Patents Represented by Attorney, Agent or Law Firm Scott C. Krieger
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Patent number: 6720031Abstract: A method of chemical vapor deposition (CVD) of copper films includes preparing a substrate, including forming structures thereon have a barrier metal exposed surface; placing the prepared substrate into a CVD chamber; heating the substrate to a temperature of between about 200° C. and 250° C.; introducing a water flow in a carrier gas for at least one minute; stopping the water flow; and starting the flow of copper precursor.Type: GrantFiled: October 16, 2001Date of Patent: April 13, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Wei Pan, David Russell Evans, Sheng Teng Hsu
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Patent number: 6716744Abstract: A method of adhering copper thin film to a substrate in an integrated circuit structure includes preparing a substrate, including forming active regions and trenches for interconnect structures; depositing a metal barrier layer on the substrate; depositing an ultra thin film layer of tungsten over the barrier metal layer; depositing a copper thin film on the tungsten ultra thin film layer; removing excess copper and tungsten to the level of the metal barrier layer; and completing the integrated circuit structure.Type: GrantFiled: May 6, 2002Date of Patent: April 6, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Wei Pan, David R. Evans, Sheng Teng Hsu
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Patent number: 6711049Abstract: A one-transistor FeRAM memory cell array includes an array of ferroelectric transistors arranged in rows and columns, each transistor having a source, a drain, a channel, a gate oxide layer over the channel and a ferroelectric stack formed on the gate oxide layer; word lines connecting the gate ferroelectric stack top electrodes of transistors in a row of the array; a connection to the channel of all transistors in the array formed by a substrate well; a set of first bit lines connecting the sources of all transistors in a column of the array; and a set of second bit lines connecting the drains of all transistors in a column of the array; wherein the ferroelectric stack has opposed edges, which, when projected to a level of the source, drain and channel, are coincident with an abutted edge of the source and the channel and the drain and the channel, respectively.Type: GrantFiled: October 28, 2002Date of Patent: March 23, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Sheng Teng Hsu, Jong-Jan Lee, Fengyan Zhang, Nobuyoshi Awaya
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Patent number: 6709910Abstract: A system and method are provided for reducing film surface protrusions in the fabrication of LILAC films. The method comprises: forming an amorphous film with a first thickness; annealing the film using a LILAC process, with beamlets having a width in the range of 3 to 10 microns; in response to annealing, forming protrusions on the film surface; optionally oxidizing the film surface; thinning the film; and, in response to thinning the film, smoothing the film surface. Typically, the film surface is smoothed to a surface flatness of 300 Å, or less. In some aspects of the method, oxidizing the film surface includes oxidizing the film surface to a depth. Then, thinning the film includes thinning the film to a third thickness equal to the first thickness minus the depth.Type: GrantFiled: October 18, 2002Date of Patent: March 23, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Mark A. Crowder, Apostolos T. Voutsas, Masahiro Adachi
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Patent number: 6709913Abstract: A method of adjusting the threshold voltage in an ultra-thin SOI MOS transistor includes preparing a SOI substrate; thinning the SOI top silicon film to a thickness of between about 10 nm and 50 nm; forming an absorption layer on the top silicon film; and implanting ions into the top silicon film through the absorption layer.Type: GrantFiled: September 4, 2001Date of Patent: March 23, 2004Assignee: Sharp Laboratories of America, Inc.Inventor: Sheng Teng Hsu
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Patent number: 6699764Abstract: A method of fabricating a Si1−XGeX film on a silicon substrate includes preparing a silicon substrate; epitaxially depositing a Si1−XGeX layer on the silicon substrate forming a Si1−XGeX/Si interface there between; epitaxially growing a silicon cap on the Si1−XGeX layer; implanting hydrogen ions through the Si1−XGeX layer to a depth of between about 3 nm to 100 nm below the Si1−XGeX/Si interface; amorphizing the Si1−XGeX layer to form an amorphous, graded SiGe layer; and annealing the structure at a temperature of between about 650° C. to 1100° C. for between about ten seconds and sixty minutes to recrystallize the SiGe layer.Type: GrantFiled: September 9, 2002Date of Patent: March 2, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Douglas J. Tweet, Jer-shen Maa, Jong-Jan Lee, Sheng Teng Hsu
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Patent number: 6693821Abstract: Low cross talk resistive cross point memory devices are provided, along with methods of manufacture and use. The memory device comprises a bit formed using a perovskite material interposed at a cross point of an upper electrode and lower electrode. Each bit has a resistivity that can change through a range of values in response to application of one, or more, voltage pulses. Voltage pulses may be used to increase the resistivity of the bit, decrease the resistivity of the bit, or determine the resistivity of the bit. Memory circuits are provided to aid in the programming and read out of the bit region.Type: GrantFiled: June 28, 2001Date of Patent: February 17, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Sheng Teng Hsu, Wei-Wei Zhuang
