Optical Microscope Patents (Class 977/869)
  • Patent number: 11961210
    Abstract: An inspection apparatus includes a specimen stage configured to retain a specimen, at least three imaging devices arranged in a triangular array positioned above the specimen stage, each of the at least three imaging devices configured to capture an image of the specimen, one or more sets of lights positioned between the specimen stage and the at least three imaging devices, and a control system in communication with the at least three imaging devices.
    Type: Grant
    Filed: February 27, 2023
    Date of Patent: April 16, 2024
    Assignee: Nanotronics Imaging, Inc.
    Inventors: Jonathan Lee, Damas Limoge, Matthew C. Putman, John B. Putman, Michael Moskie
  • Patent number: 11860087
    Abstract: A method for nanoscale tomographic infrared absorption imaging is provided, the method including: generating a first plurality of sets of probe measurements for a plurality of sample locations located across a surface of a sample, and measuring a magnitude and phase of a variation in displacement of the surface of the sample at the particular sample location at the second frequency, wherein the first frequency and the second frequency differ; and generating, based on the first plurality of sets of probe measurements, a three-dimensional tomographic map of absorption of infrared light at the first wavelength by the sample. Generating measurements for a particular location includes generating a first probe measurement by illuminating the sample with infrared light that varies at a first frequency and measuring a variation in displacement of the surface of the sample at the particular sample location at the first frequency.
    Type: Grant
    Filed: April 2, 2022
    Date of Patent: January 2, 2024
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Rohit Bhargava, Seth M Kenkel
  • Patent number: 11828592
    Abstract: An apparatus comprising: a void; an interferometer detector; and light guide means for guiding a light signal along a light path to the interferometer detector wherein the light path comprises a cantilever light guide that is supported such that a free-end can move within the void and the interferometer detector is configured to detect a deflection of the free-end of the cantilever light guide; and a reflector, wherein the cantilever light guide comprises a light outcoupler configured to out-couple the light signal to extend the light path from the cantilever light guide to the reflector.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: November 28, 2023
    Assignee: Nokia Technologies Oy
    Inventor: David Bitauld
  • Patent number: 11733021
    Abstract: A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.
    Type: Grant
    Filed: December 22, 2021
    Date of Patent: August 22, 2023
    Assignee: Mitutoyo Corporation
    Inventors: Dawn Alisa Keehnel, Christopher Richard Hamner, Scott Ellis Hemmings, Scott Allen Harsila
  • Patent number: 11600324
    Abstract: A system and method of storing and reading digital data, including providing a nanopore polymer memory (NPM) device having at least one memory cell comprising at least two addition chambers each arranged to add a unique chemical construct (or codes) to a polymer (or DNA) string when the polymer enters the respective addition chamber, the data comprising a series of codes; successively steering the polymer from deblock chambers through the nanopore into the addition chambers to add codes to the polymer to create the digital data pattern on the polymer; and accurately controlling the bit rate of the polymer using a servo controller. The device may have loading chamber(s) to load (or remove) the polymer into/from the deblock chambers through at least one “micro-hole”. The cell may be part of a memory system that stores and retrieves “raw” data and allows for remote retrieval and conversion. The cell may store multi-bit data having a plurality of states for the codes.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: March 7, 2023
    Assignee: IRIDIA, INC.
    Inventors: Paul F. Predki, John Stuart Foster
  • Patent number: 11593919
    Abstract: An inspection apparatus includes a specimen stage configured to retain a specimen, at least three imaging devices arranged in a triangular array positioned above the specimen stage, each of the at least three imaging devices configured to capture an image of the specimen, one or more sets of lights positioned between the specimen stage and the at least three imaging devices, and a control system in communication with the at least three imaging devices.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: February 28, 2023
    Assignee: Nanotronics Imaging, Inc.
    Inventors: Jonathan Lee, Damas Limoge, Matthew C. Putman, John B. Putman, Michael Moskie
  • Patent number: 9028757
    Abstract: A method for analysis of an object dyed with fluorescent coloring agents. Separately fluorescing visible molecules or nanoparticles are periodically formed in different object parts, the laser produces the oscillation thereof which is sufficient for recording the non-overlapping images of the molecules or nanoparticles and for decoloring already recorded fluorescent molecules, wherein tens of thousands of pictures of recorded individual molecule or nanoparticle images, in the form of stains having a diameter on the order of a fluorescent light wavelength multiplied by a microscope amplification, are processed by a computer for searching the coordinates of the stain centers and building the object image according to millions of calculated stain center co-ordinates corresponding to the co-ordinates of the individual fluorescent molecules or nanoparticles. Two-dimensional and three-dimensional images are provided for proteins, nucleic acids and lipids with different coloring agents.
