Patents Assigned to Beneq Oy
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Publication number: 20120307193Abstract: A strengthened structural module (2) and a method for fabricating a strengthened structural module(2). The module comprises an essentially planar glass substrate (1), an essentially planar second substrate (3), and at least one spacer element (5) in between the glass substrate (1) and the second substrate (3). The at least one spacer element (5) keeps the glass substrate (1) and the second substrate (3) separated from each other from the edges of the two substrates and defines a space (7) in between the two substrates in the inside of the module. The module comprises a coating (9) surrounding the module around the outside of the module. The coating (9) is arranged conformally on the surfaces facing the outside of the module, for increasing the strength of the module.Type: ApplicationFiled: January 31, 2011Publication date: December 6, 2012Applicant: Beneq OyInventors: Olli Jylhä, Matti Putkonen, Arto Pakkala
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Publication number: 20120258251Abstract: An apparatus and a method for producing a liquid film from one or more liquid precursors onto the surface of a substrate in order to establish a coating, the apparatus being arranged to direct an aerosol flow against the surface of the substrate in a coating chamber. The apparatus includes a homogenizing nozzle for making the aerosol flow homogeneous substantially in the direction of the surface of the substrate prior to passing the flow into the coating chamber.Type: ApplicationFiled: December 29, 2010Publication date: October 11, 2012Applicant: BENEQ OYInventor: Kai Asikkala
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Publication number: 20120218638Abstract: A decorative coating and a method for forming a decorative coating on a substrate (2). The decorative coating comprises an absorbing film (1) to attenuate the transmission of visible light through the coating. The method comprises the steps of bringing the substrate (2) into a reaction space, and depositing the absorbing film (1) on the substrate (2). Depositing the absorbing film (1) on the substrate comprises the steps of forming a preliminary deposit of transition metal oxide on the deposition surface and subsequently purging the reaction space, and treating the deposition surface with an organometallic chemical comprising first metal and subsequently purging the reaction space. The steps of forming the preliminary deposit and treating the deposition surface are alternately repeated to increase absorption of the absorbing film (1).Type: ApplicationFiled: November 2, 2010Publication date: August 30, 2012Applicant: BENEQ OYInventors: Jarmo Maula, Tapani Alasaarela
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Publication number: 20120217454Abstract: A method for forming an electrically conductive oxide film (1) on a substrate (2), the method comprising the steps of, bringing the substrate (2) into a reaction space, forming a preliminary deposit on a deposition surface of the substrate (2) and treating the deposition surface with a chemical. The step of forming the preliminary deposit on the deposition surface of the substrate (2) comprises forming a preliminary deposit of transition metal oxide on the deposition surface and subsequently purging the reaction space. The step of treating the deposition surface with a chemical comprises treating the deposition surface with an organometallic chemical and subsequently purging the reaction space, to form oxide comprising oxygen, first metal and transition metal. The steps of forming the preliminary deposit and treating the deposition surface being alternately repeated such that a film (1) of electrically conductive oxide is formed on the substrate (2).Type: ApplicationFiled: November 2, 2010Publication date: August 30, 2012Applicant: Beneq OyInventor: Jarmo Maula
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Patent number: 8231369Abstract: The invention relates to a device and a method for producing nanoparticles, in which method starting materials for nanoparticles are mixed at least as liquid droplets and optionally also as gases and/or vapors with at least combustion gases in a premixing chamber and the mixture is separated for liquid drops larger than size d, whereafter the mixture is conducted to at least one burner, in which the combustion gases are ignited such that a heavily mixing flame is generated, in which the starting materials react and optional solvents evaporate and generate through nucleation and/or sintering and/or agglomeration particles having a diameter of 1 to 1000 micrometers.Type: GrantFiled: October 24, 2006Date of Patent: July 31, 2012Assignee: Beneq OyInventors: Markku Rajala, Kai Asikkala, Anssi Hovinen
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Publication number: 20120189766Abstract: Method and apparatus for controlling a coating deposition process, where at least at one stage of the coating deposition process at least one of the coating precursors includes a gas, a vapour or an aerosol. The method includes monitoring ultrafine particles and adjusting at least one process parameter based on the monitoring. The apparatus includes means for monitoring ultrafine particles and means for adjusting at least one process parameter based on the monitoring.Type: ApplicationFiled: September 2, 2010Publication date: July 26, 2012Applicant: BENEQ OYInventors: Markku Rajala, Juha Tikkanen
