Abstract: An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

Abstract: A vacuum pump includes a control unit that monitors and controls a motor and a magnetic bearing, each being stored in a pump body. A temperature-adjustment function unit measures a temperature of the pump body by at least one temperature sensor disposed in the pump body and controls at least one heater or solenoid controlled valve based on the temperature. The temperature-adjustment function unit includes a first terminal capable of connecting or disconnecting the temperature sensor and a second terminal capable of connecting or disconnecting one of the heater and the solenoid controlled valve. A self-diagnosis unit capable of conducting a self-diagnosis of whether an input signal to the first terminal has been normally inputted or whether the signal has been normally outputted from the second terminal.

Abstract: A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.

Abstract: Provided are a vacuum pump, a magnetic bearing device, and a rotor that suppress swinging and vibration of a rotor. A vacuum pump includes, in the following order in the exhaust direction of a gas, the center of gravity of a rotor, an active radial bearing that supports the rotor in the radial direction in a non-contact manner by using a magnetic force, and a passive radial bearing that supports the rotor in the radial direction in a non-contact manner using a magnetic force.

Abstract: The present disclosure provides a vacuum pump with which size and weight reduction, improvement of workability, and cost reduction can be realized. Electrical connection between a pump main body that has a rotor supported by a magnetic bearing and a control unit that controls the drive of the pump main body is established by a flexible printed wiring board configured by printing an electric circuit on a surface of a sheet-like insulating substrate.

Abstract: A vacuum pump and a damper for the vacuum pump are provided so as to increase vibration isolation in a twisting direction with a simple structure and prevent rupture of an O-ring and an elastic member by regulating a misalignment of flanges facing each other. Provided are a first flange and a second flange, each having a central opening, the flanges being shaped like rings opposed to each other; an O-ring and an intermediate ring that are disposed between the first flange and the second flange; O-rings disposed between the first flange and the intermediate flange and between the intermediate ring and the second flange; a plurality of elastic members that are disposed between the first flange and the second flange and are spread in the circumferential direction of central openings; and airtightness keeping means including positioning pins inserted into positioning holes sequentially provided on the first flange, the intermediate ring, and the second flange.

Abstract: Provided is a vacuum pump including a turbomolecular mechanism having rotor blades and stator blades alternately arranged in multiple stages in an axial direction inside a casing having an inlet port that sucks gas from an outside and an outlet port that exhausts the sucked gas to the outside, the vacuum pump including: a plurality of annular spacers that are stacked on each other and position the stator blades in the axial direction; the casing that has a cylindrical portion arranged to surround outer peripheries of the plurality of stacked spacers and a base portion attached to a lower portion of the cylindrical portion; and an upper radial positioning portion and a lower radial positioning portion provided at two vertical positions inside the cylindrical portion and coaxially hold at least a spacer of an uppermost stage and a spacer of a lowermost stage among the plurality of stacked spacers.

Abstract: Provided are a vacuum pump and an adapter used in the vacuum pump that are capable of responding to various changes in specifications at low cost. A turbo-molecular pump includes a base, a stator blade that is provided above the base in an axial direction of a rotor, a rotor blade that is integrally attached to the rotor, a housing that is formed in a cylindrical shape, and accommodates the stator blade and is integrally attached to the base, and an adapter that is replaceable depending on a type of the stator blade, the rotor blade, or the housing, and that is detachably mounted on the base and is configured to support the stator blade in the axial direction.

Abstract: To provide a vacuum pump suited for removal of a product deposited in a flow path of the vacuum pump, and a stator component, a discharge port, and control means that are used in the vacuum pump. A vacuum pump includes a flow path through which a gas is transferred from an inlet port toward an outlet port and removing means that removes a product deposited on an inner wall surface of the flow path. The removing means has injection holes with one ends opened at the inner wall surface of the flow path and injects the removing gas into the flow path through the injection holes.

Abstract: In a vacuum pump, an outer diameter of a spiral plate disposed on a downstream side is set smaller than an outer diameter of a spiral plate disposed on an upstream side. Specifically, a stepped portion is provided by setting a blade length of the spiral plate disposed on the downstream side shorter than a blade length of the spiral plate disposed on the upstream side. In addition, in a spacer provided in the stepped portion, a relief formation portion is provided to allow a contact surface in contact with an upstream spacer (i.e., spacer opposed to the spiral plate having the unreduced outer diameter) and a contact surface in contact with a downstream spacer (i.e., spacer opposed to the spiral plate having the reduced outer diameter) in the stepped portion to have an equal inner diameter.

