copper, chromium, iron, magnesium, manganese, nickel, zinc and mixtures thereof in a ratio of preferably 5% to 50% of the divalent cation and 50% to 95% lithium.