Patents Assigned to Tokyo Ohka Kogyo Co., Ltd.
  • Patent number: 11803122
    Abstract: A chemically amplified photosensitive composition used for forming a patterned resist film by photolithography on a metal surface of a substrate which at least partly has a surface consisting of metal. The composition includes an acid generator which generates an acid by irradiation of active rays or radioactive rays; and a compound and/or a precursor compound, in which the molar absorption coefficient ? at a wavelength of 365 nm of the compound is at least 3000, the compound has a metal coordination group, and the compound can be formed from the precursor compound during formation of the patterned resist film.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: October 31, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Yasushi Kuroiwa, Kazuaki Ebisawa
  • Patent number: 11780948
    Abstract: A resin composition for forming a phase-separated structure includes a block copolymer having a block (b1) formed of a repeating structure of styrene units, the block (b1) being partially substituted with a constituent unit represented by the following General Formula (c1) and a block (b2) having a repeating structure of methyl methacrylate units.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: October 10, 2023
    Assignees: Tokyo Ohka Kogyo Co., Ltd., National University Corporation Hokkaido University
    Inventors: Ken Miyagi, Takahiro Dazai, Toshifumi Satoh, Takuya Isono, Shunma Tanaka
  • Patent number: 11780946
    Abstract: An alternating copolymer including a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a0-2) represented by general formula (a0-2) in which Rp01 represents a hydrogen atom or the like; Vp01 represents a single bond or a divalent linking group; Rp02 and Rp03 each independently represents a hydrocarbon group which may have a substituent, or Rp02 and Rp03 are mutually bonded to form a ring; Rp04 represents a hydrogen atom, a C1-C5 alkyl group or a C1-C5 halogenated alkyl group; Rp05 represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a cyano group or a hydroxy group; Rp06 represents a linear or branched aliphatic hydrocarbon group; and m represents an integer of 0 to 4
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: October 10, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Akiyoshi Yamazaki, Daisuke Kawana, Yoshitaka Komuro, Masatoshi Arai, Nobuhiro Michibayashi, Takatoshi Inari
  • Patent number: 11773324
    Abstract: A semiconductor processing liquid including hydrofluoric acid, and an organic solvent, in which the organic solvent contains a compound represented by the formula below in which X1 is a single bond or an alkylene group having 1 to 6 carbon atoms, in which an ether bond may be interposed, Y10 is one of —O—, —(C?O)—, —O—(C?O)—, and —(C?O)—O—, Y20 is one of —(C?O)—, —O—(C?O)—, and —(C?O)—O—, and Y11 and Y21 are each independently a single bond or an alkylene group having 1 to 6 carbon atoms in which an ether bond may be interposed, provided that, X1, Y11, and Y21 do not contain hydroxyl groups in structures thereof, and when X1 is a single bond, Y10 is not —O—) H3C—Y11—Y10—X1—Y20—Y21—CH3??(1).
    Type: Grant
    Filed: July 14, 2022
    Date of Patent: October 3, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Takahiro Eto, Lihong Liu
  • Patent number: 11773287
    Abstract: A method for forming a coating that is less uneven and more uniform, and has good stability after being formed, by applying a coating-forming composition including a metal compound and/or a halogen-containing compound. The coating is formed by a method including forming a coating by applying a coating-forming composition onto a substrate. The coating-forming composition is a solution including a metal compound and/or a halogen-containing compound, and an amine compound. The metal compound includes one or more metal elements selected from period 2 elements to period 6 elements in the periodic table.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: October 3, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Shunichi Mashita, Yoshihiro Sawada
  • Patent number: 11762288
    Abstract: A resist composition that generates an acid upon exposure and whose solubility in a developing solution is changed by action of an acid.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: September 19, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Hiroto Yamazaki, Seiji Todoroki, Masahiro Shiosaki, Nobuhiro Michibayashi
  • Patent number: 11754926
    Abstract: A method of forming a resist pattern, including forming a resist composition using a resist film; exposing the resist film; and alkali-developing the exposed resist film to form a positive-tone resist pattern, wherein the resist composition includes a first resin component and a second resin component which satisfies a specific relationship DRMIX<DRP1 and DRMIX<DRP2, wherein DRP1 is the dissolution rate of the first resin component (P1) in an alkali developing solution, DRP2 is the dissolution rate of the second resin component (P2) in an alkali developing solution, and DRMIX is the dissolution rate of a mixed resin of the first resin component (P1) and the second resin component (P2).
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: September 12, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventor: Eiichi Shimura
  • Patent number: 11754922
    Abstract: A resist composition containing a resin component (A1) having a constitutional unit derived from a compound represented by General Formula (a01-1).
