Abstract: A temperature regulating apparatus includes: a heating section configured to produce a heating liquid; a cooling section configured to produce a cooling liquid; a heating-liquid delivery pipe for delivering the heating liquid to the semiconductor-device manufacturing equipment; a cooling-liquid delivery pipe for delivering the cooling liquid to the semiconductor-device manufacturing equipment; a heating-side return pipe for returning a liquid mixture of the heating liquid and the cooling liquid that have passed through the semiconductor-device manufacturing equipment to the heating section; a cooling-side return pipe for returning the liquid mixture that has passed through the semiconductor-device manufacturing equipment to the cooling section; and at least one of a heating-side heat exchanger configured to exchange heat between the heating liquid and the liquid mixture and a cooling-side heat exchanger configured to exchange heat between the cooling liquid and the liquid mixture.

Abstract: A pulse shot-type flow rate control device including first and second shutoff valves, a tank, a pressure sensor, and a controller is caused to perform two or more processes. In each process, the controller repeats pulse shots of alternately causing the first shutoff valve and the second shutoff valve to open and close, changes a way of the pulse shots based on a pressure difference between the pressure after filling and the pressure after discharge, and controls a volume flow rate. In each process, the controller stores, as an optimal filling time, a filling time when the volume flow rate is controlled to a target flow rate, and opens and closes the first shutoff valve by using the optimal filling time in a first pulse shot in the next process.

Abstract: A pulse shot-type flow rate control device including first and second shutoff valves, a tank, a pressure sensor, and a controller is caused to perform two or more processes. In each process, the controller repeats pulse shots of alternately causing the first shutoff valve and the second shutoff valve to open and close, changes a way of the pulse shots based on a pressure difference between the pressure after filling and the pressure after discharge, and controls a volume flow rate. In each process, the controller stores, as an optimal filling time, a filling time when the volume flow rate is controlled to a target flow rate, and opens and closes the first shutoff valve by using the optimal filling time in a first pulse shot in the next process.

Abstract: A blister packing machine includes: a conveyor that conveys a belt-like container film having a pocket portion forming area and an expected mounting part; a preheating device that preheats the container film conveyed by the conveyor; a pocket portion forming device that forms a pocket portion in the container film softened by the preheating device; and a tension applier that applies a tension along a width direction of the container film to at least the pocket portion forming area. The pocket portion forming device forms the pocket portion while the tension applier applies the tension to the container film, the container film has an edge area between an edge in the width direction and the expected mounting part, and the tension applier includes a projection that applies the tension to the container film by pressing the edge area to form a protruding portion in the container film.

Abstract: A three-dimensional measurement device includes: a light emitter; an optical system that splits an incident light, irradiates a measurement object with an object light and irradiates a reference plane with a reference light, and recombines the object and reference lights and emits a combined light; an imaging device that takes an image of a light emitted from the optical system; a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each polarizer; and a control device that calculates a phase difference between the reference and object lights based on luminance data of each pixel in luminance image data and the transmission axis absolute angle data of each polarizer corresponding to the pixel, and measures a height of the measurement object at the measurement position.

Abstract: A solder printing inspection device includes: an illumination device that irradiates, with a predetermined light, a printed circuit board on which a solder paste is printed; an imaging device that takes an image of the printed circuit board irradiated with the predetermined light and obtains image data; and a control device that: based on the image data, obtain three-dimensional measurement data of the solder paste printed on the printed circuit board, based on the three-dimensional measurement data, extracts upper portion shape data of an upper portion of the solder paste, the upper portion having a height equal to or higher than a predetermined height, and compares the upper portion shape data with a predetermined criterion and determines whether a quality of a three-dimensional shape of the upper portion of the solder paste is good or poor.

Abstract: A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.

Abstract: A solenoid unit of an electromagnetic valve includes a coil, a bobbin, a fixed iron core, a movable iron core, an urging spring, a magnetic frame, and a molded plastic part. The magnetic frame includes a frame end wall, two frame arms, and an internal thread hole, to which the fixed iron core is threaded. A tubular projection protrudes from an end face of the frame end wall that is on a side opposite to the bobbin. The projection forms part of the internal thread hole. The molded plastic part includes a molded end wall, which covers the frame end wall, and a molded peripheral wall. The molded end wall includes a connecting hole that is continuous with the internal thread hole. The connecting hole includes a groove in an inner circumferential surface. The groove extends along an outer circumferential surface of the projection.

Abstract: A three-dimensional measurement device includes: an irradiator that emits a predetermined light; an optical system that splits the predetermined light into two lights, irradiates a measurement object with a measurement light and irradiates a reference plane with a reference light, and emits a combined light; an imaging device that takes an image of the combined light and obtains an interference fringe image; an objective lens for the measurement light that directs the measurement light toward the measurement object; an objective lens for the reference light that directs the reference light toward the reference plane; an imaging lens that forms an image of the combined light on the imaging device; and a control device that executes three-dimensional measurement of a measurement area on the measurement object based on the interference fringe image.

