Patents Examined by Allison Bernstein
  • Patent number: 11757030
    Abstract: A semiconductor device, the device including: a first silicon layer including first single crystal silicon; an isolation layer disposed over the first silicon layer; a first metal layer disposed over the isolation layer; a second metal layer disposed over the first metal layer; a first level including a plurality of transistors, the first level disposed over the second metal layer, where the isolation layer includes an oxide to oxide bond surface, where the plurality of transistors include a second single crystal silicon region; and a third metal layer disposed over the first level, where a typical first thickness of the third metal layer is at least 50% greater than a typical second thickness of the second metal layer.
    Type: Grant
    Filed: March 22, 2023
    Date of Patent: September 12, 2023
    Assignee: Monolithic 3D Inc.
    Inventor: Zvi Or-Bach
  • Patent number: 11758738
    Abstract: Approaches for integrating FE memory arrays into a processor, and the resulting structures are described. Simultaneous integrations of regions with ferroelectric (FE) cells and regions with standard interconnects are also described. FE cells include FE capacitors that include a FE stack of layers, which is encapsulated with a protection material. The protection material protects the FE stack of layers as structures for regular logic are fabricated in the same die.
    Type: Grant
    Filed: May 12, 2022
    Date of Patent: September 12, 2023
    Assignee: KEPLER COMPUTING INC.
    Inventors: Sasikanth Manipatruni, Rajeev Kumar Dokania, Ramamoorthy Ramesh, Gaurav Thareja, Amrita Mathuriya
  • Patent number: 11756603
    Abstract: On a substrate, dynamic flash memory cell transistors and, on their outside, driving-signal processing circuit transistors are disposed. A source line wiring layer, a bit line wiring layer, a plate line wiring layer, and a word line wiring layer extend in the horizontal direction relative to the substrate and connect, from the outside of a dynamic flash memory region, in the perpendicular direction, to lead-out wiring layers on an insulating layer. The transistors in driving-signal processing circuit regions connect, via multilayered wiring layers, to upper wiring layers on the insulating layer. A high-thermal-conductivity layer is disposed over the entirety of the dynamic flash memory region and in a portion above the bit line wiring layer.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: September 12, 2023
    Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
    Inventors: Nozomu Harada, Koji Sakui
  • Patent number: 11744086
    Abstract: A method of forming an electronic device comprises forming a stack structure comprising vertically alternating insulative structures and additional insulative structures, and forming pillars comprising a channel material and at least one dielectric material vertically extending through the stack structure. The method comprises removing the additional insulative structures to form cell openings, forming a first conductive material within a portion of the cell openings, and forming a fill material adjacent to the first conductive material and within the cell openings. The fill material comprises sacrificial portions. The method comprises removing the sacrificial portions of the fill material, and forming a second conductive material within the cell openings in locations previously occupied by the sacrificial portions of the fill material. Related electronic devices, memory devices, and systems are also described.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: August 29, 2023
    Assignee: Micron Technology, Inc.
    Inventors: David A. Daycock, Jonghun Kim
  • Patent number: 11744075
    Abstract: A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.
    Type: Grant
    Filed: February 16, 2022
    Date of Patent: August 29, 2023
    Assignee: Kioxia Corporation
    Inventors: Yoshiaki Fukuzumi, Shinya Arai, Masaki Tsuji, Hideaki Aochi, Hiroyasu Tanaka
  • Patent number: 11744066
    Abstract: A semiconductor device includes a lower structure and a stack structure that extends into a connection region on the lower structure, where the stack structure includes gate pads and mold pads. The mold pads include intermediate mold pads that include first intermediate mold pads and a second intermediate mold pad between a pair of the first intermediate mold pads, each of the first intermediate mold pads has a first length in a first direction, the second intermediate mold pad has a second length in the first direction, greater than the first length, one of the intermediate mold pads includes a mold pad portion and an insulating protrusion portion on the mold pad portion, one of the first intermediate mold pads includes the mold pad portion and the insulating protrusion portion, and a central region of the second intermediate mold pad does not include the insulating protrusion portion.
    Type: Grant
    Filed: March 3, 2022
    Date of Patent: August 29, 2023
    Inventors: Geunwon Lim, Seokcheon Baek
  • Patent number: 11737270
    Abstract: A semiconductor device includes a lower structure; a first upper structure including lower gate layers on the lower structure; a second upper structure including upper gate layers on the first upper structure; separation structures penetrating the first and second upper structures on the lower structure; a memory vertical structure penetrating the lower and upper gate layers between the separation structures; and a first contact plug penetrating the first and second upper structures and spaced apart from the lower and upper gate layers. Each of the first contact plug and the memory vertical structure includes a lateral surface having a bent portion. The bent portion of the lateral surface is disposed between a first height level on which an uppermost gate layer of the lower gate layers is disposed and a second height level on which a lowermost gate layer of the upper gate layers is disposed.
