Patents Assigned to TSMC Solar Ltd.
  • Patent number: 9385260
    Abstract: A method for forming thin film solar cell materials introducing a first inert gas mixture that includes hydrogen selenide into a chamber at a first pressure value until the chamber reaches a second pressure value and at a first temperature value, wherein the second pressure value is a predefined percentage of the first pressure value. The temperature in the chamber is increased to a second temperature value for a selenization process so that the pressure in the chamber increases to a third pressure value. Residual gas that is generated during the selenization process can be removed from the chamber. A second inert gas mixture that includes hydrogen sulfide is added into the chamber until the chamber reaches a fourth pressure value. The temperature in the chamber is increased to a third temperature value for a sulfurization process. The chamber is cooled after the sulfurization process.
    Type: Grant
    Filed: July 10, 2013
    Date of Patent: July 5, 2016
    Assignee: TSMC Solar Ltd.
    Inventors: Kwang-Ming Lin, Chi-Wei Liu, Wen-Cheng Kuo
  • Patent number: 9368659
    Abstract: A method includes depositing spacers at a plurality of locations directly on a back contact layer over a solar cell substrate. An absorber layer is formed over the back contact layer and the spacers. The absorber layer is partially in contact with the spacers and partially in direct contact with the back contact layer. The solar cell substrate is heated to form voids between the absorber layer and the back contact layer at the locations of the spacers.
    Type: Grant
    Filed: October 24, 2013
    Date of Patent: June 14, 2016
    Assignee: TSMC Solar Ltd.
    Inventors: Tzu-Huan Cheng, Chia-Hung Tsai
  • Patent number: 9306098
    Abstract: A method of fabricating a photovoltaic device includes a step of forming an absorber layer above a substrate, and a step of forming a surface layer on the absorber layer. The absorber layer includes an I-III-VI2 compound, which contains a Group I element, a Group III element and a Group VI element. The surface layer includes an I-III-VI2 compound, which contains a Group I element, a Group III element and a Group VI element, and has an atomic ratio of the Group I element to the Group III element in the range of from 0.1 to 0.9.
    Type: Grant
    Filed: January 24, 2014
    Date of Patent: April 5, 2016
    Assignee: TSMC Solar Ltd.
    Inventor: Chien-Yao Huang
  • Patent number: 9293633
    Abstract: A removable cover system for protecting solar cells from exposure to moisture during fabrication processes. The cover system includes a cover having a configuration that complements the configuration of a solar cell substrate to be processed in an apparatus where moisture is present. A resiliently deformable seal member attached to the cover is positionable with the cover to engage and seal the top surface of the substrate. In one embodiment, the cover is dimensioned and arranged so that the seal member engages the peripheral angled edges and corners of the substrate for preventing the ingress of moisture beneath the cover. An apparatus for fabricating a solar cell using the cover and associated method are also disclosed.
    Type: Grant
    Filed: March 5, 2014
    Date of Patent: March 22, 2016
    Assignee: TSMC Solar Ltd.
    Inventors: Chih-Wei Huang, Keng-Hsin Chi, Chien-Nan Lin, Hua-Tso Wei
  • Patent number: 9287437
    Abstract: A method for monitoring the process of fabricating solar cells generally comprises performing a reaction process in a chamber for a solar cell substructure, wherein the chamber includes a reaction solution that includes at least one chemical component. A concentration value is detected for the chemical component during the reaction process, via a detection assembly that is coupled to the chamber. The method further includes determining whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the chemical component, via a control assembly that is coupled to the detection assembly. The concentration of the chemical component within the reaction solution is modified, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: March 15, 2016
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Hung-Yu Chang
  • Patent number: 9257584
    Abstract: A solar cell device and a method of fabricating the device is described. The solar cell is fabricated by providing a substructure comprising an absorber over a back contact having a P1 line therein and scribing a P2 line in the absorber by mechanical scribing and laser scribing after the mechanical scribing. The scribing can be performed with an integrated scriber, including a scribing tip and a light source mounted adjacent the scribing tip and operable concurrently with the scribing tip.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: February 9, 2016
    Assignee: TSMC Solar Ltd.