Abstract: A substrate foreign matter inspection device includes: an image data obtaining device that obtains image data of a target inspection area in the printed circuit board including a printed portion of the solder paste; a storage that stores a neural network and a model, the model being generated by learning of the neural network that includes an encoding portion and a decoding portion by using, as learning data, only image data of the target inspection area that do not include any foreign matter; and a control device that obtains reconfigured image data by inputting original image data obtained by the image data obtaining device into the model, compares the original image data with the reconfigured image data, and determines whether any foreign matter is present or absent on the printed circuit board based on a result of comparison with the reconfigured image data.

Abstract: An inspection device inspects a formation state of a pocket portion formed in a container film of a blister pack and includes: an illumination device that irradiates a container film including the pocket portion with a predetermined electromagnetic wave; an imaging device that takes an image of at least the electromagnetic wave transmitted through a bottom portion of the pocket portion and obtains image data; a control device that extracts, based on the image data, shading pattern data corresponding to a shading pattern occurring in the bottom portion of the pocket portion by irradiation with the electromagnetic wave; a storage that stores a neural network and a model, the model being generated by learning of the neural network using, as learning data, only shading pattern data of a pocket portion without any formation defect among the extracted shading pattern data.

Abstract: A manufacturing device is used for manufacturing a package including a resin sheet and a predetermined work wrapped with the resin sheet. The manufacturing device includes: a sealing unit that thermally welds overlapping parts of the sheet; and an inspection device that inspects a sealing quality of the sealed portion thermally welded by the sealing unit. The sealing unit makes, by the thermal welding, a thickness of the sealed portion after the thermal welding smaller than a total thickness of the overlapping parts prior to the thermal welding. The inspection device obtains thickness information on the thickness of the sealed portion and determines the sealing quality of the sealed portion based on the thickness information.

Abstract: A pulse shot-type flow rate control device including first and second shutoff valves, a tank, a pressure sensor, and a controller is caused to perform two or more processes. In each process, the controller repeats pulse shots of alternately causing the first shutoff valve and the second shutoff valve to open and close, changes a way of the pulse shots based on a pressure difference between the pressure after filling and the pressure after discharge, and controls a volume flow rate. In each process, the controller stores, as an optimal filling time, a filling time when the volume flow rate is controlled to a target flow rate, and opens and closes the first shutoff valve by using the optimal filling time in a first pulse shot in the next process.

Abstract: A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.

Abstract: A screen mask inspection device inspects a screen mask including a screen opening that forms a printing pattern, and includes: an inspection control device that detects solder position information of a solder paste printed on a substrate via the screen opening, and based on the solder position information, determines whether a quality of printing using the screen mask is good or bad, the solder position information being based on an amount of positional misalignment of the solder paste actually printed on the substrate relative to a predetermined reference position.

Abstract: Passage forming blocks of a first pilot valve and a second pilot valve each include a supply passage, which opens in a first surface and a second surface and is connected to a valve chamber, a first output passage, which opens in the first surface and are connected to the valve chamber, and a second output passage, which opens in the first surface. Further, the passage forming blocks each include an output passage connecting recess. The output passage connecting recess is provided in a section of the second surface that overlaps with an opening region of the first output passage, which opens in the first surface, and is connected to the second output passage. The first output passage of the first pilot valve is connected to the second output passage of the second pilot valve via the output passage connecting recess of the second pilot valve.

Abstract: An electromagnetic valve has a solenoid, which includes a coil, a plunger, a fixed core, and a plunger spring. The fixed core is E-shaped and has a base, a first outer leg, a second outer leg, and a central leg. The first outer leg, the second outer leg, and the central leg extend from the base. The first outer leg has a first outer attraction surface configured to attract the plunger. The second outer leg has a second outer attraction surface configured to attract the plunger. The central leg has a central attraction surface configured to attract the plunger. The central attraction surface is larger in area than each of the first and second outer attraction surfaces.

Abstract: A butterfly valve has a rod connected to a DD motor and disposed along a direction orthogonal to a flow path, and a butterfly valve body that is linked to the rod and that opens and closes the flow path due to the rod being rotated by the DD motor, wherein a linking body center of gravity, which is the center of gravity of a rotating liking body having at least the rod and the butterfly valve body as constituent members, is positioned on an axial line of a rotating shaft of the DD motor.

Abstract: A pipe welding structure includes: a channel plate that includes a fluid channel; through-hole plates stacked on the channel plate, each of the through-hole plates having through holes that communicate with each other and forming a combined through hole; and a pipe inserted into the combined through hole and welded to one of the through-hole plates disposed farthest from the channel plate, the pipe internally including a pipe channel that connects to the fluid channel.

Abstract: A micromixer includes: a first channel plate where a first channel and a plurality of first branch channels are each formed by a non-through groove in a front surface, and a first confluence channel is formed by a non-through groove in a rear surface, and includes a first communication channel that communicates the first branch channels with the first confluence channel; a first lid plate that covers the front surface; a second channel plate where a second confluence channel is formed by a non-through groove in the front surface, and a second channel and a plurality of second branch each formed by a non-through groove in the rear surface, and includes a second communication channel that communicates the second branch channels with the second confluence channel; and a second lid plate that covers the rear surface of the second channel plate.