    Type: Grant
    Filed: January 15, 2014
    Date of Patent: May 12, 2015
    Assignee: Super Resolution Technologies LLC
    Inventors: Andrey Alexeevich Klimov, Dmitry Andreevich Klimov, Evgeniy Andreevich Klimov, Tatiana Vitalyevna Klimova
  • Patent number: 8893309
    Abstract: An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.
    Type: Grant
    Filed: June 22, 2010
    Date of Patent: November 18, 2014
    Assignee: The Regents of the University of California
    Inventors: Feng Tao, Miquel Salmeron, Gabor A. Somorjai
  • Patent number: 8668872
    Abstract: A method for analysis of an object dyed with fluorescent coloring agents. Separately fluorescing visible molecules or nanoparticles are periodically formed in different object parts, the laser produces the oscillation thereof which is sufficient for recording the non-overlapping images of the molecules or nanoparticles and for decoloring already recorded fluorescent molecules, wherein tens of thousands of pictures of recorded individual molecule or nanoparticle images, in the form of stains having a diameter on the order of a fluorescent light wavelength multiplied by a microscope amplification, are processed by a computer for searching the coordinates of the stain centers and building the object image according to millions of calculated stain center co-ordinates corresponding to the co-ordinates of the individual fluorescent molecules or nanoparticles. Two-dimensional and three-dimensional images are provided for proteins, nucleic acids and lipids with different coloring agents.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: March 11, 2014
    Assignee: Super Resolution Technologies LLC
    Inventors: Andrey Alexeevich Klimov, Dmitry Andreevich Klimov, Evgeniy Andreevich Klimov, Tatiana Vitalyevna Klimova
  • Patent number: 8334143
    Abstract: A method for analysis of an object dyed with fluorescent coloring agents. Separately fluorescing visible molecules or nanoparticles are periodically formed in different object parts, the laser produces the oscillation thereof which is sufficient for recording the non-overlapping images of the molecules or nanoparticles and for decoloring already recorded fluorescent molecules, wherein tens of thousands of pictures of recorded individual molecule or nanoparticle images, in the form of stains having a diameter on the order of a fluorescent light wavelength multiplied by a microscope amplification, are processed by a computer for searching the coordinates of the stain centers and building the object image according to millions of calculated stain center co-ordinates corresponding to the co-ordinates of the individual fluorescent molecules or nanoparticles. Two-dimensional and three-dimensional images are provided for proteins, nucleic acids and lipids with different coloring agents.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: December 18, 2012
    Assignee: Stereonic International, Inc.
    Inventors: Andrey Alexeevich Klimov, Dmitry Andreevich Klimov, Evgeniy Andreevich Klimov, Tatiana Vitalyevna Klimova
  • Patent number: 8110405
    Abstract: An analysis of an object dyed with fluorescent coloring agents carried out with the aid of a fluorescent microscope which is modified for improved resolving power and called a nanoscope. The method is carried out with a microscope having an optical system for visualizing and projecting a sample image to a video camera which records and digitizes images of individual fluorescence molecules and nanoparticles at a low noise, a computer for recording and processing images, a sample holder arranged in front of an object lens, a fluorescent radiation exciting source and a set of replaceable suppression filters for separating the sample fluorescent light.
    Type: Grant
    Filed: September 27, 2010
    Date of Patent: February 7, 2012
    Assignee: Stereonic International, Inc.
    Inventors: Andrey Alexeevich Klimov, Dmitry Andreevich Klimov, Evgeniy Andreevich Klimov, Tatiana Vitalyevna Klimova
  • Patent number: 7803634
    Abstract: An analysis of an object dyed with fluorescent coloring agents carried out with the aid of a fluorescent microscope which is modified for improved resolving power and called a nanoscope. The method is carried out with a microscope having an optical system for visualizing and projecting a sample image to a video camera which records and digitizes images of individual fluorescence molecules and nanoparticles at a low noise, a computer for recording and processing images, a sample holder arranged in front of an object lens, a fluorescent radiation exciting source and a set of replaceable suppression filters for separating the sample fluorescent light.
