Abstract: A gas supply unit is configured such that when a first gas whose temperature has been controlled at a first temperature is supplied to a chamber through an upper device and then a second gas which starts a chemical reaction at a reaction start temperature lower than the first temperature is supplied to the chamber through the upper device, before cleaning gas is supplied to the chamber through the defined between a base plate and the upper device to cool the upper device down to the reaction start temperature or lower.

Abstract: An inspection device used in manufacture of a Press Through Package (PTP) sheet includes a container film including a pocket portion in which a content is placed and a cover film closing the pocket portion. The inspection device includes: an illumination device that irradiates the content with near-infrared light; a spectroscope that disperses reflected light from the content irradiated with the near-infrared light; an imaging device that takes an image of an optical spectrum of the reflected light dispersed by the spectroscope and acquires spectroscopic image data; and a controller that obtains spectral data of the content based on the spectroscopic image data, executes an inspection of the content based on the spectral data of the content, and executes good or poor quality judgment of the content.

Abstract: A substrate inspection device that is placed on an upstream side of a component mounting machine that mounts an electronic component on solder that is printed on a substrate by a solder printing machine, and that inspects the solder and a thermosetting adhesive applied on the substrate, the substrate inspection device including: an irradiator that irradiates the solder and the adhesive with light; an imaging device that takes an image of the irradiated solder and the irradiated adhesive; and a processor that: generates actual solder position information of a solder group that the electronic component is mounted on based on the image, wherein the solder group includes two or more solders; generates, based on design data or manufacturing data, ideal solder inspection reference information indicating a reference inspection position and/or a reference inspection range of the solder included in the solder group.

Abstract: An inspection device includes: an irradiator that radiates, before content is placed into the pocket, ultraviolet light toward one face of the container film; imaging devices that take images of the container film from another face side of the container film; and a processor that determines, based on the images, whether the pocket includes a pinhole, at least two of the imaging devices being each disposed on respective sides of the container film in a width direction such that the pocket is placed between the two imaging devices, and while the container film is being conveyed along a conveyance path, the two imaging devices take images of the pocket at a timing when the pocket is located at an upstream-side position, a middle-side position, and a downstream-side position of the conveyance path.

Abstract: An inspection device is used in manufacture of a PTP sheet that comprises a container film including a pocket portion in which a content is placed and a cover film closing the pocket portion. The inspection device includes: an illumination device that emits near infrared light; a light shield that is placed between the illumination device and the container film and prevents the near infrared light from entering the container film; a through hole in the light shield that allows the near infrared light to pass through; a spectroscope that disperses reflected light from the content; an imaging device that images an optical spectrum of the reflected light and obtains spectroscopic image data; and a controller that: obtains spectral data of the content based on the spectroscopic image data; and performs a predetermined inspection with regard to the content based on the spectral data of the content.

Abstract: A vacuum pressure proportional control valve placed on a pipe connecting between a reaction vessel and a vacuum pump to control the vacuum pressure in the reaction vessel includes a cylinder provided with a piston chamber, a piston housed in the piston chamber so as to make reciprocal linear movement, a valve seat surface, and a valve element which contacts with or separates from the valve seat surface according to the movement of the piston. A stopper member is provided in the cylinder so that a leading end portion of the stopper member is placed in the piston chamber. The stopper member is configured to move the piston back and forth in a moving direction of the piston by use of an adjusting unit to thereby adjust the position of the leading end portion.

Abstract: This manufacturing method for a fluid control apparatus, in which the flow of a fluid is controlled by bringing a diaphragm valve element into contact with or separating the same from a valve seat, is characterized in that: the diaphragm valve element is a joint body of a seat member making contact with the valve seat and a body member; the joint body is formed by cutting a material joint body obtained by depositing a seat member material which is a material for the seat member and a body member material which is a material for the body member, and the deposition is performed over a wider range than a contact surface between the seat member and the body member of the joint body, on the contact surface between the seat member material and the body member material of the material joint body.

Abstract: A heat exchange system is arranged between a chiller device and a temperature control member, and is provided with: supply line for supplying a refrigerant from the chiller device to the temperature control member; a return line for returning the refrigerant from the temperature control member to the chiller device; a bypass line for bypassing the supply line and the return line; a latent heat storage member arranged closer to the chiller device relative to a first connection point connecting the return line and the bypass line; and a flow distribution unit that is arranged at a second connection point connecting the outgoing line and the bypass line, and that is for adjusting a ratio for distributing refrigerant to the temperature control member and the bypass line.

Abstract: An inspection device includes: an illumination device that irradiates an object with near infrared light; a spectroscope that disperses reflected light from the object irradiated with the near infrared light; an imaging device that takes a spectroscopic image of the reflected light dispersed by the spectroscope; and a processor. The processor: obtains spectral data at a plurality of points on the object based on the spectroscopic image obtained by the imaging device; selects, as typical spectral data representing the object from among the spectral data at the plurality of points, one of: spectral data in which a luminance value in a predetermined wavelength is a median value; and spectral data in which a summation of luminance values in a predetermined wavelength range is a median value; and performs a predetermined analysis for the object based on the typical spectral data and detects a different type of object.

Abstract: An inspection device includes: an irradiator that irradiates an object with near-infrared light; a spectroscope that has a slit where reflected light enters and that disperses the reflected light into wavelength component lights; an imaging device that comprises an imaging element that takes a spectroscopic image of the wavelength component lights; and a processor that: obtains spectral data based on the spectroscopic image; and detects a type of the object using a predetermined analysis based on the spectral data. Each of the wavelength component lights is a single wavelength light, the inspection device satisfies L?2P, where L is a width of each of the wavelength component lights in a wavelength dispersion direction on a light receiving surface of the imaging element and P is a width of a pixel in the wavelength dispersion direction on the light receiving surface.

