Patents Assigned to INFINEON TECHNOLOGIES DRESDEN GMBH
  • Patent number: 10354911
    Abstract: In accordance with an embodiment of the present invention, a method of forming a semiconductor device includes forming a first cavity within a substrate. The first cavity is disposed under a portion of the substrate. The method further includes forming a first pillar within the first cavity to support the portion of the substrate.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: July 16, 2019
    Assignee: INFINEON TECHNOLOGIES DRESDEN GMBH
    Inventors: Thoralf Kautzsch, Alessia Scire, Steffen Bieselt
  • Patent number: 10354992
    Abstract: A semiconductor device includes a transistor arrangement and a diode structure. The diode structure is coupled between a gate electrode structure of the transistor arrangement and a source electrode structure of the transistor arrangement. An insulating layer is located vertically between the diode structure and a front side surface of a semiconductor substrate of the semiconductor device. The diode structure includes at least one diode pn-junction. A substrate pn-junction extends from the front side surface of the semiconductor substrate into the semiconductor substrate between a shielding doping region and an edge doping portion. The edge doping portion is located adjacent to the shielding doping region within the semiconductor substrate. At the front side surface of the semiconductor substrate, the substrate pn-junction is located laterally between the diode pn-junction and a source contact region of the diode structure with the source electrode structure.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: July 16, 2019
    Assignee: Infineon Technologies Dresden GmbH & Co. KG
    Inventors: Joachim Weyers, Franz Hirler, Ahmed Mahmoud, Yann Ruet, Enrique Vecino Vazquez
  • Patent number: 10347737
    Abstract: Methods for manufacturing a bipolar junction transistor are provided. A method includes providing a semiconductor substrate having a trench isolation, where a pad resulting from a manufacturing of the trench isolation is arranged on the semiconductor substrate, providing an isolation layer on the semiconductor substrate and the pad such that the pad is covered by the isolation layer, removing the isolation layer up to the pad, and selectively removing the pad to obtain an emitter window.
    Type: Grant
    Filed: June 12, 2017
    Date of Patent: July 9, 2019
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Claus Dahl, Dmitri Alex Tschumakow
  • Patent number: 10325834
    Abstract: In accordance with an embodiment of the present invention, a semiconductor device includes a semiconductor chip having a first side and an opposite second side, and a chip contact pad disposed on the first side of the semiconductor chip. A dielectric liner is disposed over the semiconductor chip. The dielectric liner includes a plurality of openings over the chip contact pad. A interconnect contacts the semiconductor chip through the plurality of openings at the chip contact pad.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: June 18, 2019
    Assignee: INFINEON TECHNOLOGIES DRESDEN GMBH
    Inventors: Dirk Meinhold, Frank Daeche, Thorsten Scharf
  • Patent number: 10290805
    Abstract: A method for manufacturing an emitter comprises providing a semiconductor substrate having a main surface, the semiconductor substrate comprising a cavity adjacent to the main surface. A portion of the semiconductor substrate arranged between the cavity and the main surface of the semiconductor substrate forms a support structure. The method comprises arranging an emitting element at the support structure, the emitting element being configured to emit a thermal radiation of the emitter, wherein the cavity provides a reduction of a thermal coupling between the emitting element and the semiconductor substrate.
    Type: Grant
    Filed: February 5, 2018
    Date of Patent: May 14, 2019
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt
  • Patent number: 10290735
    Abstract: A method of manufacturing a semiconductor device includes: forming a doped region in a semiconductor substrate at a first distance to a main surface plane of the semiconductor substrate, wherein the doped region is a first section of a semiconductor column extending from the main surface plane into the semiconductor substrate; forming an insulator structure surrounding at least a second section of the semiconductor column between the main surface plane and the first section in planes parallel to the main surface plane; removing the second section of the semiconductor column; and forming a contact structure extending from the main surface plane to the doped region, wherein the contact structure includes a fill structure and a contact layer, the contact layer formed from a metal semiconductor alloy and directly adjoining the doped region and the fill structure formed from a metal and/or a conductive metal compound.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: May 14, 2019
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Stefan Tegen, Marko Lemke, Rolf Weis
  • Patent number: 10266389
    Abstract: A method for forming a MEMS device may include performing a silicon-on-nothing process to form a cavity in a monocrystalline silicon substrate at a first depth relative to a top surface of the monocrystalline silicon substrate; forming, in an electrically conductive electrode region of the monocrystalline silicon substrate, an electrically insulated region extending to a second depth that is less than the first depth relative to the top surface of the monocrystalline silicon substrate; and etching the monocrystalline silicon substrate to expose a gap between a first electrode and a second electrode, wherein the second electrode is separated from the first electrode, within a first depth region, by a first distance defined by the electrically insulated region and the gap, and wherein the second electrode is separated from the first electrode, within a second depth region, by a second distance defined by the gap.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: April 23, 2019
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Sebastian Pregl, Uwe Rudolph
  • Patent number: 10270002