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: September 12, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Masatoshi Arai, KhanhTin Nguyen
  • Patent number: 11746189
    Abstract: A hard-mask forming composition including a resin (P1) having a repeating structure (u1) represented by General Formula (u1-0), wherein Ar01 and Ar02 are aromatic hydrocarbon groups which may have a substituent, Ar02 has at least one nitrogen atom or oxygen atom, L01 and L02 are each independently a single-bonded or divalent linking group, and X is NH4 and the like
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: September 5, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventor: Keiichi Ibata
  • Patent number: 11747726
    Abstract: A resist composition including a base component and a fluorine additive component (F), the component (F) including a copolymer having a structural unit (f1) represented by general formula (f1-1) or (f1-2), and a structural unit (f2) represented by general formula (f2-1) (in formula (f1-1) and (f2-1), R represents a hydrogen atom or the like; at least one of Raf11 and Raf12, and at least one of Raf13 and Raf14 represents a hydrocarbon group substituted with a fluorine atom, and the total number of carbon atoms is 3 or more, provided that a hydrocarbon group forming a bridge structure is excluded; and the structural unit (f2) has a specific acid dissociable group containing an aliphatic cyclic group having no bridge structure
    Type: Grant
    Filed: June 23, 2020
    Date of Patent: September 5, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Yuki Fukumura, Tatsuya Fujii, Yoichi Hori
  • Patent number: 11747724
    Abstract: Organically modified metal oxide nanoparticles containing two or more cores including a plurality of metal atoms and a plurality of oxygen atoms covalently bonded to the plurality of metal atoms; a first modifying group that is a ligand coordinated to each of the cores and selected from the group consisting of a carboxylic acid carboxylate, a sulfonic acid sulfonate, and a phosphonic acid phosphonate; and a second modifying group that is coordinated to each of the cores and is a ligand having a structure different from that of the first modifying group and/or an inorganic anion, in which organically modified metal oxide nanoparticles have a structure in which the cores are crosslinked through a coordinate bond by at least the first modifying group.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: September 5, 2023
    Assignees: TOKYO OHKA KOGYO CO., LTD., NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    Inventors: Kiwamu Sue, Sho Kataoka, Yusuke Yoshigoe, Takatoshi Inari, Masatoshi Arai, Takaya Maehashi, Yoshitaka Komuro, Daisuke Kawana
  • Patent number: 11718772
    Abstract: Provided are a curable composition that exhibits favorable adhesiveness without heating at elevated temperatures, and a method for producing a joined structure using the curable composition. As a curable composition for use in forming one or more bonding layers bonding the two or more adherends, in which at least one of the two or more adherends includes a low heat-resistance material, a curable composition that contains an epoxy resin including a structural unit of a specific structure including an epoxy group, and yields a cured product exhibiting a water contact angle of 40° or more and 50° or less by heating at 80° C. or higher and 100° C. or lower and an exposure is used.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: August 8, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventor: Tsuyoshi Kurosawa
  • Patent number: 11718587
    Abstract: A novel compound suitable as an epoxy curing catalyst; an epoxy curing catalyst using the compound; and a method for producing the compound. A compound represented by formula (1) in which Xm+ represents an m valent counter cation, R1 represents an aromatic group which may have a substituent; R2 represents an alkylene group which may have a substituent; R3 represents a halogen atom, a hydroxyl group, a mercapto group, a sulfide group, a silyl group, a silanol group, a nitro group, a nitroso group, a sulfonic acid ester group, a phosphino group, a phosphinyl group, a phosphonic acid ester group or an organic group; m represents an integer of 1 or more; n represents an integer of 0-3; and R2 may bond with R1 to form a cyclic structure.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: August 8, 2023
    Assignees: Tokyo Ohka Kogyo Co., Ltd., Daicel Corporation
    Inventors: Kunihiro Noda, Hiroki Chisaka, Issei Suzuki, Jiro Hikida, Dai Shiota, Kieko Hanano, Kyohei Ishida, Tsutomu Watanabe, Kazuhiro Uehara
  • Patent number: 11718717
    Abstract: A resin composition including a silicon-containing resin component and a solvent, the silicon-containing resin component includes (I) mentioned below, the solvent including at least one of a terpene compound having at least one of a hydroxy group and an acetoxy group, and a cyclic skeleton-containing acetate compound (excluding the terpene compound): (I) a polysilane-polysiloxane resin having a polysilane structure and a polysiloxane structure.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: August 8, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Kunihiro Noda, Hiroki Chisaka, Kazuya Someya, Dai Shiota
  • Patent number: 11713383