    Type: Grant
    Filed: August 29, 2022
    Date of Patent: August 22, 2023
    Inventors: Junhyoung Kim, Jisung Cheon, Yoonhwan Son, Seungmin Lee
  • Patent number: 11729979
    Abstract: Disclosed is a memory device and a method for fabricating the same, and the method may include forming an alternating stack in which dielectric layers and sacrificial layers are alternately stacked over a substrate, each of the sacrificial layers being a combination of porous and non-porous materials, forming a vertical opening penetrating the alternating stack, converting exposed surfaces of the sacrificial layers located on a side wall of the vertical opening into blocking layers through an oxidation process, forming a vertical channel structure contacting the blocking layers in the vertical opening, and replacing non-converting portions of the sacrificial layers with conductive layers, wherein each of the conductive layers comprises a round-like edge contacting each of the blocking layers.
    Type: Grant
    Filed: November 24, 2021
    Date of Patent: August 15, 2023
    Assignee: SK hynix Inc.
    Inventors: Jin-Ho Bin, Il-Young Kwon, Tae-Hong Gwon, Hye-Hyeon Byeon
  • Patent number: 11723205
    Abstract: There are provided a semiconductor memory device and a manufacturing method thereof. The semiconductor memory device includes a first select group and a second select group isolated from each other by an isolation insulating layer; an upper gate stack structure extending to overlap with the first select group, the isolation insulating layer, and the second select group; channel structures extending to penetrate the first select group, the second select group, and the upper gate stack structure; and a vertical connection structure spaced apart from the first select group, the second select group, and the upper gate stack structure, the vertical connection structure extending in parallel to the channel structures.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: August 8, 2023
    Assignee: SK hynix Inc.
    Inventor: Sung Wook Jung
  • Patent number: 11723294
    Abstract: A method for fabricating a memory device is provided. The method includes forming a bottom electrode layer over a substrate; forming a buffer layer over the bottom electrode layer; performing a surface treatment to a top surface of the buffer layer; depositing a resistance switch layer over the top surface of the buffer layer after performing the surface treatment; forming a top electrode over the resistance switch layer; and patterning the resistance switch layer into a resistance switch element below the top electrode.
    Type: Grant
    Filed: June 25, 2020
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsia-Wei Chen, Chih-Hung Pan, Chih-Hsiang Chang, Yu-Wen Liao, Wen-Ting Chu
  • Patent number: 11721392
    Abstract: A method is provided that includes forming a cell film stack on a substrate of a wafer, the cell film stack comprising a top silicon layer, depositing a sacrificial layer onto the top silicon layer, etching the cell film stack and the sacrificial layer to form a plurality of pillars, depositing a dielectric to fill in gaps between the plurality of pillars, planarizing the wafer to a predefined thickness for the sacrificial layer, removing the sacrificial layer, depositing nickel onto the wafer to form a nickel layer, annealing the wafer to form a di-nickel silicide layer between the nickel layer and the top silicon layer, wet etching unreacted nickel of the nickel layer to expose the di-nickel silicide layer, and annealing the wafer to form a nickel monosilicide layer from the di-nickel silicide layer and the top silicon layer, the nickel monosilicide layer forming a monosilicide electrode.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: August 8, 2023
    Assignee: Western Digital Technologies, Inc.
    Inventor: Takuya Futase
  • Patent number: 11710521
    Abstract: 6T-SRAM cell designs for larger SRAM arrays and methods of manufacture generally include a single fin device for both nFET (pass-gate (PG) and pull-down (PD)) and pFET (pull-up (PU). The pFET can be configured with a smaller effective channel width (Weff) than the nFET or with a smaller active fin height. An SRAM big cell consumes the (111) 6t-SRAM design area while provide different Weff ratios other than 1:1 for PU/PD or PU/PG as can be desired for different SRAM designs.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: July 25, 2023
    Assignee: International Business Machines Corporation
    Inventors: Lan Yu, Junli Wang, Heng Wu, Ruqiang Bao, Dechao Guo
  • Patent number: 11710727
    Abstract: A semiconductor storage device includes first and second chips and first and second power supply electrodes. The first chip includes conductive layers arranged in a first direction, a semiconductor pillar extending in the first direction and facing the conductive layers, first contacts extending in the first direction and connected to the conductive layers, second contacts extending in the first direction and connected to a first power supply electrode, third contacts extending in the first direction, facing the second contacts in a direction crossing the first direction, and connected to the second power supply electrode, and first bonding electrodes connected to the first contacts. The second chip includes a semiconductor substrate, transistors provided on the semiconductor substrate, fourth contacts connected to the transistors, and second bonding electrodes connected to the fourth contacts.
