Patents Assigned to Fujimi Incorporated
  • Patent number: 11976220
    Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.
    Type: Grant
    Filed: July 21, 2022
    Date of Patent: May 7, 2024
    Assignee: FUJIMI INCORPORATED
    Inventors: Kohsuke Tsuchiya, Hisanori Tansho, Yusuke Suga, Taiki Ichitsubo, Takayuki Takemoto, Naohiko Saito, Michihiro Kaai
  • Publication number: 20240141137
    Abstract: Provided is a powder having a high transmittance that is suitable as a filler for optical materials and resins for which transparency is demanded. The powder of the present invention includes crystalline plate-shaped titanium phosphate particles, in which a ratio of particles having a particle diameter of 0.52 ?m or more to 0.87 ?m or less is 7.0% by mass or less.
    Type: Application
    Filed: December 10, 2021
    Publication date: May 2, 2024
    Applicant: FUJIMI INCORPORATED
    Inventors: Mayumi Iwakuni, Keiji Ashitaka, Naoya Miwa
  • Publication number: 20240131654
    Abstract: Provided is a polishing pad having a high following performance even when a surface to be polished is a curved face. A polishing pad (1) in an embodiment of the present invention includes a polishing layer (2) having a polishing face (21) and a support layer (3) that is formed from a material softer than the polishing layer (2) and is fixed to a face (22) opposite to the polishing face (21) of the polishing layer (2). The support layer (3) has a hardness of not less than 30 and less than 70 in terms of F hardness.
    Type: Application
    Filed: February 25, 2022
    Publication date: April 25, 2024
    Applicant: FUJIMI INCORPORATED
    Inventors: Kyosuke Tenko, Koji Katayama, Daisuke Yasui, Hideharu Hase, Shota Hishida
  • Publication number: 20240124810
    Abstract: Provided is a means for sufficiently removing residues remaining on the surface of a polished object and reducing the surface roughness of the polished object. The present invention relates to a surface treatment composition containing components (A) to (C), and having pH of more than 7.0: the component (A): a cyclic amine compound having a nitrogen-containing non-aromatic heterocyclic ring, the component (B): a nonionic polymer, the component (C): a buffer represented by a formula: A-COO?NH4+ wherein A is an alkyl group having from 1 to 10 carbon atoms, or a phenyl group.
    Type: Application
    Filed: September 25, 2023
    Publication date: April 18, 2024
    Applicant: FUJIMI INCORPORATED
    Inventors: Hideyuki TOKUSHIMA, Tsutomu YOSHINO
  • Publication number: 20240116763
    Abstract: Provided is a method for producing a silica sol. A gel-like material cannot be generated and highly associated silica particles can be obtained. A method for producing a silica sol comprises a step of making a reaction liquid by mixing liquid (A) comprising an alkaline catalyst, water, a first organic solvent and silica particles for association with liquid (B) comprising at least one of tetramethoxysilane and a condensate thereof and a second organic solvent, wherein during the mixing, an addition rate of the liquid (B) is 8.5×10?4 to 5.6×10?3 (mol of silicon atoms in liquid (B)/mol of water in liquid (A)) per minute.
    Type: Application
    Filed: December 18, 2023
    Publication date: April 11, 2024
    Applicant: FUJIMI INCORPORATED
    Inventor: Keiji ASHITAKA
  • Patent number: 11939491
    Abstract: The present invention provides means capable of achieving both a reduction in the number of defects and a reduction in haze in an object to be polished after polishing at a high level in a method of polishing the object to be polished containing a material having a silicon-silicon bond. The present invention relates to a method of polishing an object to be polished containing a material having a silicon-silicon bond, and the polishing method includes a final polishing step Pf.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: March 26, 2024
    Assignee: FUJIMI INCORPORATED
    Inventors: Kohsuke Tsuchiya, Maki Asada, Satoshi Momota
  • Publication number: 20240050328
    Abstract: Provided is a soft focus filler excellent in both transmittance and haze. The soft focus filler of the present invention includes a powder including plate-shaped crystal particles of titanium phosphate.
    Type: Application
    Filed: October 8, 2021
    Publication date: February 15, 2024
    Applicant: FUJIMI INCORPORATED
    Inventors: Mayumi Iwakuni, Keiji Ashitaka, Naoya Miwa
  • Publication number: 20240052203
    Abstract: The present invention is to provide a means for reducing surface roughness (Ra) while maintaining a high polishing rate in polishing of an object to be polished containing a resin and a filler. A polishing composition of the present invention comprises alumina particles, colloidal silica particles, and a dispersing medium for use in polishing an object to be polished containing a resin and a filler, in which the alumina particles have an average particle size of less than 2.8 ?m, and the colloidal silica particles have an average particle size less than the average particle size of the alumina particles.