    Inventor: Chia-Hung Tsai
  • Patent number: 9214575
    Abstract: A solar panel comprises a back contact layer, an absorber layer over the back contact layer, a buffer layer over the absorber layer, and a front contact layer comprising a transparent conductive material over the buffer layer. The front contact layer has a plurality of outer edges and a seed layer comprising a seed layer material along the outer edges.
    Type: Grant
    Filed: February 7, 2014
    Date of Patent: December 15, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Wei Chun Hsu, Chen Yun Wang
  • Patent number: 9209341
    Abstract: A solar cell device and a method of fabricating the device is described. The solar cell is fabricated by forming a back contact layer on a front side of a substrate, forming an absorber layer on the back contact layer, applying a protective layer on a back side of the substrate, depositing a buffer layer on the absorber layer. Excess buffer materials are deposited on the substrate back side, and the protective layer with excess buffer materials are removed.
    Type: Grant
    Filed: February 19, 2014
    Date of Patent: December 8, 2015
    Assignee: TSMC Solar Ltd.
    Inventor: Shih-Wei Chen
  • Patent number: 9178103
    Abstract: A method and system for forming chalcogenide semiconductor absorber materials with sodium impurities is provided. The system includes a sodium vaporizer in which a solid sodium source material is vaporized. The sodium vapor is added to reactant gases and/or annealing gases and directed to a furnace that includes a substrate with a metal precursor material. The precursor material reacts with reactant gases such as S-containing gases and Se-containing gases according to various process sequences. In one embodiment, a selenization operation is followed by an annealing operation and a sulfurization operation and the sodium vapor is caused to react with the metal precursor during at least one of the annealing and the sulfurization steps to produce a chalcogenide semiconductor absorber material that includes sodium dopant impurities.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: November 3, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Wen-Tsai Yen, Jyh-Lih Wu
  • Patent number: 9178088
    Abstract: A method for fabricating a solar cell generally comprises delivering a solar cell substructure to a chamber. Electromagnetic radiation is generated using a wave generating device that is coupled to the chamber such that the wave generating device is positioned proximate to the solar cell substructure. The electromagnetic radiation is applied onto at least a portion of the solar cell substructure to facilitate the diffusion of at least one metal element through at least a portion of the solar cell substructure such that a semiconductor interface is formed between at least two different types of semiconductor materials of the solar cell substructure.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: November 3, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Wen-Tsai Yen, Jyh-Lih Wu, Wei-Lun Xu, Chung-Hsien Wu
  • Publication number: 20150303326
    Abstract: A solar cell has a first back contact and a first absorber over the first back contact. The first absorber has a scribe line through it. A first front contact is provided over the first absorber. A first conductive material is provided over a portion of the first front contact. The first conductive material extends through the scribe line and connects to a second back contact of a second solar cell.
    Type: Application
    Filed: April 18, 2014
    Publication date: October 22, 2015
    Applicant: TSMC SOLAR LTD.
    Inventor: Tzu-Huan CHENG
  • Patent number: 9159863
    Abstract: In a method of forming a CIGS film absorption layer, a first precursor is provided including a first substrate having a major process precursor film formed thereon, the major process precursor film containing two or more of Cu, In, Ga, and Se. A second precursor is provided including a second substrate having an element supplying precursor film formed thereon, the element supply precursor film containing two or more of Cu, In, Ga and Se. The precursors are oriented with the major process precursor film and element supplying precursor film facing one another so as to allow diffusion of elements between the films during annealing. The oriented films are annealed and then the precursors are separated, wherein the CIGS film is formed over the first substrate and either a CIGS film or a precursor film containing two or more of Cu, In, Ga, and Se remains over the second substrate.
    Type: Grant
    Filed: August 15, 2013
    Date of Patent: October 13, 2015
    Assignee: TSMC Solar Ltd.
    Inventors: Chung-Hsien Wu, Wen-Chin Lee
  • Publication number: 20150287843
    Abstract: A solar cell includes a back contact layer, an absorber layer above the back contact layer, a dielectric layer above the absorber layer, and a front contact layer above the dielectric layer.
    Type: Application
    Filed: April 3, 2014
    Publication date: October 8, 2015
    Applicant: TSMC SOLAR LTD.
