Abstract: A robot arm includes a plurality of links and a plurality of joints connecting the links for adjustment relative to one another. At least a first link has a first bearing pin, a second bearing pin located opposite the first bearing pin, and a second link connected in an articulated manner to the first link by one of the joints has a first bearing flange on which the first bearing pin of the first link is rotatably mounted, and has a second bearing flange on which the second bearing pin of the first is rotatably mounted. The first bearing flange of the second link has a circumferentially closed recess in which the first bearing pin of the first link is received, and the second bearing flange of the second link has a circumferentially open recess in which the second bearing pin of the first link is received.

Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein a link connecting member with blades is engaged at a front area of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms and subordinate link arms, and a common link arm that are connected to each other or to the transfer arm platform, wherein, for each transfer arm part, drive shafts, interlocked with transfer driving motors or speed reducers installed on one of the transfer link arms, and output shafts interlocked with the drive shafts are installed on the transfer link arms.