    Type: Application
    Filed: November 10, 2021
    Publication date: February 15, 2024
    Applicant: FUJIMI INCORPORATED
    Inventor: RYO WAKABAYASHI
  • Patent number: 11897081
    Abstract: Provided are a polishing method that can be commonly applied to different types of silicon substrates varying in resistivity as well as a polishing composition set used in the polishing method. The silicon substrate polishing method provided by this invention comprises supplying a first polishing slurry S1 and a second polishing slurry S2 to a silicon substrate to be polished, switching them in this order midway through polishing the silicon substrate. The first polishing slurry S1 comprises an abrasive A1 and a water-soluble polymer P1. The polishing removal rate of the first polishing slurry S1 is higher than that of the second polishing slurry S2.
    Type: Grant
    Filed: February 13, 2017
    Date of Patent: February 13, 2024
    Assignee: FUJIMI INCORPORATED
    Inventors: Shinichiro Takami, Yusuke Kawasaki
  • Publication number: 20240043982
    Abstract: There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which can contribute to the stable production of devices and a longer life of members. The thermal spray material which is one aspect of this invention contains a composite compound containing a rare earth fluoride in the proportion of 40 mol % or more and 80 mol % or less, a magnesium fluoride in the proportion of 10 mol % or more and 40 mol % or less, and a calcium fluoride in the proportion of 0 mol % or more and 40 mol % or less.
    Type: Application
    Filed: November 18, 2021
    Publication date: February 8, 2024
    Applicants: TOCALO Co., Ltd., FUJIMI INCORPORATED
    Inventors: Yasuhiro Shiojiri, Tatsuo Suidzu, Kensuke Taguchi, Hiroaki Mizuno, Takaya Masuda
  • Publication number: 20240002697
    Abstract: The present invention is to provide a means for reducing residual abrasive grains on a surface of an object to be polished after polishing. The polishing composition of the present invention comprises abrasive grains and a dispersing medium, wherein the abrasive grains are silica particles having an average particle size (D50) of more than 1.0 ?m and a circularity of primary particles of 0.90 or more.
    Type: Application
    Filed: January 26, 2022
    Publication date: January 4, 2024
    Applicant: FUJIMI INCORPORATED
    Inventor: Ryo Wakabayashi
  • Publication number: 20240002232
    Abstract: A titanium phosphate powder containing plate-like particles with a reduced content ratio of byproducts other than the plate-like particles, and exhibiting crystallinity of titanium phosphate represented by a chemical formula Ti(HPO4)2·nH2O (0?n?1) is provided in the present disclosure. The present disclosure relates to a method for producing a titanium phosphate powder exhibiting crystallinity of titanium phosphate represented by a chemical formula Ti(HPO4)2·nH2O (0?n?1), and containing plate-like particles, the method comprising putting an acidic raw material aqueous solution containing phosphorus and titanium in a sealed vessel, and storing the sealed vessel containing the raw material aqueous solution for a period of 2 hours or more, with the ambient temperature of the sealed vessel maintained under a constant temperature condition within a range of 40° C. or more and less than 100° C.
    Type: Application
    Filed: June 23, 2023
    Publication date: January 4, 2024
    Applicant: FUJIMI INCORPORATED
    Inventors: Ryo NOMURA, Keiji ASHITAKA, Naoya MIWA
  • Patent number: 11851638
    Abstract: Provided is a means capable of sufficiently removing organic residues on the surface of an object to be polished after polishing. A surface treatment composition includes a polymer having a building block represented by Formula (1) in [Chemical Formula 1], a chelating agent, and water and is used to treat the surface of an object to be polished after polishing, and the chelating agent has at least one of a phosphonic acid group and a carboxylic acid group. In Formula (1), R1 is a hydrocarbon group having 1 to 5 carbon atoms; and R2 is a hydrogen atom or a hydrocarbon group having 1 to 3 carbon atoms.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: December 26, 2023
    Assignee: FUJIMI INCORPORATED
    Inventors: Tsutomu Yoshino, Sonosuke Ishiguro
  • Publication number: 20230404876
    Abstract: Provided is a white pigment for cosmetics, and the white pigment has a higher function as a base pigment than that of titanium oxide. A white pigment for cosmetics of the present invention includes a titanium phosphate powder having a whiteness of 92.91 or more as determined in accordance with JIS Z 8715.