Abstract: A butterfly valve includes a drive unit and a valve unit that are coupled to each other. The drive unit includes a hollow part in which a rod is inserted between a DD motor and an end portion of the drive unit on a coupling side to the valve unit. In the hollow part, a cylindrical magnetic member is placed coaxially with the rod to cover the outer peripheral surface of the rod. A magnetic fluid is filled in a void between the outer peripheral surface of the magnetic member and the inner peripheral surface of the hollow part. The rod is made of a non-magnetic corrosion-resistant alloy.

Abstract: A blister packing machine includes: a conveyor that conveys a belt-like container film having a pocket portion forming area and an expected mounting part; a preheating device that preheats the container film conveyed by the conveyor; a pocket portion forming device that forms a pocket portion in the container film softened by the preheating device; and a tension applier that applies a tension along a width direction of the container film to at least the pocket portion forming area. The pocket portion forming device forms the pocket portion while the tension applier applies the tension to the container film, the container film has an edge area between an edge in the width direction and the expected mounting part, and the tension applier includes a projection that applies the tension to the container film by pressing the edge area to form a protruding portion in the container film.

Abstract: The present invention provides a checking tool for a tube coupler with which it is possible to visually check an attachment state of the tube coupler. A checking tool 10 for a tube coupler according to the present invention is a checking tool configured to be attached to a tube coupler 30, the tube coupler being formed of a first coupling piece 31 and a second coupling piece 35 hingedly connected to each other so as to be able to be opened and closed, being configured to couple tubes to each other with use of the first coupling piece and the second coupling piece, and having hook pieces 33 and 37 that are provided protruding from outer circumferential surfaces of the first coupling piece and the second coupling piece.

Abstract: In this vortex flowmeter provided with a vortex generator and a flow rate measuring unit, a seal member is mounted on a temperature sensing element including a temperature sensor adhered with an adhesive to a metal temperature sensing case. The temperature sensing element is inserted into a first insertion hole formed in a body case so as to communicate with a body passage. A distal end surface of the temperature sensing element is arranged in either a position where the distal end surface is flush with the passage surface of the body passage formed in the body case or a position more outside than the passage surface in the radial direction of the body passage.

Abstract: A butterfly valve has a rod connected to a DD motor and disposed along a direction orthogonal to a flow path, and a butterfly valve body that is linked to the rod and that opens and closes the flow path due to the rod being rotated by the DD motor, wherein a linking body center of gravity, which is the center of gravity of a rotating liking body having at least the rod and the butterfly valve body as constituent members, is positioned on an axial line of a rotating shaft of the DD motor.

Abstract: A three-dimensional measurement device performs three-dimensional measurement of a measured object using a phase shift method. The three-dimensional measurement device includes: an irradiator that irradiates the measured object with a predetermined light pattern having a light intensity distribution in a fringe shape; a control device that shifts a phase of the light pattern radiated from the irradiator in N different ways, where N is a natural number of not less than 3; and an imaging device that takes an image of the measured object irradiated with the light pattern. The control device executes three-dimensional measurement of the measured object by the phase shift method based on N different image data taken under the light pattern having the phase shifted in the N different ways.

Abstract: A blister packaging machine includes: a pocket portion forming unit that forms a pocket portion having a bottom portion and a side portion, in a belt-like container film, and adjusts balance between a thickness of the bottom portion and a thickness of the side portion; an illumination device that is disposed on a downstream side of the pocket portion forming unit, and irradiates the pocket portion with an electromagnetic radiation; an imaging device that is disposed on a side opposite to the illumination device across the container film, and obtains transmitted image data based on the electromagnetic radiation transmitted through the pocket portion; a side portion state detector that detects a state of the thickness of the side portion based on the transmitted image data; and a controller that controls an operation of the pocket portion forming unit.

Abstract: A flow rate ratio control valve includes a pair of plate springs, each of which applies elastic force in a predetermined direction in accordance with the amount of deformation, a valve body supported by the pair of plate springs to be movable in the predetermined direction, a drive unit which drives the valve body in the predetermined direction in a non-contact state by means of electromagnetic force applied to a region between the pair of plate springs in the predetermined direction, a container in which the plate springs and the valve body are contained, and a damper which is attached to the valve body, defines a sectioned predetermined space in cooperation with an inner surface of the container, and forms a predetermined gap between the damper and the inner surface, the predetermined gap establishing communication in the predetermined direction between the predetermined space and the exterior of the predetermined space.

Abstract: A three-dimensional measurement apparatus measures measurement targets placed in a target measurement area on a measurement object. The apparatus includes: a measurement module that: is positioned with respect to the target measurement area, and includes: a first irradiator that irradiates the target measurement area with predetermined light for height measurement; a second irradiator that irradiates the target measurement area with predetermined patterned light for three-dimensional measurement; and an imaging device that takes an image of the target measurement area; and a control device that moves the measurement module in a height direction and successively positions the measurement module at a predetermined height position determined by mapping, and performs, based on image data taken by irradiating the target measurement area with predetermined patterned light, three-dimensional measurement to the measurement targets at the predetermined height position.

Abstract: An inspection device includes: an electromagnetic wave irradiator that irradiates, with a predetermined electromagnetic wave from a first film side, the package that is conveyed along a predetermined direction and that has the spaces at a plurality of positions in a width direction; an imaging device that is disposed opposed to the electromagnetic wave irradiator across the package, includes an electromagnetic wave detector including a plurality of detection elements that is arrayed along the width direction and that detects the electromagnetic wave radiated from the electromagnetic wave irradiator and transmitted through the package, and sequentially outputs an obtained electromagnetic wave transmission image every time the package is conveyed by a predetermined amount; and an image processing device that processes an image signal output from the imaging device.