Abstract: Methods for providing one or more coating layers on a surface of a substrate by successive surface reactions of at least a first and second precursor are provided. The methods generally include supplying the first precursor from a first precursor nozzle and the second precursor from a second precursor nozzle to the surface of the substrate, and moving the substrate relative to at least one of the first and second precursor nozzle. The methods can further include subjecting only one or more first limited sub-areas of the surface of the substrate to the first and second precursor by cooperation of supplying the first and second precursor and simultaneously moving the substrate relative to at least one of the first and second precursor nozzle.

Abstract: The invention relates to an apparatus and nozzle head for processing a surface of a substrate. The apparatus includes a substrate support mechanism for supporting the substrate on a substrate support plane in a process zone, a nozzle head for subjecting the surface of the substrate to successive surface reactions of at least a first precursor and a second precursor and a nozzle head support mechanism for supporting the nozzle head at a predetermined distance from the substrate support plane. The nozzle head support mechanism includes a nozzle head support surface and, that the nozzle head is supported to the nozzle head support surface.

Abstract: The present invention relates to an apparatus and method for producing aerosol. The apparatus comprising a first atomizer for producing a first aerosol jet and a second atomizer for producing a second aerosol jet, each atomizer comprising an atomizing head in which the liquid is atomized into an atomized aerosol jet. Said atomizers further comprise a focusing part arranged to restrain the atomized aerosol jet for providing a punctual aerosol jet, said focusing part extending directly from the atomizing head. The first and second atomizer form an atomizer pair such that the atomizers are aligned towards each other for colliding the aerosol jets to each other.

Abstract: Disclosed is a surface treatment device with a robust nozzle configuration. The device includes a nozzle for ejecting a primary stream of combustible substance to a gaseous atmosphere in an ejection direction; an ignition unit configured to ignite the primary stream in a point of ignition; and an impermeable shield providing a planar surface that is substantially opposite to the ejection direction and has in front of the nozzle a hole that allows passage of the primary stream. The shield is positioned between the nozzle and the point of ignition of the primary stream. The shield is advantageously dimensioned to allow simultaneous passage of the primary stream ejected from the nozzle and a circumferential secondary stream of gas from the gaseous atmosphere via the hole.

Abstract: A source for feeding one or more gaseous precursors onto a surface of a substrate and an arrangement for processing the substrate by way of subjecting the surface of the substrate to alternately repetitive surface reactions of the precursors, the source including a gas feed member for feeding at least one or more precursors onto the surface of the substrate. The gas feed member is adapted rotatable about a rotation axis, the rotation axis being arranged to extend substantially parallel to the surface of the substrate.

Abstract: An apparatus and a method for producing a liquid film from one or more liquid precursors onto the surface of a substrate in order to establish a coating, the apparatus being arranged to direct an aerosol flow against the surface of the substrate in a coating chamber. The apparatus includes a homogenizing nozzle for making the aerosol flow homogeneous substantially in the direction of the surface of the substrate prior to passing the flow into the coating chamber.

Abstract: A method for forming an electrically conductive oxide film (1) on a substrate (2), the method comprising the steps of, bringing the substrate (2) into a reaction space, forming a preliminary deposit on a deposition surface of the substrate (2) and treating the deposition surface with a chemical. The step of forming the preliminary deposit on the deposition surface of the substrate (2) comprises forming a preliminary deposit of transition metal oxide on the deposition surface and subsequently purging the reaction space. The step of treating the deposition surface with a chemical comprises treating the deposition surface with an organometallic chemical and subsequently purging the reaction space, to form oxide comprising oxygen, first metal and transition metal. The steps of forming the preliminary deposit and treating the deposition surface being alternately repeated such that a film (1) of electrically conductive oxide is formed on the substrate (2).

Abstract: An inorganic, transparent thin film electroluminescent display element with a display area having at least one emissive area and at least one non-emissive area, improved in terms of transparency and inconspicuousness is provided, as well as a method for its preparation. The structure according to the invention comprises a substrate (40), a first conducting layer (42), a first insulating layer (45), a luminescent layer (46), a second insulating layer (47), a second conductive layer (43) and a third insulating layer (44) comprising insulating, inorganic material. Emissive and non-emissive areas of the display are rendered optically similar by providing passive film elements (50) at the non-emissive areas, namely by providing conductor material also at these areas when the conductive electrodes connected to a power source for generating the required voltage are deposited at the emissive areas.

Abstract: An apparatus and method for coating a substrate using one or more liquid raw materials, includes: at least one atomizer for atomizing the one or more liquid raw materials into droplets, charging means for electrically charging the droplets during or after the atomization and a deposition chamber in which the droplets are deposited on the substrate, the deposition chamber being provided with one or more electric fields for guiding the electrically charged droplets on the substrate. According to the invention there is a charging chamber arranged upstream of the deposition chamber and provided with charging means for electrically charging the droplets.