Abstract: The present invention provides a vacuum pump that measures the temperature of a rotating portion accurately and at low cost, a stator column of the vacuum pump, a base, and an exhaust system of the vacuum pump at low cost. The vacuum pump according to the present embodiment, the thread groove-type seal for causing some of the purge gas to flow back toward the temperature sensor unit is provided on the downstream side of the purge gas flow path in which the temperature sensor unit is disposed, thereby increasing the pressure of the purge gas in the vicinity of the temperature sensor unit. Thus, with the small amount of purge gas, the gas pressure around the temperature sensor unit can create an intermediate flow or a viscous flow. Consequently, the total amount of purge gas to be supplied can be saved, resulting in cost reduction.

Abstract: To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump includes a pump main body and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket which has an inner surface and an outer surface in a vertical portion and in which a cooling medium flow passage is formed, and a plurality of electrical equipment that have circuit components and can be cooled by the cooling jacket. The inner surface and the outer surface are formed facing different directions, and the electrical equipment portions are attached respectively to the inner surface and the outer surface so that heat can be transferred.

Abstract: A vacuum pump includes a rotor that has a rotor central portion and a plurality of stages of rotor blade portions extending from the rotor central portion and having a predetermined elevation angle, and a casing that houses the rotor therein. The rotor further includes a rotor fin. The rotor fin includes a fin shaft portion connected to an end of the rotor central portion, and a transfer blade that extends from the fin shaft portion and causes particles to bounce back in a direction toward an outer periphery of the rotor, the particles falling onto the abovementioned end through an inlet port. The height of the transfer blade and the number of transfer blades are set based on the fall velocity of the particles and the rotation speed of the rotor, such that the particles are prevented from falling onto the abovementioned end without colliding with the transfer blade.

Abstract: Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.

Abstract: A vacuum pump exhaust system and an exhausting method of the vacuum pump supply a purge gas to the vacuum pump such that an amount of the purge gas satisfies one of following conditions: an amount of the purge gas flowing at a higher velocity than a backflow velocity of gas exhausted by the vacuum pump on at least a part of a downstream side of the temperature sensor unit, and an amount of the purge gas having a pressure of one of an intermediate flow and a viscous flow around the temperature sensor unit. The exhaust system further includes a purge gas supply unit capable of controlling a flow rate of purge gas introduced into the vacuum pump. This configuration can prevent process gas from flowing backward so as to change the composition around the temperature sensor unit, thereby accurately measuring the temperature of the rotating portion.

Abstract: The present disclosure can provide a vacuum pump capable of obtaining a rotation direction and correcting the rotation direction without adding a dedicated rotation direction sensor even in a state of low-speed rotation. The control device is capable of obtaining at least a first state in which a rotor shaft rotates at relatively high speed, and a second state in which the rotor shaft deviates within a gap between the rotor shaft and a protective bearing and rotates at relatively low speed while revolving, acquires output information of a radial displacement sensor, obtains a rotation direction of the rotor shaft in the second state on the basis of the output information, determines whether the rotation direction is normal or not, and when the rotation direction is not normal, stops the rotation and increases rotation speed to achieve a normal rotation direction.

Abstract: A vacuum pump and a temperature control device are capable of preventing, with a simple configuration, overheating and overcooling of a pump that are caused due to abnormality in a temperature sensor used to control a heater or a water-cooling solenoid valve that is provided to prevent the deposition of products. Problems such as overheating and overcooling of a heater can be avoided in a case where a temperature sensor system fails and consequently the measured temperature continues to be constant between the upper limit and the lower limit. TMS function controls the measured temperature of the temperature sensor to a target temperature. Thus, if an application such as a target to be heated or a heater capacity is identified, the same cycles of turning ON/OFF of the heater or the water-cooling solenoid valve are repeated, and the upper limit of the time in which the ON/OFF state is sustained continuously is determined.

Abstract: A vacuum pump includes: a rotating portion and a stator portion between which an internal flow path is formed; an exhaust mechanism which sends gas from a suction port toward an outlet port through the internal flow path; and a main sensor for detecting that a deposited material has reached a prescribed thickness at a detection object position of the internal flow path, wherein the main sensor includes at least a pair of electrodes disposed in the internal flow path at an interval corresponding to the prescribed thickness, and a capacitance detection circuit which is connected to the pair of electrodes and which detects a capacitance between the pair of electrodes, and the capacitance detection circuit detects that a deposited material in the internal flow path has reached the prescribed thickness on the basis of a drop in an increase rate of the capacitance.

Abstract: A vacuum pump includes a regenerative resistor removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and disposed in a base of the vacuum pump, and connected to the control board via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump, which has a large heat capacity, a temperature increase of the control apparatus is reduced.

Abstract: A vacuum pump includes a housing having an inlet port, a stator column provided upright inside the housing, a rotating body having a shape surrounding an outer periphery of the stator column, a support means for rotatably supporting the rotating body, and a driving means for driving the rotating body to rotate, wherein gas is sucked in from the inlet port by rotation of the rotating body, and the stator column is constituted of a cast material of aluminum alloy having a mechanical material property of an elongation of 5% or more.