    Abstract: The present disclosure relates to an integrated light emitting device. The integrated light emitting device comprises a substrate of semiconductor material, a light emitting unit integrated into the semiconductor material, and at least one cavity formed into the semiconductor material between the substrate and the light emitting unit. At least portions of the at least one cavity may be formed by Silicon-On-Nothing (SON) process steps.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: April 23, 2019
    Assignee: Infineon Technologies Dresden GmbH
    Inventor: Thoralf Kautzsch
  • Patent number: 10224328
    Abstract: A circuit has first and second semiconductor switches, each of which has a load path and control terminal connected in series. Each switch includes a first semiconductor device having a load path and a control terminal coupled to the control terminal of its switch, and a second semiconductor device having a load path between first and second load terminals, and a control terminal. Each second semiconductor device has its load path connected in series to the load path of the corresponding first semiconductor device. The semiconductor devices are coupled such that the second semiconductor devices are controlled by a load path voltage of the first semiconductor devices. The switches are integrated in a common semiconductor body. The first switch is implemented in a first area of the semiconductor body, and the second switch is implemented in a second area. In a horizontal plane, the first area surrounds the second area.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: March 5, 2019
    Assignee: Infineon Technologies Dresden GmbH
    Inventor: Rolf Weis
  • Patent number: 10199367
    Abstract: A semiconductor device includes a semiconductor body having opposite first and second surfaces. The semiconductor device further includes a transistor structure in the semiconductor body and a source contact structure overlapping the transistor structure. The source contact structure is electrically connected to source regions of the transistor structure. A gate contact structure is further provided, which has a part separated from the source contact structure by a longitudinal gap within a lateral plane. Gate interconnecting structures bridge the longitudinal gap and are electrically coupled between the gate contact structure and a gate electrode of the transistor structure. Electrostatic discharge protection structures bridge the longitudinal gap and are electrically coupled between the gate contact structure and the source contact structure.
    Type: Grant
    Filed: March 14, 2017
    Date of Patent: February 5, 2019
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Markus Schmitt, Armin Tilke, Joachim Weyers
  • Publication number: 20190004084
    Abstract: A micromechanical sensor includes a first and a second capacitive sensor element each having a first and a second electrode, wherein electrode wall surfaces of the first electrode and the second electrode are situated opposite one another in a first direction and form a capacitance, wherein the first electrodes are movable in a second direction, which is different than the first direction, in response to a variable to be detected, and the second electrodes are stationary. The electrode wall surface of the first electrode of the first sensor element has a smaller extent in the second direction than the opposite electrode wall surface of the second electrode of the first sensor element. The electrode wall surface of the second electrode of the second sensor element has a smaller extent in the second direction than the opposite electrode wall surface of the first electrode of the second sensor element.
    Type: Application
    Filed: June 26, 2018
    Publication date: January 3, 2019
    Applicant: Infineon Technologies Dresden GmbH
    Inventors: Erhard LANDGRAF, Stephan Gerhard ALBERT, Steffen BIESELT, Sebastian PREGL, Matthias ROSE
  • Publication number: 20180351027
    Abstract: The present disclosure relates to an integrated light emitting device. The integrated light emitting device comprises a substrate of semiconductor material, a light emitting unit integrated into the semiconductor material, and at least one cavity formed into the semiconductor material between the substrate and the light emitting unit. At least portions of the at least one cavity may be formed by Silicon-On-Nothing (SON) process steps.
    Type: Application
    Filed: July 20, 2018
    Publication date: December 6, 2018
    Applicant: Infineon Technologies Dresden GmbH
    Inventor: Thoralf KAUTZSCH
  • Patent number: 10128358
    Abstract: A transistor comprising a semiconductor substrate comprising a collector region extending from a main surface of the semiconductor substrate into a substrate material. The transistor comprising a base structure arranged at the collector region along a thickness direction parallel to a direction of a normal of the main surface of the semiconductor substrate, where an emitter structure arranged at the base structure is averted from the semiconductor substrate and along the thickness direction. The transistor comprising a doped electrode layer arranged at a lateral surface region of the base structure and along a lateral direction perpendicular to the thickness direction. The doped electrode layer and the base structure form a monocrystalline connection.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: November 13, 2018
    Assignee: Infineon Technologies Dresden GMBH
    Inventors: Claus Dahl, Dmitri Alex Tschumakow
  • Publication number: 20180297838
    Abstract: A microelectromechanical systems (MEMS) device is provided and includes a bulk semiconductor substrate, a cavity formed in the bulk semiconductor substrate, a movably suspended mass, a cap structure and a capacitive structure is shown. The movably suspended mass is defined in the bulk semiconductor substrate by one or more trenches extending from a main surface area of the bulk semiconductor substrate to the cavity. The cap is structure arranged on the main surface area of the bulk semiconductor substrate. The capacitive structure comprises a first electrode structure arranged on the movably suspended mass and a second electrode structure arranged at the cap structure such that the first electrode structure and the second electrode structure are spaced apart in a direction perpendicular to the main surface area of the bulk semiconductor substrate.