Abstract: A moisture barrier, device or product having a moisture barrier or a method of fabricating a moisture barrier having at least a polymer layer, and interfacial layer, and a barrier layer. The polymer layer may be fabricated from any suitable polymer including, but not limited to, fluoropolymers such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), or ethylene-tetrafluoroethylene (ETFE). The interfacial layer may be formed by atomic layer deposition (ALD). In embodiments featuring an ALD interfacial layer, the deposited interfacial substance may be, but is not limited to, Al2O3, AlSiOx, TiO2, and an Al2O3/TiO2 laminate. The barrier layer associated with the interfacial layer may be deposited by plasma enhanced chemical vapor deposition (PECVD). The barrier layer may be a SiOxNy film.

Abstract: A surface treatment device that ejects a combination of precursor substances as a directed flow of surface treatment particles. Planar objects are conveyed along a defined plane through the particle flow, a region on the surface of the planar object that the particle flow hits forming a region of direct impact. The device comprises directing means for directing the particle flow to travel along the surface of the planar object in an extended impact region outside the region of direct impact; and flow control means for controlling the extent of the extended impact region which may include a vortex flow. The exposure of the treated surface with the particle flow increases and the probability of the desired surface treatment processes to take place increases.

Abstract: The invention relates to a method and an apparatus for coating one or more objects (1) by exposing an object (1) to alternately repeating surface reactions of two or more gaseous precursors. The apparatus comprises a reaction chamber (2, 40), means for forming at least one distinct precursor region inside the reaction chamber, and means for causing translational, essentially mechanically unsupported and unsuspended, motion of an object (1) inside the reaction chamber, relative to the reaction chamber, for bringing the surface of the object (1) into contact with a gaseous precursor, the means for causing the translational motion comprising means for moving the object (1) essentially through the at least one distinct precursor region inside the reaction chamber.

Abstract: In the method, silver is protected against tarnishing using an Atomic Layer Deposition method. In the Atomic Layer Deposition method, a thin film coating is formed on the surface of silver by depositing successive molecule layers of the coating material. For example aluminium oxide (Al2O3) or zirconium oxide may be used as the coating material.

Abstract: In the method, silver is protected against tarnishing using an Atomic Layer Deposition method. In the Atomic Layer Deposition method, a thin film coating is formed 5 on the surface of silver by depositing successive molecule layers of the coating material. For example aluminum oxide (Al 2O3) or zirconium oxide may be used as the coating material.

Abstract: A process and an apparatus for coating glass by means of a method using at least one or more liquid raw materials which react essentially on at least a portion of the glass substrate forming a coating on it. At least part of the liquid raw materials is atomized to droplets with one or more two-fluid atomizer and at least a fraction of the gas used in the one or more two-fluid atomizers is electrically charged such that at least a fraction of the droplets become electrically charged during or after the atomization. According to the invention the droplets are formed into a separately created electric field.

Abstract: A strengthened structural module (2) and a method for fabricating a strengthened structural module (2). The module comprises an essentially planar glass substrate (1), an essentially planar second substrate (3), and at least one spacer element (5) in between the glass substrate (1) and the second substrate (3). The at least one spacer element (5) keeps the glass substrate (1) and the second substrate (3) separated from each other from the edges of the two substrates and defines a space (7) in between the two substrates in the inside of the module. The module comprises a coating (9) surrounding the module around the outside of the module. The coating (9) is arranged conformally on the surfaces facing the outside of the module, for increasing the strength of the module.

Abstract: A method for increasing the durability of glass by a coating, according to the present invention comprises the step of coating glass with a coating comprising at least one layer whose thickness is below 5 nanometers, wherein the coating comprises a compound of at least one element.

Abstract: Disclosed is a surface treatment device with a robust nozzle configuration. The device includes a nozzle for ejecting a primary stream of combustible substance to a gaseous atmosphere in an ejection direction; an ignition unit configured to ignite the primary stream in a point of ignition; and an impermeable shield providing a planar surface that is substantially opposite to the ejection direction and has in front of the nozzle a hole that allows passage of the primary stream. The shield is positioned between the nozzle and the point of ignition of the primary stream. The shield is advantageously dimensioned to allow simultaneous passage of the primary stream ejected from the nozzle and a circumferential secondary stream of gas from the gaseous atmosphere via the hole.

Abstract: A method and apparatus for controlling a vapor deposition based coating process, including monitoring ultrafine particles, and adjusting at least one process parameter based on the monitoring. During at least one stage of the coating deposition process, at least one of the coating precursors includes a gas, a vapor, or an aerosol.

Abstract: A coating process for coating a surface of a glass substrate in normal air pressure, in which coating process at least one liquid starting material is atomized into droplets and the formed droplets are guided towards the surface to be coated. The formed droplets are vaporized substantially close to the surface to be coated before the droplets contact the surface to be coated by bringing to the coating process the thermal energy needed for vaporizing the droplets with the glass substrate.