Abstract: A solid immersion lens (SIL) is provided. The SIL includes a spherical part, a cone-shaped part, a tip part, and an edge part between the cone-shaped part and the tip part. The edge part includes a curved surface.
Type:
Application
Filed:
November 11, 2008
Publication date:
May 28, 2009
Applicant:
Sony Corporation
Inventors:
SunMin Kim, Tsutomu Ishimoto, Takao Kondo, Ariyoshi Nakaoki