Abstract: A rotor of a vacuum pump has first and second cylindrical bodies and a connecting portion for connecting the end portions of the cylindrical bodies together. The first cylindrical body has a plurality of rotor blades on an outer circumferential surface thereof, and configures a blade exhaust portion when the rotor blades are arranged along an axial center of the vacuum pump alternately with a plurality of stator blades. The second cylindrical body configures a threaded groove exhaust portion when a threaded groove exhaust flow passage is formed at least on an inner circumference of the second cylindrical body. In this rotor, a balancing portion for the rotor is provided on an inner circumferential surface of the first cylindrical body or the connecting portion, and mass adding means is provided in the balancing portion.

Abstract: Provided are a vacuum pump and an adapter used in the vacuum pump that are capable of responding to various changes in specifications at low cost. A turbo-molecular pump includes a base, a stator blade that is provided above the base in an axial direction of a rotor, a rotor blade that is integrally attached to the rotor, a housing that is formed in a cylindrical shape, and accommodates the stator blade and is integrally attached to the base, and an adapter that is replaceable depending on a type of the stator blade, the rotor blade, or the housing, and that is detachably mounted on the base and is configured to support the stator blade in the axial direction.

Abstract: Provided are a stator blade assembly advantageous for improving the evacuation performance by shortening the evacuation time, and an exhaust pump provided with such a stator blade assembly. Inner and outer stator blade bases of a plurality of stator blades are supported by frames. A projecting portion protruding from the frame supporting the inner stator blade base, or from the frame supporting the outer stator blade base, or from both of the frames is provided in a gap in the vicinity of the inner or outer stator blade base between one of the supported stator blades and the stator blade transversely adjacent thereto.

Abstract: Provided is a vacuum pump in which the flexing of a rotating cylinder made of a fiber-reinforced resin can be reduced as much as possible to sufficiently reduce the gap between the rotating cylinder and a fixed cylinder, and exhaust performance can thereby be improved to great effect. A vacuum pump comprising a thread groove pump portion equipped with a fixed cylinder portion (2) having a spiraling thread groove portion (1) provided in an internal peripheral surface, and a rotating cylinder portion (3) placed inside the fixed cylinder portion (2), the thread groove pump portion exhausting through a spiraling exhaust flow channel due to the rotating cylinder portion (3) being caused to rotate, and the exhaust flow channel being formed from the thread groove portion (1) and an external peripheral surface of the rotating cylinder portion (3).

Abstract: The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated.

Abstract: An exhaust pump includes: a cylindrical rotating member; an outer cylindrical fixed member; an inner cylindrical fixed member a helical inner thread groove exhaust passage provided between the cylindrical rotating member and the inner cylindrical fixed member; connecting opening portions that are opened in the cylindrical rotating member and that lead a part of gas existing in the vicinity of the outer periphery of the cylindrical rotating member towards the inner thread groove exhaust passage. A gap between an upstream end of the connecting opening portions and lowermost stage rotor blades provided at the outer periphery of the cylindrical rotating member which is located upstream of the connecting opening portions has a dimension equal to or greater than a dimension that enables insertion, into the gap, of a tool for opening the connecting opening portions.

Abstract: A deposit detection device for an exhaust pump is provided, which can be easily put into operation without the burdens of, for example, installing equipment for flowing a gas, or adding or changing operation modes in apparatuses.

Abstract: Provided is a vacuum pump in which no finish processing has to be carried out after shaping of a cylindrical rotor even in use of a cylindrical rotor obtained by shaping a fiber-reinforced plastic material into a cylindrical shape. The vacuum pump has a turbo-molecular pump section and a thread groove pump section. The upper end section of a cylindrical rotor, which is obtained by shaping a fiber-reinforced plastic material into a cylindrical shape, of the thread groove pump section, is joined to the lower end section of a rotor of the turbo-molecular pump section. A joining portion of the rotor of the turbo-molecular pump section and the cylindrical rotor of the thread groove pump section is disposed upstream of an exhaust passage. As a result, finish processing does not have to be carried out after shaping of the cylindrical rotor.

Abstract: To provide a stator member that facilitates thermal radiation from a surface thereof and thermal conduction to an adjacent member, and a vacuum pump that contains the stator member. For the purpose of enhancing heat dissipation of a rotor portion, surface treatment removal processing is performed on a predetermined section of a thread groove spacer in order to efficiently release heat of the thread groove spacer toward a base and a stator blade spacer. More specifically, the surface treatment removal processing removes the surface treatment of the base and a section where the stator blade spacer comes into contact with the thread groove spacer. This surface treatment removal processing is executed simultaneously with finishing processing.

