Abstract: The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer.

Abstract: A vacuum pump has, in at least either a stator disc to be disposed or a rotating disc to be disposed, a Siegbahn type molecular pump portion in which a spiral-shaped groove with a ridge portion and a root portion is engraved (disposed), and is structured to ensure high conductance at a returning flow channel formed at the outer periphery (outside) of the Siegbahn type molecular pump portion. This structure is created by a communicating portion (a groove portion, a slit) formed on each rotating disc, or an oblique plate disposed on the stator disc and the communicating portion formed on the rotating disc. The “communicating portion,” “groove portion,” and “slit” are configured to have “concave” shapes, a concave portion is provided by engraving a groove radially inward from an outer diameter portion (toward a side of a shaft of the vacuum pump) in the rotating disc (or stator disc).

Abstract: Provided is an abatement device that reduces an amount of drainage of circulating water. The abatement device lowers an average drainage flow of circulating water to a low flow, when a ratio of a concentration of silicon dioxide within the circulating water and a concentration of hydrogen fluoride within the circulating water is greater than or equal to a predetermined value at which hydrofluorosilicic acid can be produced, and raises the average drainage flow of the circulating water to a high flow higher than the low flow, when the ratio of the concentration of silicon dioxide within the circulating water and the concentration of hydrogen fluoride within the circulating water is less than the predetermined value.

Abstract: Provided are a vacuum pump and a method for the vacuum pump in which, when contact between a rotating body and a stator is sensed, the cause of the contact can be analyzed. Contact determination is made using a threshold for rotating body contact determination for a displacement signal and a threshold for rotating body contact determination for an acceleration signal. The amount of unbalance of a rotating body is determined using a threshold for amount-of-unbalance increase determination for the displacement signal and a threshold for amount-of-unbalance increase determination for the acceleration signal. When, in one of the displacement signal and the acceleration signal, the threshold for amount-of-unbalance increase determination or the threshold for amount-of-unbalance increase determination is exceeded within a predetermined time before determination of an estimated time point of contact, the contact is determined not to be caused by an increase in accumulation of products.

Abstract: The present invention provides a stator component of a vacuum pump, which is suitable for reducing the fracture energy (energy of fracture that occurs when a rotor of the pump is damaged during its rotation) and the size of the pump, and also provides a vacuum pump having this stator component. In the vacuum pump, a spacer or of a thread groove pump stator, which is a stator component forms a gap satisfying the following <<condition>> between an outer circumferential surface of each of housed in a pump case of the vacuum pump, and an inner circumferential surface of the pump case, with the stator component being housed in the pump case. <<Condition>> 2d/D??max, where D is the outer diameter of the stator component (spacer or thread groove pump stator), d is the width of the gap, and ?max is the breaking elongation of the stator component.

Abstract: Provided is a vacuum pump for preventing solidification of gas in a thread groove portion, and a heat insulating spacer used in the vacuum pump. The vacuum pump includes a heat insulating spacer that is interposed between a casing and an outer circumferential stator having a thread groove portion, supports the outer circumferential stator coaxially with a rotor in a rotor radial direction, with keeping a gap between the casing and the outer circumferential stator, and has lower thermal conductivity than the casing and the outer circumferential stator.

Abstract: Provided is a vacuum pump having a stator disc having a divided structure, in which gaps or misalignments that occur between connection surfaces at which the divided structure is connected are reduced. In a turbo-molecular pump according to this embodiment, a mating relationship between a stator disc and a stator member for alignment (center-alignment) is opposite from that of the related art. Specifically, in a structure in which a base and the stator disc are fitted together, center alignment (positioning/centering) is performed through a structure in which an outer peripheral surface of the stator disc is held (restrained from an outer side) by an inner peripheral surface of the base to be connected thereto. Further, the mating structure of the stator disc includes an integral component. Moreover, the mating position of a stator blade and the mating position of the stator disc having a Siegbahn structure are provided separately.

Abstract: A vacuum pump, and a waterproof structure and a control apparatus applied to the vacuum pump which improve efficiency of on-site maintenance work and prevent water from penetrating into a connector connecting portion when a cover is removed during circuit separation or the like. When performing maintenance work, after a chassis of a control apparatus is lowered by around several tens of millimeters, the chassis of the control apparatus is pulled out in a radial direction of a pump. Accordingly, a pump main body and the control apparatus can be readily attached and detached even when sufficient empty space is not available in an axial direction of the vacuum pump. A wall portion is circumferentially protrusively provided in side portions of the base portion and the control apparatus. Furthermore, a sealing member and a lid are inserted into a gap. Therefore, water droplets cannot easily penetrate into the gap.

Abstract: An object of the present invention is to provide a magnetic bearing device designed to achieve reduction in cost and size of a circuit by omitting a DC/DC converter that has been used for obtaining a control power voltage of a magnetic bearing, and to provide a vacuum pump having the magnetic bearing device.