    Type: Application
    Filed: April 12, 2018
    Publication date: October 18, 2018
    Applicant: Infineon Technologies Dresden GmbH
    Inventors: Thoralf KAUTZSCH, Steffen BIESELT, Heiko FROEHLICH, Andre ROETH, Maik STEGEMANN, Mirko VOGT
  • Patent number: 10096511
    Abstract: According to various embodiments, a carrier may be provided, the carrier including: a hollow chamber spaced apart from a surface of the carrier; a trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure including one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure, wherein the one or more support structures including an electrically insulating material.
    Type: Grant
    Filed: February 1, 2017
    Date of Patent: October 9, 2018
    Assignee: Infineon Technologies Dresden GmbH
    Inventor: Steffen Bieselt
  • Patent number: 10084441
    Abstract: An electronic circuit includes a first transistor device and a second transistor device of the same conductivity type. The first transistor device is integrated in a first semiconductor body and includes a first load pad at a first surface of the first semiconductor body and a second load pad at a second surface of the first semiconductor body. The second transistor device is integrated in a second semiconductor body and includes a first load pad at a first surface of the second semiconductor body, and a second load pad at a second surface. The first load pad of the second transistor device is mounted to the first load pad of the first transistor device and the second load pad of the first transistor device is mounted to an electrically conducting carrier.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: September 25, 2018
    Assignee: Infineon Technologies Dresden GMBH
    Inventors: Andreas Meiser, Markus Winkler
  • Patent number: 10056305
    Abstract: According to various embodiments, a wafer arrangement may be provided, the wafer arrangement may include: a wafer including at least one electronic component having at least one electronic contact exposed on a surface of the wafer; an adhesive layer structure disposed over the surface of the wafer, the adhesive layer structure covering the at least one electronic contact; and a carrier adhered to the wafer via the adhesive layer structure, wherein the carrier may include a contact structure at a surface of the carrier aligned with the at least one electronic contact so that by pressing the wafer in direction of the carrier, the contact structure can be brought into electrical contact with the at least one electronic contact of the at least one electronic component.
    Type: Grant
    Filed: February 13, 2017
    Date of Patent: August 21, 2018
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Peter Brockhaus, Uwe Koeckritz
  • Patent number: 10044005
    Abstract: According to various embodiments, an electrode may include at least one layer including a chemical compound including aluminum and titanium.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: August 7, 2018
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Dirk Meinhold, Sven Schmidbauer, Markus Fischer, Norbert Urbansky
  • Patent number: 10031062
    Abstract: Various embodiments provide a particle sensor including: a first carrier, the first carrier including at least one heating structure and a light detecting structure, at least one spacer structure disposed over the first carrier, a second carrier disposed over the at least one spacer structure, the second carrier including a light emitting structure, wherein the first carrier, the second carrier and the at least one spacer structure are arranged to provide a channel for a fluid flow, wherein the light emitting structure is configured to emit light into the channel and wherein the light detecting structure is configured to detect light from the channel.
    Type: Grant
    Filed: June 9, 2016
    Date of Patent: July 24, 2018
    Assignee: INFINEON TECHNOLOGIES DRESDEN GMBH
    Inventor: Thoralf Kautzsch
  • Patent number: 10020387
    Abstract: Embodiments provide a method for manufacturing a bipolar junction transistor, comprising: providing a semiconductor substrate comprising a buried layer of a first conductive type; doping the semiconductor substrate in a collector implant region, to obtain a collector implant of the first conductive type extending parallel to a surface of the semiconductor substrate and from the surface of the semiconductor substrate to the buried layer; providing a base layer of a second conductive type on the surface of the semiconductor substrate, the base layer covering the collector implant; providing a sacrificial emitter structure on the base layer, wherein a projection of an area of the sacrificial emitter structure is enclosed by an area of the collector implant; and partially counter doping the collector implant through an area of the base layer surrounding an area of the base layer that is covered by the sacrificial emitter structure.
    Type: Grant
    Filed: March 8, 2017
    Date of Patent: July 10, 2018
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Dirk Manger, Stefan Tegen