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Patent number: 6686978Abstract: A method is provided to produce liquid crystal displays (LCDs) on polycrystalline films having a single predominant crystal orientation. A layer of amorphous silicon is deposited over a substrate to a thickness suitable for producing a desired crystal orientation. Lateral-seeded excimer laser annealing (LS-ELA) is used to crystallize a region of the amorphous silicon to form a polycrystalline film with a preferred crystal orientation. In an embodiment of the method, the polycrystalline film is polished. A pixel region is formed over a portion of the substrate using either amorphous silicon or polycrystalline silicon. A circuit region is formed over the polycrystalline film.Type: GrantFiled: February 28, 2001Date of Patent: February 3, 2004Assignee: Sharp Laboratories of America, Inc.Inventor: Apostolos Voutsas
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Patent number: 6686212Abstract: A method of forming a layer of high-&kgr; dielectric material in an integrated circuit includes preparing a silicon substrate; depositing a first layer of metal oxide using ALD with a metal nitrate precursor; depositing another layer of metal oxide using ALD with a metal chloride precursor; and completing the integrated circuit.Type: GrantFiled: October 31, 2002Date of Patent: February 3, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: John F. Conley, Jr., Yoshi Ono, Rajendra Solanki
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Patent number: 6686273Abstract: A method of forming a low-k inter-level insulator structure is provided comprising the steps of: providing a first metal layer; depositing a sacrificial insulator layer overlying the first metal layer; producing a second metal layer; removing the sacrificial insulator layer; and depositing a low-k inter-level insulator, whereby low-k material replaces the sacrificial insulator. An intermediate insulator layer structure is also provided comprising a sacrificial insulator layer overlying a low-k insulator layer, such that the sacrificial insulator layer may be subjected to processes, including CMP, which may be incompatible with low-k insulator materials.Type: GrantFiled: September 26, 2001Date of Patent: February 3, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Sheng Teng Hsu, Wei Pan
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Patent number: 6682995Abstract: A conductive barrier, useful as a ferroelectric capacitor electrode, having high temperature stability has been provided. This conductive barrier permits the use of iridium (Ir) metal in IC processes involving annealing. Separating silicon substrate from Ir film with an intervening, adjacent, tantalum (Ta) film has been found to very effective in suppressing diffusion between layers. The Ir prevents the interdiffusion of oxygen into the silicon during annealing. A Ta or TaN layer prevents the diffusion of Ir into the silicon. This Ir/TaN structure protects the silicon interface so that adhesion, conductance, hillock, and peeling problems are minimized. The use of Ti overlying the Ir/TaN structure also helps prevent hillock formation during annealing. A method of forming a multilayer Ir conductive structure and Ir ferroelectric electrode are also provided.Type: GrantFiled: December 11, 2002Date of Patent: January 27, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Fengyan Zhang, Jer-shen Maa, Sheng Teng Hsu
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Patent number: 6673691Abstract: A method of changing the resistance of a perovskite metal oxide thin film device with a resistance-change-producing pulse includes changing the resistance of the device by varying the duration of a resistance-change-producing pulse.Type: GrantFiled: September 26, 2002Date of Patent: January 6, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Wei-Wei Zhuang, Sheng Teng Hsu
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Patent number: 6673220Abstract: A method for fabricating silicon tiles and silicon tile targets has been provided, such as may be used in the sputter deposition of thin film transistor (TFT) silicon films. The method describes processes of cutting the tiles, beveling the tiles edges, etching the tiles to minimize residual damage caused by cutting the tiles, polishing the tiles to a specified flatness, and attaching the tiles to a backing plate. All these processes are performed with the aim of minimizing contamination and particle formations when the target is used for sputter deposition.Type: GrantFiled: May 21, 2001Date of Patent: January 6, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Apostolos Voutsas, John Hartzell
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Patent number: 6673664Abstract: A method of making a self-aligned ferroelectric memory transistor includes preparing a substrate, shallow trench isolation, n the polysilicon; and forming a gate stack, including: depositing a layer of silicon nitride; selectively etching the silicon nitride, the bottom electrode and the polysilicon; selectively etching the polysilicon to the level of the first dielectric layer; and implanting and activating ions to form a source region and a drain region; forming a sidewall barrier layer; depositing a layer of ferroelectric material; forming a top electrode structure on the ferroelectric material; and finishing the structure, including passivation, oxide depositing and metallization.Type: GrantFiled: October 16, 2001Date of Patent: January 6, 2004Assignee: Sharp Laboratories of America, Inc.Inventors: Sheng Teng Hsu, Tingkai Li, Fengyan Zhang
