Abstract: A temperature control system includes a first chiller, a first tank, a first tank bypass channel, a first mixing valve that adjusts a mixing ratio of a fluid flowing from the first tank into the first chiller to a fluid flowing from the first tank bypass channel into the first chiller, a second chiller, a second tank, a second tank bypass channel, a second mixing valve that adjusts a mixing ratio of a fluid flowing from the second tank into the second chiller to a fluid flowing from the second tank bypass channel into the second chiller, a first supply valve, a first return valve, a first on-off value, a second supply valve, a second return valve, a second on-off valve, and a controller that controls the valves.

Abstract: A butterfly valve includes a purge gas flow path supplying a purge gas for preventing inflow of a control fluid into a magnetic fluid sealing portion from a flow path through an insertion hole. The purge gas flow path is provided with an opening and closing valve for opening and closing the purge gas flow path and a pressure gauge for measuring a pressure value in the purge gas flow path, in the stated order from the upstream side. The purge gas flow path is connected to a portion between the magnetic fluid sealing portion and the flow path of the butterfly valve on the downstream side of the pressure gauge, and communicates with the flow path through the insertion hole. The butterfly valve further includes a control device that controls at least the opening and closing valve. The control device is provided with a monitoring program for monitoring a pressure value.

Abstract: An electromagnetic valve manifold includes an electromagnetic valve including a discharge port, a manifold base including a discharge passage that is connected to the discharge port, and a check valve. The check valve includes a valve member, a valve housing including a valve seat, and an urging member. The valve housing includes a valve chamber that accommodates the valve member, a peripheral wall that defines the valve chamber, a valve hole that connects the valve chamber to the discharge port, and a discharge opening that connects the valve chamber to the discharge passage. The check valve is disposed in the discharge passage. The discharge opening is formed in the peripheral wall, at least a part of the discharge opening overlapping with the valve seat in a direction orthogonal to a moving direction of the valve member.

Abstract: A butterfly valve to be placed on a pipe between a vacuum chamber provided with a pressure sensor and a vacuum pump is configured to control the pressure in the vacuum chamber. The butterfly valve includes a servo motor, a butterfly valve element to be rotated about a rod connected to the servo motor in an opening or closing direction, and a control unit to adjust an opening degree of the butterfly valve element based on a pressure value of the vacuum chamber detected by the pressure sensor. The control unit is provided with an abnormal vibration detection program configured to whether or not abnormal vibration is occurring in the servo motor based on a variation amount of the opening degree of the butterfly valve element within a monitoring time while at least the pressure value of the vacuum chamber is stable.

Abstract: An inspection device includes: an electromagnetic wave irradiator that irradiates, with a predetermined electromagnetic wave from a first film side, the package that is conveyed along a predetermined direction and that has the spaces at a plurality of positions in a width direction; an imaging device that is disposed opposed to the electromagnetic wave irradiator across the package, includes an electromagnetic wave detector including a plurality of detection elements that is arrayed along the width direction and that detects the electromagnetic wave radiated from the electromagnetic wave irradiator and transmitted through the package, and sequentially outputs an obtained electromagnetic wave transmission image every time the package is conveyed by a predetermined amount; and an image processing device that processes an image signal output from the imaging device.

Abstract: A three-dimensional measurement apparatus measures measurement targets placed in a target measurement area on a measurement object. The apparatus includes: a measurement module that: is positioned with respect to the target measurement area, and includes: a first irradiator that irradiates the target measurement area with predetermined light for height measurement; a second irradiator that irradiates the target measurement area with predetermined patterned light for three-dimensional measurement; and an imaging device that takes an image of the target measurement area; and a control device that moves the measurement module in a height direction and successively positions the measurement module at a predetermined height position determined by mapping, and performs, based on image data taken by irradiating the target measurement area with predetermined patterned light, three-dimensional measurement to the measurement targets at the predetermined height position.

Abstract: A three-dimensional measurement device performs three-dimensional measurement of a measured object using a phase shift method. The three-dimensional measurement device includes: an irradiator that irradiates the measured object with a predetermined light pattern having a light intensity distribution in a fringe shape; a control device that shifts a phase of the light pattern radiated from the irradiator in N different ways, where N is a natural number of not less than 3; and an imaging device that takes an image of the measured object irradiated with the light pattern. The control device executes three-dimensional measurement of the measured object by the phase shift method based on N different image data taken under the light pattern having the phase shifted in the N different ways.

Abstract: An electromagnetic valve manifold includes valve assemblies arranged in a single direction, each valve assembly including electromagnetic valves arranged in the single direction, a slave station disposed at one of ends of the electromagnetic valve manifold in the single direction, and a valve driving unit disposed in correspondence with each of the valve assemblies. The slave station includes a slave station output port that sends a control signal and valve driving unit power to the valve driving units. The valve driving units each include an electromagnetic valve power input port that receives electromagnetic valve power from an external device and a circuit board configured to control driving of the electromagnetic valves of a corresponding one of the valve assemblies using the control signal and send the electromagnetic valve power to the electromagnetic valves.

Abstract: A blister packaging machine manufactures a blister pack including a pocket portion formed in a container film of a belt-like shape and a cover film that closes the pocket portion. The blister packaging machine includes: a conveyor that conveys the container film; a preheater that preheats the container film conveyed by the conveyor; a pocket portion former that forms the pocket portion in the container film softened by the preheater; and a support belt that moves in synchronism with the container film conveyed by the conveyor while supporting a part of the container film other than the pocket portion or a part of the container film other than an area where the pocket portion is to be formed, in at least a location from the preheater to a position downstream of the pocket portion former.