    Type: Grant
    Filed: May 5, 2006
    Date of Patent: September 28, 2010
    Inventors: Andrey Alexeevich Klimov, Dmitry Andreevich Klimov, Evgeniy Andreevich Klimov, Tatiana Vitalyevna Klimova
  • Patent number: 7507957
    Abstract: A problem to be resolved by the invention resides in providing a multifunction analyzing apparatus for detecting a shape with high resolution and physical property information capable of not only successively reading a base arrangement from end to end but also specifying a position hybridized by known RNA with regard to a single piece of DNA elongated in one direction on a board. A microscope system of the invention is provided with a fluorescence microscope, a scanning near field microscope and a scanning probe microscope as a detecting system, the microscopes are fixed to a switching mechanism and can be moved to a position at which the various microscopes can observe the same portion of a sample by switching operation of the mechanism. The microscope system of the invention is provided with a function capable of directly detecting a shape and physical property information of one piece of DNA by the scanning probe microscope by multifunction scanning.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: March 24, 2009
    Assignee: SII NanoTechnology Inc.
    Inventors: Masamichi Fujihira, Masatoshi Yasutake, Tatsuaki Ataka
  • Patent number: 7444856
    Abstract: Sensors and systems for electrical, electrochemical, or topographical analysis, as well as methods of fabricating these sensors are provided. The sensors include a cantilever and one or more probes, each of which has an electrode at its tip. The tips of the probes are sharp, with a radius of curvature of less than about 50 nm. In addition, the probes have a high aspect ratio of more than about 19:1. The sensors are suitable for both Atomic Force Microscopy and Scanning Electrochemical Microscopy.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: November 4, 2008
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Friedrich B. Prinz, Ye Tao, Rainer J. Fasching, Ralph S. Greco, Kyle Hammerick, Robert Lane Smith
  • Patent number: 7430898
    Abstract: A system that includes an optical subsystem and an atomic force microscope probe is provided. The optical subsystem is configured to generate positional information about a location on a surface of the specimen. The system is configured to position the probe proximate the location based on the positional information. One method includes generating positional information about a location on a surface of a specimen with an optical subsystem. The method also includes positioning an atomic force microscopy probe proximate the location based on the positional information. Another system includes an optical subsystem configured to measure overlay of a wafer using scatterometry. The system also includes an atomic force microscope configured to measure a characteristic of a feature on the wafer. An additional method includes measuring overlay of a wafer using scatterometry. The method also includes measuring a characteristic of a feature on the wafer using atomic force microscopy.
    Type: Grant
    Filed: September 3, 2004
    Date of Patent: October 7, 2008
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Michael Weber-Grabau, Christopher F. Bevis, Michael Faeyrman, Ofir Zamir
  • Publication number: 20080149832
    Abstract: This invention has applications as a scanning probe microscope/nanomanipulator with consumer gaming applications. An integrated compound lever cantilever which can function simultaneously as both a sample substrate actuator and probe tip scanner actuator for modulation of one or more probe tip. In one embodiment a piezoelectric multimorph MEMS structure is fabricated which serves as a Scanning Probe Microscope cantilever probe tip scanner and allows for the substrate to be moved in more than 1 Degree of freedom with subnanometer resolution. Nanomanipulation means such as nanotweezer, nanopore and nanomachine embodiments are possible uses for the device in addition to data storage. Parallel array operation of many sets of cantilevers is a preferred embodiment which can be used as a nanoscale manipulation and fabrication means.
    Type: Application
    Filed: December 20, 2006
    Publication date: June 26, 2008
    Inventor: Miguel Zorn
  • Patent number: 7076871
    Abstract: A method of manufacturing a carbon nanotube device including an inner electrode, having connecting step, connecting a carbon nanotube to the inner electrode, wherein the connecting step comprises: attaching a conductor to an end or periphery thereof of a needle-shaped or rod-shaped carrying electrode; arranging the carbon nanotube in contact or close to a predetermined connection part of the inner electrode; approaching the end of the carrying electrode on which the conductor is carried to the connection part; and transferring the conductor carried on the carrying electrode to the connection part or periphery thereof to connect the carbon nanotube to the inner electrode.
    Type: Grant
    Filed: January 27, 2003
    Date of Patent: July 18, 2006
    Assignee: Fuji Xerox Co., Ltd.
    Inventors: Kazunaga Horiuchi, Masaaki Shimizu, Nobuyuki Aoki, Yuichi Ochiai