    Abstract: To provide a method for producing a porous film in which even when minute fine particles are used, fine particles can be satisfactorily dispersed, a method for producing a composition for producing a porous film, and a porous film that can be produced by the method for producing a porous film. When a porous film is formed using a varnish including at least one resin component selected from the group consisting of polyamide acid, polyimide, a polyamide-imide precursor, polyamide-imide and polyethersulfone, and fine particles, varnish is produced by dispersing the fine particles by using a pressure device that pressurizes slurry including the fine particles and a dispersing device provided with a flow path whose cross-sectional area is 1960 ?m2 or more and 785000 ?m2 or less, and allowing the slurry pressurized to 50 MPa or more to pass through the flow path.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: August 1, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventor: Tsukasa Sugawara
  • Patent number: 11709425
    Abstract: A resist composition including: a compound including an anion moiety and a cation moiety and represented by the following Formula (bd1); and an organic solvent having a hydroxyl group in which Rx1 to Rx4 each represent a hydrocarbon group or a hydrogen atom, or may be bonded to each other to form a ring structure; Ry1 and Ry2 each independently represent a hydrocarbon group or a hydrogen atom, or may be bonded to each other to form a ring structure; Rz1 to Rz4 each represent a hydrocarbon group or a hydrogen atom, or may be bonded to each other to form a ring structure; at least one of Rx1 to Rx4, Ry1 and Ry2 and Rz1 to Rz4 has an anionic group; and Mm+ represents an organic cation)
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: July 25, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Takaya Maehashi, Yoshitaka Komuro
  • Patent number: 11703757
    Abstract: A resist composition including: a base material component (A), a compound (B1) represented by Formula (b1-1), and a fluorine additive component (F) which contains a fluororesin component (F1) having a constitutional unit (f1) represented by Formula (f-1) and a constitutional unit (f2) represented by Formula (f-2); in Formula (b1-1), Vb01 represents a fluorinated alkylene group, Rb02 represents a fluorine atom or a hydrogen atom, a total number of fluorine atoms as Vb01 and Rb02 is 2 or 3; in Formula (f-1), Rf1 represents a monovalent organic group having a fluorine atom; in Formula (f-2), Rf2 represents a group represented by Formula (f2-r-1), which is a group containing a polycyclic aliphatic cyclic group.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: July 18, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Daichi Takaki, Hirokuni Saito, Makoto Sakata
  • Patent number: 11703756
    Abstract: A resist composition including a compound represented by formula (bd1), a total amount of the acid-generator component and the basic component being 20 to 70 parts by weight, relative to 100 parts by weight of the base material component. In the formula, Rx1 to Rx4 represents a hydrogen atom or a hydrocarbon group, or two or more of Rx1 to Rx4 may be mutually bonded to form a ring structure; Ry1 and Ry2 represents a hydrogen atom or a hydrocarbon group, or Ry1 and Ry2 may be mutually bonded to form a ring structure; Rz1 to Rz4 represents a hydrogen atom or a hydrocarbon group, or two or more of Rz1 to Rz4 may be mutually bonded to form a ring structure; provided that at least one of Rx1 to Rx4, Ry1, Ry2 and Rz1 to Rz4 has an anionic group; and Mm+ represents an m-valent organic cation).
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: July 18, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Koshi Onishi, KhanhTin Nguyen, Masatoshi Arai, Yoshitaka Komuro
  • Patent number: 11693313
    Abstract: A resist composition including a compound (D0) represented by general formula (d0) and a polymeric compound (A10) having a structural unit (a0) derived from a compound represented by general formula (a0-1) shown below (in formula (d0), n represents an integer of 2 or more; in formula (a0-1), W1 represents a polymerizable group-containing group; Ct represents a tertiary carbon atom, and the ?-position of Ct is a carbon atom which constitutes a carbon-carbon unsaturated bond; R11 represents an aromatic hydrocarbon group which may have a substituent, or a chain hydrocarbon group; R12 and R13 each independently represents a chain hydrocarbon group, or R12 and R13 are mutually bonded to form a cyclic group
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: July 4, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Masahito Yahagi, Takahiro Kojima
  • Patent number: 11693316
    Abstract: A resist composition including a resin component having a constitutional unit derived from a compound represented by General Formula (a01-1) and a constitutional unit derived from a compound represented by General Formula (a02-1), and an acid generator component composed of an anion moiety and a cation moiety. In General Formula (a01-1), W1 represents a polymerizable group-containing group, Ct represents a tertiary carbon atom, R11 represents an unsaturated hydrocarbon group which may have a substituent, R12 and R13 represent a chain saturated hydrocarbon group which may have a substituent, and a carbon atom at an ?-position of Ct constitutes a carbon-carbon unsaturated bond.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: July 4, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: KhanhTin Nguyen, Masatoshi Arai, Nobuhiro Michibayashi