Abstract: To provide a vacuum pump capable of heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and prevents the accumulation of a product that is caused by a decrease in the temperature of process gas near the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.

Abstract: A vacuum pump including a pump main unit and a control unit is disclosed. The control unit includes a substrate having electronic elements mounted thereon and terminal pins soldered to the substrate at a first end edge of the substrate. The substrate is mounted to a plate via an attachment near a second end edge opposing the first end edge and the plate is mounted to the pump main unit. The terminal pins extend through the plate. Upon linear thermal expansion of the terminal pins, by reason of the location of the terminal pins near the first end edge and the attachment near the second end edge, stresses in the soldered pin connections are reduced. A molding material having a Shore hardness of less than 50, is molded around the electronic elements on the substrate in one embodiment.

Abstract: To provide a protective bearing, a bearing unit, and a vacuum pump that are configured to prevent a touchdown bearing from co-rotating with the rotation of a rotor that is supported in a levitated state and a non-contact state. Slits are formed in the radial direction at four sections on the inner side of a securing member. A pair of permanent magnets of the same polarity is fixed to the upper surface of each of the four regions partitioned by the slits. The inner rim of the securing member has projections that are formed circumferentially downward. An attractive force is generated between an outer ring and an inner ring. An attractive force is also generated between the projections projecting toward the inner end of the securing member and the inner ring. Due to this configuration, even when a rotational torque is applied to the inner ring of the touchdown bearing as a result the rotation of the rotating body, co-rotation of the inner ring does not occur due to a large holding torque.

Abstract: Provided is a magnetic bearing device which allows easy initial adjustment and allows optimal bearing control to be performed by a simple algorithm without increasing a memory capacity of a controller. A pair of square multipliers and an adder acquire respective steady-state current values of a pair of electromagnets which attract a rotor shaft of a magnetic bearing not shown in opposite radial directions, square the respective steady-state current values, and add up the respective squared steady-state current values. Then, to optimally change respective currents in the electromagnets in accordance with a mounting posture of the magnetic bearing, a correction coefficient arithmetic operator calculates a correction gain instruction value acting on the electromagnets from the steady-state current values squared/added up. Then, a gain instruction value obtained by adding the correction gain instruction value to a fundamental gain of a control circuit for the electromagnets is input to a gain amplifier.

Abstract: In a rotor blade cylindrical portion or a stator portion in which thread grooves are formed, convex surfaces (thread groove peak surfaces) configuring the peak sections of the thread grooves are cut by a desired amount over the entire circumference (a circumferential direction of the thread grooves) of a certain range in an axial direction. As a result, the gap on the lower side of the thread groove portion can partially be expanded by cutting the thread groove peak surfaces by a desired amount.

Abstract: Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.

Abstract: The present invention provides a stator component of a vacuum pump, which is suitable for reducing the fracture energy (energy of fracture that occurs when a rotor of the pump is damaged during its rotation) and the size of the pump, and also provides a vacuum pump having this stator component. In the vacuum pump, a spacer or of a thread groove pump stator, which is a stator component forms a gap satisfying the following <<condition>> between an outer circumferential surface of each of housed in a pump case of the vacuum pump, and an inner circumferential surface of the pump case, with the stator component being housed in the pump case. <<Condition>> 2d/D??max, where D is the outer diameter of the stator component (spacer or thread groove pump stator), d is the width of the gap, and ?max is the breaking elongation of the stator component.

Abstract: The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.

Abstract: An object of the present invention is to enhance the capacity of a turbomolecular pump. A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion. Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion.

Abstract: A stator disk includes a connection hole for improving exhaust efficiency in a vacuum pump including a Seigbahn type molecular pump portion, and a vacuum pump including the stator disk. The vacuum pump according to an embodiment includes a Seigbahn type molecular pump portion and includes, in a stator disk disposed therein, a connection hole that connects an upper space (an inlet port side region, an upstream side region) with a lower space (an outlet port side region, a downstream side region) in the axial direction of the stator disk.

Abstract: A vacuum pump having substrates which can be wired together easily and cooled easily. A substrate unit structure is formed by covering the opening of the casing of the pump main unit with a plate functioning also as the casing of the control unit. Pins of a terminal fixed while penetrating the plate are soldered directly to an active magnetic bearing (AMB) control substrate and an aerial connection substrate in order to integrate these components. The casing and sealing structures can be of simple construction. A drip-proof structure can be made with the terminal at low cost without using expensive drip-proof connectors. Further, by cooling the plate, electronic components mounted respectively on the AMB control substrate in a vacuum atmosphere and the aerial connection substrate in an air atmosphere can be cooled simultaneously.