    Type: Grant
    Filed: August 26, 2020
    Date of Patent: July 25, 2023
    Assignee: Kioxia Corporation
    Inventors: Nobuaki Okada, Tetsuaki Utsumi
  • Patent number: 11711918
    Abstract: Provided is a semiconductor memory device. The semiconductor memory device comprises a first semiconductor pattern including a first impurity region, a second impurity region, and a channel region, the first impurity region spaced apart from a substrate in a first direction and having a first conductivity type, the second impurity region having a second conductivity type different from the first conductivity type, and the channel region between the first impurity region and the second impurity region, a first conductive connection line connected to the first impurity region and extending in a second direction different from the first direction and a first gate structure extending in the first direction and including a first gate electrode and a first gate insulating film, wherein the first gate electrode penetrates the channel region and the first gate insulating film is between the first gate electrode and the semiconductor pattern.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: July 25, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyung Hwan Lee, Yong Seok Kim, Hyun Cheol Kim, Satoru Yamada, Sung Won Yoo, Jae Ho Hong
  • Patent number: 11707005
    Abstract: A chalcogenide material may include germanium (Ge), arsenic (As), selenium (Se) and from 0.5 to 10 at % of at least one group 13 element. A variable resistance memory device may include a first electrode, a second electrode, and a chalcogenide film interposed between the first electrode and the second electrode and including from 0.5 to 10 at % of at least one group 13 element. In addition, an electronic device may include a semiconductor memory. The semiconductor memory may include a column line, a row line intersecting the column line, and a memory cell positioned between the column line and the row line, wherein the memory cell comprises a chalcogenide film including germanium (Ge), arsenic (As), selenium (Se), and from 0.5 to 10 at % of at least one group 13 element.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: July 18, 2023
    Assignee: SK hynix Inc.
    Inventors: Gwang Sun Jung, Sang Hyun Ban, Jun Ku Ahn, Beom Seok Lee, Young Ho Lee, Woo Tae Lee, Jong Ho Lee, Hwan Jun Zang, Sung Lae Cho, Ye Cheon Cho, Uk Hwang
  • Patent number: 11706931
    Abstract: A variable resistance memory device including a substrate; horizontal structures spaced apart from each other in a first direction perpendicular to a top surface of the substrate; variable resistance patterns on the horizontal structures, respectively; and conductive lines on the variable resistance patterns, respectively, wherein each of the horizontal structures includes a first electrode pattern, a semiconductor pattern, and a second electrode pattern arranged along a second direction parallel to the top surface of the substrate, and each of the variable resistance patterns is between one of the second electrode patterns and a corresponding one of the conductive lines.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: July 18, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jae Hoon Kim, Sang Hwan Park, Yong-Sung Park, Hyeonwoo Seo, Se Chung Oh, Hyun Cho
  • Patent number: 11701728
    Abstract: Provided are a logic switching device and a method of manufacturing the same. The logic switching device may include a domain switching layer adjacent to a gate electrode. The domain switching layer may include a ferroelectric material region and an anti-ferroelectric material region. The domain switching layer may be a non-memory element. The logic switching device may include a channel, a source and a drain both connected to the channel, the gate electrode arranged to face the channel, and the domain switching layer provided between the channel and the gate electrode.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: July 18, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jinseong Heo, Yunseong Lee, Sanghyun Jo
  • Patent number: 11699488
    Abstract: Various embodiments of the present application are directed towards an integrated memory chip with an enhanced device-region layout for reduced leakage current and an enlarged word-line etch process window (e.g., enhanced word-line etch resiliency). In some embodiments, the integrated memory chip comprises a substrate, a control gate, a word line, and an isolation structure. The substrate comprises a first source/drain region. The control gate and the word line are on the substrate. The word line is between and borders the first source/drain region and the control gate and is elongated along a length of the word line. The isolation structure extends into the substrate and has a first isolation-structure sidewall. The first isolation-structure sidewall extends laterally along the length of the word line and underlies the word line.
    Type: Grant
    Filed: October 21, 2021
    Date of Patent: July 11, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih Kuang Yang, Ping-Cheng Li, Hung-Ling Shih, Po-Wei Liu, Wen-Tuo Huang, Yu-Ling Hsu, Yong-Shiuan Tsair, Chia-Sheng Lin
  • Patent number: 11696440
    Abstract: A nonvolatile memory device includes a cell array formed on a substrate, and a control gate pickup structure, wherein the cell array comprises floating gates, and a control gate surrounding the floating gates, wherein the control gate pickup structure comprises a floating gate polysilicon layer, a control gate polysilicon layer surrounding the floating gate polysilicon layer and connected to the control gate, and at least one contact plug formed on the control gate polysilicon layer.
    Type: Grant
    Filed: April 25, 2022
    Date of Patent: July 4, 2023
    Assignee: KEY FOUNDRY CO., LTD.
    Inventors: Min Kuck Cho, Seung Hoon Lee
  • Patent number: 11690226
    Abstract: Some embodiments include an integrated structure having a stack of memory cell levels. A pair of channel-material-pillars extend through the stack. A source structure is under the stack. The source structure includes a portion having an upper region, a lower region, and an intermediate region between the upper and lower regions. The upper and lower regions have a same composition and join to one another at edge locations. The intermediate region has a different composition than the upper and lower regions. The edge locations are directly against the channel material of the channel-material-pillars. Some embodiments include methods of forming an integrated assembly.
    Type: Grant
    Filed: April 27, 2022
    Date of Patent: June 27, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Collin Howder, Gordon A. Haller