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Patent number: 6669870Abstract: A Cu(hfac) precursor with a substituted phenylethylene ligand has been provided. The substituted phenylethylene ligand includes bonds to molecules selected from the group consisting of C1 to C6 alkyl, C1 to C6 haloalkyl, C1 to C6 phenyl, H and C1 to C6 alkoxyl. One variation, the &agr;-methylstyrene ligand precursor has proved to be stable a low temperatures, and sufficiently volatile at higher temperatures. Copper deposited with this precursor has low resistivity and high adhesive characteristics. A synthesis method has been provided which produces a high yield of the above-described precursor.Type: GrantFiled: March 28, 2001Date of Patent: December 30, 2003Assignee: Sharp Laboratories of America, Inc.Inventors: Wei-Wei Zhuang, Tue Nguyen, Lawrence J. Charneski, David R. Evans, Sheng Teng Hsu
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Patent number: 6664117Abstract: A method of forming a multi-layered, spin-coated perovskite thin film on a wafer includes preparing a perovskite precursor solution including mixing solid precursor material into acetic acid forming a mixed solution; heating the mixed solution in air for between about one hour to six hours; and filtering the solution when cooled; placing a wafer in a spin-coating mechanism; spinning the wafer at a speed of between about 500 rpm to 3500 rpm; injecting the precursor solution onto the wafer surface; baking the coated wafer at a temperature of between about 100° C. to 300° C.; annealing the coated wafer at a temperature of between about 400° C. to 650° C. in an oxygen atmosphere for between about two minutes to ten minutes; repeating the spinning, injecting, baking and annealing steps until a perovskite thin film of desired thickness is obtained; and annealing the perovskite thin film at a temperature of between about 500° C. to 750° C.Type: GrantFiled: September 26, 2002Date of Patent: December 16, 2003Assignee: Sharp Laboratories of America, Inc.Inventors: Wei-Wei Zhuang, Sheng Teng Hsu, Jong-Jan Lee
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Patent number: 6664116Abstract: A method of forming a ferroelectric thin film on a high-k layer includes preparing a silicon substrate; forming a high-k layer on the substrate; depositing a seed layer of ferroelectric material at a relatively high temperature on the high-k layer; depositing a top layer of ferroelectric material on the seed layer at a relatively low temperature; and annealing the substrate, the high-k layer and the ferroelectric layers to form a ferroelectric thin film.Type: GrantFiled: December 12, 2001Date of Patent: December 16, 2003Assignee: Sharp Laboratories of America, Inc.Inventors: Tingkai Li, Sheng Teng Hsu
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Patent number: 6664147Abstract: A method is provided to produce thin film transistors (TFTs) on polycrystalline films having a single predominant crystal orientation. A layer of amorphous silicon is deposited over a substrate to a thickness suitable for producing a desired crystal orientation. Lateral-seeded excimer laser annealing (LS-ELA) is used to crystallize the amorphous silicon to form a film with a preferred crystal orientation. The crystallized film is then polished to a desired thickness. A gate is formed overlying the polycrystalline film. The polycrystalline film is doped to produce source and drain regions.Type: GrantFiled: February 28, 2001Date of Patent: December 16, 2003Assignee: Sharp Laboratories of America, Inc.Inventor: Apostolos Voutsas
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Patent number: 6660628Abstract: A method of forming a titanium-based barrier metal layer includes preparing a substrate, including forming IC elements on the substrate; forming a titanium-based barrier metal precursor using a solution of about 5% by volume tetrakis (methylethylamino) titanium (TMEAT) and about 95% by volume octane; and depositing a titanium-based barrier layer on the substrate by MOCVD.Type: GrantFiled: March 17, 2003Date of Patent: December 9, 2003Assignee: Sharp Laboratories of America, Inc.Inventors: Wei Pan, Wei-Wei Zhuang, David R. Evans, Sheng Teng Hsu
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Patent number: 6660576Abstract: A substrate and a method for fabricating variable quality substrate materials are provided. The method comprises: selecting a first mask having a first mask pattern; projecting a laser beam through the first mask to anneal a first area of semiconductor substrate; creating a first condition in the first area of the semiconductor film; selecting a second mask having a second mask pattern; projecting the laser beam through the second mask to anneal a second area of the semiconductor film; and, creating a second condition in the second area of the semiconductor film, different than the first condition. More specifically, when the substrate material is silicon, the first and second conditions concern the creation of crystalline material with a quantitative measure of lattice mismatch between adjacent crystal domains.Type: GrantFiled: March 11, 2002Date of Patent: December 9, 2003Assignee: Sharp Laboratories of America, Inc.Inventors: Apostolos Voutsas, Yasuhiro Mitiani, Mark A. Crowder