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Publication number: 20120177903Abstract: A multilayer coating and a method for fabricating a multilayer coating on a substrate (3). The coating is arranged to minimize diffusion of atoms through the coating, the method comprising the steps of introducing a substrate (3) to a reaction space, depositing a layer of first material (1) on the substrate (3), and depositing a layer of second material (2) on the layer of first material (1). Depositing the layer of first material (1) and the layer of second material (2) comprises alternately introducing precursors into the reaction space and subsequently purging the reaction space after each introduction of a precursor. The first material being selected from the group of titanium oxide and aluminum oxide, the second material being the other from the group of titanium oxide and aluminum oxide. An interfacial region is formed in between titanium oxide and aluminum oxide.a.Type: ApplicationFiled: September 13, 2010Publication date: July 12, 2012Applicant: Beneq OyInventors: Sami Sneck, Nora Isomäki, Jarmo Maula, Olli Jylhä, Matti Putkonen, Runar Törnqvist, Mikko Söderlund
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Publication number: 20120120514Abstract: A structure comprising at least one reflecting thin-film on a surface of a macroscopic object is disclosed. The surface of the macroscopic object, without the at least one thin-film, reflects less than 50% of incident light in the visible wavelength band and is opaque, and reflection of visible light from the surface of the macroscopic object, with the at least one thin-film on the surface of the macroscopic object, is essentially spectrally uniform and flat over available viewing angles. The at least one thin-film is dielectric and essentially transparent to visible light, and the at least one thin-film is fabricated by exposing the surface of the macroscopic object to alternately repeating, essentially self-limiting, surface reactions of two or more precursors, for increasing the reflectance of specularly reflected visible light in the visible wavelength band from the surface.Type: ApplicationFiled: April 7, 2010Publication date: May 17, 2012Applicant: Beneq OyInventor: Jarmo Maula
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Publication number: 20120070579Abstract: A coating process for coating a surface of a glass substrate in normal air pressure, in which coating process at least one liquid starting material is atomized into droplets and the formed droplets are guided towards the surface to be coated. The formed droplets are vaporized substantially close to the surface to be coated before the droplets contact the surface to be coated by bringing to the coating process the thermal energy needed for vaporizing the droplets with the glass substrate.Type: ApplicationFiled: June 8, 2010Publication date: March 22, 2012Applicant: BENEQ OYInventors: Markku Rajala, Sami Kauppinen
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Publication number: 20120067284Abstract: An apparatus for carrying out atomic layer deposition onto a surface of a substrate by exposing the surface of the substrate to alternate starting material surface reactions, the apparatus including two or more low-pressure chambers, two or more separate reaction chambers arranged to be placed inside the low-pressure chambers, and at least one starting material feed system common to two or more low-pressure chambers for carrying out atomic layer deposition. The apparatus includes at least one loading device arranged to load and unload substrates to/from the reaction chamber and further to load and unload the reaction chambers to/from the low-pressure chambers.Type: ApplicationFiled: June 14, 2010Publication date: March 22, 2012Applicant: BENEQ OYInventors: Pekka Soininen, Jarmo Skarp
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Publication number: 20120060536Abstract: A method and apparatus for tempering material is provided. One or more liquids are atomized by at least one sprayer into droplets which are guided towards a surface of a hot material so that at least some of the droplets collide with the surface of the hot material and evaporate, thus removing thermal energy from the surface layer of the hot material. Impact members may be used to further reduce the size of the droplets. The droplets may be guided to the surface by a separate guiding gas flow.Type: ApplicationFiled: June 15, 2010Publication date: March 15, 2012Applicant: BENEQ OYInventors: Sampo Ahonen, Reijo Karvinen, Tommi Vainio
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Publication number: 20120055407Abstract: The invention relates to an arrangement for processing a substrate in a reaction chamber of a gas deposition apparatus by exposing the substrate to alternate, saturated surface reactions of starting materials, the arrangement comprising loading means for loading the substrate into the reaction chamber on a substrate support. In accordance with the invention, the substrate is arranged for being attached in a detachable manner with an adhesive to the substrate carrier.Type: ApplicationFiled: May 21, 2010Publication date: March 8, 2012Applicant: BENEQ OYInventor: Jarmo Maula
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Publication number: 20120040193Abstract: A coated article is disclosed. The coated article comprises an antibacterial coating on a glass substrate, the substrate having a modified surface layer which essentially reduces the ion exchange between silver in the antibacterial coating and sodium in the glass substrate. Apparatus and method for forming such article are also disclosed.Type: ApplicationFiled: February 4, 2010Publication date: February 16, 2012Applicant: BENEQ OYInventor: Markku Rajala