    Inventor: Tzu-Huan CHENG
  • Publication number: 20150280051
    Abstract: An apparatus and method of forming a top contact layer of a thin film solar cell with improved layer thickness uniformity. Apparatus comprises a diffusion head for introduction of a processing gas into a chamber. The diffusion head includes a diffusion plate with a plurality of openings, each opening having a first cylindrical portion and a second conical-frustum portion.
    Type: Application
    Filed: April 1, 2014
    Publication date: October 1, 2015
    Applicant: TSMC SOLAR LTD.
    Inventor: Li XU
  • Publication number: 20150280050
    Abstract: A method of fabricating a photovoltaic device includes a step of forming an absorber layer above a substrate of the photovoltaic device, a step of forming a buffer layer over the absorber layer, and a step of pre-heating the photovoltaic device at a first heating rate to a selected temperature. The first heating rate being higher than 5° C./minute. The method further includes a step of forming a front contact layer over the buffer layer at the selected temperature, after the step of pre-heating the photovoltaic device.
    Type: Application
    Filed: March 27, 2014
    Publication date: October 1, 2015
    Applicant: TSMC SOLAR LTD.
    Inventor: Chen-Yun Wang
  • Publication number: 20150270417
    Abstract: A method includes depositing an acid over a portion of a buffer layer of a solar cell substrate. A front contact material is deposited over the buffer layer, such that the front contact material does not bond to the portion of the buffer layer having the acid on it. Thus, the front contacts of adjacent solar cells of the solar cell substrate are formed with a separation between them.
    Type: Application
    Filed: March 18, 2014
    Publication date: September 24, 2015
    Applicant: TSMC Solar Ltd.
    Inventor: Yi-Feng HUANG
  • Publication number: 20150263198
    Abstract: A method of forming a CIGS absorber wherein at least one source particle is selected and prepared as a powder or gel; the powder or gel is deposited on a substrate, compressed, and annealed. In some embodiments, a plurality of source particles are prepared as powders and mixed prior to deposition, compression, and annealing. In other embodiments, a plurality of source particles are individually deposited in layers, collectively compressed, and collectively annealed. In yet further embodiments, a plurality of source particles are individually deposited in layers, individually compressed, and collectively annealed.
    Type: Application
    Filed: March 11, 2014
    Publication date: September 17, 2015
    Applicant: TSMC Solar Ltd.
    Inventor: Shih-Wei CHEN
  • Publication number: 20150263207
    Abstract: A solar cell device and a method of fabricating the device is described. The solar cell is fabricated by providing a substructure comprising an absorber over a back contact having a P1 line therein and scribing a P2 line in the absorber by mechanical scribing and laser scribing after the mechanical scribing. The scribing can be performed with an integrated scriber, including a scribing tip and a light source mounted adjacent the scribing tip and operable concurrently with the scribing tip.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 17, 2015
    Applicant: TSMC Solar Ltd.
    Inventor: Chia-Hung TSAI
  • Publication number: 20150263195
    Abstract: A solar cell and a method of fabricating the solar cell is described. The solar cell includes a substrate, a back contact layer over the substrate, a P1 trench on an upper portion of the back contact layer, and an insulator disposed in the P1 trench. The solar cell can also include an absorber layer over the back contact layer and insulator and a front contact layer over the absorber layer.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 17, 2015
    Applicant: TSMC Solar Ltd.
    Inventor: Chien-Yao HUANG
  • Publication number: 20150263215
    Abstract: A method for monitoring the process of fabricating solar cells includes delivering at least one solar cell substructure to a wash chamber having a wash solution therein, such that the solar cell substructure is at least partially immersed within the wash solution. A residual material is removed from the solar cell substructure using the wash solution. A pH value of the wash solution is detected automatically while the solar cell substructure is at least partially immersed within the wash solution, via a control apparatus. The method also includes determining whether the detected pH value is at a predefined threshold pH level or within a predefined pH range for the wash solution, via the control apparatus. The pH value of the wash solution is modified automatically if the detected pH value is different from the predefined threshold pH level or different from the predefined pH range.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 17, 2015
    Applicant: TSMC SOLAR LTD
    Inventor: Shih-Wei CHEN