Abstract: The use of neural networks has been employed to adjust processing during the fabrication of articles. For example, in the production of photolithographic masks by electron beam irradiation of a mask blank in a desired pattern, electrons scattered from the mask substrate cause distortion of the pattern. Adjustment for such scattering is possible during the manufacturing process by employing an adjustment function determined by a neural network whose parameters are established relative to a prototypical mask pattern.

Abstract: It has been found that for a SCALPEL lithographic system thermal effects dictate that the acceleration voltage for the exposing electrons be maintained within a specific range. This range depends on a variety of factors but is generally in the 50 to 150 KeV region. Additionally, thermal considerations also dictate the method of scanning the mask to print an entire wafer.

Abstract: Repair of transparent errors in masks utilized for lithographic processes in the manufacture of devices is accomplished by a particularly expedient procedure. In this procedure a metal ion beam such as a gallium ion beam is directed to the region that is to be repaired. An organic gas, including a material having an aromatic ring with an unsaturated substituent, is introduced into this region. The interaction of the gas with the ion beam produces an opaque adherent deposit. The resolution for this deposition is extremely good and is suitable for extremely fine design rules, e.g., 1 .mu.m and below.

Abstract: Batteries based on lead chemistry, e.g., lead-acid batteries, are substantially improved through the use of a particular positive material. This material is formed by the electrochemical conversion of tetrabasic lead sulfate (TTB) where this TTB is synthesized at a pH in the range 9.3 to 12 and under reaction conditions that provide a substantial excess of sulfate to the reactive lead. The resulting materials provide needle-like structures with a width generally in the range 3 to 1 .mu.m. The relative narrow needles, when employed on the positive electrode of a lead acid battery, improve the efficiency of formation, provide good adhesive to the positive plate, extend battery life, as well as, yield excellent capacity per gram of active material.

Abstract: Stress induced grain boundary movement in aluminum lines used as connections in integrated circuits is substantially avoided by doping the aluminum with iron. Through this expedient not only is grain boundary movement avoided but electromigration problems are also decreased.

Abstract: A process of radiation-induced formation of a uniform metal or metal oxide region suitable for device application or for repairing transparent defects in pattern metal films of lithographic masks has been found. The process requires that the heat evolved during the radiation-induced reactions be carefully limited to produce the desired uniformity.

Abstract: A method for fabricating a semiconductor device, which involves a technique for monitoring the temperature of the semiconductor substrate in which the device is formed, is disclosed. In accordance with the inventive technique, light, to which the substrate is substantially transparent, is impinged upon the substrate, and the intensity of either the reflected or transmitted light is monitored. If, for example, the intensity of the reflected light is monitored, then this intensity will be due to an interference between the light reflected from the upper surface of the semiconductor substrate and the light transmitted through the substrate and reflected upwardly from the lower surface of the substrate. If the temperature of the substrate varies, then the optical path length of the light within the substrate will vary, resulting in a change in the detected intensity.

Abstract: It has been found that in the preparation of devices having repetitive layers, such as distributed Bragg reflectors, the dopant introduced during processing redistributes itself in a deleterious manner. In particular, this dopant through various effects segregates and diffuses from one layer into the interface region of the second layer. As a result, properties such as electrical resistance of the structure become unacceptably high. By utilizing various expedients such as carbon doping this segregation and its associated deleterious effects are avoided.

Abstract: A solder paste that is useful in applications such as surface mounting of components on printed circuit boards has been found. After soldering, the residue requires no cleaning. The achievement of these desirable properties is accomplished by employing a solder flux vehicle including a three component residue modifier.

Abstract: Substrates for supporting optical fibers in an optical coupler are made by, first, making grooves in a glass preform which are about ten times the desired size, and then using glass drawing techniques to draw from the preform a substrate of the proper size. Optical fibers are arranged in ribbon form and placed in a fixture which allows the ends to be cut and polished at the angle required for proper coupler operation. Fibers are stripped from the end of the ribbon that has been cut and polished and placed in the grooves for proper alignment with abutting fibers. The ends of the fibers that remain fixed to the ribbon prevent unwanted rotation of the fibers.

Abstract: A class of resist compositions sensitive to deep ultraviolet radiation includes a resin sensitive to acid and a composition that generates acid upon exposure to such radiation. A group of nitrobenzyl materials is particularly suitable for use as the acid generator.

Abstract: It has been found that the properties of poly(vinyl chloride) based polymers are substantially enhanced through the use of a specific plasticizer system. In particular, the use of specific triarylphosphates in combination with specific diarylphosphates in specific proportions not only plasticizes the PVC polymer but produces a transparent, flame retardant heat resistant, easily worked polymer. These materials are used so that the diarylphosphate is 30-45% of the total concentration of the phosphates and such that 45 to 70 parts of the phosphates are present per 100 parts of the polymer.

Abstract: Various methods have been proposed for measuring the viscosity of thermosetting polymers. It has been found that these method are generally inaccurate. A test which avoids the inaccuracies of previous techniques is proposed. In this test the heated thermosetting resin is forced at a known flow rate through a runner and through a capillary tube at the end of the runner. By measuring the pressure differential across the capillary a meaningful measure of viscosity is obtained.

Abstract: Direct contact to shallow junctions in integrated circuits and interconnection between these contacts is achievable by utilizing a specific aluminum CVD process. In this process the aluminum is deposited utilizing a triisobutyl aluminum precursor onto a substrate having a nucleation layer, e.g. a titanium nitride layer. By appropriate choice of this nucleation layer to control the nucleation of the depositing aluminum, suitable contact is made while avoiding void defects present in the absence of such layer.

Abstract: A p-channel depletion-mode MOS device is utilized for measuring low levels of ionizing radiation.

Abstract: The use of a surface treatment approach to lithography, depending on a radiation-induced change in hydrophilicity, shows particular promise for deep UV, vacuum ultraviolet and x-ray lithography. For example, hydrophobic chlorinated polystyrene is selectively irradiated in the presence of oxygen producing local hydrophilic regions. Subsequent treatment of these hydrophilic regions with water followed by an organometallic or inorganic gas such as TiCl.sub.4 yields a patterned, surface metal oxide suitable as, for example, an etch mask for further patterning of the underlying polymer film and device regions.

Abstract: Stress induced grain boundary movement in aluminum lines used as connections in integrated circuits is substantially avoided by doping the aluminum with iron. Through this expedient not only is grain boundary movemenmt avoided but electromigration problems are also decreased.

Abstract: The use of alternating n and p type regions asymmetrically spaced in a semiconductor material yields extremely advantageous properties. In particular, by controlling the doping level and the spatial configuration of the doped region both the device response and its optical properties are controllable. Therefore, in applications such as those involving optical switches LEDs, lasers and long wavelength detectors, both the speed of device and its optical properties are controllable. As a result, greater fabrication flexibility than previously available is possible.

Abstract: Corrosion of metals such as silver and copper by sulfur and chlorine containing entities are substantially prevented by surrounding these materials with a suitable polymeric structure. The structure should be a polymer containing a material such as copper or aluminum that reacts readily with corrosive gases. In one advantageous embodiment a polymer bag containing approximately 35 weight percent of dispersed, powdered copper is employed to enclose a metal containing structure such as a printed circuit board. Use of this expedient substantially reduces corrosion of the printed circuit board.

Abstract: Polymers formed from monomers such as chloromethyl styrene and trimethylgermylmethyl methacrylate form negative-acting resists that are extremely sensitive to exposure by electron beam and deep UV radiation. These materials are particularly useful in bilevel resist applications for fabricating masks or for device processing.