    Type: Application
    Filed: August 25, 2023
    Publication date: December 21, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Mayumi IWAKUNI, Keiji ASHITAKA, Naoya MIWA
  • Publication number: 20230390166
    Abstract: Provided is a powder having excellent hiding power, such that the powder can be used in place of titanium dioxide as a white pigment in a cosmetic. The powder of the present invention includes plate-shaped crystal particles, the volume D50% diameter thereof is 0.7 ?m or more and 8.0 ?m or less, and a coefficient of variation (CV value) of a primary particle diameter is 1.0 or less.
    Type: Application
    Filed: September 8, 2021
    Publication date: December 7, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Mayumi Iwakuni, Keiji Ashitaka, Naoya Miwa
  • Publication number: 20230364732
    Abstract: Provided is a method that enables good cleaning of a polished substrate formed of a high-hardness material. Provided is a method of polishing and cleaning a substrate formed of a material having a Vickers hardness of 1500 Hv or more. The method includes: polishing a substrate to be polished using a polishing composition; and cleaning the polished substrate using a cleaner. The polishing composition contains a polishing auxiliary. Furthermore, the cleaner contains a surfactant.
    Type: Application
    Filed: September 17, 2021
    Publication date: November 16, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: SACHIKO HIRAKO, NAOTO NOGUCHI
  • Patent number: 11814294
    Abstract: There is provided a method of producing anionically modified colloidal silica capable of polishing a silicon nitride film at a high speed and suppressing a polishing speed of a silicon oxide film. A method of producing anionically modified colloidal silica includes ion exchanging raw colloidal silica using an ion exchange resin (ion exchange step); and anionically modifying ion-exchanged raw colloidal silica to obtain anionically modified colloidal silica (modification step).
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: November 14, 2023
    Assignee: FUJIMI INCORPORATED
    Inventor: Ryota Mae
  • Publication number: 20230331930
    Abstract: To provide a polyvinyl alcohol composition effectively suppressed in generation of an aggregated product, in a method for producing a wetting agent for a semiconductor, containing a polyvinyl alcohol composition. A method for producing a wetting agent for a semiconductor, containing a polyvinyl alcohol composition, wherein the polyvinyl alcohol composition is obtained through an addition-in-liquid step of adding into the inside of any one solution of a first liquid containing polyvinyl alcohol and water and a second liquid other than the first liquid, the other liquid of the first liquid and the second liquid.
    Type: Application
    Filed: June 9, 2021
    Publication date: October 19, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Hisanori TANSHO, Kohsuke TSUCHIYA, Hiroki YAMAGUCHI, Reiko AKIZUKI, Ryunosuke ANDO
  • Publication number: 20230321628
    Abstract: Provided is an absorption method of an element belonging to periods 4 to 6 and groups 3 to 15 of the periodic table. The method includes: preparing mesoporous alumina that satisfies at least one of the following items: (1) a surface hydroxyl content is 3.5 mmol/g or more; (2) a low-temperature CO2 desorption amount in CO2 thermal desorption amount spectrometry is 5 µmol/g or more; and (3) a low-temperature NH3 desorption amount in NH3 thermal desorption amount spectrometry is 25 µmol/g or more; and bringing a liquid containing an absorption target element in contact with the mesoporous alumina to absorb the absorption target element in the mesoporous alumina. The absorption target element is at least one type selected from the group consisting of an element belonging to periods 4 to 6 and groups 3 to 15 of the periodic table.
    Type: Application
    Filed: August 5, 2021
    Publication date: October 12, 2023
    Applicant: FUJIMI INCORPORATED
    Inventors: Robert HEPBURN, Shogo TSUBOTA
  • Patent number: 11781039
    Abstract: Solutions are disclosed for preventing the settling of an abrasive, while maintaining the polishing performance of a polishing composition. Solutions are disclosed for improving the redispersibility of an abrasive while maintaining the polishing performance. Polishing compositions for use in polishing a semiconductor substrate according to the present disclosure include an abrasive, a layered compound, and a dispersion medium.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: October 10, 2023
    Assignee: FUJIMI INCORPORATED
    Inventors: Tomoaki Ishibashi, Hiroki Kon