Abstract: An inspection device includes: an illumination device; an imaging device that includes: an optical system that corrects a field curvature; an imaging element that takes an image via the optical system; and a mirror that reflects an incident light from the inspection object toward the optical system; and an inspection controller that: judges whether a quality of the inspection object is good or poor based on image data; and controls the imaging device to take an image of a first inspection area at a first timing when the first inspection area is located within a first focusing range, in which the first inspection area is focusable without the mirror, and to take an image of a second inspection area at a second timing when the second inspection area is located within a second focusing range, in which the second inspection area is focusable via the mirror.

Abstract: A four-way valve includes a body and a valve component. The body includes a valve chamber and first to fourth communication channels which communicate with the valve chamber at positions arranged in sequence in a predefined rotational direction and cause the valve chamber to communicate with an outside. The valve component is rotatable in the predefined rotational direction and switches the four-way valve to be in at least one of: a first state in which the first and second communication channels communicate with the first region and the third and fourth communication channels communicate with the third region; and a second state in which the second communication channel communicates with the first region, the third communication channel communicates with the second region, and the first and fourth communication channels communicate with the third region.

Abstract: A fluid control valve includes a diaphragm assembly including a shaft member joined to an end of a drive shaft on the side near an annular valve seat, a membrane member made of perfluoro alkoxy alkane and located in surface contact with the end face of the shaft member on the opposite side to the end joined to the drive shaft, and a weld part formed by laser welding at the interface between the shaft member and the membrane member to join the shaft member and the membrane member. The shaft member is made of fluorine resin with carbon-based additive dispersed.

Abstract: A pulse shot-type flow rate control device including first and second shutoff valves, a tank, a pressure sensor, and a controller is caused to perform two or more processes. In each process, the controller repeats pulse shots of alternately causing the first shutoff valve and the second shutoff valve to open and close, changes a way of the pulse shots based on a pressure difference between the pressure after filling and the pressure after discharge, and controls a volume flow rate. In each process, the controller stores, as an optimal filling time, a filling time when the volume flow rate is controlled to a target flow rate, and opens and closes the first shutoff valve by using the optimal filling time in a first pulse shot in the next process.

Abstract: A three-dimensional measurement device includes: an optical system including an optical device that splits an incident light, irradiates a measurement object with a measurement light, irradiates a reference plane with a reference light, and combines at least part of the reflected measurement light with at least part of the reflected reference light to emit a combined light; a first light emitter that emits a first light that has a first wavelength; a second light emitter that emits a second light that has a second wavelength; a first imaging device that takes an image of an output light output from the optical device in which the first light enters; a second imaging device that takes an image of an output light output from the optical device in which the second light enters; and a control device that executes three-dimensional measurement of the measurement object.

Abstract: An inspection device includes: an illumination device that irradiates an object with near-infrared light; a spectroscope that disperses reflected light from the object irradiated with the near-infrared light; an imaging device that takes a spectroscopic image of the reflected light dispersed by the spectroscope; and a processor. The processor obtains spectral data at a plurality of points on the object based on the spectroscopic image obtained by the imaging device, selects, from among the spectral data at the plurality of points, a group having a highest density of luminance values of a predetermined wavelength component as a dense spectral data group, and performs a predetermined analysis for the object based on the dense spectral data group and detects a different type of object.

Abstract: Parts of a first coupling and a second coupling that protrude from manifold blocks each have the shape of an elongated tube. When the first coupling and the second coupling are viewed in the axial direction, the traverse direction of the first coupling and the second coupling agree with the arrangement direction of manifold blocks. A part of the tube insertion hole is a small diameter hole, which is a stadium-shaped hole. When the first coupling and the second coupling are viewed in the axial direction, the traverse direction of the small diameter hole agrees with the traverse direction of the first coupling and the second coupling.

Abstract: A temperature control system is used for controlling a temperature of a control target to a target temperature that changes with lapse of time. The system includes: a first adjustment apparatus that includes a first tank that stores a first heat transfer medium, adjusts the temperature of the first heat transfer medium to a first set temperature, and supplies the temperature-adjusted first heat transfer medium; a first circulation circuit through which the first heat transfer medium flows from the first adjustment apparatus to a first flow-through path and returns to the first adjustment apparatus; an adjustment section that adjusts an amount of heat supplied from the first flow-through path to the control target; a memory that stores a relation between the lapse of time and the target temperature; and a controller.

Abstract: A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.

Abstract: An electromagnetic valve manifold includes an electromagnetic valve including an output port, a manifold base including an output passage, and a spacer arranged between the manifold base and the electromagnetic valve. The spacer includes a spacer block including a shaft hole and a manual shaft accommodated in the shaft hole. The spacer block includes an output connecting passage that is connected to the shaft hole and connects the output passage and the output port to each other. The manual shaft is configured to be manually operated to be switched between a first switching position, in which the manual shaft allows for connection between the output passage and the output port through the output connecting passage, and a second switching position, in which the manual shaft blocks the connection between the output passage and the output port through the output connecting passage.

Abstract: A temperature regulating apparatus includes: a heating section configured to produce a heating liquid; a cooling section configured to produce a cooling liquid; a heating-liquid delivery pipe for delivering the heating liquid to the semiconductor-device manufacturing equipment; a cooling-liquid delivery pipe for delivering the cooling liquid to the semiconductor-device manufacturing equipment; a heating-side return pipe for returning a liquid mixture of the heating liquid and the cooling liquid that have passed through the semiconductor-device manufacturing equipment to the heating section; a cooling-side return pipe for returning the liquid mixture that has passed through the semiconductor-device manufacturing equipment to the cooling section; and at least one of a heating-side heat exchanger configured to exchange heat between the heating liquid and the liquid mixture and a cooling-side heat exchanger configured to exchange heat between the cooling liquid and the liquid mixture.