Abstract: An object is to reduce an adhesion amount of a product in a vacuum pump as a whole and effectively prevent occurrence of a trouble in a vacuum pump electric system due to a magnetic flux leak. A vacuum pump includes a rotor enclosed in a pump case, a rotating shaft fixed to the rotor, a supporting means that rotatably supports the rotating shaft, a driving means that rotates the rotating shaft, and thread-groove-exhaust-portion stators that form thread grove exhaust passages between the thread-groove-exhaust-portion stator and an outer circumferential side of or an inner circumferential side of the rotor. A heating portion is provided below the thread-groove-exhaust-portion stators. The heating portion includes a yoke, a coil, and a heating plate. The heating portion heats the yoke and the heating plate with electromagnetic induction heating by feeding an alternating current to the coil.

Abstract: Provided is a magnetic bearing device which allows easy initial adjustment and allows optimal bearing control to be performed by a simple algorithm without increasing a memory capacity of a controller. A pair of square multipliers and an adder acquire respective steady-state current values of a pair of electromagnets which attract a rotor shaft of a magnetic bearing not shown in opposite radial directions, square the respective steady-state current values, and add up the respective squared steady-state current values. Then, to optimally change respective currents in the electromagnets in accordance with a mounting posture of the magnetic bearing, a correction coefficient arithmetic operator calculates a correction gain instruction value acting on the electromagnets from the steady-state current values squared/added up. Then, a gain instruction value obtained by adding the correction gain instruction value to a fundamental gain of a control circuit for the electromagnets is input to a gain amplifier.

Abstract: A vacuum pump component includes a stationary disk that is formed with a spiral groove (helical groove) having a ridge portion and a valley part and has a projecting (protruding) portion on both or either one of an inner-diameter portion of the disk which faces a rotary cylinder (rotator cylinder-shaped portion) and an inner-diameter side of a stationary cylinder disposed on an outer peripheral side of the stationary disk. A second vacuum pump component includes rotary disk formed with a spiral groove having a ridge portion and a valley part and having a projecting (protruding) portion on both or either one of an outer-diameter portion of a rotary cylinder disposed on an inner peripheral side of the rotary disk and an outer-diameter portion of the rotary disk which faces a spacer.

Abstract: A stator disk includes a connection hole for improving exhaust efficiency in a vacuum pump including a Seigbahn type molecular pump portion, and a vacuum pump including the stator disk. The vacuum pump according to an embodiment includes a Seigbahn type molecular pump portion and includes, in a stator disk disposed therein, a connection hole that connects an upper space (an inlet port side region, an upstream side region) with a lower space (an outlet port side region, a downstream side region) in the axial direction of the stator disk.

Abstract: A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.

Abstract: The present invention provides a stator component of a vacuum pump, which is suitable for reducing the fracture energy (energy of fracture that occurs when a rotor of the pump is damaged during its rotation) and the size of the pump, and also provides a vacuum pump having this stator component. In the vacuum pump, a spacer or of a thread groove pump stator, which is a stator component forms a gap satisfying the following <<condition>> between an outer circumferential surface of each of housed in a pump case of the vacuum pump, and an inner circumferential surface of the pump case, with the stator component being housed in the pump case. <<Condition>> 2d/D??max, where D is the outer diameter of the stator component (spacer or thread groove pump stator), d is the width of the gap, and ?max is the breaking elongation of the stator component.

Abstract: The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.

Abstract: An object of the present invention is to improve, using a simple configuration, heat dissipation of a regenerative resistor that is disposed in a vacuum pump control device (controller) connected to a vacuum pump. The regenerative resistor disposed in the vacuum pump control device is stored in an aluminum die-cast casing. More concretely, a housing of the vacuum pump control device is prepared by aluminum die casting (metal mold casting). A regenerative resistor storing portion (aluminum die-cast casing) provided with a hollow portion is provided on a top panel of the aluminum die cast, the hollow portion being designed to have a size accommodating the entire regenerative resistor. The regenerative resistor is fitted into the hollow portion, and an opening section of the hollow portion is sealed with an aluminum sheet of the same material as that of the casing. In this manner, the regenerative resistor can removably be stored in the aluminum die-cast casing.

Abstract: A rotor of a vacuum pump has a circular member that is driven rotatably, a cylindrical member joined to an outer circumference of the circular member, and a thread groove pump flow path formed between the cylindrical member and a stator member surrounding an outer circumference of the cylindrical member. The cylindrical member is made of a material having at least a feature of lower thermal expansivity or lower creep rate than that of a material of the circular member. A gap of a second region provided between a non-joint portion of the cylindrical member and the stator member is set to be smaller than a gap of a first region provided between a joint portion of the cylindrical member and the stator member.

Abstract: An IPM motor for a vacuum pump suitable for use as a motor for a small vacuum pump is provided. The IPM motor for a vacuum pump includes: a rotor core in which a rotor shaft of the vacuum pump is pressed and which also has magnets embedded therein; and a stator core which surrounds the rotor core and around which stator windings are wound. The magnets per pole embedded in the rotor core are each split into two pieces and inserted in respective magnet slots in the rotor core. A hole for stress concentration relaxation is provided at either end of each pair of magnet slots in which permanent magnets split into two pieces are embedded in each pole. The rotor core has a multilayer structure having a plurality of rotor core laminations stacked vertically in an axial direction of the rotor shaft. The rotor core laminations stacked vertically are positioned with a skew angle determined by using the holes for stress concentration relaxation.

Abstract: To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater and a magnetic valve is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.