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Publication number: 20120015106Abstract: The invention relates to a method and an apparatus for coating one or more objects (1) by exposing an object (1) to alternately repeating surface reactions of two or more gaseous precursors. The apparatus comprises a reaction chamber (2, 40), means for forming at least one distinct precursor region inside the reaction chamber, and means for causing translational, essentially mechanically unsupported and unsuspended, motion of an object (1) inside the reaction chamber, relative to the reaction chamber, for bringing the surface of the object (1) into contact with a gaseous precursor, the means for causing the translational motion comprising means for moving the object (1) essentially through the at least one distinct precursor region inside the reaction chamber.Type: ApplicationFiled: March 25, 2010Publication date: January 19, 2012Applicant: Beneq OyInventor: Jarmo Maula
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Publication number: 20110274837Abstract: An ALD reactor for treating one or more substrates is provided. The ALD reactor includes at least one reaction chamber which has a front plate including gas connections for introducing starting materials, flushing gases and the like gases into the reaction chamber. In addition, the front plate is arranged for being placed over the substrate for closing the reaction chamber and at distance from the substrate surface for opening the reaction chamber such that the substrate is arranged for being loaded below, above or in front of the front plate, when the reaction chamber is in the open state, in which the front plate is at a distance from the substrate and such that the substrate is treatable by the ALD method in the closed state of the reaction chamber, in which the front plate is placed onto the substrate.Type: ApplicationFiled: February 8, 2010Publication date: November 10, 2011Applicant: BENEQ OYInventors: Pekka Soininen, Jarmo Skarp
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Publication number: 20110265720Abstract: A reactor is provided for a gas deposition method, in which method the surface of a substrate is subjected to alternate starting material surface reactions. The reactor includes a first chamber, a second chamber mounted inside the first chamber, and heating means for heating the first chamber. The reactor also includes one or more heat transfer elements for equalising temperature differences inside the first chamber.Type: ApplicationFiled: February 11, 2010Publication date: November 3, 2011Applicant: BENEQ OYInventors: Jarmo Maula, Hannu Leskinen, Kari Harkonen
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Publication number: 20110265719Abstract: A reaction chamber for an atomic layer deposition reactor is provided. The reaction chamber includes outer walls for providing a reaction space inside the reaction chamber. At least one of the outer walls of the reaction chamber is made from a flexible thinsheet.Type: ApplicationFiled: February 8, 2010Publication date: November 3, 2011Applicant: BENEQ OYInventors: Janne Peltoniemi, Pekka Soininen
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Publication number: 20110229644Abstract: A process and an apparatus for coating glass substrate by using at least one or more liquid raw materials which react essentially on or in the vicinity of at least a portion of the glass substrate surface. The process comprises steps: a) heating the glass substrate to at least substantially the coating temperature; b) forming a coating on the glass substrate surface by converting the one or more liquid materials to a liquid-aerosol and depositing at least a fraction of the liquid-aerosol on the glass substrate surface; c) repeating step b) at least once; and d) heating the glass substrate surface before at least one of the steps b). The heating in step d) is carried out by convective heating.Type: ApplicationFiled: December 21, 2009Publication date: September 22, 2011Applicant: BENEQ OYInventors: Markku Rajala, Erkki Seppalainen, Toni Korelin
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Publication number: 20110223344Abstract: A process and an apparatus for coating glass by means of a method using at least one or more liquid raw materials which react essentially on at least a portion of the glass substrate forming a coating on it. At least part of the liquid raw materials is atomized to droplets with one or more two-fluid atomizer and at least a fraction of the gas used in the one or more two-fluid atomizers is electrically charged such that at least a fraction of the droplets become electrically charged during or after the atomization. According to the invention the droplets are formed into a separately created electric field.Type: ApplicationFiled: December 21, 2009Publication date: September 15, 2011Applicant: BENEQ OYInventors: Markku Rajala, Jorma Keskinen
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Publication number: 20110111175Abstract: A method for increasing the durability of glass (1) by a coating, according to the present invention comprises the step of coating glass (1) with a coating comprising at least one layer (4, 5, 6) whose thickness is below 5 nanometres, wherein the coating comprises a compound of at least one element. A glass product comprising a coating, according to the present invention is fabricated by coating glass (1) with a coating comprising at least one layer (4, 5, 6) whose thickness is below 5 nanometres. A glass product comprising a coating, according to the present invention comprises surface scratches (2) with a width at the level of the glass (1) surface of below 50 nanometres, the coating residing essentially conformally on the inside of the surface scratches (2) to increase the durability of the glass (1).Type: ApplicationFiled: December 1, 2008Publication date: May 12, 2011Applicant: Beneq OyInventors: Markku Rajala, Matti Putkonen